高功率980nm垂直腔面发射激光器的亮度特性

在循环水冷却(工作环境温度控制在15℃)和连续注入电流条件下,从垂直腔面发射激光器(VCSEL)亮度基本定义出发,实验测量了不同注入电流时口径为400μm的高功率980nm InGaAs/GaAs应变量子阱垂直腔面发射激光器(VCSEL)的亮度特性。结果表明:在注入电流4 A时,随着注入电流的增加,亮度也跟着增加;当注入电流4A时,尽管输出功率在增加,但是器件的光束质量变差,M2因子升高,表明此时影响器件亮度的主导因素是M2因子,所以亮度减小;在注入电流为4A,输出功率为1.2W时,亮度达到最大值2.43kW/cm2.sr,此时的光束质量最好,M2因子为207。最后,分析了影响高功率VCSEL器件亮度特性的主要因素,提出了提高器件亮度特性的解决方法。     

氧化光栅型垂直腔面发射激光器的研究

通过分析矩形出光孔径和亚波长金属光栅结构,发现大孔径高功率垂直腔面发射激光器(VCSEL)的偏振控制的难点在于横模非常复杂。因此提出一种新型的氧化光栅型VCSEL结构,不仅能够很好地在有源区内引入各项异性的增益结构,并且最大的优势还在于能够完美地控制大孔径VCSEL的横模。通过有限元软件对器件有源区的电流分布进行了模拟,发现当光栅脊的宽度为1.8 μm时,载流子在光栅两端聚集的现象基本上可以消除,而且其电流密度分布差可以达到很高。     

矩形结构垂直腔顶发射激光器的偏振特性

为了获得高功率的偏振激光,对矩形结构的980 nm大口径顶发射垂直腔面发射激光器(VCSEL)进行了研究.实验结果显示,对于400 μm×80μm出光口径的矩形VCSEL器件,在工作电流内,水平偏振光和竖直偏振光共同存在,并且水平偏振光一直占据主导地位;而且水平偏振光的光谱相对于竖直偏振光有蓝移.这些现象和理论模型的分...     

高功率垂直腔面发射半导体激光器优化设计研究

与传统的端发射半导体激光器相比，垂直腔面发射半导体激光器（VCSEL）具有可单模输出，光束对称性好，可被高度聚焦，进入光纤的耦合效率极高和有利于大规模二维列阵等优 点.为了得到高功率的激光输出，除了要增大VCSEL的发射面积之外，关键的是要选择适 当的量子阱层数、有源区电流密度的均匀分布和良好的热管理等.本文详细研究和分析了高功率VCSEL有源区量子阱层数，有源区直径，材料的热导和电阻，电极间距等对VCSEL 器件性能的影响.通过优化参数，进行最佳设计，研制出了980 nm In0.2Ga0.8As/Ga 关键词： 垂直腔面发射激光器（VCSEL） 量子阱 高功率     

径向桥电极高功率垂直腔面发射激光器

为改善高功率垂直腔面发射半导体激光器的热特性,提高它的输出功率,研制了新型径向桥电极高功率垂直腔面发射半导体激光器器件,对新型半导体激光器的结构模型进行理论分析表明,采用径向桥式电极可以降低器件P型DBR电阻,减小焦耳热;降低热阻,提高器件的散热能力。实验制备了出光孔径同为200μm的径向桥电极与常规电极的高功率垂直腔面发射半导体激光器,并对器件的性能进行了实验对比测试。结果表明径向桥电极高功率垂直腔面发射半导体激光器器件的微分电阻为0.43Ω;室温下最大输出功率可达340 mW,是常规电极垂直腔面发射半导体激光器的1.7倍;器件的热阻为0.095℃/mW,在80℃时,仍能正常激射,具有良好的热特性,径向桥电极高功率垂直腔面发射半导体激光器的光电特性与温度特性要远好于常规电极的高功率垂直腔面发射半导体激光器器件。     

795 nm高温高功率垂直腔面发射激光器及原子陀螺仪应用

在传统的氧化物约束型的垂直腔面发射半导体激光器中,横向光限制主要取决于氧化层的厚度及其相对于腔内光驻波分布的位置.通过减少外延结构中氧化层与光场驻波分布之间的重叠,可以降低芯层与包层之间的有效折射率差,从而减少腔内可存在的横向模的数量,并增加横模向氧化物孔径之外的扩展.本文利用这一原理设计并制作了一个795 nm的大氧化孔径的垂直腔面发射激光器.器件在80℃下可实现4.1 mW的高功率单基模工作,最高边模抑制比为41.68 dB,最高正交偏振抑制比为27.46 dB.将VCSEL作为抽运源应用于核磁共振陀螺仪系统样机中,实验结果表面新设计的VCSEL可以满足陀螺系统的初步应用需求.     

1.3μm GaAs基量子点垂直腔面发射激光器结构设计与分析

结合垂直腔面发射激光器（VCSEL）原理以及量子点增益特点，计算了不同结构VCSEL的腔内损耗和量子点的模式增益.分析了激光器阈值特性以及氧化限制层对光损耗的影响.设计了含 氧化限制层的13μm量子点VCSEL结构. 关键词： 量子点 垂直腔面发射激光器 增益     

注入电流对垂直腔面发射激光器横模特性的影响

对980nm氧化限制型垂直腔面发射激光器横模进行测试和研究,理论上从时间、空间变量的速率方程出发,利用空间积分法分析了典型电注入参数对弱折射率导引垂直腔面发射激光器(VCSELs)横模行为的影响,通过实验测试,得到VCSELs的横模光场分布情况,并与理论分析进行对比,得出相应的实验结果,在氧化孔径不变的情况下,随着注入电流的增加,载流子分布从有源区中心向边缘移动,模式从低阶基模向高阶模转变,并发生了较强的模式竞争以及载流子空间烧孔效应,最终导致基模强度的降低.另一方面,通过比较不同注入孔径下高阶模的发生时 关键词： 横模 垂直腔面发射激光器 空间烧孔现象 模式竞争     

表面液晶-垂直腔面发射激光器温度特性的研究

本文利用向列相液晶层作为激光偏振调控单元,涂覆于垂直腔面发射激光器（VCSEL）表面,测量并分析了不同温度下VCSEL正交线偏振光的阈值电流、峰值光功率和I-P特性. 实验结果表明：温度为293 K时,涂覆液晶后激光偏振第一跳变点和第二跳变点之间的电流值ΔI增大了2.2 mA,比无液晶时增大1倍. 温度为313 K、注入电流为3 mA时,两种正交线偏振光的光功率差ΔP由133.6 μW增大到248.8 μW,进一步增加了线偏振光的各向异性. 表面液晶层的引入有效地扩大了VCSEL的正交线偏振态稳定范围和光功率差,为实现液晶VCSEL高温单偏振稳定的设计和器件制备提供了理论和实验基础. 关键词： 垂直腔面发射激光器 向列相液晶 偏振态     

各向异性光反馈注入的垂直表面发射激光器的矢量偏振模转换机理

数值研究了各向异性光反馈注入的垂直表面发射激光器(VCSEL)的矢量偏振模转换机理,研究结果表明,首先,当注入电流接近阈值电流时,由VCSEL的外部参数和偏振器控制的光反馈注入量中各偏振模的能量决定VCSEL 输出的偏振态.其次,由偏振器控制的各向异性光反馈注入引起的VCSEL输出偏振态呈周期性变化.另外,当由偏振器控制的反馈注入量中的x^偏振和y^偏振模能量相当时, x^偏振模和y^偏振模之间竞争激烈,而激光器外部微小的扰动都会打破这两种偏振模竞争 关键词： 各向异性光反馈 垂直表面发射激光器 矢量偏振模     

High power 808 nm vertical cavity surface emitting laser with multi-ring-shaped-aperture structure

The carrier conglomeration effect has been one of the main problems in developing electrically pumped high power vertical cavity surface emitting laser (VCSEL) with large aperture. We demonstrate a high power 808 nm VCSEL with multi-ring-shaped-aperture (MRSA) to weaken the carrier conglomeration effect. Compared with typical VCSEL with single large aperture (SLA), the 300-μm-diameter VCSEL with MRSA has more uniform near field and far field patterns. Moreover, MRSA laser exhibits maximal CW light output power 0.3 W which is about 3 times that of SLA laser. And the maximal wall-plug efficiency of 17.4% is achieved, higher than that of SLA laser by 10%.     

VCSEL with reticular electrode and larger emitting aperture and its optoelectronic characteristics

The enlargement of the emitting aperture is usually one of the important methods of increasing vertical- cavity surface-emitting laser （VCSEL） optical output power. However, in a VCSEL with a larger aperture, the inhomogeneity in the injected current often causes inhomogeneous or even no emission. To solve this problem and to increase VCSEL output power, as well as to improve its thermal characteristics, we develop a new type of injected VCSEL with a larger aperture and a reticular electrode, where the conventional circular injection electrode of the P side is turned into a reticular one, and the heat sink is on the N side. The tests of the new VCSEL show an improvement in homogeneity in not only the injected current but also the emission intensity. The optical output power is also considerably increased, and the device optoelectronic performance is improved.     

注入电流引起质子轰击VCSEL中的模式竞争

为了分析质子轰击垂直腔面发射激光器(VCSEL)中注入电流引起的激光模式竞争过程,在三维空间中对VCSEL激射后光电热进行了研究。给出仿真光电热的方程之后,在室温连续工作条件下,对电流孔半径r为4μm、阈值电流Ith为4.5 m A的VCSEL进行自洽求解。当注入电流Iin分别为5.0,5.5,6.0 m A时,得到了对应的外加电压和输出光功率,并绘制了VCSEL的电势、注入电流、载流子、光场和热场的空间分布,给出了连续工作下输出光功率随注入电流变化的曲线。仿真结果表明:随着注入VCSEL中的电流增加,电流密度增大,激光的横向基模和横向一阶模式同时增强。横向一阶模式增加的强度及扩展的范围大于横向基模,激光输出能量逐渐向横向一阶模式过渡,横向模式竞争的同时产生载流子空间烧孔,因此在电流孔半径r≥4μm的VCSEL中,连续工作激光模式不稳定。     

A 658-W VCSEL-pumped rod laser module with 52.6% optical efficiency

A high-efficiency and high-power vertical-cavity surface-emitting laser (VCSEL) side-pumped rod Nd:YAG laser with temperature adaptability are demonstrated. The VCSEL side-pumped laser module is designed and optimized. Five VCSEL arrays are symmetrically located around the laser rod and a large size diffused reflection chamber is designed to ensure a uniform pump distribution. Furthermore, the absorbed pump power distribution of the rod is simulated to verify the uniformity of the pump absorption. Finally, a proof-of-principle experiment is performed in short linear cavity laser with single laser module. A continuous-wave output power of 658 W at 1064 nm is obtained, the corresponding optical-to-optical efficiency is 52.6%, and the power variations are ±0.7% over 400 s and ±3.1% over the temperature range from 16 ℃ to 26 ℃. To the best of our knowledge, this is the highest output power and the highest optical-to-optical efficiency ever reported for VCSEL pumped solid-state lasers. By inserting a telescopic module into the cavity and optimizing the TEM₀₀ mode volume, the average beam quality is measured to be M²=1.34 under an output power of 102 W. The experimental results reveal that such a high power rod laser module with temperature stability is appropriate or field applications.     

1.55-μm InGaAs/InGaAlAs MQW vertical-cavity surface-emitting lasers with InGaAlAs/InP distributed Bragg reflectors

High-performance InGaAs/InGaAlAs multiple-quantum-well vertical-cavity surface-emitting lasers (VCSELs) with InGaAlAs/InP distributed Bragg reflectors are proposed for operation at the wavelength of 1.55 μm. The lasers have good heat diffusion characteristic, large index contrast in DBRs, and weak temperature sensitivity. They could be fabricated either by metal-organic chemical vapor deposition (MOCVD) or by molecular beam epitaxy (MBE) growth. The laser light-current characteristics indicate that a suitable reflectivity of the DBR on the light output side in a laser makes its output power increase greatly and its lasing threshold current reduce significantly, and that a small VCSEL could output the power around its maximum for the output mirror at the reflectivity varying in a broader range than a large VCSEL does.     

A low-threshold and high-power oxide-confined 850-nm AlInGaAs strained quantum-well vertical-cavity surface-emitting laser

A low-threshold and high-power oxide-confined 850-nm AlInGaAs strained quantum-well (QW) vertical-cavity surface-emitting laser (VCSEL) based on an intra-cavity contacted structure is fabricated. A threshold current of 1.5 mA for a 22 μm oxide aperture device is achieved, which corresponds to a threshold current density of 0.395 kA/cm². The peak output optical power reaches 17.5 mW at an injection current of 30 mA at room temperature under pulsed operation. While under continuous-wave (CW) operation, the maximum power attains 10.5 mW. Such a device demonstrates a high characteristic temperature of 327 K within a temperature range from -12℃ to 96℃ and good reliability under a lifetime test. There is almost no decrease of the optical power when the device operates at a current of 5 mA at room temperature under the CW injection current.     

1.55-μm InGaAs/InGaAlAs MQW vertical-cavity surface-emitting lasers with InGaAlAs/InP distributed Bragg reflectors

High-performance InGaAs/InGaAlAs multiple-quantum-well vertical-cavity surface-emitting lasers (VCSELs) with InGaAlAs/InP distributed Bragg reflectors are proposed for operation at the wavelength of . The lasers have good heat diffusion characteristic, large index contrast in DBRs, and weak temperature sensitivity. They could be fabricated either by metal-organic chemical vapor deposition (MOCVD) or by molecular beam epitaxy (MBE) growth. The laser light-current characteristics indicate that a suitable reflectivity of the DBR on the light output side in a laser makes its output power increase greatly and its lasing threshold current reduce significantly, and that a small VCSEL could output the power around its maximum for the output mirror at the reflectivity varying in a broader range than a large VCSEL does.     

Highly confined and continuous single-mode operation of self-align photonic crystal oxide VCSEL

In this letter, we report on single-mode operation of originally multi-mode oxide VCSEL by using etched photonic crystal air holes and unique trench structure. The device fabrication utilized conventional photolithography; with simplified lithography step of self-aligning the photonic crystal and trench structures to the laser aperture for efficient and vigorous device processing. The fabricated photonic crystal VCSEL with trench device exhibits a single-mode output power of 0.7 mW, threshold current of 3.5 mA, slope efficiency of 0.10 W/A, and continuous single-mode output spectra at wide operating current range. The results are compared with conventional multi-mode oxide VCSEL of similar device geometry. In addition, theoretical analysis is presented for developing further understanding of the photonic crystal VCSEL.