相位测量轮廓术中随机相移误差的校正算法

在相位测量轮廓术(PMP)中．随机相移误差足导致测量误差的重要因素,提出一种新的随机相移误差的校正算法,在五步相移的基础上不需要求解相位分布．通过近似处理可以直接求解相移过程中存在的随机相移误差,在保证精度的情况下,能大大减少迭代次数和计算量。推导了新算法的计算公式,详细说明了随机相移误差的求解过程。计算机模拟和实验证实了新的算法的有效性。与In-bok Kong的算法相比较,新算法能大大减少迭代次数和计算量。该新算法也同样适用于相移干涉计量。     

四步相移数字全息中随机误差的抑制方法

提出一种在四步相移数字全息中消除随机相移误差及CCD噪声的方法。通过多次重复四步相移数字全息的实验过程,使得每一步的相移都有多幅全息图像与之对应,把每一步对应的多幅全息图像进行数学平均就会得到4幅全息均值图像。理论分析表明,使用这4幅全息均值图像进行数字全息的重建,可以得到精确的物光波的分布,有效地消除随机相移误差及CCD噪声的影响。计算机模拟结果表明:该方法有助于提高数字全息重建光场质量。     

Error-Compensating Phase Measuring Algorithms in a Fizeau Inter ferometer

In phase-shifting Fizeau interferometers, nonlinear motion of the phase shifter and multiple-beam interference are the most common sources of systematic errors affecting high-precision phase measurement. A new class of algorithms with extended compensating capability for these errors is proposed. Measurement errors for the new algorithms and two groups of conventional algorithms: discrete Fourier algorithms and the Schwider-Larkin-Hibino algorithms are estimated as a function of the number of sampled images when these systematic error sources are equally dominant. It is shown that the conventional phase-measuring algorithms produce significant errors when the reflectivity of the testing surface exceeds ten percent. Also, these algorithms have an optimum number of samples at around seven with which the residual errors become minimum. The new class of algorithms shows a substantial reduction of the residual errors when the number of samples exceeds ten. There is no optimum number of samples for the new algorithms. For fewer than six samples, discrete Fourier algorithms which have no error-compensating capability for the nonlinearity of phase modulation give a minimum error.     

An effective method in calibrating nonlinear errors for phase-shifting interferometry

In phase measurement or digital holography for phase-shifting interferometry, the key role is the variation of reference light wave and recover algorithm based on interferograms and reference phase, so the calculation result is directly affected by phase-shift accuracy. However, because of the errors of nonlinear and other random factors, it is difficult to control the actual phase-shifting amount accurately. In this paper, we aim to propose an efficient method for phase-shifting interferometry which does not require accurate initial estimation of phase-shift amounts, only a few pixels with several randomly shifted interferograms are sufficient for accurate extraction of phase information. This method has reduced the dependence of reference phase, and can obtain phase-shifting amount directly without using complex revised algorithm for correcting phase-shifting nonlinear errors.     

调制度分析在等步长相移法相位展开中的应用

推导了两种常用等步长相移算法的调制度表达式,提出一种新的调制度分析方法。该方法用于等步长相移法中基于加权最小二乘法的相位展开,能够充分利用调制度信息,构造二值和小数权重,从而增强相位展开过程对多种干扰因素的免疫力。实验结果说明了该方法的有效性和实用性。最后比较了二值权重和小数权重在加权最小二乘法的相位展开中的性能表现。     

Phase Retrieval of Phase-Shifting Interferometry with Iterative Least-Squares Fitting Algorithm: Experiments

We report our experimental results of phase-shifting interferometry with an iterative least-squares fitting technique to estimate both the wave front phases and the phase shifts. The method allows phase retrieval from phase-shifting interferograms even though the calibration data of the phase shifter is unknown. The algorithm is used to analyze two sets of experimental interferograms. One records by moving a piezoelectric transducer shifter randomly and therefore has embedded random phase shifter errors, and the other samples the interference movie recorded by a video recorder while driving a stepping motor and therefore has embedded random intensity noises. The results are comparable with that of the conventional M-frame algorithm. Investigation of the effects of the intensity noises and phase shift errors shows the algorithm to perform well in both. Problems such as convergence, unique solution and reliability are also discussed.     

Three-step self-calibrating generalized phase-shifting interferometry

An accurate and fast three-step self-calibrating generalized phase-shifting interferomertry (SGPSI) is proposed. In this approach, two new phase-shifting signals are constructed by the difference interferograms normalization and noise suppressing, then the unknown phase shift between the two difference phase-shifting signals is estimated quickly through searching the minimum coefficient of variation of the modulation amplitude, a limited number of pixels are selected to participate in the search process to further save time, and finally the phase is reconstructed through the searched phase shift. Through the reconstruction of phase map by the simulation and experiment, and the comparison with several mature algorithms, the good performance of the proposed algorithm is proved, and it eliminates the limitation of requiring more than three phase-shifting interferograms for high-precision SGPSI. We expect this method to be widely used in the future.     

相移相位测量的全息再现算法及测量误差分析

用全息原理和方法研究相移相位测量,得到了N步整周期相移再现物光波复振幅同步叠加函数(N步相移函数),同时提出一种新的相移相位测量误差分析和最大误差估计方法。N步相移干涉图是以理想平行光为参考光的无衍射同轴全息图,将其与对应的相移参考光相乘后求和得到N步相移函数;在理想情况下,这是一种复振幅分离、测量和物光波复振幅函数同步叠加方法,存在误差时计算出的相位是最小二乘方法的最佳期望结果。利用N步相移函数得到的N 1步相移函数,说明非理想N步相移函数是理想N步相移函数与误差函数之和,可以把相位型误差转化为与振幅和强度相对误差同等的误差来对待,降低了相位测量中误差估计的难度,给出了N步相移算法最大误差的估计方法和公式。     

Phase shifting technique using generalization of Carre algorithm with many images

The present work offers new algorithms for phase evaluation in optics measurements. Several phase-shifting algorithms with an arbitrary but constant phase-shift between captured intensity frames are proposed. The algorithms are derived similarly to the so called Carre algorithm. The idea is to develop a generalization of Carre that is not restricted to four images. Errors and random noise in the images cannot be eliminated, but the uncertainty due to its effects can be reduced by increasing the number of observations. The advantages of the proposed algorithm are its precision in the measures taken and immunity to noise in images.     

在随机和倾斜移相下光强归一化的迭代移相算法

由于存在振动和导向误差,干涉仪移相器在移相过程中产生随机的平移误差和倾斜误差,会给测量结果带来影响。因此高精度测量中对环境的稳定性和移相器的性能要求很苛刻。为了降低此种要求,针对随机和倾斜移相下干涉图背景光强和调制度的不均匀会影响移相平面计算的问题,对采集得到的干涉图做归一化处理,并利用迭代最小二乘法对归一化的干涉图做相位求解。迭代过程中,将干涉图分块来求解移相值,并对各移相值做平面拟合得到移相平面。仿真结果表明,该方法消除了背景光强和调制度的不均匀对倾斜系数计算的耦合作用,能够有效补偿倾斜移相误差对面形相位的影响,与其他方法相比,具有收敛速度快、求解精度高的特点。实验结果进一步验证了该方法的有效性。     

Strain maps obtained by phase-shifting interferometry: An uncertainty analysis

We used Moiré interferometry to evaluate the strains induced on a specimen subjected to a steady tensile load. The strains were evaluated by differentiating the whole-field phase values obtained by a phase-shifting algorithm. Because the direct differentiation of even slightly noisy data may lead to unacceptable derivative errors, the strain evaluation procedure included the application of a low-pass filter, which allowed us to smooth out local fluctuations in the phase data. In addition to the noise, the strain values were also affected by systematic errors in the phase values rendered by the phase-shifting algorithm as well as uncertainties in the determination of both the interferometer sensitivity and the magnification of the imaging system. In this paper, the influence of these error sources was assessed by applying a Monte Carlo-based uncertainty propagation technique; the strain uncertainty evaluation was based on simulating a large number of times, both the phase-shifting procedure and the post-image processing (which included the filter application). We found that the strain uncertainty strongly depends on the low-pass filter used to counteract the noise effect. Although we obtained the phase data from a Moiré pattern, the procedure presented to evaluate the strain uncertainty is valid independently of the techniques used to generate the fringe pattern or the algorithm applied to exploit the phase-shifting procedure.     

Rapid phase extraction method based on the difference image between interferograms with unknown phase-shifting amount

In phase-shifting interferometry, based on the difference image between interferograms with unknown phase-shifting amount, a rapid phase extraction method is proposed. In this method, first, by means of the simple subtraction operation between interferograms captured in one phase-shifting period, a sequence of difference images are generated easily; second, to decrease the random phase-shifting errors induced during the phase-shifting procedure, the summation operation is performed for these difference images; third, based on one time phase recovery operation and one time phase-unwrapping operation, the measured phase with high precision can be obtained rapidly. Moreover, in the proposed method, by means of a simple phase summation operation for all pixel-phases in one interferogram, the corresponding phase-shifting amount of interferogram can be determined conveniently.     

Measurement of sub-surface delaminations in carbon fibre composites using high-speed phase-shifted speckle interferometry and temporal phase unwrapping

A high-speed phase-shifted speckle interferometer has been developed recently for studying dynamic events. Speckle interferograms are continuously recorded by a CCD camera operating at 1 kHz with temporal phase shifting carried out by a Pockels cell running at the same frequency. Temporal phase unwrapping through sequences of more than 1000 frames allows the determination of time-varying absolute displacement maps. This paper presents the application of this speckle interferometry system to the detection and measurement of sub-surface delamination defects in carbon fibre specimens. The influence of re-referencing the temporal phase unwrapping algorithm after different time intervals is analysed to reduce the random phase errors produced by speckle decorrelation and vibration. The performance of several phase-shifting algorithms to minimize the influence of the vibration noise caused by the vacuum pump used to load the specimen is also investigated.     

基于倾斜相位的抗振动干涉面形测量

环境振动会在干涉测量过程中产生随机倾斜、移相误差,导致测量精度下降.为了降低环境振动对移相干涉测量的影响,提出了一种基于倾斜相位的抗振动干涉面形测量方法.首先,利用Fourier变换将干涉图变换到频域;然后,利用频域细分操作对峰值坐标进行亚像素精度定位,求解出振动倾斜平面;最后,利用最小二乘法计算出待测面的相位分布.实...     

Analysis of a multi-wavelength multi-camera phase-shifting profilometric system for real-time operation

Real-time accomplishment of a phase-shifting profilometry through simultaneous projection and recording of fringe patterns requires a reliable phase retrieval procedure. In the present work we consider a four-wavelength multi-camera system with four sinusoidal phase gratings for pattern projection that implements a four-step algorithm. Successful operation of the system depends on overcoming two challenges which stem out from the inherent limitations of the phase-shifting algorithm, namely the demand for a sinusoidal fringe profile and the necessity to ensure equal background and contrast of fringes in the recorded fringe patterns. As a first task, we analyze the systematic errors due to the combined influence of the higher harmonics and multi-wavelength illumination in the Fresnel diffraction zone considering the case when the modulation parameters of the four gratings are different. As a second task we simulate the system performance to evaluate the degrading effect of the speckle noise and the spatially varying fringe modulation at non-uniform illumination on the overall accuracy of the profilometric measurement. We consider the case of non-correlated speckle realizations in the recorded fringe patterns due to four-wavelength illumination. Finally, we apply a phase retrieval procedure which includes normalization, background removal and denoising of the recorded fringe patterns to both simulated and measured data obtained for a dome surface.     

Error-compensating algorithms in phase-shifting interferometry: a comparison by error analysis

In this paper, two families of phase-shifting algorithms with π/2 phase steps are studied. In family I, three new algorithms are derived by using the averaging technique based on the Surrel six-sample algorithm with phase shifts of π/2. Family II includes four well-known algorithms derived by the averaging technique based on the conventional four-sample algorithm with π/2 phase steps. A polynomial model of phase-shift errors used to describe general expressions for calculation of the correct object phase via the Fourier spectra analysing method as a function of the harmonic order in the fringe signal is presented. The error-compensating properties of the algorithms in families I and II are investigated by the Fourier spectra analysing method. It is found that the averaging technique, when used in any of the algorithm with π/2 phase steps, can improve the phase-shifting algorithm property: it is insensitive to phase-shift error when the fringe signal contains the first harmonic, but it can't be used to enhance the phase-shifting algorithm properties when the fringe signal contains higher order harmonics (n2). P–V (peak–valley) phase errors are calculated by the computer simulation and tables and plots are presented, from which the algorithms in families I and II are compared. It is shown that the algorithms in family I are more insensitive to phase-shift errors when the fringe signal contains the second harmonic and the algorithms in family II are more insensitive to phase-shift errors when the fringe signal is a sinusoidal waveform.     

二阶总广义变分图像放大

提出了一种在相移数字全息中提取相移角的方法.该方法通过在相移数字全息中引入随机相位板对物光波的相位进行调制,使得物光波在全息面上的相位分布成为近似理想的随机分布,进而根据这种随机分布的统计性质对相移角进行提取.计算机模拟结果表明,该方法提取出的相移角与设定的相移角之间的相对误差小于千分之一.同时,经过对比采用随机相位板和不采用随机相位板的计算结果发现,物体衍射光波在全息面上的相位分布具有一定的相关性.     

Suppression of Multiple-Beam Interference Noise in Testing an Optical-Parallel Plate by Wavelength-Scanning Interferometry

Measurements of optical parallel plates in a Fizeau interferometer lead to problems from multiple-beam interference noise unless the back surface of the plate has an additional treatment to prevent its reflection from reaching the detector. Such internal-reflection noise can be separated from the fundamental interference signal by its modulation frequency in a wavelength-scanning interferometer. However, to completely eliminate the noise, the air-gap distance between the testing and reference surfaces of the interferometer must be adjusted to a specific value, depending on the thickness and refractive index of the plate. This adjustment requires an undesirable change in the air gap, which is related to the phase modulation rate of the interferometer, and also requires additional information regarding the testing plate, which makes the measurement laborious. We show that if we add new symmetries to the sampling functions of the phase measuring algorithm, we can obtain significantly greater tolerance for the air-gap error. A new 19-sample algorithm allows a tolerance of ±23% while keeping the systematic errors at less than λ/200. The periodicity of the new algorithm and an integrating bucket technique also provide more options for the thickness of the testing plate, which guarantees an air-gap distance more independent of this thickness.     

相移阴影莫尔基于迭代LSM拟合

相移阴影莫尔技术相位高度存在着非线性关系,无法在全场获得均匀相移,因而致使经典的相移算法不能得到精确解.对此,提出了一种基于最小方差迭代的相移阴影莫尔技术,该技术通过垂直光栅面等间距移动光栅来产生相移,但光栅移动距离可不采用固定值,所以相移过程灵活|使用在高度解调过程中确定的逐点相移增量来抽取精确的测量相位,实现了相移阴影莫尔技术中固有的相位高度非线性误差补偿.结果表明,该方法可通过干涉图计算光栅的移动量,具有相移器的自标定特性.     

用于相移点衍射干涉仪的加权最小二乘相位提取算法

针对现有的相位提取算法只对某些特定的误差不敏感,不能满足高精度光学检测的要求,本文引入一种等间隔多步移相算法—权重待定的加权最小二乘算法。通过在最小二乘算法中添加待定的权重,分析移相点衍射干涉仪中多种误差源对算法的影响,获得多组约束方程,从而确定权重和新算法。对新算法和标准四步算法、Hariharan五步算法进行比对分析,验证了新算法对PZT线性和二阶非线性移相不准、光强的一阶二阶波动和光源频率一阶二阶波动等误差抑制能力远远优于标准四步算法和Hariharan五步算法;新算法对CCD的量化误差、光强噪声、频率噪声的抑制能力也具有一定优势,且对CCD的二阶响应非线性完全不敏感。