Mechanism of the rf sputtering of mixed oxides

New experimental data on the growth mechanisms of multicomponent Pb(Zr,Ti)O₃, (Ba,Sr)TiO₃, and Y-Ba-Cu-O films in an rf discharge plasma are presented. An investigation of the spatial distribution of the radiated intensity of the sputtered particles in the rf plasma during the deposition of films of these mixed oxides in the epitaxial state reveals general laws governing their transport from the target to the substrate, which are stipulated by features of the negative glow of the rf discharge. The roles of external and internal parameters are examined from the standpoint of describing the mechanisms of the heteroepitaxial growth of mixed oxides. Zh. Tekh. Fiz. 68, 99–103 (September 1998)     

Two-dimensional mesoscopic dusty plasma clusters: Structure and phase transitions

A two-dimensional mesoscopic cluster of “dusty plasma” particles, which can be interpreted as a system of microparticles in an rf gas discharge, is investigated. The ground-state configurations and corresponding eigenfrequencies and eigenvectors are found for clusters of N=22–40 particles in a harmonic confining potential. It is shown that a change in the Debye screening length R of the particle charge in the plasma can cause structural transformations of the ground state of the system, manifested as first-order or second-order phase transitions with respect to the parameter R. The disorder (“melting”) of the clusters is analyzed in detail by Monte Carlo simulation and molecular dynamics. By varying the characteristic range of particle interaction in a cluster, it is possible to modulate its thermodynamic properties and the character of the phase transitions, thereby causing a controlled transition of the system into the fully ordered, orientationally disordered, or fully disordered state. The possibility of dusty plasma clusters coexisting in different states is discussed. Zh. éksp. Teor. Fiz. 116, 1300–1312 (October 1999)     

On the role of strong turbulence in low-pressure rf discharges in a magnetic field

The results of an experimental and theoretical investigation of strong turbulence produced by an external rf field in the plasma of a beam-plasma discharge are presented. The modulation instability of a rf electric field, perpendicular to a constant magnetic field, in the frequency range between the lower-hybrid and ionic Langmuir frequencies, has been investigated. It is shown that the low-frequency fields can be used to control beam relaxation. Pis’ma Zh. éksp. Teor. Fiz. 64, No. 9, 608–612 (10 November 1996)     

Features of the α-γ transition in a low-pressure rf argon discharge

It is found that the region for the stable existence of the aregime of a radio-frequency (rf) discharge is bounded not only on the moderate-pressure side, but also on the low-pressure side. One feature of the α-γ transition in a low-pressure rf discharge is that the criterion for breakdown of the electrode sheath is not satisfied. It is shown that at low pressures the α-γ transition of an rf argon discharge takes place abruptly and exhibits hysteresis. At intermediate pressures the α-γ transition is continuous and lacks jumps; negative differential conductivity appears, double layers form, and nonmonotonic behavior of the plasma density is observed at the center of the discharge. The role of stochastic (collisionless) electron heating in sustaining an rf discharge at intermediate gas pressures is discussed. Zh. Tekh. Fiz. 68, 52–60 (May 1998)     

Parametric excitation of oscillations of charged particle bunches in a Penning trap

A self-similar solution is obtained for the self-consistent hydrodynamic equations describing the motion of an ellipsoid of charged particles in a Penning trap and in an rf trap. The conditions are determined for which a small periodic variation of the confining magnetic field in the Penning trap drives oscillations of the bunch. Zh. Tekh. Fiz. 67, 27–29 (January 1997)     

The vibration and rotation of piezoelectric particles in high frequency electric fields observed by a thermoacoustic method

We have observed, by a thermoacoustic method, the acoustic resonance vibration of small (diameter 115 m) piezoelectric particles in high frequency (15 MHz) electric fields. The frequency dependence of the thermoacoustic signal gives direct information about the size distribution of the particles.In very strong rf electric fields we also observed a rotation of the vibrating particles by large angles — as originally suggested by Melcher and Shiren [3] — orienting the initially random rf dipoles parallel to the rf electric fields.The observed strong forces acting on vibrating piezoelectric particles in rf fields can probably be used as a new method of selectively extracting particles of a given size from a broad distribution of very small particles.     

The approach to diamond growth on levitating seed particles

We demonstrate the approach of diamond growth on levitating seed particles in a rf plasma. We introduce a hot filament chemical vapor deposition (CVD) technique into the rf plasma chamber in order to obtain improved crystal growth. Firstly, we confirmed diamond nucleation on seed particles placed on a Si substrate using the hot filament CVD. The deposition conditions, namely the total pressure and the rf power, were chosen so that they correspond to particles levitation conditions. We observe that a hydrogen pre-treatment on the seed particles improves the nucleation. Secondly, we confirm the levitation of particles at high temperatures. Fine particles levitated in a plasma are particularly sensitive to thermophoretic effects due to inhomogeneities in the gas heating. Therefore, proper heating procedures are required for successful particles levitation.     

Superradiance by a system of highly polarized exchange-coupled nonequivalent spins

We propose a model of radiofrequency (rf) superradiance by a system of interacting nonequivalent spins in a point specimen. In contrast to the rf superradiance observed and described earlier, here spin-spin coupling acts as the interaction with the cavity. To be definite, we examine the spins of two isotopes of a metal that are coupled by the Ruderman-Kittel interaction. The analysis of such a system when the magnetization of one spin species is inverted shows that the system can have one resonance frequency and two different decay times, instead of two resonance frequencies and one decay time in the usual situation. When such “repulsion” of decay times occurs and the absolute values of the spin polarizations are large, transverse magnetization increases and exhibits features characteristic of superradiance. Finally, we calculate the parameters of this superradiance: the voltage across the terminals of an rf pickup coil, the pulse length, the delay time, and the superradiant intensity. Zh. éksp. Teor. Fiz. 112, 551–563 (August 1997)     

Coherent repopulation of the components of a three-level quantum system in the field of a pulsed bichromatic radio frequency wave

The coherent repopulation of a quantum system consisting of three nonequidistant levels in the field of a resonant bichromatic rf wave is studied. The atoms are assumed to have an impulsive interaction with the rf wave in which the pulse duration is less than any of the relaxation times. The hyperfine structure of gas atoms and a system of atomic oscillator levels in a magnetic trap are considered as examples of such a quantum system. It is shown that in the second case, the coherent repopulation effect can be used to cool neutral atoms in magnetic traps. Zh. éksp. Teor. Fiz. 113, 1181–1192 (April 1998)     

Radio frequency pulse shaping system using a switchable cavity

An analysis is made of an rf pulse shaping system containing a storage cavity and an extraction system which can be switched from antiresonant to resonant operation. Relations are given for the pulse shape, gain, and efficiency. Zh. Tekh. Fiz. 67, 139–141 (November 1997)     

Ion bombardment of amorphous silicon films during plasma-enhanced chemical vapor deposition in an rf discharge

The characteristics of ion and electron fluxes to the surface of a growing silicon film are investigated in various rf discharge regimes in silane at frequencies of 13.56 MHz and 58 MHz in plasma-enhanced chemical vapor-deposition (PECVD) apparatus. The energy spectra of the ions and electrons bombarding the growing film are measured. The electronic properties of films grown under various degrees of ion bombardment are studied. The correlation of these properties with the ion parameters in the rf discharge plasma during film growth is discussed. Zh. Tekh. Fiz. 68, 52–59 (February 1998)     

Application of a double insulated probe for the investigation of charged-particle beams in plasmas

It is shown that the existence of a current in the external circuit of a double insulated probe without electrical bias between its electrodes is evidence of the presence of a stream (beam) of charged particles in a plasma. The species of particles forming a beam in a plasma, the direction and divergence of the beam, and information on the distribution of the current density over the beam cross section in the plasma can be obtained by determining the direction and strength of the current in the external circuit of the probe as it is positioned at various sites in the investigated system. Zh. Tekh. Fiz. 68, 121–123 (October 1998)     

Effect of a magnetic field on the rate of etching of silicon dioxide in a CF4 + O2 plasma

A near-electrode nonuniform magnetic field crossed with an electric field is found to strongly affect the rate of etching of silicon dioxide on glass substrates in a CF₄ + O₂ plasma when the Larmor frequency (≈10⁹ s⁻¹) is much higher than the frequency of collisions of an electron with surrounding plasma particles (≈10⁶ s⁻¹) and the frequency of the applied rf electric field (≈10⁷ s⁻¹). The confinement of electrons by the magnetic field in the immediate vicinity of the substrate surface to be treated increases the rate of generation of chemically active particles, which increases the etching rate of silicon dioxide.     

Measurement of dust particle shielding in a plasma from oscillations of a linear chain

An experimental method for the measurement of the shielding of dust particles in the sheath of an rf plasma based on the excitation of coupled oscillations of a linear particle arrangement is presented. With the measured screening strength the solid-liquid phase transition of the plasma crystal is analysed.     

Unusual electromechanical effects in glycine

Unusual piezoresponse signals have been observed in glycine aminoacid powder at a frequency near 10 MHz, which exhibited a regular pattern in time determined by a periodic phase variation in the elastic vibrations of individual powder particles. This phenomenon results from the formation of spatial structures in glycine powder under the action of a strong rf field. Fiz. Tverd. Tela (St. Petersburg) 40, 1086–1089 (June 1998)     

Dispersion relations of dissipative drift waves in moderately ionized magnetoplasmas

Based on a three-fluid plasma model a theory is developed in which all collisions between electrons, ions, and neutral particles are effective. The numerical analysis satisfactorily explains an m = 4 mode instability observed in an rf generated, moderately ionized magnetoplasma.     

Suppression of particle generation in a plasma process using a sine-wave modulated rf plasma

Sine-wave modulated rf plasma has been used to control particle generation and growth in a plasma-enhanced chemical vapor deposition of silicon dioxide thin films using TEOS/O₂. The density and the size of particles generated in the plasma are greatly reduced when the plasma is modulated with sine-wave modulation at low modulation frequency (<1000 Hz). In addition, particle contamination on the films is significantly reduced also for nanoparticles, and the film growth rates at the range of modulation frequencies where particle generation are greatly reduced do not decrease appreciably. Compared to its counterpart pulse-wave modulation plasma, the sine-wave modulation plasma has demonstrated a better performance in terms of reduction of particle generation and film contamination, and of film growth rate. Thus, the sine-wave modulation plasma has shown as a promising method to be applied in the production of thin film with a high deposition rate and a low particle contamination.     

Particle Growth in an Experimental Dusty Plasma System

The coagulation and growth process of dust particles is investigated through laboratory experiment in a plasma system. A large number of dust particles with different sizes and shapes are formed. The growth process is characterized by the scattering laser intensity and fractal dimension. The comparisons of dust particles and scattering laser intensity obtained at different rf powers are presented. The three-dimensional distribution of dust particles is also given. These results provide an experimental basis for dust growth investigation.     

Electron paramagnetic resonance in a subsystem of structural defects as a factor in the plasticization of NaCl crystals

A change in the macroplastic deformation rate and an increase in the travel distances of edge dislocations are observed in NaCl single crystals placed in crossed dc and rf magnetic fields. The magnetic-field frequencies at which softening maxima are observed correspond to the resonance frequencies of transitions between Zeeman sublevels in paramagnetic complexes of structural defects. Pis’ma Zh. éksp. Teor. Fiz. 68, No. 5, 400–405 (10 September 1998)