往复式电镀金刚石线锯切割单晶硅片特性研究

通过往复式电镀金刚石线锯切割单晶硅片实验,分析了切片表面的微观形貌特点,研究了锯丝速度与进给速度对硅片的表面粗糙度、总厚度偏差(TTV)、翘曲度与亚表面损伤层厚度(SSD)的影响规律.结果表明:线锯锯切时材料以脆性模式去除,锯切表面的微观形貌呈现部分沟槽与断续划痕,并存在大量凹坑;锯丝速度增大,进给速度减小,表面粗糙度与SSD减小;锯丝速度增大,进给速度增大,硅片的翘曲度也随之增大;硅片TTV值与锯丝速度和进给速度的匹配关系相关.     

多晶硅制绒工艺研究

本文讨论了多晶硅制绒工艺技术,对比多晶硅在碱混合液和酸混合液中制绒,酸溶液制绒能更好的改善多晶硅表面减反射作用。采用显微镜及模拟日光器对电池性能检测分析,结果表明,不同绒面的多晶硅电池电学性能参数存在差异,并对多晶硅的最佳刻蚀深度进行了总结。     

KDP晶体金刚石线锯切割表面缺陷分析

采用树脂金刚石线锯对KDP晶体进行了锯切实验,使用扫描电子显微镜对KDP晶体锯切的表面缺陷进行了分析,分析了走丝速度和工件进给速度对KDP晶体表面缺陷特征的影响.分析发现线锯锯切的晶片表面缺陷主要有呈锯齿状形态的沟槽、表面破碎、划痕、橘皮状的外观、凹坑、以及锯切表面嵌入脱落磨粒和切屑.走丝速度增大,工件进给速度降低,锯切材料的表面缺陷逐渐由以脆性破碎凹坑为主转变为以材料微切削去除留下的沟痕为主.锯丝表面脱落的金刚石磨粒在锯切过程中在锯丝压力作用下挤压嵌入或冲击加工表面造成凹坑,对材料表面和亚表面质量的损害严重.其分析结果为获得高质量的锯切表面,进一步优化工艺参数提供了实验参考依据.     

[100]定向织构生长金刚石薄膜的红外光学性能研究

采用微波等离子增强化学气相沉积法在(100)镜面抛光的硅片衬底上实现了金刚石薄片[100]定向织构生长.并用扫描电子显微镜、拉曼散射和傅立叶红外光谱仪分析测试了不同工艺得到的金刚石薄片的表面形貌、组成结构和红外性能.结果表明:负偏压辅助定向成核和氢的等离子刻蚀不仅促进了金刚石薄膜的定向织构生长,而且还能刻蚀成核期的非金刚石成分.从而提高了金刚石薄片的红外光透过特性.     

晶硅片切割用水基切割液摩擦学性能的研究

重点研究了晶硅片切割用水基切割液中润滑剂的摩擦性能影响因素.选用低分子量的聚乙二醇(PEG)作为润滑剂,研究了不同分子量PEG作为润滑剂的摩擦学性能.在使用PEG300作为水基切割液润滑剂的情况下,相比纯水可减小硅片表面的粗糙度达86.51;;磨损体积可以减少50;,磨损表面磨屑变少.     

钎焊金刚石线锯切割单晶硅时的材料去除机理研究

利用钎焊金刚石线锯,在恒进给速度的方式下对单晶硅材料进行切割加工,探讨切割参数对切割力及表面粗糙度的影响机制.建立了金刚石线锯的切割力模型,推导线锯横截面不同位置处金刚石磨粒的法向力与线锯总法向力之间的关系式,依据单晶硅材料的压痕断裂力学性能,探讨钎焊金刚石线锯切割单晶硅时线锯横截面不同位置金刚石磨粒去除材料的机理.分析表明,随着磨粒位置的变化,其法向力值经历了一个从最大值到零的变化过程,并存在脆塑性转变角,其值的大小决定了工件表面材料的去除方式.     

超声辅助线锯切割SiC单晶实验研究

针对单晶SiC切割过程切割效率低,加工表面粗糙度和表面不平度差以及线锯磨损和断裂严重等问题,提出采用线锯横向施加超声振动的方法切割单晶SiC.通过实验对比研究了普通切割与超声辅助切割两种切割工艺,结果表明:与普通切割相比,超声辅助切割单晶SiC,锯切力减小37;～52;,且减小趋势随工件进给速度的增大更明显;切片表面粗糙度降幅约为26;～55;,晶片表面形貌均匀,无划痕,明显优于普通切割方法所获得的表面;线锯磨损降低约近40;;切割效率提高近56;.     

基于负性光刻胶掩膜的湿法多晶硅制绒

提出了一种用于大规模多晶硅太阳能电池生产的制绒工艺,采用负性光刻胶作为湿法刻蚀的掩膜,制备蜂巢状低反射率绒面.通过研究氢氟酸/硝酸溶液中各向同性刻蚀时腐蚀坑的形成过程,发现随着刻蚀时间的增加,在掩膜图形的开孔下逐渐形成六方分布的球面形状的腐蚀坑,腐蚀坑的深径比(深度/开孔直径)出现先上升然后下降的趋势.同理论计算值对比发现,随着刻蚀时间增加,掩膜和硅片的附着紧密性及掩膜的阻挡效应降低,酸液可能渗入了掩膜和硅片的界面,横向刻蚀速度快速上升,降低了深径比,导致实际的反射率高于理论计算值.尽管如此,本文还是成功制备了孔径15微米的蜂巢状绒面,反射率达到了22.9;.     

预处理对超纳米金刚石薄膜表面质量的影响

本文研究了金刚石粉手工研磨及超声波震荡两种预处理方法对硅片衬底及超纳米金刚石膜表面粗糙度和形貌的影响,利用表面轮廓仪、X射线衍射分析(XRD)、激光拉曼、场发射扫描电子显微镜(FE-SEM)对衬底及超纳米金刚石膜进行表征.结果表明,由于衬底轮廓的遗传特性,手工研磨的硅片上沉积的超纳米金刚石膜表面粗糙度远高于超声震荡的硅片上沉积的超纳米金刚石膜.     

横向超声激励对金刚石线锯切割单晶SiC切割速度及切割机理影响

硬脆晶体材料如SiC、Ge和Si等,由于具有极高的硬度和脆性,普通线锯切割很难进一步提高硬脆材料晶片的切割效率和表面质量.本研究把超声振动应用到金刚石线锯切割单晶SiC.基于超声振动切削加工的特点,分析了柔性线锯横向振动切割单晶SiC的必要条件;建立了横向超声激励下柔性金刚石线锯对SiC工件的动态切割过程模型,研究分析了超声振动对线锯间歇切割弧长及切割速度的影响,得到横向超声振动线锯切割速度增量的数学表达式.基于压痕裂纹模型,讨论了横向超声振动线锯切割和普通线锯切割对切割速度、切割力和表面粗糙度的影响.以单晶SiC为切割对象,对普通线锯切割和超声振动线锯切割进行了对比实验,结果表明在相同条件下,超声振动线锯切割使晶片的表面粗糙度有明显改善,超声振动线锯的切割速度比普通线锯切割的速度提高了约45;,锯切力减少28;~53;.实验结果与理论分析具有良好的一致性.     

Science for the small and the tall,the young and the old

Public engagement becomes increasingly important for scientists. One reason is the demand of the taxpayer to know what her or his money is being spent on, and why. The other one is that in a world that increasingly relies on technology, student engagement even at a very young age becomes a target to assure the needed supply of well-educated and especially motivated scientists for the decades to come. And it falls on the older generation of current researchers to leave the comfort of their lab once in a while, to awaken the interest for science among the population. Many people may know that there is a ‘liquid crystal’ in their mobile (cell) phone display, but when prompted, no one really knows what that liquid crystal actually is, let alone how the display they use many times every day, actually works in principle. It is part of our job to change this. In this contribution Valentina Domenici and Ingo Dierking would like to report on two recent Science Festival events in which they took part, one held in Genoa, Italy, and the other in Manchester, UK.     

On the role of the porous shell of the solid core of the earth in the anomalous heat and mass flow to the mantle

The model of the pressure-induced first-order phase transition of a metal melt to the metallicglass state considers a thermodynamically nonequilibrium porous near-surface shell of the solid core of the Earth, which contacts cyclonic vortices in the liquid core. Anomalous flows of heat and light-material mass to the mantle from the solid core at these contact points are calculated. These anomalous flows are shown to be comparable with the observed ones under the assumption of a rapid increase in the melt viscosity at pressures of 1–10 Mbar, which is characteristic of a solid core. In this case, the porous layer permeability may be very low.     

On the inhomogeneity of the transition surface layer of the solid core of the earth

Different geophysical data and conclusions of theoretical models, which can give information about the behavior of the solid and liquid cores of the Earth as well as about the existence of a transition layer as a temperature-hysteresis region at a relatively weak first-order phase transition, are compared. It is concluded that liquid inclusions inevitably exist in this region; these inclusions are involved (due to the complex convective processes occurring in the liquid core) in the transport of light materials from some areas of the solid-core surface. The porosity and permeability of the transition layer determine the seismic acoustic inhomogeneities in these areas, which contact the convective flows in the liquid core. In particular, this explains the well-known ??east-west?? effect. Obviously, the model of the crystalline core is not the only possible alternative for a model of a core with a metallic glasslike structure.     

On the dependence of the surface tension at the crystal-melt interface on the impurity concentration

The stationary task of impurity diffusion in a melt has been solved within a two-dimensional crystallization model in a second-order approximation with respect to the amplitude of deviation from a smooth crystallization front. The dependence of the surface tension Γ at the interface on the impurity concentration C is taken into account in the form Γ = Γ₀ + ζ _d C, where Γ₀ and ζ _d are constants. The variational method is used to obtain the condition for the transition from a smooth crystallization front to a cellular one. It is shown that calculated cell sizes are in agreement with the experimental data in the literature only when the parameter ζ _d ≠ 0. For binary systems with distribution coefficients k < 1 and k > 1, ζ _d should be positive and negative, respectively.

     

A new example for the applicability of the relationship between the particle size and the kinetic of the crystal growth

Experiments have been made with PbCrO₄ precipitating system in a batch type tank. In the experiments the speeds of stirring and the residence times were changed. The particle size distribution of precipitates formed has been determined. The rate determining mechanism of the crystal growth were evaluated by two different methods (NIELSEN method and method elaborated in our institute). The two methods used have indicated the same informations about the rate determining processes. It also has been stated that the coagulation does not disturb the selection of the suitable growing mechanism.     

On the entropy difference between the vitreous and the crystalline state

The paper deals with the entropy difference between frozen-in phases and their equilibrium counterparts. First, the nature of data compiled in thermochemical data collections are briefly reviewed, comprising data for non-equilibrium phases. Then, experimental evidence from earlier literature is compiled showing that the conventional entropy of a frozen-in phase at zero Kelvin assumes a non-zero residual value S(0). Based on calorimetric data from multiple sources, the same evidence is elaborated for diopside glass, yielding S_glass(0) = 24.8 ± 3 J/(mol K), a value reproducing a result publishes earlier. The zero Kelvin enthalpy of this glass is H_glass(0) = 81±8 kJ/mol. For S_glass(0), a structural interpretation in terms of silicate chain mixing is proposed, yielding a lower threshold for S_glass(0). From the point of view of statistical mechanics, non-zero residual entropies of frozen-in phases can be derived from ensemble averages, however, not from time averages.     

On the slope of the growing pyramids

By means of some theoretical models the present work shows that pyramids of different slopes can grow on a crystal face at constant supersaturation due to the interaction between steps, arising from close spaced screw dislocations. Pairs of adjacent screw dislocations of opposite sign, as well as other groups of closely spaced screw dislocations, can operate as more active sources of growing steps than the single screw dislocations. Both independent and dependent step propagation velocities have been considered in the present discussion.     

On the Influence of the Crystallization Conditions on the Microstructure of the Directionally Solidified Eutectic of the LiF – LiYF4 System

This paper particularly deals with the transitions in degree and type of ordering of a given microstructure. As a model system the eutectic of the LiF – LiYF₄ system was used for studies of transitions from ‘anomal’ microtextures with non-cooperative production of seeds of both phases to the fibrous microtexture. It was shown that even if the matrix phase LiYF₄ contains a relative high volume ratio (36%) of LiF it is possible to create highly ordered fibrous microtextures with pronounced hexagonal ordering of particular LiF fibres. It was also shown that methods of image processing could be used for sensitive evaluation of small changes in degree of ordering of the microstructure. These procedures make possible a deeper understanding of the influence of the solidification conditions on the microstructure of the directionally solidified eutectic and creates possibilities for optimalisation of the technological process.