Investigation of different surface morphologies formed on AISI 304 stainless steel via millisecond Nd:YAG pulsed laser oxidation

Different surface morphologies on AISI 304 stainless steel have been obtained after millisecond Nd:YAG pulsed laser oxidation. The effects of laser processing parameters, especially pulse width and laser energy density on the surface morphologies of the stainless steel were emphatically investigated. The results showed that surface morphologies were significantly changed with increasing laser pulse widths and laser energy densities. When the pulse width was 0.2–1.0 ms and laser energy density was 4.30×10⁶–7.00×10⁶ J/m², the surface was obviously damaged and the morphologies varied gradually from craters to ripple structures. However, when the pulse width was longer than 1 ms and the laser energy density was increased from 1.90×10⁷ to 3.16×10⁷ J/m², the sizes of craters got smaller until disappeared and the surface became flatter and smoother. Nevertheless, the smooth surface was not obtained under overhigh laser energy densities. In addition, the schematic relationship was used to describe the formation process and mechanism of different surface morphologies.     

Experimental investigation of recoil-momentum-generation efficiency under near-IR femtosecond laser ablation of refractory metals in vacuum

The use of ultrashort laser pulses is a way to increase recoil momentum under laser ablation of materials, because, in this case, the energy deposition per unit volume of the target material is substantially higher due to reduced heat dissipation. By using methods of combined interferometry, we estimated the specific impulse (～200–900 s), momentum coupling coefficient (～2 × 10^?5?3 × 10^?4 Ns/J), laser-energy conversion efficiency to kinetic energy of the gas-plasma flow (～0.05–0.82), and degree of the gas-plasma flow monochromaticity (～0.72–0.92) under femtosecond (τ ～ 45 fs, λ ～ 800 nm) ablation of refractory metals (Ti, Zr, Mo, and Nb) in vacuum.     

Wet bone ablation with mechanically Q-switched high-repetition-rate CO2 laser

2 laser using a miniature water spray is demonstrated. An ablation threshold of 1.4 J/cm², an optimal energy density of 9–10 J/cm², and a corresponding specific ablation energy of 25–30 J/mm³ are found for pig thighbone compacta at λ=9.57 μm and a beam waist diameter of 0.5 mm. The water spray alleviates tissue carbonization even at high laser pulse repetition rates and increases ablation efficiency. Received: 9 March 1998/Revised version: 6 July 1998     

Tritium recovery from co-deposited layers using 193-nm laser

Recovery of tritium from co-deposited layers formed in deuterium–tritium plasma operations of the TFTR (Tokamak Fusion Test Reactor) was investigated by the use of an ArF excimer laser operating at the wavelength of 193 nm. At the laser energy density of 0.1 J/cm², a transient spike of the tritium-release rate was observed at initial irradiation. Hydrogen isotopes were released in the form of hydrogen-isotope molecules during the laser irradiation in vacuum, suggesting that tritium can be recovered readily from the released gases. In a second experiment, hydrogen (tritium) recovery from the co-deposited layers on JT-60 tiles that had experienced hydrogen-plasma operations was investigated by laser ablation with a focused beam of the excimer laser. The removal rate of the co-deposited layers was quite low when the laser energy density was smaller than the ablation threshold (1.0 J/cm²), but reached 1.1 μm/pulse at the laser energy density of 7.6 J/cm². The effective absorption coefficient in the co-deposited layers at the laser wavelength was determined to be 1.9 μm^-1. The temperature of the surface during the irradiation at the laser energy density of 0.5 J/cm² was measured on the basis of Planck’s law of radiation, and the maximum temperature during the irradiation decreased from 3570 K at the initial irradiation to 2550 K at the 1000th pulse of the irradiation. Received: 5 August 2002 / Accepted: 7 August 2002 / Published online: 28 October 2002 RID="*" ID="*"Corresponding author. Fax: +81-29/2825917, E-mail: shu@tpl.tokai.jaeri.go.jp     

Effect of nonionic surfactant addition on Pyrex glass ablation using water-assisted CO2 laser processing

Pyrex glass etching using laser ablation is an important technology for the microfluid application to lab-on-a-chip devices but suffers from the formation of surface crack. In this article, the addition of nonionic surfactant to water for glass ablation using water-assisted CO₂ laser processing (WACLAP) has been investigated to enhance ablation rate and to eliminate conventional surface defects of cracks in air. WACLAP for Pyrex glass ablation can reduce thermal-stress-induced crack with water cooling and hydrophilic nonionic surfactant to water can enhance ablation performance. Compared to pure water, the 15% weight percent Lauramidopropyl Betaine surfactant solutions for WACLAP can enhance ablation rate from 13.6 to 25 μm/pass of Pyrex glass ablation at a linear laser energy density of 2.11 J/cm, i.e., 24 W power, 114 mm/s scanning speed, and obtain through-wafer etching at 3.16 J/cm for 20 passes without cracks on the surface. Effect of surfactant concentration and linear energy density on WACLAP was also examined. The possible mechanism of surfactant-enhanced phenomenon was discussed by the Newton’s law of viscosity of surfactant solution.     

Patterning of PLZT and PSZT thin films by excimer laser

The patterning of lanthanum-doped lead zirconate titanate (PLZT) and strontium-doped lead zirconate titanate (PSZT) thin films has been examined using a 5-ns pulsed excimer laser. Both types of film were deposited by rf magnetron sputtering with in situ heating and a controlled cooling rate in order to obtain the perovskite-structured films. The depth of laser ablation in both PSZT and PLZT films showed a logarithmic dependence on fluence. The ablation rate of PLZT films was slightly higher than that of PSZT films over the range of fluence (10–150 J/cm²) and increased linearly with number of pulses. The threshold fluence required to initiate ablation was ∼ 1.25 J/cm² for PLZT and ∼ 1.87 J/cm² for PSZT films. Individual squares were patterned with areas ranging from 10×10 μm² up to 30×30 μm² using single and multiple pulses. The morphology of the etched surfaces comprised globules which had diameters of 200–250 nm in PLZT and 1400 nm in PSZT films. The diameter of the globules has been shown to increase with fluence until reaching an approximately constant size at ≤ 20 J/cm² in both types of film. The composition of the films following ablation has been compared using X-ray photoelectron spectroscopy and energy-dispersive X-ray spectroscopy. PACS 79.20.Ds; 82.80.Pv; 82.80.Ej     

纳秒激光烧蚀冲量耦合数值模拟

为研究激光烧蚀靶产生冲量过程和机理, 建立了一个复杂的一维热传导和流体动力学模型. 以空间碎片常见材料Al为例, 用建立的模型数值计算了纳秒脉宽激光烧蚀靶产生的冲量及冲量耦合系数随时间变化情况. 数值结果和已有的实验数据符合的较好. 数值计算表明: 激光脉冲时间内, 靶获得的冲量随时间迅速增加, 在脉冲时间结束后, 冲量变化随时间趋于稳定; 在冲量耦合过程中, 烧蚀等离子体向真空膨胀, 羽流尺度逐渐增大, 同时吸收入射激光能量, 导致激光与靶耦合的能量降低. 关键词： 激光烧蚀 冲量耦合 等离子体     

Modeling of fast phase transitions dynamics in metal target irradiated by pico- and femtosecond pulsed laser

We investigate laser pulse influence on aluminum target in irradiance range 10⁹ to 10¹⁶ W/cm², pulse duration between 10⁻⁸ and 10⁻¹⁵ s, Gaussian time profile with wavelength of 0.8 μm. For all computations energy density was 10 J/cm². Plasma in the evaporated material is generated at the energy density above 10 J/cm²as the modeling showed.Long and short laser pulses distinguish by the mechanisms of energy transformation. For short laser pulses there is volumetric energy absorption, together with rapid phase transitions it lead to overheating in solid and liquid states, overheated solid temperature rises up to (6-8)T_m. Under influence of the energy saved in overheated solid, duration of the phase transitions becomes nanosecond, which is several orders of magnitude longer than laser pulse.     

Silicon nanoparticles generated by femtosecond laser ablation in a liquid environment

Silicon nanoparticles were generated by femtosecond laser [387 nm, 180 fs, 1 kHz, pulse energy = 3.5 μJ (fluence = 0.8 J/cm²)] ablation of silicon in deionized water. Nanoparticles with diameters from ~5 up to ~200 nm were observed to be formed in the colloidal solution. Their size distribution follows log-normal function with statistical median diameter of ≈20 nm. Longer ablation time leads to a narrowing of the nanoparticle size distribution due to the interaction of the ablating laser beam with the produced nanoparticles. Raman spectroscopy measurements confirm that the nanoparticles exhibit phonon quantum confinement effects and indicate that under the present conditions of ablation they are partially amorphous.     

Hardnes and resistivity of amorphous carbon thin films deposited by laser ablation

Amorphous carbon thin films were deposited by laser ablation of a graphite target, using the fundamental line of a 5 ns Nd:YAG laser. Deposition was carried out as a function of the plasma parameters (mean kinetic ion energy and plasma density), determined by means of a planar probe. In the selected working regimes the optical emission from the plasma is mainly due to atomic species, namely C⁺ (426.5 nm); however, there is also emission from other atomic species and molecular carbon. The hardness and resistivity could be varied in the range between 10 and 25 GPa, and 10⁸ and 10¹¹ Ω cm, respectively. The maximum values were obtained at a 200 eV ion energy and 6×10¹³ cm⁻³ plasma density, where the maximum quantity of C–C sp³ bonds was formed, as confirmed by Raman spectroscopy.     

Experimental femtosecond laser photodisruption of rabbit sclera for minimally invasive laser sclerostomy: An in vitro study

Femtosecond laser technology, used as a minimally invasive tool in intrastromal refractive surgery, may also have potential as a useful instrument for glaucoma filtration surgery. The purpose of the present study was to evaluate the feasibility of minimally invasive laser sclerostomy by femtosecond laser photodisruption and seek the appropriate patterns of laser ablation and relevant laser parameters. A femtosecond laser (800 nm/50 fs/1 kHz), focused by a 0.1 numerical aperture (NA) objective lens, with different pulse energies and exposure times was applied to ablate hydrated rabbit sclera in vitro. The irradiated samples were examined by scanning electron microscopy (SEM). By moving a three-dimensional, computer-controlled translation stage to which the sample was attached, the femtosecond laser could produce three types of ablation patterns, including linear ablation, cylindrical aperture and rectangular cavity. With pulse energies ranging from 37.5 to 150 μJ, the linear lesions were consistently observed at the inner surface of sclera, whereas it failed to make any photodisruption if pulse energy was below the threshold value of 31.25 μJ, with the corresponding threshold intensity of 4.06×10¹⁴ W/cm². The depths of the linear lesions increased linearly with both pulse energy (37.5–150 μJ) and exposure time (0.1–0.4 s). Histological examination showed the incisions produced by femtosecond laser photodisruption had precise geometry and the edges were sharp and smooth, with no evidence of collateral damage to the surrounding tissue. Our results predict the potential application of femtosecond laser pulses in minimally invasive laser sclerostomy for glaucoma treatment.     

Picosecond laser ablation of SiO2 layers on silicon substrates

In this work, we report on laser ablation of thermally grown SiO₂ layers from silicon wafer substrates, employing an 8–9 ps laser, at 1064 (IR), 532 (VIS) and 355 nm (UV) wavelengths. High-intensity short-pulse laser radiation allows direct absorption in materials with bandgaps higher than the photon energy. However, our experiments show that in the intensity range of our laser pulses (peak intensities of <2×10¹² W/cm²) the removal of the SiO₂ layer from silicon wafers does not occur by direct absorption in the SiO₂ layer. Instead, we find that the layer is removed by a “lift off” mechanism, actuated by the melting and vaporisation of the absorbing silicon substrate. Furthermore, we find that exceeding the Si melting threshold is not sufficient to remove the SiO₂ layer. A second threshold exists for breaking of the layer caused by sufficient vapour pressure. For SiO₂ layer ablation, we determine layer thickness dependent minimum fluences of 0.7–1.2 J/cm² for IR, 0.1–0.35 J/cm² for VIS and 0.2–0.4 J/cm² for UV wavelength. After correcting the fluences by the reflected laser power, we show that, in contrast to the melting threshold, the threshold for breaking the layer depends on the SiO₂ thickness.     

Femtosecond laser ablation of cadmium tungstate for scintillator arrays

Ultrafast pulsed laser ablation has been investigated as a technique to machine CdWO₄ single crystal scintillator and segment it into small blocks with the aim of fabricating a 2D high energy X-ray imaging array. Cadmium tungstate (CdWO₄) is a brittle transparent scintillator used for the detection of high energy X-rays and γ-rays. A 6 W Yb:KGW Pharos-SP pulsed laser of wavelength 1028 nm was used with a tuneable pulse duration of 10 ps to 190 fs, repetition rate of up to 600 kHz and pulse energies of up to 1 mJ was employed. The effect of varying the pulse duration, pulse energy, pulse overlap and scan pattern on the laser induced damage to the crystals was investigated. A pulse duration of ≥500 fs was found to induce substantial cracking in the material. The laser induced damage was minimised using the following operating parameters: a pulse duration of 190 fs, fluence of 15.3 J cm⁻² and employing a serpentine scan pattern with a normalised pulse overlap of 0.8. The surface of the ablated surfaces was studied using scanning electron microscopy, energy dispersive X-ray spectroscopy, atomic force microscopy and X-ray photoelectron spectroscopy. Ablation products were found to contain cadmium tungstate together with different cadmium and tungsten oxides. These laser ablation products could be removed using an ammonium hydroxide treatment.     

Single and multiple shot near-infrared femtosecond laser pulse ablation thresholds of copper

The single-shot ablation threshold and incubation coefficient of copper were investigated using an amplified near-infrared, femtosecond Ti:sapphire laser. To date, the near-infrared femtosecond ablation threshold of copper has been reported in the range of several hundred millijoules per cm² based primarily on multiple shot ablation studies. A careful study of the single shot ablation threshold for copper was carried out yielding an incident single-shot ablation threshold of (1.06±0.12) J/cm² for a clean copper foil surface. This was determined by measuring the diameters of the ablation spots as a function of the laser pulse energy using scanning electron microscopy for spatially Gaussian laser spots. When multiple shots were taken on the same spot, a reduction in ablation threshold was observed, consistent with a multiple shot incubation coefficient of 0.76±0.02. Similar experiments on 250 nm and 500 nm copper thin films sputtered on a silicon substrate demonstrated that scaling the threshold values with the absorbance of energy at the surface yields a consistent absorbed fluence threshold for copper of (59±10) mJ/cm². This absorbed threshold value is consistent with the expected value from a two-temperature model for the heating of copper with an electron-lattice coupling constant of g=10¹⁷ Wm^-3 K^-1. Single-shot rippling of the surface in the threshold ablation intensity regime was also observed for the foil target but not for the smooth thin film target. PACS 61.80.Ba; 61.82.Bg     

Hard tissue ablation with a free running Er:YAG and a Q-switched CO2 laser: a comparative study

The Er:YAG and the CO₂ laser are competitors in the field of hard tissue ablation. The use of Er:YAG lasers (2.94 μm, pulse length _L of 100 to 200 μs) show smaller areas of thermal defects then ‘‘superpulsed’’ CO₂ lasers with pulse lengths of approximately 100 μs. Only the development of a Q-switched CO₂ laser (9.6 μm, τ_L=250 ns) allowed for similar results. In this paper new results for the Er:YAG and the Q-switched CO₂ laser under the influence of water spray will be presented. Several parameters are of special interest for these investigations: the specific ablation energy, which shows a minimum for the CO₂ laser at an energy density of 9 J/cm ² and a broad shallow minimum in the range of 10 to 70 J/cm² for the Er:YAG laser, and comparison of the cut-shape and depth. Surface effects and cutting velocity are discussed based on SEM pictures. Received: 19 July 2000 / Revised version: 1 November 2000 / Published online: 30 November 2000     

Picosecond laser ablation of nickel-based superalloy C263

Picosecond laser (10.4 ps, 1064 nm) ablation of the nickel-based superalloy C263 is investigated at different pulse repetition rates (5, 10, 20, and 50 kHz). The two ablation regimes corresponding to ablation dominated by the optical penetration depth at low fluences and of the electron thermal diffusion length at high fluences are clearly identified from the change of the surface morphology of single pulse ablated craters (dimples) with fluence. The two corresponding thresholds were measured as F _th(D1)¹=0.68±0.02 J/cm² and F _th(D2)¹=2.64±0.27 J/cm² from data of the crater diameters D _1,2 versus peak fluence. The surface morphology of macroscopic areas processed with a scanning laser beam at different fluences is characterised by ripples at low fluences. As the fluence increases, randomly distributed areas among the ripples are formed which appear featureless due to melting and joining of the ripples while at high fluences the whole irradiated surface becomes grainy due to melting, splashing of the melt and subsequent resolidification. The throughput of ablation becomes maximal when machining at high pulse repetition rates and with a relatively low fluence, while at the same time the surface roughness is kept low.     

水滴烧蚀多脉冲激光推进性能

 用实时的推力测试方法研究了水滴烧蚀模式多脉冲TEA CO2激光推进的推进性能。用纹影法研究了伴随水滴烧蚀产生的激波等流场变化过程。多脉冲激光推进的比冲和冲量耦合系数等性能参数随激光脉冲重复频率的变小和脉冲数目的增加而逐渐下降。与激光传输相反和相同方向的激波传播最大速度分别为10 km/s和7 km/s。与纹影法结果同步获得的推力曲线表明：汽化过程对推力的形成过程贡献最大,激波也对推力的形成过程有一定贡献。     

Diamond-like phase formation in an amorphous carbon films prepared by periodic pulsed laser deposition and laser irradiation method

Diamond-like carbon (DLC) films were fabricated by pulsed laser ablation of a liquid target. During deposition process the growing films were exited by a laser beam irradiation. The films were deposited onto the fused silica using 248 nm KrF eximer laser at room temperature and 10⁻³ mbar pressure. Film irradiation was carried out by the same KrF laser operating periodically between the deposition and excitation regimes. Deposited DLC films were characterized by Raman scattering spectroscopy. The results obtained suggested that laser irradiation intensity has noticeable influence on the structure and hybridization of carbon atoms deposited. For materials deposited at moderate irradiation intensities a very high and sharp peak appeared at 1332 cm⁻¹, characteristic of diamond crystals. At higher irradiation intensities the graphitization of the amorphous films was observed. Thus, at optimal energy density the individual sp³-hybridized carbon phase was deposited inside the amorphous carbon structure. Surface morphology for DLC has been analyzed using atomic force microscopy (AFM) indicating that more regular diamond cluster formation at optimal additional laser illumination conditions (∼20 mJ per impulse) is possible.     

Ultrafast laser ablation of indium tin oxide thin films for organic light-emitting diode application

Ultrafast laser ablation of ITO thin film coated on the glass has been investigated as a function of laser fluence as well as the number of laser pulses. The ablation threshold of ITO thin film was found to be 0.07 J/cm² that is much lower than that of glass substrate (about 1.2–1.6 J/cm²), which leads to a selective ablation of ITO film without damage on glass substrate. The changes in the electrical resistance and morphology of ablated trench of ITO electrode were found to be strongly dependent on the processing conditions. We present the performance of organic light-emitting diodes (OLED) fabricated with ITO electrode patterned by ultrafast laser ablation.