A Shadow Moire Technique by Optional Multiple Light Sources for BGA Coplanarity Measurement

Shadow moire profilometry is a whole field non-contact 3-D measurement method. Generally there exist mechanical motion so that the measurement speed, life time and reliability are limited. A fast measurement method without mechanical motion is realized in this work by using the technique of changeable light source.This method satisfies the need for the on-line measurement of BGA coplanarity.     

大型精密光学调节架的俯仰角运动控制方法及误差修正

航天遥感仪器的光学装调需要使用大型精密调节架,其俯仰角调节机构使用步进电机驱动,且传动比为非线性,因此控制难点在于如何以步进电机开环方式来实现调节架俯仰角的精确运动。通过对现有调节架的俯仰角运动机构进行建模分析,得到其运动学模型为偏心曲柄滑块机构。根据运动学公式,分析了当前使用的控制方法精度不高的原因,并提出了新的控制方法。在此基础上,为了验证新方法下调节架俯仰角的运行结果,引进了全新的测量工具一激光跟踪仪。根据测量结果,绘制出俯仰角的目标值和误差曲线图,分析误差规律并修正。经复测,俯仰角的运动精度最终达到了光学装调的要求。     

Mechanical squeezing via parametric amplification and weak measurement

Nonlinear forces allow motion of a mechanical oscillator to be squeezed below the zero-point motion. Of existing methods, mechanical parametric amplification is relatively accessible, but previously thought to be limited to 3 dB of squeezing in the steady state. We consider the effect of applying continuous weak measurement and feedback to this system. If the parametric drive is optimally detuned from resonance, correlations between the quadratures of motion allow unlimited steady-state squeezing. Compared to backaction evasion, we demonstrate that the measurement strength, temperature and efficiency requirements for quantum squeezing are significantly relaxed.     

Optical detection of the quantization of collective atomic motion

We directly measure the quantized collective motion of a gas of thousands of ultracold atoms, coupled to light in a high-finesse optical cavity. We detect strong asymmetries, as high as 3:1, in the intensity of light scattered into low- and high-energy motional sidebands. Owing to high cavity-atom cooperativity, the optical output of the cavity contains a spectroscopic record of the energy exchanged between light and motion, directly quantifying the heat deposited by a quantum position measurement's backaction. Such backaction selectively causes the phonon occupation of the observed collective modes to increase with the measurement rate. These results, in addition to providing a method for calibrating the motion of low-occupation mechanical systems, offer new possibilities for investigating collective modes of degenerate gases and for diagnosing optomechanical measurement backaction.     

自动化控制下机械手臂运动轨迹研究

对机械手臂运动轨迹进行优化控制,能改善机械手臂的自动控制性能。为了提高机械臂的控制稳健性,提出一种基于变结构模糊PID控制的机械手臂运动轨迹优化控制模型。首先采用末端效应逆运动学模型构建机械手臂的运动规划约束参量数学模型,采用七自由度运动空间重构方法建立机械手臂运动的动力学方程。然后通过纵向定常运动,分析建立机械手臂整定控制目标函数,求解机械臂在抓取作业过程中的最佳导引控制律,采用变结构模糊PID控制方法进行运动轨迹的误差修正,实现机械臂自动控制优化。最后通过仿真实验进行控制性能测试,结果表明,采用该方法进行机械手臂运动轨迹控制的精度较高,对机械臂位形变化轨迹的预测准确性较好。     

基于相位相关与块匹配的纳米精度微器件平面动态测量

为测量MEMS谐振器周期运动过程中各个时刻的运动特性及其动态特性参数,结合微器件的特征,利用光学的方法对MEMS器件进行了运动分析。提出了基于相位相关与块匹配相结合的运动检测技术,并对MEMS器件的运动图像序列做了分析与处理,得到了其动态特性参量,为MEMS器件的设计提供了重要参考。实验结果表明,该方法具有较好的测量精度和测量速度,测量重复性可达到44nm。     

基于联合变换相关的机载航空相机像移测量

为了提高像移测量精度,针对机载航空摆扫相机提出一种坐标变换法和图像相关法相结合的像移测量方法。利用坐标变换法得到初始像移速度,利用图像联合变换相关法对像移速度残差进行补偿。联合图像通过一个面阵CCD获得,该面阵CCD放置在相机焦平面上并与成像线阵TDI CCD平行,其输出的当前图像与参考图像合并构成联合图像进行二维空间联合变换相关运算,得到像移修正矢量。对该矢量分别在相机摆扫方向和载机飞行方向进行分解,从而得到摆扫像移和前向像移的修正量。仿真实验结果表明,在输入图像信噪比为4 dB时,像移测量误差在0.1 pixel以内。     

Transfer function method for investigating the complex modulus of acoustic materials: Spring-like specimen

The complex modulus of acoustic materials has to be known as a function of frequency. Among many methods for investigating the complex modulus, it is advantageous to use the transfer function method for detailed frequency analysis. In this method, a cylindrical or prismatic specimen is excited into longitudinal vibration at one end, the other end being loaded by a mass. The complex modulus can be calculated after having measured the transfer function: i.e., the vibration amplitudes of the specimen ends and the phase angle between them. In this paper the transfer function and its measurability are investigated theoretically and experimentally in that frequency range where the specimen can essentially be modelled by lumped parameter mechanical elements. The role of the measurement errors is analyzed and it is shown that the smaller the loss factor the higher the measurement accuracy that is needed. Furthermore, it is shown that disregarding the longitudinal wave motion of the specimen at higher frequencies leads to an apparent increase of the dynamic modulus and to an apparent decreases of the loss factor. This effect may be compensated up to a certain frequency by the lateral wave motion of the specimen. Experimental results supporting the theoretical predictions are presented.     

A novel method for the measurement of mechanical mobility

We describe a novel technique for direct measurement of the unloaded driving-point mechanical mobility of a structure. The method uses an electrically-excited inertial motor/actuator attached directly to the structure under test (SUT) to induce sinusoidal motion in the frequency range 7.5-750 Hz. Two accelerometers, one attached to the actuator frame and the other to the vibrating actuator mass, separately measure the induced motion of the SUT and the vibrating mass. We develop an expression for the driving-point mobility of the SUT using these two measurements and show analytically that any mass-loading effect of the actuator on the measured mobility can be removed mathematically so that the unloaded mobility of the SUT can be determined. In this study we validate the method using a cantilever as a mobility standard. Measured mobility, mode shape and resonant frequency of cantilevers with various lengths were consistent with theoretical predictions for an unloaded cantilever. We conclude that the method can be used to conveniently determine the mobility of a range of structures, without the limitations associated with some of the traditional methods of mobility measurement.     

Harmonic pulsed excitation and motion detection of a vibrating reflective target

Elasticity imaging is an emerging medical imaging modality. Methods involving acoustic radiation force excitation and pulse-echo ultrasound motion detection have been investigated to assess the mechanical response of tissue. In this work new methods for dynamic radiation force excitation and motion detection are presented. The theory and model for harmonic motion detection of a vibrating reflective target are presented. The model incorporates processing of radio frequency data acquired using pulse-echo ultrasound to measure harmonic motion with amplitudes ranging from 100 to 10,000 nm. A numerical study was performed to assess the effects of different parameters on the accuracy and precision of displacement amplitude and phase estimation and showed how estimation errors could be minimized. Harmonic pulsed excitation is introduced as a multifrequency radiation force excitation method that utilizes ultrasound tonebursts repeated at a rate f(r). The radiation force, consisting of frequency components at multiples of f(r), is generated using 3.0 MHz ultrasound, and motion detection is performed simultaneously with 9.0 MHz pulse-echo ultrasound. A parameterized experimental analysis showed that displacement can be measured with small errors for motion with amplitudes as low as 100 nm. The parameterized numerical and experimental analyses provide insight into how to optimize acquisition parameters to minimize measurement errors.     

永磁悬浮技术探究匀变速直线运动的规律

在之前我们所用的气垫导轨探究匀变速直线运动规律的基础上,改进为永磁悬浮技术探究匀变速直线运动的规律,并进一步测得了当地的重力加速度。运用该方法能够有效减少物体运动时的阻力,提高测量精度,方便实验的计算,将电磁学与力学相关知识有效结合,提高实验的综合设计程度。     

激光陀螺捷联惯导垂向通道测量研究

在参考国外相关垂向通道测量方法的基础上,提出了垂向速度和升沉位移的测量方法。分析了舰船在海平面上的运动特性,设计了关于高度通道的三阶阻尼网络。假设航行在海平面上舰船的高度为零,对阻尼网络引入外部零高度进行阻尼,得到舰船运动的垂向速度,对速度进行高通滤波,积分高通滤波后的高频速度,得到舰船的垂向位移。在此基础上,利用杆臂效应原理,设计了基于双轴摇摆台的升沉测量检测方法,对激光陀螺捷联惯导做了检测实验,结果表明此设计方法已达到国外相关技术先进水平。     

A continuous-wave ultrasound system for displacement amplitude and phase measurement

A noninvasive, continuous-wave ultrasonic technique was developed to measure the displacement amplitude and phase of mechanical structures. The measurement system was based on a method developed by Rogers and Hastings ["Noninvasive vibration measurement system and method for measuring amplitude of vibration of tissue in an object being investigated," U.S. Patent No. 4,819,643 (1989)] and expanded to include phase measurement. A low-frequency sound source was used to generate harmonic vibrations in a target of interest. The target was simultaneously insonified by a low-power, continuous-wave ultrasonic source. Reflected ultrasound was phase modulated by the target motion and detected with a separate ultrasonic transducer. The target displacement amplitude was obtained directly from the received ultrasound frequency spectrum by comparing the carrier and sideband amplitudes. Phase information was obtained by demodulating the received signal using a double-balanced mixer and low-pass filter. A theoretical model for the ultrasonic receiver field is also presented. This model coupled existing models for focused piston radiators and for pulse-echo ultrasonic fields. Experimental measurements of the resulting receiver fields compared favorably with theoretical predictions.     

三机械薄膜腔光力系统相互作用的研究

本文主要研究了利用传输矩阵理论和共振透射条件详细地推导光腔中均匀放置三个机械薄膜构成的腔光力系统中系统本征模式随机械运动的色散关系.计算结果发现系统的光学本征模式由一组四个的本征能级构成,且不同的能级随不同的机械运动模式的变化曲线各不相同,进而导致不同光学模式与不同机械运动模式之间的耦合也不相同.此外,利用微扰理论求解了当机械运动振幅远小于腔模波长、机械振子处于平衡位置附近时,各种光学模式与不同机械振动模式间相互作用耦合强度的解析表达式.研究结果能够为理论和实验上研究多模腔光力系统提供一定的参考.     

Interlayer forces and ultralow sliding friction in multiwalled carbon nanotubes

We describe interlayer force measurements during prolonged, cyclic telescoping motion of a multiwalled carbon nanotube. The force acting between the core and the outer casing is modulated by the presence of stable defects and generally exhibits ultralow friction, below the measurement limit of 1.4 x 10(-15) N/atom and total dissipation per cycle lower than 0.4 meV/atom. Defects intentionally introduced in the form of dangling bonds lead to temporary mechanical dissipation, but the innate ability of nanotubes to self heal rapidly optimizes the atomic structure and restores smooth motion.     

微结构特性的光学测试平台

微结构是微机电系统的基本元件,其几何尺寸、运动特性、材料及力学特性直接影响微机电系统的整体性能。提出一种将计算机微视觉、米劳显微干涉、频闪成像和激光多普勒测振等技术充分融合的微结构静态和动态特性的光学测试平台,分别对微谐振器的平面和离面周期运动特性和微机械扭转镜的离面瞬时运动特性进行测试研究。实验结果表明,利用计算机微视觉和频闪成像技术能够实观微结构的平面位移、运动相位及喈振频率等周期运动参量的测试．位移的重复精度为30nm;利用显微干涉和频闪成像技术可实现微结构的离面位移及表面扭曲等周期运动参量的测试．位移的重复精度为3nm;激光多普勒测振技术具有在频域上对微结构瞬态运动进行分析的优点．是时域上周期运动测试的重要补充。     

Evaluation of uncertainty in measurements—problems and tools

The ISO “Guide to the Expression of Uncertainty in Measurement” (GUM) establishes a unified method for evaluating and stating measurement uncertainties that has been accepted by nearly all calibration services and most test co-operations in all parts of the world. In measurements of mechanical quantities, such as acceleration and derived motion quantities, the application of the GUM may be difficult and very time-consuming unless some possibilities of simplification are made use of. After a brief introduction to the basic procedure specified in the GUM for the calculation of the measurement uncertainty, a survey of the problems typically encountered in uncertainty calculations when, for example, vibrations are measured or accelerometers calibrated by laser interferometry is given. It is shown how a model function of simple structure can be established for the usually complex relationship between the output quantity (e.g. sensitivity of an accelerometer), the quantity to be measured (e.g. acceleration) and various influence quantities (noise, transverse motion, base strain, etc.). Among other things, non-linear effects such as the influences of distortion, hum and noise can be properly taken into account.     

Feedback cooling of a single trapped ion

Based on a real-time measurement of the motion of a single ion in a Paul trap, we demonstrate its electromechanical cooling below the Doppler limit by homodyne feedback control (cold damping). The feedback cooling results are well described by a model based on a quantum mechanical master equation.     

基于线阵CCD空间滤波效应的航空相机像移速度测量方法

基于空间滤波测速原理,提出了利用线阵CCD空间滤波效应进行航空相机像移速度测量的新方法。对线阵CCD输出图像进行隔行采样,模拟了多狭缝的空间滤波特性,实现了对航空相机像移速度的光学非接触测量。通过研究空间滤波器的功率谱密度函数,对影响线阵CCD空间滤波特性的关键因素进行了特性分析,并在实验上验证了利用线阵CCD推扫图像模拟多狭缝空间滤波器测量像移速度的可行性。结果表明,对于5～53.2 mm/s范围内的像移速度,测量误差导致的像移量误差不大于1/3 pixel,能够满足航空相机像移补偿精度的要求。     

第三代同步辐射光源储存环支撑组件振动控制研究

第三代同步辐射光源对束流轨道稳定性要求很高, 上海光源是一台在建的第三代光源, 束流位置稳定度要求达到微米乃至亚微米级. 地基振动会使储存环磁聚焦结构中的各种元件发生机械振动引起随时间变化的束流闭合轨道畸变, 影响束流轨道稳定性. 上海光源场地振动幅值大, 需要研究措施控制机械组件的振动. 阻尼减振是一种有效的振动控制方法, 针对上海光源储存环机械组件, 作者设计了一种阻尼减振方案. 试验结果表明, 该方案能有效地控制机械组件的振动. 这对于保证上海光源的束流稳定性要求有积极意义.