静电悬浮系统的数字控制与实验研究

介绍了一种基于DSP的数字控制器的总体结构及控制器算法的设计。在此基础上构建了三轴静电悬浮系统，并通过仿真和实验讨论了不同采样频率对系统性能的影响。实验结果表明，系统带宽达到750Hz，谐振峰小于3dB，刚度等各项性能均满足静电悬浮系统的指标要求。     

静电伺服微加速度计的量程设计

详细推导了静电伺服加速度计在定极板上施加直流偏压、交流驱动电压，动极板上有反馈直流电压和交流检测电压的情况下，检测质量(动极板)受到的静电力。通过对静电力的分析，得出静电伺服彻。速度计的量程除了受系统能提供的最大静电力限制外，还需满足电刚度小于与机械刚度的条件，该电刚度是极板上所有的直流电压、交流电压产生的电刚度之和。离心实验证明，利用该原则设计的“叉指”结构静电伺服微加速度计的量程达到了设计值。该设计原则可以为此类加速度计的设计提供参考。     

多自由度静电悬浮系统几何对称性迭代调节方法

静电悬浮系统在重力卫星和天基减振领域有重要的应用,当悬浮质量块或悬浮平台被调节至系统电极笼的对称中心时能使悬浮系统的线性度达到最优,进而获得优良的传感或控制特性。首先,建立了多自由度静电悬浮系统模型,介绍了单自由度静电悬浮系统的对称性调节方法,并分析了将其应用于多自由度静电悬浮系统时由于力耦合造成的失准问题。然后,提出一种基于迭代调节的多自由度静电悬浮系统几何对称性逼近方法,通过迭代逼近克服了多自由度耦合所引起的误差,并给出了迭代调节方法的收敛性分析。最后,基于Matlab建立了多自由度静电悬浮系统仿真模型,对调节方法进行了仿真验证,并采用实际静电悬浮系统进行了实验验证。仿真与实验结果均表明,所提方法可以在有限步迭代下将悬浮体调节至电极笼的中心位置,误差小于标称间隙的0.1%。     

静电悬浮转子微陀螺及其关键技术

静电悬浮转子微陀螺具有比振动式微陀螺精度高的潜在优点，并可同时测量二轴角速度和三轴线加速度。介绍了静电悬浮转子微陀螺的研究现状。对该静电悬浮转子微F1螺／加速度计的工作原理、特点进行了分析，并对实现高精度静电悬浮转子微陀螺／加速度计晌关键技术如静电稳定悬浮、微位移检测控制、静电恒速旋转驱动、微机械加工和真空封装技术等进行了探讨。指出这一新颖MEMS陀螺是高精度多轴集成微惯性传感器技术发展的一个重要方向，具有广阔的应用前号和较大的发展潜力。     

六轴硅微静电加速度计的悬浮回路设计

传统的静电加速度计在空间微弱加速度测量方面可以获得极高的分辨率。提出了一种采用静电悬浮、可实现六轴加速度测量的微静电加速度计。敏感组合件采用玻璃-硅-玻璃三层键合结构、体硅加工工艺;检测质量采用"回"字形结构,以提高加速度计的径向量程和刚度。利用有限元软件分析了大气环境下检验质量的气模阻尼特性,对六自由度静电悬浮回路进行了建模与分析,提出了实现六轴加速度检测的控制方案。给出了静电悬浮回路的仿真结果,评估了六轴加速度计的性能。     

静电悬浮式惯性仪表中的微位移检测技术

静电陀螺仪、空间静电加速度计等基于静电悬浮的惯性仪表在高精度的惯性导航和空间微重力测量领域得到广泛应用。近年来，对基于MEMS工艺的悬浮式微惯性传感器的研究引起了广泛的重视。介绍了静电悬浮式惯性仪表中采用的差动电容式微位移检测电路的原理，分别对静电陀螺、静电加速度计和MEMS微陀螺、微加速度计的电极配置方案和位移检测的接口电路进行了分析，并对不同的位移检测方案进行了比较.     

在ESS中嵌入滤波器实现转子电场恒速的系统设计方法

对于空心大球转子静电陀螺仪,转速接近静电支承系统(ESS)的剪切频率,一般采用磁场恒速控制方法,因而介绍了一种电场恒速控制方法,通过在支承电路中加入滤波器,来提高支承系统的力矩系数,从而利用支承系统构成了恒速控制系统。实验结果表明,系统的稳定性满足要求,恒速精度优于0.1Hz。     

静电加速度计悬浮质量块质心偏移量在轨标定

高精度静电加速度计已广泛地应用于航天任务中,用于测量作用于航天器的非引力加速度。如果静电加速度计悬浮质量块的质心与航天器的质心安装有偏差时,重力梯度力、姿态耦合产生的干扰加速度,静电加速度计控制系统引入的干扰加速度等干扰力会夹杂在测量数据中。针对这一问题,研究了航天器小质量特性变化情况下,当静电加速度计处于动态设计良好并进入稳态后,利用静电加速度计、陀螺仪和磁强计作为敏感元件,基于非线性卡尔曼滤波理论的静电加速度计悬浮质量块质心偏移量的在轨标定。仿真结果表明,该方案的精度J向可以达到0．1mm,Y和Z向能达到0．04mm。     

参数激励下静电驱动MEMS共振传感器的非线性动力特性研究

静电驱动微机电系统(MEMS)共振传感器因其结构简单、应用广泛等优点引起了研究人员广泛的关注,共振传感器件耦合系统在非线性静电力、压膜阻尼、参数激励下呈现出较复杂的非线性振动、不稳定性、分岔与混沌行为.提出参数激励作用下静电驱动微机电系统中梁式微结构共振传感器的动力学模型,采用多尺度方法对微系统的动力学方程进行摄动分析,探讨直流偏置电压、压膜阻尼和交流激励电压幅值对系统频率响应、共振频率的影响规律,结果表明:直流偏置电压和交流电压幅值都具有软化效应,且使共振频率漂移到较小的数值范围,压膜阻尼对共振频率的影响较小,但是增大压膜阻尼会使稳态振幅的峰值明显下降,为静电驱动微机电系统共振传感器的动力学分析与设计提供参考.     

模糊控制在静电悬浮转子微陀螺起支中的应用

给出了一种基于UV-LIGA技术的静电悬浮转子微陀螺,提出了控制系统组成方案,为了实现转子的起支控制和稳定悬浮,模糊控制被应用于该系统中,首先,对轴向压膜阻尼和滑膜阻尼进行有限元分析,并用解析法进行分析,计算结果表明两种方法的一致性,从而得到阻尼的解析表达式。然后,建立了带偏置电压的双边支承下的数学模型,并对数学模型进行模糊控制仿真研究,仿真结果表明,相对于PID控制,模糊控制具有较强的鲁棒性,具有响应速度快,自适应能力强的优点。最后,设计了悬浮控制系统,给出了硬件和软件组成。     

一种高精度无刷直流陀螺电机锁相稳速系统

设计了一种两相无位置传感器无刷直流陀螺电机锁相稳速系统，单片机与可编程逻辑器的结合使系统以简单的电路实现了各种数字信号的处理。锁定时，电机反电势频率脉冲跟踪基准脉冲，电机稳速运行。试验表明：该系统稳速精度高，实用性强，可靠性高。     

三浮陀螺有源磁悬浮系统力学模型分析

有源磁悬浮系统在高过载条件下的工作状态,是影响三浮陀螺和平台系统使用精度的关键因素。针对此问题,分析磁悬浮系统加力的作用机理,对系统的力学模型进行研究。从刚体动力学基本方程出发,以三浮陀螺浮子组件为研究对象,建立了浮子5个受控自由度的动力学关系和浮子运动的状态方程。然后对瞬时冲击力、阶跃常值力和简谐变化力作用下浮子运动规律的进行了分析和计算。仿真结果表明,当三种过载同时作用在浮子上时,磁悬浮系统在闭环状态下浮子位移的稳态值为2.12?m,即浮子最终停在线性区的边缘,不会碰到轴尖,因此不会影响仪表的精度和可靠性。但由于加力的刚度比较小,系统的过渡时间比较长。     

提高反馈式速率陀螺系统可靠性的技术研究

通过对某反馈式速率陀螺仪进行支承方式,输电装置及力矩器和电机的技术改进,提高了产品可靠性、仪表零位电压的稳定性、产品合格率、仪表比例系数的一致性等性能,伺服回路放大器由集成电路改成通用化分立电路,提高了速率陀螺系统工作的可靠性,通过增加DC/DC电路提高了系统的电磁兼容能力,通过设计微型减振器,提高了电子箱总体结构的抗振性能,以上的改进措施有效地提高了反馈式速率陀螺系统工作的可靠性,取得了良好的社会效益和经济效益。     

Electro-spray of high viscous liquids for producing mono-sized spherical alginate beads

Alginate beads, often used for controlled release of enzymes and drugs, are usually produced by spraying sodium alginate liquid into a gelling agent using mechanical vibration nozzle or air jet. In this work an alternative method of electro-spray was employed to form droplets with desired size from a highly viscous sodium alginate solution using constant DC voltage. The droplets were then cured in a calcium chloride solution. The main objective was to produce mono-sized beads from such a highly viscous and non-Newtonian liquid (1000-5000 mPa s). The effects of nozzle diameter, flow rate and concentration of liquid on the size of the beads were investigated. Among the parameters studied, voltage had a pronounced effect on the size of beads as compared to flow rate zzle diameter and concentration of alginate liquid. The size of beads was reduced to a minimum value with increasing the voltage in the range of 0-10 kV. At the early stages of voltage increase (I.e. Up to about 4 kV), the rate of size reduction was relatively low, while the dripping mode dominated. However, in the middle part of the range of applied voltage, where the rate of size reduction was high (I.e. About 4-7 kV), an unstable transition occurred between dripping and jetting. At the end part of the range (I.e. 7-10 kV) jet mode of spray was observed. Increasing the height of fall of the droplets was found to improve the sphericity of the beads, because of the increased time of flight for the droplets. This was especially identifiable at higher concentrations of the alginate liquid (I.e. 3 w/v%)     

Application of piezoelectric actuation to regularize the chaotic response of an electrostatically actuated micro-beam

The impetus of this study is to investigate the nonlinear chaotic dynamics of a clamped–clamped micro-beam exposed to simultaneous electrostatic and piezoelectric actuation. The micro-beam is sandwiched with piezoelectric layers throughout its length. The combined DC and AC electrostatic actuation is imposed on the micro-beam through two upper and lower electrodes. The piezoelectric layers are actuated via a DC electric voltage applied in the direction of the height of the piezoelectric layers, which produces an axial force proportional to the applied DC voltage. The governing differential equation of the motion is derived using Hamiltonian principle and discretized to a nonlinear Duffing type ODE using Galerkin method. The governing ODE is numerically integrated to get the response of the system in terms of the governing parameters. The results show that the response of the system is greatly affected by the amounts of DC and AC electrostatic voltages applied to the upper and lower electrodes. The results show that the response of the system can be highly nonlinear and in some regions chaotic. Evaluating the K–S entropy of the system, based on several initial conditions given to the system, the chaotic response is distinguished from the periodic or quasiperiodic ones. The main objective is to passively control the chaotic response by applying an appropriate DC voltage to the piezoelectric layers.     

激光陀螺数字直流稳频系统设计

从激光陀螺稳频原理出发，分析了交流稳频和直流稳频的异同。设计实现了激光陀螺数字直流稳频系统，分析了控制系统的稳定性和误差并做了数字算法实现。最后试验验证了该系统的稳频性能，得到了优于交流稳频的效果。     

使用变象管相机研究高压长间隙放电现象

利用变象管相机研究了高电压长间隙放电现象,特别是(?)晕和先导放电随有关参数的变化情况。本文介绍有关测试技术。例如,适应放电特点而采用的全视场扫描技术;为防止强放电干扰而采取的抗干扰及保护措施;以及球隙放电光电转换同步技术等等。     

转台速率系统的相差／电压转换问题

本文介绍由相差／电压转换原理构成的一种高精度速率系统的原理及硬件电路的实现，并对各环节的关键技术进行了详细阐述。经实际调整证明，本方案容易实现，可靠性高，克服了增量编码器速率系统中使用锁相回路的若干缺点。     

Fault Detection of DC Electric Motors Using the Bispectral Analysis

The two major advantages of bispectral analysis are: resistance to noise and the ability to detect nonlinearities, like quadratic phase coupling. The first aim was to study some of the theoretical aspects of bispectral estimation. A lot of attention was paid to the influence of noise, the number of segments, the influence of one or several harmonic deterministic components and aliasing. These aspects are typical of rotating machinery. An example of successful fault identification in DC electric motors is presented. The identification proved to be capable to identify quadratically coupled mechanical system when the power-spectra analysis failed. Further it proved to be quite resistant to noise.     

The effect of time-delayed feedback controller on an electrically actuated resonator

This paper presents a study of the effect of a time-delayed feedback controller on the dynamics of a Microelectromechanical systems (MEMS) capacitor actuated as a resonator by DC and AC voltage loads. A linearization analysis is conducted to determine the stability chart of the linearized system equations as a function of the time delay period and the controller gain. Then the method of multiple-scales is applied to determine the response and stability of the system for small vibration amplitude and voltage loads. It is shown that negative time-delay feedback control gain can lead to unstable responses, even if AC voltage is relatively small compared to the DC voltage. On the other hand, positive time delay can considerably strengthen the system stability even in fractal domains. We also show how the controller can be used to control damping in MEMS, increasing or decreasing, by tuning the gain amplitude and delay period. Agreements among the results of a shooting technique, long-time integration, basin of attraction analysis with the perturbation method are achieved.