Fabrication of broadband antireflection coatings using broadband optical monitoring mixed with time monitoring

Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system(SWLOMS). In this paper, a broadband antireflection(AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering(IBS). Ta_2O_5 and Si O_2 were chosen as high and low refractive index coating materials,respectively. The optimized coating structure contains 9 non-quarter-wave(QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented.     

In situ sensitive optical monitoring with proper error compensation

We introduce a way to estimate the fluctuation of the refractive index during thin film deposition, through an optical monitor. The thicknesses and error-compensated thickness for each layer are analyzed. A novel monitoring method is thereby derived. The revised refractive index and the choice of highly sensitive monitoring wavelengths help us predict the termination points more accurately. The performance of a narrow-bandpass filter monitored by this method is demonstrated.     

Algorithms for optical control of reactive magnetron deposition of film coatings

Algorithms for optical control of a reactive gas flow rate are considered for processes of magnetron deposition of film coatings. The algorithms are based on registration of spectral elements (lines, bands) of a cathode material and reactive/inert gases in magnetron discharge plasma spectra. The influence of instabilities in the magnetron discharge power and vacuum chamber pressure on the composition of the deposited flow and gaseous medium was studied for titanium oxide and nitride deposition that were carried out using various algorithms for optical control of the reactive gas flow rate.     

Metamaterial coatings for broadband asymmetric mirrors

We report the design and fabrication of nanostructured metal-dielectric mirrors with high reflectance asymmetries in the visible spectral range. Applying dispersion engineering principles to model a broadband and large reflectance asymmetry, we obtain a dielectric function for this metamaterial, closely resembling the effective permittivity of disordered metal-dielectric nanocomposites. Coatings realized by using disordered nanocrystalline silver films on glass substrates confirm the theoretical predictions, exhibiting symmetric transmittance, accompanied by large broadband reflectance asymmetries.     

基于时间控厚离子束溅射技术的宽带减反膜制备

为了制备满足设计要求的宽角度、宽波段减反膜,利用离子束溅射沉积技术,在时间-功率控厚的模式下,对膜层沉积速率进行了精确修正。在实验中,利用时间-功率控厚的离子束溅射沉积技术,选择HfO2和SiO2作为高低折射率组合,在超抛ZF6玻璃基底上制备了宽角度、宽带减反膜,通过对实验后的透过率光谱曲线的数值反演计算,获得膜层厚度修正系数,初步得到了沉积速率随沉积时间变化的规律。利用修正后的沉积参数制备设计的膜系,在0°~30°入射角度下,600~1 200 nm波段的平均透过率达到99%以上。     

基于时间控厚离子束溅射技术的宽带减反膜制备

 为了制备满足设计要求的宽角度、宽波段减反膜,利用离子束溅射沉积技术,在时间-功率控厚的模式下,对膜层沉积速率进行了精确修正。在实验中,利用时间-功率控厚的离子束溅射沉积技术,选择HfO₂和SiO₂作为高低折射率组合,在超抛ZF6玻璃基底上制备了宽角度、宽带减反膜,通过对实验后的透过率光谱曲线的数值反演计算,获得膜层厚度修正系数,初步得到了沉积速率随沉积时间变化的规律。利用修正后的沉积参数制备设计的膜系,在0°~30°入射角度下,600~1 200 nm波段的平均透过率达到99%以上。     

Log-periodic optical antennas with broadband directivity

Optical antennas offer unique possibilities for light manipulation on a sub-wavelength scale. Here, we study log-periodic antennas that exhibit broadband directivity as a result of the self-similar relation between the lengths, separations and widths of the elements. We show through numerical simulations that the log-periodic designs have a considerable potential for improvement of both directivity and operation bandwidth over classical Yagi–Uda designs. Moreover, the directivity is more robust against changes in the location of the source or detector at different antenna elements. We systematically study the influence of geometrical parameters on angular performance and local field enhancement to arrive at optimum values. Next, we demonstrate that introducing a gap in the dipole array architecture can provide at least a ten-fold enhancement of the emitted power. Finally we present an optical zigzag antenna capable of both broader spectral response and even higher directivity.     

Doublet achromatic metalens for broadband optical retroreflector

A retroreflector that reflects light along its incident direction has found numerous applications in photonics, but the available metasurface schemes suffer from the issue of narrow bandwidth and/or a single angle of incidence. Here, a retroreflector using double layers of achromatic gradient metasurfaces is reported, which can realize retroreflection over a continuous range of incidence angles within a wide spectral band. The first metasurface serves as a transmissive achromatic lens that performs a broadband spatial Fourier transform and its inverse, while the second metasurface works as a reflective achromatic lens that undergoes wavelength-and position-dependent phase dispersions. Using this design strategy, a near-infrared retroreflector comprised of silicon nanopillars with the cross sections of square pillars and square holes is numerically demonstrated, providing a high-performance retroreflection for polarization-independent incident light waves over a continuous range of incidence angles from 0° to 16° within an extremely broad wavelength range between 1.35 and 1.95 μm. The scheme herein can offer a design strategy of broadband retroreflectors and impact numerous photonics applications.     

Efficient broadband simulations for thin optical structures

The thickness of the layers comprising optical structures is usually very thin. When modelling such thin features using a traditional numerical method, for instance the transmission-line modelling (TLM) method, a very small space step is often used to properly discretize the material geometry. This consequently results in large memory storage and longer run time. In this paper a new technique embedding thin structures between TLM nodes is investigated. The key features of this technique are the acquisition of the formulations in the frequency domain and the utilisation of digital filter theory and an inverse Z transform to change the formulations to the time domain. This technique has been successfully applied to calculate the reflection and transmission coefficients of optical structures incorporating thin layers, including antireflection coatings and fibre Bragg grating structures.     

Fast wavelength-parallel polarimeter for broadband optical networks

We describe a novel wavelength-parallel polarimeter operating in the light-wave band that measures the complete state of polarization of 256 wavelengths in parallel within 20 ms (software-limited), with the potential for submillisecond operation. By use of fast switching ferroelectric liquid crystals in conjunction with an InGaAs arrayed detector, selection and wavelength-parallel detection of individual polarization components can be achieved within approximately 150 microseconds. This instrument offers unprecedented sensing capability that is relevant to the compensation of polarization-related impairments in high-speed light-wave communications.     

基于拟合衰减差自补偿的分布式光纤温度传感器

针对斯托克斯光和反斯托克斯光的本质损耗、附加损耗使分布式光纤温度传感器产生测温误差的问题,通过对分布式光纤温度传感器的温度解调原理的研究,提出了拟合斯托克斯光与反斯托克斯光之间衰减差的方法实现温度自补偿,以此减小测温误差.以传感光纤上不同位置的两部分作为参考段和测温段,参考段的光信号作为测温段拟合多阶衰减差和解调温度的参量,通过引入多阶拟合结果解调温度,减小因斯托克斯光和反斯托克斯光的本质损耗、附加损耗导致的温度误差,实现温度的初步修正.改变光纤上同一位置的温度,取3组不同温度值及对应信号值计算引入拟合衰减差前后的瑞利噪声,分析了瑞利噪声与光纤长度和温度的关系,通过引入拟合衰减差消除瑞利噪声,减小了斯托克斯光和反斯托克斯光的本质损耗、附加损耗导致的瑞利噪声误差,实现温度的再次修正.分析比较多阶衰减差拟合结果对测温误差以及消除瑞利噪声的影响,获得最优拟合阶次.在拟合因参考段的附加损耗而导致的测温段的附加误差后,通过拟合结果进行温度补偿,完成了最终温度修正.实验结果表明,在30-90℃,引入一阶线性拟合结果的温度修正效果最好,经过三次修正后,测温误差从10.50℃降低至0.90℃.     

Wavelength-swept optical parametric oscillator for broadband mid-infrared spectroscopy

In this work we describe a wavelength-swept continuous-wave optical parametric oscillator (OPO) for the rapid acquisition of mid-infrared spectra spanning over hundreds of wavenumbers. Rapid tuning of a ytterbium-doped fibre pump laser resulted in the OPO idler tuning over 900 cm^?1 in 3.36 ms at a resolution of 4.5 cm^?1, within a total accessible range of 2.67 to 4.34 μm (2304–3752 cm^?1). Predictable tuning characteristics allowed simple online calibration of recorded spectra for absolute mid-infrared frequency. The system thus offers a viable approach to broadband spectral acquisition in applications requiring high-radiance illumination.     

A novel tunable optical oscillator for broadband signals

A tunable optical oscillator that generates signals at the micro- to millimeter-wave band for wireless communication applications is suggested. It uses directly modulated semiconductor lasers, in which sideband modes and four-wave mixing (FWM) conjugate modes are injection locked by the simple control of the applied modulation power. The signals at 15 GHz with phase noise of below ?95 dBc/Hz at an offset frequency of 100 kHz were experimentally obtained. The frequency of the generated signal is tunable, and the maximum achievable signal frequency is limited mainly by the bandwidth of the receiver.     

Air-clad optical fibre filament for generating broadband radiation

A simple broadband optical source is demonstrated by using a high numerical aperture air-clad optical fibre to collect broadband emission of blackbody radiation from the fibre during exposure to high intensity electric arcs.     

Use of langmuir probes for monitoring of precursor concentrations during plasma activated chemical vapor deposition of hard coatings

Langmuir-probe characteristics were measured during the deposition of hard zirconium nitride films in H₂ plasmas with tetrakis(diethylamido)-zirconium-Zr[N(C₂H₅)₂]₄- as a precursor. A combination of fast repeatable probe sweeps and hysteresis measurements indicated undisturbed characteristics for approximately 1 h. Since the electron concentration is highly dependent on the partial pressure of the precursor it is possible to use probes as sensors to monitor precursor concentration in a discharge.     

Direct monitoring of broadband light absorbers

The final performances of manufactured thin film filters usually depend on to the monitoring strategy. Some optical monitoring systems provide transmittance measurements while others measure the reflectance. With our system, we are able to simultaneously measure both transmittance and reflectance over an extended spectral range [400 nm; 1000 nm]. This reflectance channel is necessary for direct monitoring of some kinds of filters like light absorbers. Indeed, in this case, transmittance is cancelled after the first metallic layer deposition. The optical system is also very useful for in situ characterization especially for metallic absorbing materials.     

Two-photon absorption and broadband optical limiting with bis-donor stilbenes

Large two-photon absorptivities are reported for symmetrical bis-donor stilbene derivatives with dialkylamino or diphenylamino groups. These molecules exhibit strong optical limiting of nanosecond pulses over a broad spectral range in the visible. Relative to bis(di-n-butylamino)stilbene, bis(diphenylamino)stilbene exhibits a 90-nm red shift of its optical limiting band but only a minimal shift of ~13 nm of its lowest one-photon electronic absorption band. Mixtures of these compounds offer an unprecedented combination of broad optical limiting bandwidth and high linear transparency.     

Pulsed-laser deposition of particulate-free TiC coatings for tribological applications

Hybrid bearings comprising ceramic or ceramic-coated steel balls and steel raceways can provide good fatigue life and resistance to wear. One of the coating materials that has received serious consideration in hybrid systems is titanium carbide (TiC). At present, the commercially available process for the deposition of TiC involves the heating of steel substrates to fairly high temperatures (>900 °C). The high-temperature process involves considerable costs and complexities that are associated with the post-deposition heat treatment and repolishing of the coated steels for bearing applications. Pulsed-laser deposition (PLD) is ideally suited to deposit TiC coatings on bearing steels at room temperature. However, it is well known that codeposition of particulates has been one of the most challenging problems of PLD. This is especially of concern when dealing with hard coatings for tribological applications. Here we describe a novel and extremely simple method of depositing high-quality, particulate-free TiC coatings on bearing steel surfaces that uses PLD. The method relies on a new non-line-of-sight deposition that uses a permanent magnet and prevents particulates from arriving at the substrate. The surface roughness of TiC films deposited on steels by way of this technique has an extremely low root mean square value of 1.6 nm. The TiC films have been extensively characterized for their morphology, chemical composition, and mechanical properties with scanning electron and atomic force microscopy, X-ray diffraction, transmission electron microscopy, X-ray photoelectron spectroscopy, and nanoindentation. Time-resolved emission has been used for the in situ characterization of the laser-ablated TiC plume and has resulted in the identification of various plume species as a function of laser parameters. The spectroscopic results are correlated to film growth and to our modified PLD method.