Effect of E × B electron drift and plasma discharge in dc magnetron sputtering plasma

Study of electron drift velocity caused by Etimes B motion is done with the help of a Mach probe in a dc cylindrical magnetron sputtering system at different plasma discharge parameters like discharge voltage, gas pressure and applied magnetic field strength. The interplay of the electron drift with the different discharge parameters has been investigated. Strong radial variation of the electron drift velocity is observed and is found to be maximum near the cathode and it decreases slowly with the increase of radial distance from the cathode. The sheath electric field, E measured experimentally from potential profile curve using an emissive probe is contributed to the observed radial variation of the electron drift velocity. The measured values of the drift velocities are also compared with the values from the conventional theory using the experimental values of electric and magnetic fields. This study of the drift velocity variation is helpful in providing a useful insight for determining the discharge conditions and parameters for sputter deposition of thin film.     

Non-linear Doppler shift of the plasmon resonance in a grating-coupled drifting 2DEG

We report experimental measurements and computer calculations of the plasmon resonances of two dimensional electron gases in the far-infrared which show the effects of laterally drifting the 2DEG. Coupling to radiation is achieved using an overlaid metal grating of submicron period, and its periodic screening effect splits the plasmon into upper and lower energy modes. For a symmetric grating profile the higher energy mode is non-radiative for a stationary 2DEG and a splitting is not observable, but when the 2DEG is laterally drifted under the grating, coupling to both modes can occur, and their Doppler shifts produce an observable splitting which increases with drift velocity. These Doppler shifts are not linear with drift velocity for low velocities, but approach asymptotically the expected linear shift with increasing drift velocity. Experimental results on 2DEGs at GaAs/AlGaAs heterojunctions compare well with theoretical calculations.     

利用介质阻挡探针法测量大气压氦等离子体射流电子密度

分别利用电子的漂移速度和等离子体的传播速度计算了大气压下氦等离子体射流的电子密度。     

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The electron densities in the atmospheric pressure helium plasma were calculated by means of electron drift velocity and the jet velocity respectively. The electron velocity and jet velocity can be calculated by means of helium plasma jet current measured by a dielectric probe and plasma discharge current signal measured by voltage probes. The results show that the estimated electron densities of the helium plasma jet calculated from electron drift velocity and the jet velocity are in the order of 10 ¹¹ cm ^-3 and they increase with applied voltage. There is a little fluctuation in the value of the electron density along the jet axis of the plasma. This result is the same as the measured electron density in atmospheric pressure helium non-thermal plasma jet by using a Rogowski coil and a Langmuir probe. This is in one order lower than the electron density measured by microwave antenna.     

On the electron energy distribution in the gas discharge positive column: Langmuir paradox

The results of calculations of electron drift characteristics in a dc spatially inhomogeneous periodic electric field are presented. It is shown that the effect of field inhomogeneities on the drift velocity and the average electron energy is insignificant under typical conditions of experiments with gas-discharge plasma at low gas pressures. However, the intensity of the processes of excitation, ionization, and plasma spatial distribution are strongly affected by the inhomogeneity (variance) and field variation behavior. It is shown that the electric field inhomogeneity in the gas discharge positive column leads to maxwellization of the electron energy distribution function.     

Fowler-Nordheim electron tunneling under very intense electric field

In the context of the Fowler-Nordheim tunneling under an electric field of very high strength, electron velocity and drift mobility are calculated as functions of the above strength. In addition, carrier relaxation time is determined.     

Collisionless Drift Waves Ranging from Current‐Driven,Shear‐Modified,and Electron‐Temperature‐Gradient Modes

The specific history of collisionless drift waves is marked by focusing upon current‐driven, shear‐modified, and electron‐temperature‐gradient modes. Studies of current‐driven collisionless drift waves started in 1977 using the Innsbruck Q machine and was continued over 30 years until 2009 with topics such as plasma heating by drift waves in fusion‐oriented confinement and space/astrophysical plasmas. Superposition of perpendicular flow velocity shear on parallel shear intensively modifies the drift wave characteristics through the variation of its azimuthal structure, where the parallel‐shear driven instability is suppressed for strong perpendicular shears, while hybrid‐ion velocity shear cause unexpected stabilization of the parallel‐shear‐modified drift wave. An electron temperature gradient can be formed easily by control of thermionic electron superimposed on ECR plasma, and is found to excite low‐frequency fluctuation in the range of drift waves (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Effect of small admixtures of N<Subscript>2</Subscript>, H<Subscript>2</Subscript> or O<Subscript>2</Subscript> on the electron drift velocity in argon: experimental measurements and calculations

The electron drift velocity in argon with admixtures of up to 2% of nitrogen, hydrogen or oxygen is measured in a pulsed Townsend system for reduced electric fields ranging from 0.1 Td to 2.5 Td. The results are compared with those obtained by Monte Carlo simulations and from the solution of the electron Boltzmann equation using two different solution techniques: a multiterm method based on Legendre polynomial expansion of the angular dependence of the velocity distribution function and the S _n method applied to a density gradient expansion representation of the distribution function. An almost perfect agreement between the results of the three numerical methods and, in general, very good agreement between the experimental and the calculated results is obtained. Measurements in Ar-O₂ mixtures were limited by electron attachment to oxygen molecules, which contributes to the measured drift velocity. As a result of this attachment contribution, the bulk drift velocity becomes larger than the flux drift velocity if attachment is more probable for electrons with energy below the mean value and smaller in the opposite case. Attachment also contributes to the negative differential conductivity observed in Ar-O₂ mixtures.     

High field transport properties in a GaN/AlGaN heterostructure

The drift velocity, electron temperature, electron energy and momentum loss rates of a two-dimensional electron gas are calculated in a GaN/AlGaN heterojunction (HJ) at high electric fields employing the energy and momentum balance technique, assuming the drifted Fermi–Dirac (F–D) distribution function for electrons. Besides the conventional scattering mechanisms, roughness induced new scattering mechanisms such as misfit piezoelectric and misfit deformation potential scatterings are considered in momentum relaxation. Energy loss rates due to acoustic phonons and polar optical phonon scattering with hot phonon effect are considered. The calculated drift velocity, electron temperature and energy loss rate are compared with the experimental data and a good agreement is obtained. The hot phonon effect is found to reduce the drift velocity, energy and momentum loss rates, whereas it enhances the electron temperature. Also the effect of using drifted F–D distribution, due to high carrier density in GaN/AlGaN HJs, contrary to the drifted Maxwellian distribution function used in the earlier calculations, is brought out.     

Contraction of the space of electron drift in low-frequency bunchers

In the paper we theoretically investigate the mechanism by which the space of drift electrons is contracted in klystron-type bunchers which modulate the electron beam in ion accelerators, in particular to excite an rf field. The contraction of the drift length is effected through a decrease in the mean beam velocity in the field of an electrostatic lens or a metal tube and is based on the fact that the relative motion of velocity-modulated electrons are independent of the mean velocity of the electron beam in a weak modulation regime.     

Conduction-electron drift velocity measurement via electron spin resonance

In analogy with NMR, motion induced phase shift of pulsed ESR signals enables in principle the direct detection of electron drift velocity or electronic current, respectively. Overcoming the difficulties with additional magnetic field gradients induced by the current itself, we succeeded in demonstrating the detection of electron flow via ESR. Measuring the electron drift velocity in the organic conductor (fluoranthene)2PF6 the microscopic Ohmic law could be observed in a current range of more than +/-0.25 A.     

Filamentation Instability in a Current‐Carrying Plasma in the Presence of Quantum Effects

The filamentation instability of a current‐carrying plasma under the diffusion condition is investigated taking into account the Bohm potential and the Fermi electron pressure. Using quantum hydrodynamic equations, the dispersion relation and growth rate of the instability is obtained. It is found that the filamentation instability, in the presence of quantum effects, depends on various characteristic parameters such as: electron Fermi velocity, plasma number density, ion thermal velocity and electron drift velocity. Moreover, the wavelength region in which the instability occurs is more restricted and the minimum size of filaments is larger, in comparison with the classical case. It is also found that the growth rate of the instability is smaller in the presence of quantum effects. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Analytical model of electron transport characteristics for 4H-SiC material and devices

Based on 4H-SiC material parameters, three different analytical expressions are used to characterize the electron mobility as the function of electric field. The first model is based on simple saturation of the steady-state drift velocity with electric field (conventional three-parameter model for silicon). The second GaAs-based mobility model partially reflects the peak velocity in high electric fields. The third multi-parameter model proposed in this paper is more realistic since it well reproduces the drift velocity－field characteristics obtained by Monte Carlo calculations, revealing the peak drift velocity with subsequent saturation at higher electric fields. Thus, the drift velocity model presented in this paper is much better for device simulation. In this paper, the influence of mobility model on DC characteristics of 4H-SiC MESFET is calculated and the better accordance with the experimental results is presented with multi-parameter model.     

Long-distance drifting of ionization electrons in liquid and solid argon

Summary A study of ionization electron drifting long distances in liquid and solid argon was carried out with a 10 cm gridded ionization chamber, operated with electric fields between 10 V/cm and 2 kV/cm. A detailed analysis of the ionization pulse shape was performed with a FADC readout, yielding information on both the degree of purity of the liquid and the electron drift velocity. Argon with an impurity concentration less than 0.2 p.p.b. oxygen equivalent was obtained with a very simple purification system. With this level of purity electrons remained free for periods of time in excess of one millisecond. The measured attenuation length extrapolates to 7.5 m for liquid argon and to 1 m for solid argon at a drift field of 1 kV/cm. This work was supported by the U.S. Department of Energy under contract number DE-AC02-76ER03064.     

Parameters of pulse generators based on 4H : SiC sharp-recovery drift diodes: The influence of electron drift velocity saturation

The generation of high-voltage electrical pulses by generators based on 4H : SiC sharp-recovery drift diode is demonstrated. It is shown that the electron drift velocity saturation influences the shape of output pulses.     

Light-induced drift of ions in a magnetic field

The effect of a magnetic field on the ion drift in a weakly ionized gas under the combined action of the light-induced drift and light pressure is studied theoretically. It is shown that, under the action of light, a component of ion drift velocity transverse to the direction of propagation of radiation may appear in a weakly ionized gas upon the application of an external magnetic field. It is shown that the Lorentz force acting on ions in the magnetic field radically changes the dependence of the ion drift velocity on the radiation frequency detuning. It is predicted that the ion drift velocity component along the direction of radiation must reverse its sign upon an increase in the magnetic field and an anomalous light-induced drift may be observed.     

Precession of an electron-magnetohydrodynamic field-reversed configuration

A field-reversed configuration is generated in a large laboratory plasma in the parameter regime of electron magnetohydrodynamics. During its free relaxation, the magnetic moment is observed to precess when tilted from its original axis. The precession velocity is the electron drift velocity in the toroidal current layer. The precession is a manifestation of frozen-in field lines in a moving electron fluid.     

ELECTRON DIFFUSION IN A NON-UNIFORM ELECTRIC FIELD AND A UNIFORM MAGNETIC FIELD

A Monte Carlo simulation technique has been used to model the electron transport beharlot, especially the electron diffusion motion, in the cathode fall region of a glow discharge under the influence of a non-uniform electric field and a transverse magnetic field perpen-dicular to the cathode sheath electric field. Three types of collisions (elastic, excitation and ionization) are taken into account in our model. The electron free flying time is determined by the electron-neutral atom collision frequency. We focus attention on the electron diffusion distance and velocity. The electron-neutral atom collision processes and the electron drift velocity are also studied. The results indicate that with the increase of the magnetic field the electron diffusion distance increases and the electron diffusion velocity decreases. The results Mso show that the collision processes are enhanced by the magnetic field, this is in agreement with the experimental result. However, the axial magnetic field does not affect the electron transport behavior.     

强流脉冲电子束二极管等离子体漂移速度的研究

 强流相对论电子束二极管阴阳极等离子体的形成和漂移,是二极管工作状态研究的重要组成部分。根据Child-Langmuir定律和二极管导流系数,结合二极管阴极电子发射面积的变化模型,给出了二极管阴阳极等离子体漂移所导致的阴阳极间隙闭合速度。     

Electron swarm coefficients in 1,1,1,2 tetrafluoroethane (R134a) and its mixtures with Ar

Using a pulsed Townsend technique, we have measured the drift velocity, the longitudinal diffusion coefficient and the effective ionisation coefficient of electrons in R134a and R134a-Ar over a wide range of the density-reduced electric field intensity, E/N. Regarding the measurement of the electron drift velocities and of the effective ionization coefficients, we have covered a wider range than that hitherto achieved for pure R134a. Both the electron drift velocity and the effective ionisation coefficient have been found in very good agreement with those published in the literature, covering a shorter range of E/N. On the other hand, the swarm coefficients on R134a-Ar are, to the best of our knowledge, the first to be published. It is hoped that these data will be of interest for the test/derivation of electron collision cross sections for this important hydrofluorocarbon gas, which is nowadays of great use in gaseous detectors.