微型光学元件的透过波面畸变的数字化检测

介绍了由浙江大学研制的CQG II型车间数字干涉仪检测 φ3 6mm× 0 5mm平行平面玻璃的透过波面畸变的情况。最近研制出的干涉仪测量的最大口径为 φ60mm ,采用移相式条纹扫描数字化处理 ,基于WINDOWS操作系统实现实时检测 ,以优于λ/ 30的精度计算出被检件的波面误差。工厂生产检测表明 :在上述仪器上增加一个 4倍口径的放大系统 ,可以使通光口径 φ3 1mm的工件达到 42 0 0个采样点 ,仪器的透射测量标准干涉腔误差PV≤ 0 0 2 8λ ,仪器隔日多次测量重复性PV≤ 0 0 3λ。该仪器已经正常投入使用 ,生产的用于光学信息产品的微型光学件已为日本先锋公司 (PIONEER)复检通过 ,成为工厂批量生产过程质量控制 (QC)的重要手段。     

移相式干涉仪在锥体棱镜角度测试中的应用

为了实时、高精度地测试光学零件，对移相式数字波面干涉仪在锥体棱镜角度测试中的应用进行了研究。通过锥体棱镜二面角偏差计算方法得到了二面角偏差和干涉波面之间的关系，分析了干涉波面的形状与锥体棱镜综合误差的关系，编写了锥体棱镜角度和综合误差测试程序，并且在移相式数字波面干涉仪和ZYGO干涉仪上分别对锥体棱镜进行测试，给出了2者的比较测试结果。结果表明，移相式数字波面干涉仪测量锥体棱镜二面角偏差的误差在0.3″范围内，RMS值的测量误差在λ/50内；提出的方法可实现检测过程的自动化。     

移相干涉测量术及其应用

为了对移相式数字干涉仪在光学元件测量中的应用有全面了解，介绍了移相干涉术的基本原理。结合激光数字波面干涉仪，阐述移相干涉术的四步重叠平均算法、压电晶体移相器(PZT)的结构、3 PZT的组合方法、移相器的标定误差和非线性误差的校正方法、波面相位解包的自适应种子算法、波面相位的评价指标等内容。结合移相数字波面干涉仪，叙述了移相干涉测量技术在普通光学元件、红外光学元件、大口径光学元件、非球面光学元件等测量中的应用并指出了应用过程中的注意事项。最后明确指出光干涉技术正沿着高相位分辨率、高空间分辨率、宽波段和瞬态高速测量的方向发展，并将会在瞬态波前测量、微机械的微结构动态分析等方面有着越来越广泛的应用。     

基于二维傅里叶变换的单帧干涉图相位提取方法

针对大口径光学元件干涉测试过程中,测试装置和干涉腔长较大,气流扰动和环境振动对移相测试过程产生影响等问题,采用一种基于二维傅里叶变换的单帧干涉图处理方法,只需要对一幅空间载频干涉条纹图进行处理即可获得待测相位,具有抗振测试的优点。对该方法的基本原理和算法过程进行分析,并对近红外大口径移相平面干涉仪中600 mm口径的光学平晶进行了面形测试。实验结果表明:采用该方法所得波面峰谷值(PV)为0.112,波面均方根值(RMS)为0.014,与移相算法所得波面数据相比,波面峰谷值偏差不到(1/500);波面均方根值(RMS) 偏差几乎为零。     

高精度,大口径平面波像差标准—移相式数字平面干涉仪

介绍研制成的一台移相式数字平面干涉仪，其孔径为φ２４５ｍｍ，用液面作基准标定并消除仪器的系统误差，准确度优于λ／５０（峰谷值，λ＝０．６３２８μｍ），利用计算机辅助干涉术，被测件口径可扩展到φ５００ｍｍ，该仪器将用于建立高精度，大孔径平面波像差标准。文中阐述了光学干涉仪，移相器及精度校核等问题。     

基于相干波面光强分布的静态干涉图的数字分析

提出了基于相干波面光强分布的静态干涉图数字处理的新方法 ,即在CQG Ⅱ型激光数字波面干涉仪上通过分别微调参考镜和被测镜的倾斜量 ,在CCD探测器上获得形成静态干涉图的两幅相干波面光强分布图 ,利用这两幅光强分布图与它们所形成的干涉图 ,可高精度地完成静态干涉图的数字分析。利用相干原理 ,给出了实现该方法的基本过程 ,并编程实现了该数字分析 ,获得了实验测量结果。通过与相移测量结果相比较 ,验证该方法对口径为 60mm的平面有望达到的测量精度。     

子孔径拼接法检验大口径光学镜面精度分析

介绍子孔径拼接检测大口径光学镜面的原理，即用小口径的平面干涉仪检验大口径平面的一部分，通过改变2者相对位置获得覆盖到整个被检验镜面的子孔径检测数据。提出利用最小二乘法对相邻2个子孔径重叠部分的检测数据进行计算来确定实际所有子孔径之间的位置关系，进而得到拼接而成的整体面形信息。并对子孔径拼接成的面型与实际面型的误差进行分析，建立了对子孔径拼接全口径波面恢复精度的评价指标。根据子孔径拼接原理完成了实验，并对多组子孔径数据拼接后的波面恢复精度进行了分析。实验证明，子孔径拼接检测大口径光学元件综合误差小，重复精度高。     

斐索型球面干涉仪移相误差的探讨

本文对斐索型球面干涉仪的移相原理误差进行了理论推导和计算;应用移相干涉术的三步法和五步法,分析和比较了球面移相误差对波面复原精度的影响,并给出了有关数据和曲线。最后,提出了几种减小球面测量误差的措施。     

CGQ-II车间数字干涉仪的几种特殊检测的应用

最近研制与改进的几台CQG II型车间数字干涉仪除应用于平面及球面的面形测量、获得面形误差PV、RMS或N、ΔN外 ,还可以广泛地应用于下列几种特殊的应用 :( 1)微型光学件的检测 :借助 φ60mm～φ15mm放大系统可以测量 φ1mm平面 ;( 2 )光学平行平面的透过波面畸变检测 ;( 3)棱镜角度及面形检测 ;( 4)非球面检测 :低陡度非球面、二次曲面及非球面准直系统 ;( 5 )衍射光检测 ;( 6)镜头的调制传递函数 (MTF)的检测 ;( 7)金属表面 (模具 )或镀反射膜光学件的检测。仪器的口径为 60mm ,平面精度为λ/2 0 ,球面精度为λ/10 ,λ =632 8nm ,对以上的应用均列举了生产实际应用或科研应用的实例。     

非球面数字波面检测技术

提出了一种快速检测浅度非球面（非球面度小于0.01 mm）的方法,该方法无需补偿器或其他辅助光学元件进行零位补偿。用移相干涉仪直接测量正轴或离轴的浅度凹非球面,剔除平移、倾斜、失焦等调整误差后,得到实际被测镜面的面形分布数据;根据正轴或离轴的浅度凹非球面矢高方程计算理想非球面的面形分布数据,得到理论波面数据,用实测的面形分布数据减去理论的面形分布数据即可得到被检非球面的剩余波像差,即面形误差。利用该方法测量了一口径为135 mm的双曲面,并用零位补偿法加以验证。两种方法的检测结果精度相当,说明数字波面法可实际应用于正轴或离轴的浅度凹非球面的检测。     

Guided-Wave Two-Dimensional Acousto-Optic Scanner Using Proton-Exchanged Lithium Niobate Waveguide

Two-dimensional scanning of a 0.6328 mum guided-light beam has been realized using noncolinear acousto-optic (AO) coplanar Bragg diffraction together with colinear AO guided-mode to substrate radiation-mode conversion in a Z-cut Xpropagation LiNbO3 proton-exchanged (PE) waveguide. The two surface acoustic (SAW) waves utilized are at the center frequencies of 500 and 200 MHz, propagating in the Y and X axes, respectively. Two-dimensional scanning of approximately 720 resolvable light beam spots, namely, 18 40 (horizontal vertical) scanning, has been demonstrated using a light beam of 1.0 mm aperture. The total number of resolvable beam spots can be greatly increased from 720 by simply utilizing SAW transducers of larger bandwidth and a light beam of greater aperture. It should also be possible to significantly increase the diffraction efficiency from 3 % by optimizing the parameters of the PE waveguide and the SAWs.     

Femtosecond Transform-Limited Pulse Generation by Compensating for the Linear Chirp of SPM Spectra in Dispersion Shifted Fibers

A simple technique of pulse compression, based on the linear chirp compensation of self-phase modulation (SPM) spectra in dispersion shifted fibers, is demonstrated. The optimization procedure is carried out, for a short span of a single-mode fiber, using a parabolic law, which describes the behavior of the squared output pulse width versus the pump peak power in the case of Gaussian pulses. The experimental results give a minimum pulse duration of 233 fs, which is in good agreement with the model. Shorter and coherent pulses, down to 90 fs, have been obtained by inserting an interference filter at the optical output.     

Effect ofγ-radiation on the spectral luminescence characteristics of impure cadmium tungstate crystals

Results of a study of the effect of γ-radiation on the spectral luminescence properties of cadmium tungstate crystals doped with silver, bismuth, and molybdenum cations are presented. Spectral characteristics of the nondnnnoped crystals are briefly described. Absorption and photo and X-ray luminescence spectra of the crystals taken before and after exposure to γ-radiation (5.5·10⁴ Gy) are compared. It is found that the spectral characteristics of the crystals doped with silver, bismuth, and molybdenum cations do not change markedly after the exposure. The relation between the type of impurity-induced defects, individual characteristics of the impurity cations, and the character of the effect of γ-radiation on the spectral luminescence properties of impure crystals is analyzed (preliminarily). Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 64, No. 1, pp. 55–60, January–February, 1997.     

Sorting of bending magnets for the SSRF booster

The Shanghai Synchrotron Radiation Facility(SSRF)booster ring,a full energy injector for the storage ring,is deigned to accelerate the electron beam energy from 150MeV to 3.5GeV that demands high extraction efficiency at the extraction energy with low beam loss rate when electrons are ramping.Closed orbit distortion(COD)caused by bending magnet field uniformity errors which affects the machine performance harmfully could be effectively reduced by bending magnet location sorting.Considering the affections of random errors in measurement,both ideal sorting and realistic sorting are studied based on measured bending magnet field uniformity errors and one reasonable combination of bending magnets which can reduce the horizontal COD by a factor of 5is given as the final installation sequence of the booster bending magnets in this paper.     

Measurement of nonlinear coefficient of optical fiber based on small chirped soliton transmission

We measure the waveform and phase curves of short optical pulses before and after transmission over different lengths of fibers by use of the pulse analyzer with the frequency-resolved optical gating (FROG),and numerically simulate pulse evolution under the experimental conditions.The nonlinear coefficient of the fiber is given by comparing the experimental results with the numerical ones.Difference between the experiment and numerical simulation is analyzed.     

Resonance scattering of canonical elastic shells in absorbing fluid medium

Resonance scattering of elastic spherical shell and cylindrical shell while the surrounding fluid medium has absorption is studied. The normal mode solution derived using exact elastic theory and the separation of variables is still applicable. However, the scattering form function has to be modified for the absorbing medium, otherwise the unreasonable result would be obtained. The backscattering form function in the absorbing medium is redefined, and the form function of elastic spherical and cylindrical shell with vacuum or solid matter filled is calculated in various absorption conditions. The results show that the absorption of surrounding fluid leads to notable attenuation of the coincidence resonances in the mid-frequency, but it has a little influence on the low-frequency resonance scattering induced by the filler inside the shell.     

Single-beam self-referenced phase-sensitive surface plasmon resonance sensor with high detection resolution

A versatile and low-cost single-beam self-referenced phase-sensitive surface plasmon resonance(SPR)sensing system with ultra-high resolution performance is presented.The system exhibits a root-mean-square phase fluctuation of ±0.0028.over a period of 45 min.i.e.a resolution of±5.2×10-9 refractive index units.The enhanced performance has been achieved through the incorporation of three design elements:a true single-beam configuration enabling complete self-referencing so that only the phase change associated with SPR gets detected,a differential measurement scheme to eliminate spurious signals not related to the sensor response,and the elimination of retardation drifts by incorporating temperature stabilization in the liquid crystal phase modulato .Our design should bring the detection sensitivity of non-labeling SPR biosensing closer to that achievable by conventional fluorescence-based techniques.     

Influences of SiO2 protective layers and annealing on the laser-induced damage threshold of Ta2O5 films

Ta2O5 films are prepared on BK7 substrates with conventional electron beam evaporation deposition.The effects of SiO2 protective layers and annealing on the laser-induced damage threshold (LIDT) of the films are investigated.The results show that SiO2 protective layers exert little influence on the electric field intensity(EFI)distribution,microstructure and microdefect density but increase the absorption slightly.Annealing iS effective on decreasing the microdefect density and the absorption of the films.Both SiO2 protective layers and annealing are beneficial to the damage resistance of the films and the latter is more effective to improve the LIDT.Moreover,the maximal LIDT of Ta2O5 films is achieved by the combination of SiO2 protective layers and annealing.     

A stereo matching algorithm using multi-peak candidate matches and geometric constraints

Gray cross correlation matching technique is adopted to extract candidate matches with gray cross correla- tion coefficients less than some certain range of maximal correlation coefficient called multi-peak candidate matches. Multi-peak candidates are extracted corresponding to three closest feature points at first. The corresponding multi-peak candidate matches are used to construct the model polygon. Correspondence is determined based on the local geometric relations between the three feature points and the multi-peak candidates. The disparity test and the global consistency checkout are applied to eliminate the remaining ambiguous matches that are not removed by the local geometric relational test. Experimental results show that the proposed algorithm is feasible and accurate.