硬X射线光子筛波导效应研究

基于快速傅里叶变换光束传播法,研究了硬X射线光子筛中高高宽比金属结构的波导效应,确定了硬X射线光子筛的物理边界条件,采用角谱法计算了硬X射线光子筛的点扩展函数,并分析了吸收体厚度对聚焦性能的影响.研究结果表明波导效应一定程度上有利于抑制光子筛高级衍射的产生,提高聚焦性能.在同样的特征尺寸下,硬X射线光子筛的空间分辨率优于菲涅尔波带片,其缺点是衍射效率的下降.吸收体厚度的提高有利于提高光子筛的聚焦性能和衍射效率,但是相应的纳米加工工艺难度会增加. 关键词： 菲涅尔波带片 硬X射线光子筛 光束传播法 角谱法     

硬X光光电成像系统面密度分辨能力

针对基于将X光转换成可见光接收的硬X光光电成像系统,研究了系统面密度分辨能力的理论模型,获得了系统面密度分辨能力的上下限的表达式;建立了对硬X光成像系统对面密度分辨能力的测量方法。利用自制面密度分辨率板,实验测量了由射频X光机、转换屏、光纤锥耦合和CCD相机组成的硬X光光电成像系统在不同照射量下的面密度极限分辨能力的上下限值。实验结果与理论分析模型分析趋势一致,在未饱和条件下面密度分辨力上限随着照射量的增加而不断增加,而面密度分辨力下限随着照射量的增加将减小。     

X射线相衬成像光子筛

基于 Zernike相衬成像原理和光瞳切趾原理,提出一种将相位板和切趾光子筛集成为一个相衬显微物镜的 X射线相衬成像光子筛的设计方法.这种 X射线相衬成像物镜可以实现生物体组织或者其他弱吸收材料的高分辨率和高衬度成像.通过优化光子筛透镜的衍射结构,可以抑制成像系统的点扩展函数的旁瓣和消除高阶衍射焦点,从而提高成像分辨率;另外,将光子筛透镜和变相板合为一体,克服了成像透镜和变相板难以对准的缺陷.以高斯切趾光子筛为例,实验验证了设计方法的可行性. 关键词： X射线显微技术 相衬成像 光瞳切趾 光子筛     

基于光子筛的软X光谱仪

介绍了采用新型软X光谱学光子筛作为分光元件的软X光谱仪的原理和结构参数设计。新谱仪理论测量范围为100 eV~2 keV,光谱分辨力达0.35 nm。应用该谱仪在SILEX-Ⅰ装置上测量了飞秒激光与固体铜靶相互作用产生的X射线发射谱。实验结果表明,该谱仪主要性能指标达到设计要求,适合于激光与等离子体相互作用产生的软X射线研究。     

基于光子筛的软X光谱仪

 介绍了采用新型软X光谱学光子筛作为分光元件的软X光谱仪的原理和结构参数设计。新谱仪理论测量范围为100 eV~2 keV,光谱分辨力达0.35 nm。应用该谱仪在SILEX-Ⅰ装置上测量了飞秒激光与固体铜靶相互作用产生的X射线发射谱。实验结果表明,该谱仪主要性能指标达到设计要求,适合于激光与等离子体相互作用产生的软X射线研究。     

Holographic imaging with a nanometer resolution using compact table-top EUV laser

Holographic 2D/3D imaging with nanometer resolution using short wavelength extreme ultraviolet (EUV) light is presented in this paper. Gabor’s holograms were recorded with a highly coherent table top EUV laser with different numerical apertures demonstrating ultimately a spatial resolution of 46+/−2 nm, comparable with the illumination wavelength, in 2D holographic imaging. Three dimensional images were obtained from a single high numerical aperture hologram recorded in a high resolution photoresist and numerically reconstructed at different image planes, allowing numerical optical sectioning with a lateral resolution ∼170 nm and depth resolution of 2.4 μm. The holograms were recorded in a high resolution photoresist and digitized with an atomic force microscope. To assess the spatial resolution of the numerical reconstructions of the holograms a correlation method was used. The algorithm allows for simultaneous estimation of the resolution and the feature size of the image under analysis.     

Single order soft X-ray diffraction with quasi-random radius pinhole array spectroscopic photon sieves

A novel single order diffraction grating in the soft X-ray region, called quasi-random radius pinhole array spectro- scopic photon sieves （QRSPS）, is proposed in this paper. This new grating is composed of pinholes on a substrate, whose radii are quasi-random, while their centers are regular. Analysis proves that its transmittance function across the grating bar is similar to that of sinusoidal transmission gratings. Simulation results show that the QRSPS can suppress higher-order diffraction effectively. And the QRSPS would still retain its characteristic of single order diffraction when we take the effect of X-ray penetration into account. These properties indicate that the QRSPS can be used in the soft X-ray spectra measurement.     

软X光谱学光子筛衍射特性的实验表征

 概述了谱学光子筛的设计原理,计算了其透射率,并对设计的软X光谱学光子筛的衍射模式在光学波段进行了模拟计算和实验表征。结果表明,这种新型色散元件具有良好的、与设计预期一致的单级衍射特性,3级及以上的高级衍射能被有效抑制。与传统的透射光栅和以前设计的单级衍射光栅相比,新设计的软X光谱学光子筛更易于实现自支撑,可望在极紫外和软X光谱测量过程中得到广泛应用。     

软X光谱学光子筛衍射特性的实验表征

概述了谱学光子筛的设计原理,计算了其透射率,并对设计的软X光谱学光子筛的衍射模式在光学波段进行了模拟计算和实验表征。结果表明,这种新型色散元件具有良好的、与设计预期一致的单级衍射特性,3级及以上的高级衍射能被有效抑制。与传统的透射光栅和以前设计的单级衍射光栅相比,新设计的软X光谱学光子筛更易于实现自支撑,可望在极紫外和软X光谱测量过程中得到广泛应用。     

Toward one nanometer X-ray focusing: a complex refractive lens design

We report a design for one nanometer X-ray focusing by a complex refractive lens, which is capable of focusing 20 keV X-rays down to a lateral size of 0.92 nm （full-width at half-maximum （FWHM）） and an axial size of 98 nm （FWHM） with intensity gain of 49050. This complex refractive lens is comprised of a series of kinoform lenses, whose aperture is gradually matched to the converging trace of the X-ray beam so as to increase the numerical aperture （NA）. The theoretical principle of the proposed complex refractive lens is presented. The NAs of these lenses are calculated. The numerical simulation results demonstrate that the proposed design can focus the X-ray beam into sub-nanometer while remaining high gain.     

Advances in synchrotron hard X-ray based imaging

Modern synchrotron radiation (SR) sources have dramatically fostered the use of SR-based X-ray imaging. The relevant information such as density, chemical composition, chemical states, structure, and crystallographic perfection is mapped in two, or, increasingly, in three dimensions. The development of nano-science requires pushing spatial resolution down towards the nanoscale.The present article describes a selection of hard X-ray imaging and microanalysis techniques that emerged over the last few years, by taking advantage of the flux and coherence of the SR beams, as well as exploiting the advances in X-ray optics and detectors, and the increased possibilities of computers (memory, speed). Examples are given to illustrate the opportunities associated with the use of these techniques, and a number of recent references are provided. To cite this article: J. Baruchel et al., C. R. Physique 9 (2008).     

基于激光驱动等离子体X光源的X射线相衬成像

为了诊断惯性约束聚变（ICF）内爆靶丸球壳的多层信息,在神光Ⅱ激光器上对激光驱动等离子体X光源的相衬成像进行了研究。利用神光Ⅱ第9路激光驱动平面Ti靶获得X光源,在10 μm的针孔约束下作为次级点光源对样品成像,用X光胶片记录。成功地将相衬成像技术应用于ICF实验,综合考虑成像放大倍数、分辨力、成像衬度和抑制烧蚀碎片等因素,选择合适的实验条件,成功获得了清晰的双层内爆靶丸球壳结构,空间分辨力优于10 μm。     

硬X射线微分相衬成像的噪声特性分析

量子噪声引起光强随机波动是影响X射线相衬图像质量的一个重要因素.提出了一种针对硬X射线微分相衬成像噪声特性的分析方法,通过数值模拟获得了量子噪声对成像结果的作用规律.模拟结果表明,折射像和散射像的噪声均方差与叠栅条纹对比度成反比关系,叠栅条纹对比度越大,统计所得的均方差值越小.在保证X射线探测效率的前提下,提高叠栅条纹对比度将有利于获得高质量的相衬图像,并为有效减少X射线曝光剂量提供条件.     

硬X射线焦斑环孔编码成像的理论与实验研究

针对几十~百keV能量的低强度X射线焦斑源测量,建立了高探测效率环孔编码成像技术。研究给出了环孔成像效率和信噪比与环孔结构参数的关系,采用微联结的环孔结构设计并模拟了联结区尺寸对成像质量的影响,解决了环孔结构同轴成像技术难题。所建立环孔成像系统应用于Unique-II X射线焦斑源成像实验。结果表明,X射线焦斑的空间分布近似为‘马鞍’形状,而且中间部分的强度低于两侧的强度,与针孔成像结果相似,但环孔的探测效率明显高于针孔的效率。最后,分析了维纳滤波与R-L两种复原图像方法的效果。     

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Ring coded imaging technology with high detection efficiency was put forward to diagnose space distribution for low intensity X-ray spot with several tens to hundred of keV. In this paper, the relations of detection efficiency and signal – noise ratio varied with the ring geometric parameters were researched. The coaxial imaging technology was resolved by employing the design of local micro joins on the ring aperture, and simulating the influence of micro joint area size on imaging quality. The ring aperture imaging system was developed and the Unique-II X-ray spot imaging experiment was implemented. The results show that the space distribution of the X-ray spot is approximate a ‘saddle’ shape, and the intensity in the middle part is lower than both sides along the long axis of the elliptical surface; this conclusion is consistent with pin-hole image; the detection efficiency of ring is evidently more than that of pin. Finally, the effects of and the R-L method and Wiener method used to restore the image are analyzed.     

X-ray magnetic circular dichroism imaging with hard X-rays

X-ray polarization-contrast images resulting from X-ray magnetic circular dichroism (XMCD) in the hard X-ray region have been successfully recorded for the first time. The apparatus used consisted of an X-ray polarizer, double X-ray phase retarders, and a high-spatial-resolution X-ray charge-coupled-device detector. The sample used was a hexagonal-close-packed cobalt polycrystal foil having a thickness of about 4 microns. The X-ray polarization-contrast image resulting from XMCD was observed at a photon energy of 10 eV above the cobalt K-absorption edge (7709 eV). The observed contrast in the image was reversed by inversion of the magnetic field. Furthermore, the contrast was reversed again at a photon energy of 32 eV above the cobalt K-absorption edge.     

基于激光驱动等离子体X光源的X射线相衬成像

为了诊断惯性约束聚变(ICF)内爆靶丸球壳的多层信息,在神光Ⅱ激光器上对激光驱动等离子体X光源的相衬成像进行了研究。利用神光Ⅱ第9路激光驱动平面Ti靶获得X光源,在10μm的针孔约束下作为次级点光源对样品成像,用X光胶片记录。成功地将相衬成像技术应用于ICF实验,综合考虑成像放大倍数、分辨力、成像衬度和抑制烧蚀碎片等因素,选择合适的实验条件,成功获得了清晰的双层内爆靶丸球壳结构,空间分辨力优于10μm。     

Feasibility study of hard-x-ray nanofocusing above 20 keV using compound photon sieves

Combining the advantages of photon sieves (PSs) and compound Fresnel zone plates (CZPs), we designed compound photon sieves (CPSs) for hard-x-ray nanofocusing. A CPS consists of an inner PS using the first-order diffraction surrounded by an outer zone plate using the third-order diffraction. A robust digital prolate spheroidal window was used as an apodization window for the inner PS, making CPSs more flexible than CZPs. CPSs can provide not only slightly better resolution compared to CZPs, but also it can significantly suppress the sidelobes, leading to a high signal-to-noise ratio. Further improvement of the high-aspect-ratio metal nanostructure process will allow CPSs to be a promising candidate for hard-x-ray nanofocusing in the high-energy region above 20 keV.     

针孔单光子发射计算机断层成像的空间分辨率研究

针孔单光子发射计算机断层(SPECT)成像的空间分辨率通常是根据Anger经验公式来进行估算,与实际测量存在较大偏差.本文通过对针孔成像的物理过程进行分析,提出了一个近似度更高的计算公式.利用精确的蒙特卡罗方法模拟针孔SPECT成像,采用OSEM(ordered subsets expectation maximization)算法对投影数据进行图像重建,并与模具实验进行比较,验证了理论公式的适用性.同时还讨论了体素尺寸、几何映射获取投影矩阵以及探测器尺寸与成像物体尺寸比值对断层图像空间分辨率的影响.实验结果显示,该理论公式所估算的空间分辨率比实验值平均偏小约10%,而Anger经验公式所估算的空间分辨率比实验值平均偏大约60%.因此,该理论公式能更好地估算针孔SPECT成像的空间分辨率,可为针孔SPECT系统的设计和使用提供有价值的参考.