Sputtering yields for light ions as a function of angle of incidence

The sputtering yield of Ni, Mo, and Au have been measured at oblique angles of incidence for H⁺-, D⁺-, and⁴He⁺-ion irradiation in the energy region from 1 to 8 keV. The yields were determined from the weight loss of the targets. For Ni and Mo the dependence of the sputtering yield on the angle of incidence was found to be much stronger for H⁺- and D⁺-ion than for⁴He⁺-ion irradiation. In all cases the maximum in the yield was found at angles of incidence ϑ≧80°, where ϑ is the angle measured from the surface normal. Furthermore the ratio of the maximum yield to the yeild at normal incidence increases with increasing surface binding energy of the target material as well as with increasing ion energy in the energy region inveestigated. The results are discussed qualitatively in view of a model for the sputtering mechanism for light ions.     

Low energy (⩽ 100 eV) sputtering of thin molybdenum nitride films

Molybdenum nitride films formed by 100 eV N⁺₂ bombardment to saturation of polycrystalline Mo have been sputtered to high fluence by normally incident 100 eV Ar⁺ and He⁺ and 15 eV Ne⁺ while the surface nitrogen concentration was monitored by Auger electron spectroscopy (AES). The penetration distance of nitrogen atoms during film formation and subsequent sputtering is assumed to be small enough that AES will detect, to some degree, all of the nitrogen in the film. The nitrogen AES signal decays exponentially to unsputterable levels for the 15 eV Ne⁺ and 100 eV He⁺ cases and decays bi-exponentially to near the bulk contamination level for the 100 eV Ar⁺ case. The results are interpreted according to existing concepts, but the kinetics of nitrogen loss is modeled using a two-layer adaptation of the standard model for adsorbate monolayer sputtering kinetics. Fitting our proposed model to the data yields apparent cross-sections which are interpreted as composites of cross-sections for experimentally indistinguishable elementary processes; these elementary cross-sections for each process are geometrical averages on the polycrystalline surface. Processes considered, in addition to nitrogen sputtering, include bombardment-induced transport of nitrogen within the film and sputtering of the Mo lattice itself.     

Sodium halide sputtering by H+, He+, Ar+ ions

Sputtering experiments were performed with 70 to 300 keV H⁺, He⁺ and Ar⁺ ions impinging on KC1, KBr and Kl. The alkali halide samples are prepared as polycrystalline layers of about 2500 Å thickness, deposited on carbon-aluminium backings. During the ion bombardment the targets are kept at elevated temperatures between 50 and 300°C, in order to study the temperature dependence of sputtering. During the irradiation the removal of halogen and sodium is simultaneously observed by Rutherford backscattering.

The present results are (i) preferential sputtering of the halogen atoms, (ii) temperature dependent sputtering yields with 0.2 eV activation energy, (iii) sputtering yields proportional to the electronic stopping power, rather than the nuclear stopping power, and (iv) sputtering yields orders of magnitude higher than estimated by elastic collision cascade theories. These findings can be interpreted by a Pooley process with subsequent migration of the interstitial halogen atom to the surface.     

Yields of H+ and He+ at the energy for elastic scattering from H2+3He+ incident on Ag and Pd

Yields, Y, of H⁺ and He⁺ emerging specularly with the energy for single binary elastic collisions have been measured from polycrystalline Ag and Pd surfaces bombarded with mixed monoenergetic (300 < E₀ < 2600 eV) beams of H₂⁺³He⁺ impinging at an angle of 45° from the surface normal. The surfaces were exposed to H₂⁺ at a dynamic pressure of 8 × 10^?3 Pa (6 × 10^?5 Torr) during the measurements. The He⁺ yields from Pd are slightly larger than from Ag, and the H⁺ yields from Pd are 10 to 40 times as large as those from Ag. These results suggest that differences between Pd and Ag in the amount of hydrogen adsorbed and in the character of the hydrogen-metal bond may be responsible for the yield differences through shadowing by, and possibly the sputtering of, adsorbed hydrogen. The Y versus E₀ curves for all four systems have qualitatively the same singly peaked shape which implies that reactive and noble gas ions undergo similar neutralization processes during elastic surface collisions. The ratios of the yields from Ag and Pd do not exhibit the theoretically expected exponential dependence on collision time over the entire range studied, but at the lowest energies the ratios lead to estimates of the difference of neutralization constants which do agree with theory. The potential utility of the large difference in proton yields from Ag and Pd for studying the Ag-Pd alloy system is noted.     

A new technique for the measurement of sputtering yields

We have measured the yields of 90 keV ⁴⁰Ar⁺ and V⁴He⁺ sputtering of Mo and V samples by the use of a new radio-tracer technique. This technique involves activating the samples by high-energy charged-particle irradiation before sputtering, and using conventional γ-ray counting methods to analyze the material subsequently sputtered onto collector foils. We have also measured angular distributions of the sputtered material, and compared these results and our total sputtering yields with the predictions of Sigmund's sputtering theory. Further comparisons between our radiotracer results and those obtained for ⁴⁰Ar⁺ sputtering of unactivated Mo and V samples, determined from elastic backscattering measurements using 12 MeV ¹⁶O ions, show that the techniques give consistent results.     

Preferential sputtering of TIC under keV Ar+ ion bombardment: Simultaneous sputtering-ISS measurement with He+ and Ar+ ions

The composition change of the outermost atom layer of TiC(110) under ion bombardment with 1.5–3 keV He⁺ and He⁺ + Ar⁺ ions has been measured by ion scattering spectroscopy with He⁺ ions at different sample temperatures. It has been found that the preferential sputtering of C atoms takes place for both the He⁺ and Ar⁺ ion bombardment, however the preferred sputtering is more pronounced for Ar⁺ ions than for He⁺ ions. The ion bombardment with He⁺ ions at elevated sample temperatures hardly results in any change in surface composition below ～800°C, while Ar⁺ ion bombardment results in C enrichment for elevated temperatures as reported so far.     

Effect of helium/argon gas ratio in a He-Ar-Cu<Superscript>+</Superscript> IR hollow-cathode discharge laser: modeling study and comparison with experiments

The He-Ar-Cu⁺ IR laser operates in a hollow-cathode discharge, typically in a mixture of helium with a few-% Ar. The population inversion of the Cu⁺ ion levels, responsible for laser action, is attributed to asymmetric charge transfer between He⁺ ions and sputtered Cu atoms. The Ar gas is added to promote sputtering of the Cu cathode. In this paper, a hybrid modeling network consisting of several different models for the various plasma species present in a He-Ar-Cu hollow-cathode discharge is applied to investigate the effect of Ar concentration in the gas mixture on the discharge behavior, and to find the optimum He/Ar gas ratio for laser operation. It is found that the densities of electrons, Ar⁺ ions, Ar_m ^* metastable atoms, sputtered Cu atoms and Cu⁺ ions increase upon the addition of more Ar gas, whereas the densities of He⁺ ions, He₂ ⁺ ions and He_m ^* metastable atoms drop considerably. The product of the calculated Cu atom and He⁺ ion densities, which determines the production rate of the upper laser levels, and hence probably also the laser output power, is found to reach a maximum around 1–5 % Ar addition. This calculation result is compared to experimental measurements, and reasonable agreement has been reached. Received: 14 October 2002 / Revised version: 28 November 2002 / Published online: 19 March 2003 RID="*" ID="*"Corresponding author. Fax: +32-3/820-23-76, E-mail: annemie.bogaerts@ua.ac.be     

Screening effects in secondary electron production by equal velocity H+, H+2, He+, He++ions

Electron spectra produced by equal velocity (0.75 MeV/amu) H⁺, H⁺₂, He⁺ and He ⁺⁺ ions are shown. Screening effects are observed for He⁺ ions but not for H⁺₂. He⁺⁺ cross sections scale like Z² = 4 when compared to H⁺ cross sections.     

Depth profiles of metal ions implanted in dielectrics at low energies

The depth profiles of Cu⁺, Ag⁺, and Au⁺ ions implanted into amorphous dielectric SiO₂, Al₂O₃, and soda-lime silicate glass (SLSG) are simulated by the DYNA program. The algorithm follows projectile-ion-substrate-atom pair collisions giving rise to a dynamic variation in the phase composition in the surface layer of the irradiated material and takes into account surface sputtering. Ion implantation up to doses of ≤10¹⁶ ion/cm² at low ion energies of 30, 60, and 100 keV is considered. The measured dynamic variation of the depth profiles of implanted ions as a function of the dose is compared with the standard statistical distribution calculated by the TRIM algorithm.     

Ion-enhanced gas-surface chemistry: The influence of the mass of the incident ion

There are many examples of situations in which a gas-surface reaction rate is increased when the surface is simultaneously subjected to energetic particle bombardment. There are several possible mechanisms which could be involved in this radiation-enhanced gas-surface chemistry. In this study, the reaction rate of silicon, as determined from the etch yield, is measured during irradiation of the Si surface with 1 keV He⁺, Ne⁺, and Ar⁺ ions while the surface is simultaneously subjected to fluxes of XeF₂ or Cl₂ molecules. Etch yields as high as 25 Si atoms/ion are observed for XeF₂ and Ar⁺ on Si. A discussion is presented of the extent to which these results clarify the mechanisms responsible for ion-enhanced gas-surface chemistry.     

kinetic energy reflection from polycrystals bombarded with Ar+, Kr+, and Xe+ ions

When the surface of a solid is bombarded with ions a fraction of the primary energy is reemitted by ion reflection and sputtering. The contribution of ion reflection or sputtering to energy reflection is determined by the mass ratio of the bombarding ions to the target atoms.^1,2 In the case of light ions the contribution of reflected ions is dominant. Results for He⁺ and Ne⁺ bombardment were described in a previous paper.³ The present paper deals with results for Ar⁺, Kr⁺, and Xe⁺ bombardment of the same targets as investigated before.³ The energies of the mass selected bombarding ions range from 9 to 16 keV. The measurements were carried out by means of the thermic detector described in a separate paper.⁴ For the given mass ratios most of the reemitted energy is related to sputtering.     

ISS measurement of surface composition of AuCu alloys by simultaneous ion bombardments with Ar+ and He + ions

Surface composition of Au-Cu(43 at%) alloy under 1.5–5 keV argon ion bombardment has been investigated by ion scattering spectroscopy (ISS). In this experiment, we adopted a specific technique to use mixed He⁺ and Ar⁺ ions as primary beam in order to perform sputtering (Ar⁺) and ISS measurement (He⁺) simultaneously. The outermost atom layer of Au-Cu alloys under Ar⁺ ion bombardment is Au-rich leading to the conclusion that Ar⁺ ion bombardment of AuCu alloys causes the preferential sputtering of Cu atoms, resulting in a Au-rich outermost atom layer and a depletion layer of Au atoms beneath the outermost atom layer due to ion-beam-enhanced surface segregation. This result explains the experimental results obtained by AES as well.     

Exit angle dependence of charge-state distribution of backscattered He ions

Exit angle and energy dependences of the charge-state distribution of backscattered He ions were investigated when 500 keV He⁺ ions were incident on SiO₂. The energy dependence of the He⁺ fraction was estimated by comparing the measured He⁺ spectra with the simulated spectra of He ions in all charge states at the exit angles of 5-25° with respect to the SiO₂ surface. We found that the He⁺ fraction is almost independent of the exit angle at energies higher than 250 keV and the observed energy dependence of the He⁺ fraction is in good agreement with that for the carbon-foil-transmission experiment. In the low energy region (<250 keV), however, the He⁺ fraction decreases as the exit angle decreases.     

Effect of the bombarding-ion mass in alloy sputtering

It is shown experimentally that a change in the mass of bombarding ions from ⁴⁰Ar⁺ to ⁴He⁺ has a strong effect on the spatial distributions of the components sputtered from the alloy NiMoRe. A mechanism of sputtering by backscattered ions is proposed to describe the observed preferential ejection of the light component in the direction normal to the surface of the sample under bombardment by ⁴He⁺ ions. Pis’ma Zh. éksp. Teor. Fiz. 63, No. 7, 507–510 (10 April 1996)     

Sputtering and secondary ion emission of a two-phase system composed of small oxide precipitates dispersed in a copper matrix

This paper deals with the ion emission of a two-phase system composed of a copper single crystal matrix in which small precipitates of Al₂O₃ or BeO oxide of a few hundreds Å in diameter (from 60 to 470 Å) are included. It is observed that ions originate from three regions of the sample: region I. copper matrix: Cu⁺, Cu⁺₂, Cu⁺₃,…; region II. precipitates: Al⁺, Al⁺₂, AlO⁺ Al₂O⁺, …; respectively Be⁺, Be⁺₂, BeO⁺ Be₂O⁺,…; region III, matrix-precipitate interface: Cu⁺, CuAl⁺ or CuBe⁺,…. The presence of CuAl⁺ or CuBe⁺ ions and the enhancement of Cu⁺ emission at the periphery of precipitates in region III, makes the principle of the linear superposition of mass spectra of the two phases invalid. The interpretation of the results is based upon a simple model of sputtering which involves a coupling between the sputtering of precipitates and matrix. This model shows that, under steady state conditions, the surface density of precipitates is roughly proportional to the ratio S/S_p of the sputtering yields of the matrix and precipitates. We have taken advantage of the dependence of S on the crystal orientation of the sample with respect to the bombarding direction, to change the surface density of precipitates. Any change in S is followed by a time evolution of ion intensities originating from regions H and III. The average time of evolution allows one to characterize the size of precipitates. The sputtering process of a two-phase system (formation of cones) is discussed together with the ionization process.     

Electronic absorption spectrum of CO+ in an ion beam

The He+He⁺¹ interactions have been studied, as a function of the internuclear separation R, in terms of the electronic forces acting on the nuclei and the change in the charge distribution. The analysis reveals that at large R the atomic densities are polarized inwards, causing an attractive force on each nucleus, while at small R the difference in the nature of the interactions in the ²Σ_u and ²Σ_g systems is noted. It is seen that the He+He⁺¹ (²Σ_u) interaction is less attractive than the He⁺¹+He⁺¹ interaction at lower values of R.     

Spectres auger et sections efficaces d'ionisation de la couche L23 du magnésium et de l'aluminium sous impact de protons et d'ions lourds (10–100 keV)

A comparison of Auger structures observed on the energy distributions of secondary electrons emitted from Mg and A1 solid targets bombarded by either light particles (H⁺ and He⁺) or heavy ions (Ne⁺, Ar⁺, …) is presented. With incident protons, it essentially appears a broad peak corresponding to a L₂₃VV transition and a weak shoulder due to the surface and bulk plasmon excitation. The Auger structures obtained with heavy ions are richer and the peaks which compose it are sharper. Such atomic-like structures correspond to Auger transitions from excited (with one or two L₂₃ holes) moving recoiling atoms. The experimental L₂₃ Mg and A1 ionization cross sections were determined from Auger spectra. In H⁺?Mg (or A1) collisions our results are in good agreement with the theoretical values calculated in a PWBA model. In the case of heavy ion-target interactions, we compared the experimental measurements with ionization cross section calculations obtained in a Landau-Zener model.     

Singlet-triplet excitation ratios in Ne III, Ar III and N II under ion impact

Peculiar properties of ion-atom collision systems, in particular deviations from statistical populations of singlet and triplet levels, can be studied by optical spectroscopy. We have extended earlier studies by VUV spectroscopy of a number of collision systems at various collision energies in the 0.01-MeV/nucleon to 1-MeV/nucleon range, involving H₂ ⁺, H⁺, He⁺, He²⁺, Ne⁺, Ar⁺, and N₂ ⁺ as projectiles and Ne, Ar, and N₂ as target gases. Statistically significant deviations of the relative intensities of singlet and triplet lines from simple ratios are observed in the displaced terms of the valence shell of Ne III, corroborating and extending earlier work. For Ar III, the energy dependences of singlet-to-triplet excitation ratios are very different for different projectiles. For N II, in contrast, all observed line ratios are practically independent of the projectile energy. Received 17 November 2000 and Received in final form 31 January 2001     

Radiative capture of deuterons in154Sm and238U

Angular — and velocity — distributions of electrons emitted near zero degree from projectile ions (H⁺, H ₂ ⁺ , H ₃ ⁺ , He⁺, He⁺⁺ at 1.7 MeV/u) traversing solid carbon foils (2 to 20) μg/cm²) have been measured. The data give clear evidence of production mechanisms which go beyond those reported elsewhere.     

等离子体增强化学气相沉积法制备立方氮化硼薄膜过程中的表面生长机理

利用感应耦合等离子体增强化学气相沉积法以Ar，He，N₂和B₂H₆为反应气体制备了高纯立方氮化硼薄膜.用四极质谱仪对等离子体状况进行了系统的分析，发现B₂H₆完全被电离而N₂只是部分被电离.H₂和过量的N₂在等离子体中生成大量中性的H原子和活化的N^*₂，它们与表面的相互作用严重地阻碍了立方 关键词： 立方氮化硼薄膜 等离子体 质谱