共查询到20条相似文献,搜索用时 15 毫秒
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An optical measurement system has been developed for the simultaneous detection for five degree-of-freedom (DOF) deviations of the object. The measuring system designed bases on laser holographic technique, laser alignment technique, laser drift compensation technique and magneto-optic modulating technique where a single laser beam is used as datum line. This measuring system is applied to multiple degree-of-freedom alignment and measurement of fine deviation, and it carries out the automatic testing in a deformation of machine tool, or the loaded axon in a strain wind tunnel balance. Through actual calibration and measurement, the resolution of the system is estimated to be 4 μm for linear displacement error measurement and better than 2″ for angular error measurement with a 1 m offset between laser and a photoelectric receiving target. 相似文献
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Straightness Measurement Using Laser Diode and CCD Camera 总被引:4,自引:0,他引:4
HAO Qun ZHAO Yang LI Dacheng CAO Mang 《Chinese Journal of Lasers》1999,8(3):215-220
1IntroductionInmanufactureandasembleofmodernmachinesandinstruments,anindispensablerequirementisthecontrolofformandpositionero... 相似文献
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This paper focuses on measuring straightness of large-scale dimension by using laser diode fiber alignment, diffraction imaging technique and a CCD camera. In this method, we use a laser diode fiber alignment beam as the datum reference of straightness, deviation of the measured from this datum, can be detected by a CCD camera directly. Also a novel image processing algorithm is presented. The experiment result shows that the measurement range of L (m), the measurement accuracy of the system is 3+2.3×10-6L(\mm). 相似文献
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采用90型二频机抖激光陀螺和石英挠性加速度计,利用单轴旋转惯性组件的方法,研制了高精度姿态测量系统。介绍了系统的硬件结构组成和无减震结构设计方案,给出了初始对准和姿态测量系统的算法。系统的初始对准采取粗对准和精对准两种方式, 姿态测量系统的误差传播特性由系统的误差模型来描述。对该系统进行了静态导航实验和长时间单轴旋转导航实验。实验结果表明:系统水平姿态24h保持精度优于30″,24h航向保持精度优于30″。 相似文献
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调频连续波激光测距方法可以实现高精度的大尺寸绝对距离测量, 且测量过程无需合作目标, 在大空间坐标精密测量领域有很高的研究价值. 而如何提高测量分辨率和实用化一直是近年来调频连续波激光绝对测距研究的热点. 本文研究了调频连续波激光测距的原理, 基于双光路调频连续波激光测距系统, 提出了通过信号拼接提高测量分辨率的信号处理优化方案, 该方案可以提高测距分辨率, 且可以降低对激光器的性能要求; 提出了可实现高速测量的简易测量方法. 设计加工了双光路光纤调频连续波激光测距系统, 利用该系统进行了测距分辨率及测距误差标定实验, 实验结果表明: 优化方案可以有效地提高测量分辨率和测量效率, 在26 m测量范围内, 测距分辨率达到了50 μm, 测距误差不超过100 μm; 快速测量方案有较高实用价值. 相似文献
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CHEN Yan ZHAO Yang 《Chinese Journal of Lasers》2000,9(3):219-225
1 Introduction Thetechniqueoflinearfrequencymodulation(LFM)interferometrybasedonfrequencytunningcharacteristicsofasemiconductorlaser,hasbeenwidelyinvestigatedinthefieldofmeasuringabsolutedistanceandsurfaceprofile[1].ALDpumpedmicrochipsolidlaserdeveloped… 相似文献
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In this paper, the principle of linear frequency-modulation (LFM) with an external microcavity laser is analyzed mathematically and a method to establish the math model of LFM heterodyne interference is presented. The expression of LFM heterodyne interference is deduced by an illustration of a triangular frequency modulation. At present, one application of the LFM technique is non-guide absolute distance measurement. Experimental results of a system for absolute distance measurement based on a microchip solid laser and LFM technique are given. Based on the precisely theoretical model some effective approaches to improve the performance of LFM and decrease the measuring error are discussed. 相似文献
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An idea of using laser Doppler velocimeter (LDV) to measure the velocity for the vehicle inertial navigation system was put forward. The principle of measuring its own velocity with laser Doppler technique was elaborated and reference-beam LDV was designed. Then Doppler signal was processed by tracking filter, frequency spectrum refinement and frequency spectrum correction algorithm. The result of theory and experiment showed that the reference-beam LDV solved the problem that dual-beam LDV cannot be used for measuring when the system was out of focus. Doppler signal was tracked so that signal-to-noise ratio was improved, and the accuracy of the system was enhanced by the technology of frequency spectrum refinement and correction. The measurement mean error was less than 1.5% in velocity range of 0-30 m/s. 相似文献
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基于分步式压印光刻的激光干涉仪纳米级测量及误差研究 总被引:1,自引:1,他引:0
针对在未做隔离保护处理的环境中,基于Michelson干涉原理的激光干涉仪测量系统存在严重的干扰误差,不适合分步式压印光刻纳米级对准测量的要求.采用Edlen公式的分析及计算,不仅在理论上揭示出环境温度、湿度、气压等变化对激光干涉仪测量准确度的影响,而且证明影响测量准确度的最大干扰源是空气流动的结果.通过气流隔离措施和系统测量反馈校正控制器,能够实时补偿激光干涉仪两路信号的相差.最终,测量漂移误差在10 min内由13 nm降低到5 nm以内,满足压印光刻在100 mm行程中达到20 nm定位准确度要求. 相似文献
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Study on a reference optical system applied to the outline loss measurement of complicated three-dimension object 总被引:1,自引:0,他引:1
In this paper, laser Doppler reference optical technique is studied, and an optical system with high resolving power which is applied to longitudinal displacement measurement of complicated 3-D object is brought forward. Structure of the measuring optical head is designed reasonably. The experiments prove that the new-type reference optical system can achieve the outline loss measurement of object with the relative error of 0.3%. 相似文献