薄膜光学 薄膜材料与器件

TB43 2005053687 静电梳齿驱动器薄膜变形反射镜=Electrostatic comb ac- tuator membrane deformable mirrors[刊,中]／阎金良(烟台 师范学院物理系．山东,烟台(264025))∥半导体光电．- 2005,26(1)．-19-21 提出一种大冲程静电梳齿驱动器微机械薄膜变形反 射镜,理论上研究了静电梳齿驱动器微机械薄膜变形反射 镜的静电驱动力和变形位移与驱动电压的关系,分析了变 形反射镜的驱动稳定性,比较了平板电容驱动器与纵向梳 齿驱动器的驱动能力。结果表明,变形反射镜的静电驱动 力和变形位移没有关系;在相同的面积下,纵向梳齿驱动 器的驱动力比平板电容驱动器的驱动力大很多。图1参6 (严寒)     

几何光学 光学镜头、光学零部件

O435.1 2006042851新型微机械变形反射镜研究=Research on a novel MEMSdeformable mirror[刊,中]/阎金良(烟台师范学院物理系.山东,烟台(264025)) ,赵银女…∥仪器仪表学报.—2006 ,27(1) .—91-94提出一种新型的静电驱动微机械变形反射镜,研究了静电力驱动的静态模型和动态模型。结果表明,驱动器的变形位移随驱动电压的增加出现稳定的非线性增加和不稳定的“拉入”现象;当变形镜由余弦电压驱动时,平衡位移的响应为2倍频的余弦信号;变形匀驱动电压撤除后驱动器上电极薄板经过17μs回复到驱动前的未变形状态。图4参7(严寒)TH703 2006042…     

一种静电驱动微机械变形反射镜

 以ANSYS软件的有限元分析为依据对变形反射镜结构模型进行研究,探讨各主要结构参数及驱动电压对变形位移的影响。考虑静电驱动力、张力和空气阻尼衰减对变形镜回复过程的影响,建立一种复合参数模型来预测变形镜的瞬态行为。结果表明,驱动器的弹性薄板厚度、跨度和电极间距明显影响变形位移;驱动器的变形位移随驱动电压的增加出现稳定的非线性增加和不稳定的“拉入”现象;驱动电压撤除后镜面回复时间短,重复性好。     

静电排斥型微机电系统变形镜驱动器

为了克服常规静电微机械驱动器所存在的静电吸合现象,基于非均匀分布的静电场可以产生排斥力的原理,设计了一种新型的微机电系统变形镜驱动器。驱动器由5组电极构成,最大的一组由中心质量块和位于正下方的下电极组成,其它4组分别位于各条边上。中心质量块由4根L形弹簧支撑,每根弹簧分别固定于驱动器的4个锚点。利用有限元软件对驱动器的频率响应和暂态响应特性进行了仿真,结果表明,谐振频率高达4kHz,暂态响应时间小于0.05s。利用表面硅工艺加工出了驱动器,并利用白光扫描干涉仪对驱动器的静态位移电压特性进行了测试,测得驱动器在70V激励电压下的形变量为1.4μm。     

MEMS变形反射镜主要特性测试

介绍了基于微机电系统技术的微变形反射镜的基本结构和电极分布.分析了微机系统变形镜的变形原理,推导了微变形镜的镜面变形与外加驱动电压的关系.分析了基于计算机控制的频闪显微干涉测量系统的组成及测试原理,并利用该系统实现了对微变形镜静态电压-位移曲线、静态面形、动态离面变形以及谐振频率的测试.实验表明,测试结果与理论分析有很好的一致性.     

MEMS变形反射镜主要特性测试

介绍了基于微机电系统技术的微变形反射镜的基本结构和电极分布.分析了微机系统变形镜的变形原理,推导了微变形镜的镜面变形与外加驱动电压的关系.分析了基于计算机控制的频闪显微干涉测量系统的组成及测试原理,并利用该系统实现了对微变形镜静态电压-位移曲线、静态面形、动态离面变形以及谐振频率的测试.实验表明,测试结果与理论分析有很好的一致性.     

晶体非线弹性变形的原子级模拟研究

采用分子静力学结合量子修正Sutten-Chen型多体势研究了Ni单晶体在受单向拉伸和压缩载荷作用下的弹性响应.考虑了三种加载方式,即［001］,［011］和［111］单向加载.模拟的结果表明：晶体在［011］单向加载下的弹性变形表现出强烈的非线性效应,然而沿［001］和［111］单向加载时,它的横向变形表现为各向同性.进一步讨论了杨氏模量和泊松比与应变的关系,并和第一性原理计算的结果做了比较. 关键词： 晶体 弹性变形 分子静力学     

微加工薄膜变形镜特性分析

 借助测量微加工薄膜变形镜驱动器的面形影响函数,分析了驱动器的电压-位移函数和驱动器之间的线性叠加性;通过对连续面形变形镜拟合像差的理论分析和实验研究,建立了微加工薄膜变形镜电压解耦模型。分析了对前36阶Zernike模式的拟合残差和拟合能力,指出微加工薄膜变形镜仅可用来拟合低级像差并且有较大的拟合能力和较小的拟合残差,而不能拟合高级像差。     

基于虚拟仪器的压电陶瓷驱动技术研究

针对压电陶瓷驱动器的非线性应变,以压电陶瓷微位移驱动原理为基础,分析了扫频激光器腔长控制原理;在硬件时钟的定时下,分析了压电陶瓷的驱动特性,并通过调整驱动信号的步长电压来调节压电陶瓷的非线性。设计了基于虚拟仪器的控制系统,并对线性化方法进行了原理分析和实验。实验结果表明,该测量系统可以使压电陶瓷在其伸长范围内线性地伸长。     

梯度泡沫铝的各向异性压溃力学行为

功能梯度泡沫金属因其密度连续变化,在轴向受压时可提供稳定增长的反馈载荷。然而当前研究多局限于其纵向压缩力学响应,考虑到实际应用中可能出现的横向冲击,基于低速冲击实验,考察梯度泡沫铝轴向和横向压缩力学响应的异同,并采用数字图像相关技术和数值模拟方法研究其宏细观压溃机制。结果表明:(1)在力学性能上,相比于纵向压缩加载的梯度泡沫铝,横向压缩加载下具有更高的抗压强度,而平台应力、致密化应变和能量吸收效果低于纵向压缩;(2)在失效变形模式上,纵向压缩变形模式为变形带渐进式压缩,而横向压缩变形模式的变形带则随机出现在试样的各个位置;(3)横向压缩下梯度泡沫铝致密化应变和比吸能的减小是由高孔隙率区的胞孔利用率降低导致的;(4)构建的弹性-塑性硬化-刚性模型能够较准确地描述梯度泡沫铝的纵向压缩力学行为。研究结果可为梯度泡沫金属在爆炸冲击结构防护工程中的设计提供理论参考。     

Actuation of a discontinuous structure with piezoelectric actuators

An alternate approach to exciting a one-dimensional structure with discontinuities using a piezoelectric actuator is presented and examined. Instead of being bonded to the uniform side of a beam, the piezoelectric actuator is attached such that it spans two adjacent rib discontinuities. In this configuration, the actuator generates an eccentric actuation force on the structure and induces both axial and transverse motions. The goal of this work is to first model the axial and transverse response caused by the piezoelectric actuator. Then, the change in that response is examined for the case where an external disturbance force is present. The system is modeled by coupling the piezoelectric strain and structural dynamic response. The characteristics of the voltage-generated piezoelectric forces are discussed through numerical examples. The structural response found using the dynamic force–voltage model for the actuator is then compared to the response when the actuator model is approximated by its static or zero-frequency value. Furthermore, the ability of the actuator to potentially provide better control authority by using this alternate configuration is examined. The numerical study shows that when the actuator spans two discontinuities, there is potential for greater control authority than when that same actuator is placed on the uniform side of the structure.     

基于微喷射结构的计算机芯片冷却试验研究

在计算机芯片冷却方式中,喷液冷却比风冷和微槽道液冷效率高,冷却效果好。普通机械泵及压电薄膜泵无法满足微孔尺度的微小化带来的高驱动压力问题。利用叠堆式压电陶瓷作为致动器,设计了一种基于叠堆式压电陶瓷驱动流体进行喷射冷却的冷却器,进行了同一驱动参数下微孔数量与尺度配比冷却实验研究,试验结果表明:相同面积的微喷板上采用多数量小孔径结构的微喷冷却器具有较佳的冷却效果。     

Dynamic properties of an omni-directional piezoelectric motor for precision position control

A piezoelectric motor capable of omni-directional movements has been developed to apply for robot joints, eyes, and precision positioning stage. The piezoelectric actuator has a simple structure of a cone type consisting of two piezoelectric ring-typed ceramics with electrodes divided into four segments and stainless steel elastic bodies. Before manufacturing the piezoelectric motor, the admittance characteristics and displacements of the actuator as a function of frequency were simulated. Elliptical motions of the actuator were created at several frequencies between the longitudinal and transverse resonance frequencies. The actual motor with alumina ball exhibited nice performance using a driving circuit with two rotary encoders and a PID controller. The moving element was omni-directionally operated at a driving frequency of 53.8 kHz and an output voltage of 280 V_p-p. The developed motor enables the moving element to move to a desired position with a resolution of 1.2°/pulse, an angular velocity of 4 rad/s, and a thrust force of 200 g.     

Simultaneous measurement of axial strain, temperature, and transverse load by a superstructure fiber grating

A novel and simple fiber-optic sensor based on a superstructure fiber grating for simultaneous measurement of temperature, axial strain, and transverse load is proposed and demonstrated. By measurement of the shift and split of broadband and narrow-band loss peaks, one can determine the temperature, axial strain, and transverse load simultaneously over the ranges 0-140 degrees , 0-1200muepsilon, and 0-0.3 kg/mm, respectively.     

Modelling and characterization of a piezoceramic inertial actuator

An inertial actuator (also known as a proof mass actuator) applies forces to a structure by reacting them against an “external” mass. This approach to actuation may provide some practical benefits in the active control of vibration and structure-borne noise: system reliability may be improved by removing the actuator from a structural load path; effective discrete point-force actuation permits ready attachment to curved surfaces, and an inherent passive vibration absorber effect can reduce power requirements.This paper describes a class of recently developed inertial actuators that is based on mechanical amplification of displacements of an active piezoceramic element. Important actuator characteristics include resonance frequencies, clamped force, and the drive voltage to output the force frequency response function.The paper addresses one particular approach to motion amplification, the “dual unimorph,” in detail. A model of actuator dynamic behavior is developed using an assumed-modes method, treating the piezoelectrically induced stresses as external forces. Predicted actuator characteristics agree well with experimental data obtained for a prototype actuator. The validated actuator dynamic model provides a tool for design improvement.     

State-of-the-art surface acoustic wave linear motor and its future applications

Two merits of the surface acoustic wave (SAW) device are its high energy density and small size. However, the driving frequency is around 10 MHz or higher. In spite of the difficulties involved with high frequency, the high energy density is attractive for actuator applications. The SAW linear motor's no load speed and maximum output force were 1.1 m/s and 3.5 N using a silicon slider. The silicon slider dimensions were 4 x 4 x 0.3 mm3. We made a lot of 30 microns diameter projections on the silicon surface. The acceleration was 1000 m/s2. The SAW motor is expected to be a high speed, quick response, high resolution microactuator, and much more. High driving voltage was a problem. Our newly designed electrode proved that the driving voltage was reduced to less than 10 V to excite the traveling wave. For actual applications, the SAW device will be placed in a slider. This design is effective in terms of performance and cost. The nanotribology of the SAW motor is also an important and interesting subject.     

Capacitance and power consumption quantification of dielectric barrier discharge (DBD) plasma actuators

A new procedure for determining the characteristic capacitance of DBD plasma actuators during operation is introduced, based on time-resolved discharge cyclograms. The actuator performance is described extensively and the interaction of several key quantities is elucidated. Operating voltage and corresponding power consumption are identified as deciding factors influencing the actuator’s capacitance. Conclusions concerning plasma actuators as a time and power dependent load in electrical circuits are drawn from these new insights. The steps necessary to insure optimal impedance matching of DBD based systems are underlined as well as its sensitivity to simple parameters such as the operating voltage.     

A disk-pivot structure micro piezoelectric actuator using vibration mode B11

Micro piezoelectric actuator using vibration mode B(11) (B(mn), where m is the number of nodal circles, n is the nodal diameters) is designed. Different from conventional wobble-type ultrasonic motor using piezoelectric rod or cylinder, piezoelectric disc is used to excite wobble modes and metal cylinder stator is used to amplify the transverse displacement, metal rod rotor is actuated to rotate. The outer diameter of the actuator is 14mm. There are features such as low drive voltage, micromation, and convenient control of wobble state by modifying the structure of stator, etc. Finite element analysis (FEA) of the stator has been made. It is found that the resonant frequency of vibration mode B(11) is 49.03kHz, which is measured at 45.7kHz by the laser vibrometer and impedance analyzer. The rotation speed has been measured, which could be as high as 10,071rpm under an alternating current 100V. Such piezoelectric actuator can be optimized and adjusted to fit practical conditions. It can be applied in the fields of precise instrument, bioengineering and other micro actuator system.     

高密度光学头中力矩器的运动串扰分析与抑制

力矩器多维运动之间的串扰是影响其动态特性和光斑质量的关键因素。建立了力矩器的空间受力分布模型,提出了聚焦、循迹、倾斜三个方向串扰度的概念,用数值方法计算并分析了力矩器的运动串扰现象,得到了串扰度与力矩器结构参数的关系。分析结果表明,串扰度与永磁铁和聚焦线圈的结构参数密切相关,合理选择结构参数可有效降低串扰度,可提高力矩器的动态性能。