谱域光学相干层析系统中基于解卷积方法的像质优化

谱域光学相干层析（spectral domain optical coherence tomography, 简记为SD-OCT）系统的轴向点扩散函数（point spread function, 简记为PSF）并不具备空不变特性,无法直接应用于解卷积运算.为实现SD-OCT系统成像质量基于解卷积算法的优化,本文采用数值校正后的轴向扫描信号和轴向有效PSF来实施基于Lucy-Richardson算法的解卷积运算,进而实现了SD-OCT系统中图像质量尤其是轴向分辨率的改善.本文理论分析了SD-OCT系统中导致轴向有效PSF随成像深度增大而下降和图像模糊的因素,阐述了利用解卷积算法实现图像质量优化的过程,基于建立的SD-OCT系统实施了不同成像深度位置处PSF的标定,并利用离散轴向位置处PSF的峰值拟合了轴向有效PSF的调制函数.利用调制函数对所有轴向扫描信号进行数值校正,然后根据轴向有效PSF进行解卷积算法.典型样品的解卷积图像重建结果表明,提出的解卷积方法能有效提高系统的轴向分辨率,同时有效抑制系统灵敏度随成像深度增大而下降的趋势. 关键词： 谱域光学相干层析 Lucy-Richardson解卷积 有效点扩散函数     

谱域光学相干层析系统中基于解卷积方法的像质优化

谱域光学相干层析（spectral domain optical coherence tomography, 简记为SD-OCT）系统的轴向点扩散函数（point spread function, 简记为PSF）并不具备空不变特性,无法直接应用于解卷积运算.为实现SD-OCT系统成像质量基于解卷积算法的优化,本文采用数值校正后的轴向扫描信号和轴向有效PSF来实施基于Lucy-Richardson算法的解卷积运算,进而实现了SD-OCT系统中图像质量尤其是轴向分辨率的改善.本文理论分析了SD-OCT系统中导致轴向有效PSF随成像深度增大而下降和图像模糊的因素,阐述了利用解卷积算法实现图像质量优化的过程,基于建立的SD-OCT系统实施了不同成像深度位置处PSF的标定,并利用离散轴向位置处PSF的峰值拟合了轴向有效PSF的调制函数.利用调制函数对所有轴向扫描信号进行数值校正,然后根据轴向有效PSF进行解卷积算法.典型样品的解卷积图像重建结果表明,提出的解卷积方法能有效提高系统的轴向分辨率,同时有效抑制系统灵敏度随成像深度增大而下降的趋势.     

用于大景深三维纳米分辨多分子追踪的衍射光学元件的设计制备和实验研究

发展能实时检测完整细胞内多个生物分子随时空变化的单分子探测和追踪技术, 对于研究生命过程的分子机理具有重要意义. 在变形光栅多阶成像和双螺旋点扩散函数成像方法的基础上, 基于波前编码的原理, 提出将二者优化结合, 获得全新的衍射光学元件, 该器件同时具有多重平面成像和双螺旋点扩散函数成像的功能, 旨在解决活细胞内单分子探测和追踪技术中的大景深探测难题. 设计和制备了该器件, 并基于该器件搭建了显微成像系统, 实验模拟证明该衍射光学元件同时可实现轴向12 μ的探测范围, 与理论设计结果相符合, 从而有效扩大了显微镜系统的景深, 证明了设计的可行性. 关键词： 多分子追踪 衍射光学元件 变形光栅 双螺旋点扩散函数     

Particle-swarm optimization of axially superresolving binary-phase diffractive optical elements

A particle-swarm optimization (PSO) algorithm was developed for designing binary-phase-only diffractive optical elements (DOEs) that superresolve the axially focused point-spread function. The method is based on vector diffraction theory to ensure solutions are valid under high-NA conditions. A DOE is identified that superresolves the focal spot by 34% and maintains the sidelobes below 50% of the peak intensity. The algorithm was used to obtain the Pareto front of the fitness-value space, which describes the achievable superresolution versus an allowed upper bound in sidelobe intensity. The results suggest that the algorithm yields solutions that are global in terms of the co-optimized fitness values G and M.     

投影光刻离轴照明用衍射光学元件的矢量分析

使用衍射光学元件(DOE)作为投影光刻照明系统实现离轴照明(OAI)的光束整形匀光器件,能够在保持较高照明效率的基础上精确控制OAI光束的形状及光强分布.在矢量角谱传输方法的基础上,建立了投影光刻用DOE的矢量分析模型,并对标量方法设计的DOE在偏振照明情况下的匀光与整形性能进行了分析.分析结果表明DOE在大角度衍射、...     

大口径衍射光学束匀滑器件的研制

 采用爬山－模拟退火混合优化算法,选取合适的权重因子,改善了衍射光学束匀滑器件的设计性能,其顶部不均匀性小于1%,能量利用率优于95%。采用旋转镂空掩模板,加工出Φ 180的束匀滑器件,并进行了实验研究,获得了较好的束匀滑光强包络。为获得真实的束匀滑分布、改善顶部均匀性、提高抗波前畸变宽容度,选取特定的焦面采样间隔进行了精细化设计。     

Mixed multi-region design of diffractive optical element for projection exposure system

The diffractive optical element (DOE) is widely used to generate various illumination modes in the projection lithography system. The working principle and design methods of the DOE are discussed in detail in this paper. A mixed multi-region design method is proposed to calculate the phase of DOE based on the poor spatial coherence of excimer laser, using the Gerchberg–Saxton (GS) algorithm. The DOEs generating circular, dipole and quadrupole illumination modes are designed and simulated by three different methods: single region design, repeated multi-region design and mixed multi-region design. The performance of these DOEs are compared and analyzed with these three design methods. The mixed multi-region design method is used to design the DOEs generating three illumination modes, the diffraction efficiencies are greater than 85%, and the non-uniformities of illumination are less than 3%. The analysis results indicate that the DOE designed by the mixed multi-region design can achieve higher diffraction efficiency and illumination uniformity of the far-field intensity distribution without modifying the GS algorithm.     

菲涅耳区衍射光学束匀滑器件的设计

 采用精细化设计方法，进行了菲涅耳区衍射光学束匀滑器件的设计，利用爬山-模拟退火混合优化算法，获得了真实的束匀滑分布，不仅控制了算法采样点上的光强分布，还控制了其他非采样点上的光强分布。优化得到的束匀滑器件的位相深度小于π，易于后续加工。     

焦斑形态精细化设计及其性能分析

 对实现焦斑形态控制的衍射光学器件进行了精细化设计,模拟计算结果表明,可同时满足洞口附近旁瓣光强峰值不超过主瓣平均光强的0.01%,且主瓣顶部不均匀性小于10%。选取不同的采样间隔对比说明了精细化设计相对于传统设计,能真实准确地获得焦斑形态的性能参数。最后,采用功率谱密度(PSD)方法初步分析了器件几何结构与焦斑性能,特别是旁瓣间的对应关系。     

折衍混合单透镜的色球差校正研究

分析研究了小视场折射混合单透镜的设计中，当衍射面同时用于消色差和球差时光焦度分配的最优方案，得到了改进的光焦度分配公式，通过设计实例表明，由该改进公式可得到了较好的初始结构，能够有效地克服了衍射光学透镜校球差时产生的较大的色球差，验证了此改进公式的正确性和有效性，此改进公式对折衍混合系统的设计具有指导意义。     

空间变化PSF非盲去卷积图像复原法综述

传统的图像复原一般认为点扩散函数(PSF)是空间不变的,实际光学系统由于受到像差等因素的影响,并非严格的线性空间不变系统,基于空间变化PSF的非盲去卷积图像复原法逐渐体现其优越性。空间变化PSF的非盲去卷积图像复原法先准确估计图像空间变化的PSF,再利用非盲去卷积算法对图像进行复原,有利于恢复出高质量图像。本文从算法的角度综述了近几年提出的基于空间变化PSF的非盲去卷积图像复原方法,并对比了基于强边缘预测估计PSF的非盲去卷积法、基于模糊噪声图像对PSF估计非盲去卷积法等算法的优缺点,各算法分别在PSF估计精确度、振铃效应抑制效果、适用范围等方面体现出各自的优劣。空间变化PSF的非盲去卷积图像复原法的研究,有利于推进图像复原技术向更高水平发展,使光学系统往轻小型化方向发展,从而在多个科学领域发挥其重要作用。     

采用分步迭代算法设计制作衍射光学元件

 结合均匀照明相位器件的设计实例，介绍最新提出的基于迭代框架的优化方法，并应用该方法设计制作了16台阶的衍射光学元件并对其进行了测试，验证了设计原理及方法的正确性，且对加工中可能出现的误差进行了分析和讨论。测试结果验证了采用多台阶相位结构的设计方案能有效提高工艺宽容度。     

A single diffractive optical element implementing spectrum-splitting and beam-concentration functions simultaneously with high diffraction efficiency

In this paper,a novel method is proposed and employed to design a single diffractive optical element(DOE) for implementing spectrum-splitting and beam-concentration(SSBC) functions simultaneously.We develop an optimization algorithm,through which the SSBC DOE can be optimized within an arbitrary thickness range according to the limitations of modern photolithography technology.Theoretical simulation results reveal that the designed SSBC DOE has a high optical focusing efficiency.It is expected that the designed SSBC DOE should have practical applications in high-efficiency solar cell systems.     

YG算法设计分数傅里叶变换衍射光学光束整形器件

针对分数傅里叶变换衍射光学光束整形器件,比较了按离散点与按菲涅耳积分计算得到的变换矩阵间的差距,从中分析得出按离散点计算的变换矩阵引入的离散化误差与分数傅里叶变换系统参数的关系.模拟计算结果表明,该离散化误差不能忽略.为了在输出面上得到真实的光强分布,应采用菲涅耳积分计算其变换矩阵.鉴于该变换矩阵非幺正,本文利用YG算法进行了光束整形器件的设计.     

The use of a consumer grade photo camera in optical-digital correlator for pattern recognition and input scene restoration

In this work an optical-digital correlator for pattern recognition and input scene restoration is described. Main features of the described correlator are portability and ability of multi-element input scenes processing. The correlator consists of a consumer grade digital photo camera with a diffractive optical element (DOE) inserted as a correlation filter. Correlation of an input scene with a reference image recorded on the DOE are provided optically and registered by the digital photo camera for further processing. Using obtained correlation signals and DOE’s point spread function (PSF), one can restore the image of the input scene from the image of correlation signals by digital deconvolution algorithms.The construction of the correlator based on the consumer grade digital photo camera is presented. The software procedure that is necessary for images linearization of correlation signals is described. Experimental results on optical correlation are compared with numerical simulation. The results of images restoration from conventionally and specially processed correlation signals are reported. Quantitative estimations of accuracy of correlation signals as well as restored images of the input scene are presented.     

Trade-off between diffraction efficiency and uniformity for design of binary diffractive laser beam shaper

The trade-off between diffraction efficiency and uniformity is studied when a binary phase-only diffractive optical element (DOE) is designed for transforming a Gaussian beam to an expanded squared uniform intensity distribution. The simulated annealing (SA) algorithm and Fresnel diffraction theory are applied in our design. Two types of cost functions are utilized in the SA algorithm, and the cases of different incident Gaussian diameters and bright-area sizes of the target patterns are studied. The mechanisms of reducing nonuniformity by the two cost functions are essentially different, and the mechanism combining nonuniformity and the intensity difference between the reconstructed and target patterns has better results. Satisfactory performance can be obtained under the trade-off between them.     

Optimization of 350× optical zoom lens with diffractive optical element

Through researching and validating, a set of optical designs using a diffractive optical element (DOE) and optimization process has been derived in this paper. We put forward a set of theories to solve the numerous quality issues in imaging and applied it to an optical design. For an optical design to be successful, it must comply with the standards of the optical system. Optical designers must also take into consideration imaging quality, wherein the most influential aspects are chromatic aberration and monochromatic aberration. We complied with systemic standards such as effective focal length and total system length. Diffractive Optical Element, based on the theory of wave phase difference, takes advantage of negative Abbe number, which might significantly eliminate chromatic aberrations of optics. Following the advanced technology applied to micro lens and etching process, precisely made micro DOE element now is possible to be manufactured in a large number. A 350× zoom lens with DOE is demonstrated in the proposal. The results show that regardless of whether chromatic aberration is axial or longitudinal, issues concerning the optical lens's chromatic aberration could be significantly reduced.     

一种用于均匀照明的衍射光学元件设计的快速模拟退火法

介绍了一种适用于均匀照明的衍射光学元件设计的自洽迭代和优化混合的快速模拟退火法,它引入Tsallis正则分布以及相应的效用函数思想,可以在接近1%的时间内得到和传统模拟退火法有着相同均方差(MSE)的理想模拟结果.     

光谱色散匀滑技术对衍射光学器件束匀滑性能的影响

 模拟分析了光谱色散匀滑技术对衍射光学器件束匀滑性能的影响。光谱色散匀滑技术的使用提高了衍射光学器件的抗波前畸变能力，降低了对加工精度的高要求。光谱色散匀滑技术与衍射光学器件的联用有望满足惯性约束聚变对束匀滑性能的高要求。     

Simultaneous multicolor image formation with a single diffractive optical element

A design for a novel diffractive optical element (DOE) that can reconstruct three different intensity patterns when it is illuminated by three different wavelengths is presented. If the chosen wavelengths are red, green, and blue, full-color reconstruction capability is obtained. Reconstruction is achieved in the near field (Fresnel domain). Computer simulation results as well as experimental evidence are presented, proving the capabilities of this novel DOE design procedure.