环境气压对激光烧蚀Cu诱导发光机理的影响

利用时间分辨的光谱测量技术,测定了不同氪气压强下脉冲激光烧蚀金属Cu诱导等离子体发光羽的发射光谱及其强度随时间的分布。利用快速同步照相的方法,拍摄了不同氪气压强下的等离子体发光羽的照片。实验结果表明,等离子体发光羽的光谱主要由原子谱线构成,发光羽颜色随环境气压而变化。结合实验结果探讨了环境气压对脉冲激光烧蚀Cu诱导等离子体发光羽的发光机理的影响,认为不同环境气压下等离子体发光羽的发光机理不同,低压下以电子碰撞传能激发辐射为主,中压下以电子与原子碰撞传能激发和电子与一价离子的复合激发辐射为主,高压下以电子与一价离子的复合激发辐射为主,并用此机理定性地解释了所观察到的实验现象。     

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利用时空分辨的测量技术,测定了XeCl紫外激光烧蚀金属Cu消融粒子的发射光谱随时间与空间的强度分布。通过在不同的氢气压强下拍摄到的XeCl308nm紫外激光烧蚀金属Cu消融粒子的发光羽照片,发现激光消融粒子发光羽的颜色在不同区域有不同的颜色,不同区域的发光羽颜色随环境气压的改变而变化。随环境气压的增大,发光羽不仅逐渐变小,而且逐渐变淡。对激光消融粒子发光羽的机理进行了探讨,激光消融粒子发光羽的发光动力学模式在不同区域有不同的发光模式,且随环境气压的变化而改变。定性地解释了所观察的实验现象。     

低真空下紫外激光烧蚀铜诱导发光的机理

采用时间与空间分辨的光谱测量技术,测量了在低真空下XeCl紫外激光烧蚀金属Cu诱导产生等离子体发光羽的发射光谱随时间和空间的强度分布,利用快速同步照相的方法获得了发光羽的相片,结果发现发光羽的不同区域有不同的颜色特征。根据实验结果建立了非常可能的激光烧蚀诱导发光的理论模型,认为不同区域的主要发光机理不同,连续辐射背景光来自近靶处高能电子的运动而产生的轫致辐射;原子线的产生来自电子碰撞传能以及电子与离子的复合激发;离子线的产生来自电子与离子碰撞传能激发。此模型不仅能解释单一激发模型所能解释的实验现象,而且还能够很好地解释单一模型所不能解释的实验现象,低真空下紫外激光烧蚀铜诱导发光的机理与常压下相似,在此实验条件下可以更准确地揭示诱导发光的机理。     

激光烧蚀铜产生原子和离子光谱线的研究

通过测定Nd∶YAG脉冲激光烧蚀金属Cu诱导产生光谱线及其强度随时间与空间的分布,结果表明等离子体辐射光谱线由原子光谱线、离子光谱线及连续辐射背景光组成,Cu原子光谱线的数目不仅比离子光谱线多,而且辐射强度比离子光谱线的大,以连续辐射背景光的辐射强度为最弱;原子光谱线的发光范围最大,持续时间最长;离子光谱线发光范围中等,持续时间中长;连续辐射背景光的发光范围最小,持续时间最短.讨论了激光诱导发光的机理,认为等离子体羽中连续辐射背景光主要来自近靶处高能电子的韧致辐射和电子与离子的复合激发,原子和离子光谱线主要由等离子体中高能电子的碰撞传能激发所引起,并用之较好地解释了所观察的实验现象.     

脉冲Nd:YAG激光烧蚀Cu产生等离子体总辐射的时空分辨研究

通过时空分辨的光谱测量技术,测定了在环境气压下,Ｎｄ：ＹＡＧ脉冲激光烧蚀金属Ｃｕ产生等离子体的总辐射随时间与空间的强度分布,研究了烧蚀环境气压对总辐射强度的影响,提出了电子碰撞与复合激发模型。     

不同气压背景下激光烧蚀Al靶产生等离子体特性分析

用时间和空间分辨诊断技术研究了脉冲激光烧蚀不同气压环境下金属Ａｌ靶过程中产生的等离子体羽的特性。     

高气压Ar气对激光诱导Cu等离子体电子温度的影响

用高能量钕玻璃激光器产生的脉冲激光(0～25 J)烧蚀Ar气氛中的Cu靶,观测了激光诱导Cu等离子体的发射光谱强度随环境气压(0.1～0.5 MPa)的增强规律。为了探讨辐射增强的机理,在局部热平衡(LTE)近似条件下,测量了等离子体的电子温度随环境气压的变化。实验结果表明,等离子体的电子温度随着环境气压的升高而正比增加。为了进一步了解等离子体的空间行为,测量了Ar气气压分别为0.1,0.3,0.5 MPa时,等离子体电子温度的空间分布。     

激光烧蚀金属Al诱导发光的动力学研究

利用时间分辨的光谱测量技术,测定了XeCl紫外激光在不同条件下烧蚀金属Al诱导产生光谱线及其强度随时间的分布.结果表明：等离子体辐射光谱线由原子光谱线、一价离子光谱线及连续辐射背景光组成.Al原子光谱线的辐射强度与持续时间为最大,一价离子光谱线次之,以连续辐射背景光为最小.对激光烧蚀金属诱导发光的机理进行了探讨.等离子体中连续辐射背景光来自高能电子的韧致辐射和电子与离子的复合,原子光谱线和一价离子光谱线主要来自等离子体中电子与离子的复合.用此机理定性地解释了所观察到的实验现象. 关键词： 激光烧蚀 时间分辨光谱 辐射机理 金属Al     

激光烧蚀高纯Zn形成的微米金属球体对后续脉冲激光的耦合增强效应

脉冲激光束在低真空(约2 Pa)环境下聚焦到高纯Zn靶表面, 烧蚀区域不仅有中心深孔的宏观损伤, 而且还发现大量微米量级的类似足球形状的金属Zn球体结构附着生长在孔洞内侧表面. 实验过程中采用等离子体光谱诊断技术研究宏观和微观损伤对后续脉冲激光的影响程度. 与聚焦于金属Zn平滑表面相比, 宏观损伤可以使后续激光诱导的Zn原子334.5 nm谱线强度提高10.3%, 在此基础上大量Zn微米球体附着在内表面可以使谱线强度再提高34.3%. 因此, 推断这些金属Zn微球表面镶嵌着光洁的纳米量级六边形和五边形小平面, 可以对后续脉冲激光产生镜面反射, 使得激光能量汇聚并耦合增强, 提高烧蚀效率. 实验结果还表明, 这些微米球体的数目随着激光脉冲次数的增加而增多, 使得后续激光能够诱导产生更为致密高温的等离子体. 研究结果有望为激光-金属微孔技术提供新思路. 关键词： 脉冲激光烧蚀 微纳米结构 激光诱导等离子体     

脉冲Nd：YAG激光烧蚀金属Al产生等离子体的时空分辨光谱研究

本文采用时间与空间分辨的光谱测量技术，测量记录了在Ａｒ为缓冲气体下，用Ｎｄ：ＹＡＧ脉冲激光烧蚀金属Ａｌ，产生的等离子体发射光谱随时间和空间的强度分布，研究了烧蚀环境气压对其的影响。     

Interface kinetics during pulsed laser ablation

This work investigates evaporation kinetics -- the relation between the surface temperature and pressure during excimer laser ablation. Nickel targets are ablated by excimer laser pulses in a laser fluence range between 1 and 6 J/cm², with the upper limit exceeding the threshold of phase explosion (5 J/cm²). The surface pressure is determined with a polyvinylidene fluoride (PVDF) piezoelectric transducer. When phase explosion occurs, the surface temperature is known to be near the thermodynamic critical temperature, therefore, by measuring the surface pressure, the surface temperature-pressure relation is determined at the threshold fluence of phase explosion. The surface temperature and the threshold fluence of phase explosion are also estimated from the measured velocity of the vapor plume and gas dynamics calculations. It is shown that, during excimer laser ablation, the temperature and pressure relation deviates significantly from the equilibrium kinetic relation.     

Enhanced emission of the laser generated plume in Ar gas

We report an effect of enhanced emission of laser generated plume in gas ambi-ent.Nonreactive argon gas was used in the experiment of UV laser ablation of copper plate.The emission of Cu atoms from the plume was increased more than the times.The emission in-tensity is sensitive to the gas pressure,but in a certain region of gas pressure,the enhanced ef-fect can be controlled stably.For the emission lines from other element,Zn,in the plume,the intensities are subjected to the same factor of increasement.     

Laser ablation of silicon and copper targets. Experimental and finite elements studies

The ablation process induced by excimer lasers is a collective phenomenon that basically involves two phenomena: the laser radiation–matter interaction and the dynamic of the ablation plume. The laser parameters, the thermal and optical properties of the material, and the surface morphology are critical factors in the ablation mechanisms affecting the direction of the ablation plume expansion. In this study, the role of the surface roughness and the evolution of its morphology under the laser irradiation were investigated. Assuming a thermal ablation model, a theoretical study of the initial steps of the laser ablation process by a finite element method using ANSYS (6.1) was performed. Different ablation experiments were carried out on silicon and copper targets using a XeCl laser. The target surface morphology changes were observed by SEM and the plume deflection was recorded by a digital camera. An acceptable agreement between the experimental and simulated results was found. This study contributes to a better understanding of the physical processes involved in the laser ablation and the relations between the plume deflection angle and the surface roughness. PACS 79.20.Ds; 81.40.Gh; 44.05.+e     

Effects of laser intensity and ambient conditions on the laser-induced plume

Laser ablation presents a promising technique for material processing. The quality of products is strongly influenced by the properties of the laser-induced plume. In compressible flow, the ambient conditions can be transmitted upstream. Therefore, the laser ablation process is strongly affected by the ambient conditions. In this paper, the effects of laser intensity, back pressure and temperature on the laser-induced plume were studied using a numerical model, which calculates the density, pressure and temperature of the laser-induced plume at different laser intensity and ambient conditions. The results are in agreement with experimental results available in the literature and can be used for the optimization of the pulsed laser deposition process.     

Analysis of KrF excimer laser beam modification resulting from ablation under closed thick film flowing filtered water

The application of a closed thick film flowing filtered water to immerse the ablation etching mechanism of an excimer laser poses interesting possibilities concerning debris control, modification of machined feature topography and modification of the ablation rate. Furthermore, these parameters have been shown to be dependent on flow velocity; hence, offering further user control of machining characteristics. However, the impact of this technique requires investigation. This contribution offers comparison of the calculated ablation pressure and the effect on feature surface characteristics given for laser ablation of bisphenol A polycarbonate using KrF excimer laser radiation in ambient air against laser ablation of the same substrate under closed thick film flowing filtered water immersion. Also, an impact of such immersion equipment on the optical performance of the micromachining centre used is quantified and reviewed. The pressure is calculated to have risen by a magnitude of 48, when using the liquid immersed ablation technique. This increase in pressure is proposed to have an increased surface roughness, promoting the number of asperities with a surface area lower than 16 μm²; resulting in a diffuse reflection of light and an apparent darkening of features. The focal length of the optical system was accurately predicted to increase by 2.958 mm, when using the closed flowing liquid immersion equipment. This equipment is predicted to have increased the optical depth of focus via reduction in the angle of convergence of the two defining image rays; yet the perceived focus, measured discretely by mean feature wall angle, was found to be 25% smaller when using the closed thick film flowing filtered water immersion technique instead of similar laser ablation in ambient air. A compressed plume interaction is proposed as a contributing factor in this change.     

紫外激光烧蚀Cu产生等离子体辐射特性

通过时间分辨的光谱测量技术,测定了308 nm XeCl紫外激光烧蚀金属Cu在氮气环境中诱导产生等离子体的发射光谱及其强度随时间分布,实验结果表明等离子体辐射光谱线主要由原子光谱线、一价离子光谱线及连续辐射背景光组成,各种光谱线的数目、辐射强度、持续时间不同。结合实验结果对等离子辐射机理进行了探讨,认为电子通过逆韧致辐射获得较高的能量,连续辐射主要来自高能电子的韧致辐射,原子和一价离子的激发主要是通过电子与原子、离子的碰撞传能以及电子与离子的复合产生,并用其定性地解释了所观察的实验现象。     

Langmuir probe investigation of surface contamination effects on metals during femtosecond laser ablation

Characterisation of the plasma plume induced by femtosecond laser-metal interactions has been carried out using a Langmuir probe. A double peak distribution of ablated ions and electrons has been recorded during time of flight (TOF) experiments for three metals studied (Ag, Cu and Ni). The first peak which occurs earliest in time is attributed to a surface layer of contaminants on the metal surface as it is shown to disappear after several laser shots. The re-growth of this peak, thought to be due to a recontamination process on the surface of the metal, is the subject of this paper. Two re-contamination mechanisms were considered; adsorption of contaminants from the ambient gas, and surface diffusion effects from the surrounding contaminants. Re-contamination rates for Ag, Cu and Ni were studied under two distinct gas pressures to investigate the contamination effects from the ambient. Effects arising from surface diffusion were investigated by raising the temperature of the metal sample to increase the surface mobility of the contaminants. The total contribution of contamination species present in the ablation plume was estimated by conducting angular distribution measurements of the plume. Surface diffusion of the surrounding contaminants was found to be the dominant recontamination process.