Peculiarities of pulsed ion implantation from a laser plasma containing multiply charged ions

A mathematical model describing the dynamics of a pulsed laser plasma with multiply charged ions, as well as the formation of the accelerated ion flow in an external magnetic field, is developed. Experimental studies and mathematical simulation by the particle-in-cell method are used to determine the role of multiply charged ions in the process of ion implantation into a silicon substrate from the pulsed plasma containing singly and doubly charged titanium ions. The plasma spreads between parallel-plate electrodes (Ti target and Si substrate) along the normal to the surface of the target. Ions are accelerated by high-voltage negative pulses applied to the substrate. It is found that doubly charged ions effectively participate in the implantation process when an external electric field is applied very soon after the laser action on the target. The application of a high-voltage pulse with an amplitude of 50 kV 0.5 μs after a laser pulse leads to ion implantation with an energy close to 100 keV. With increasing delay in the application of the high-voltage pulse, the upper boundary of the energy spectrum of implanted ions is displaced towards lower energies. Comparison of the depth profiles of titanium distribution in silicon calculated from the results of simulation are compared with the experimental profiles shows that the model developed here correctly describes the formation of the high-energy component of the ion flow, which is responsible for defect formation and doping of deep layers of the substrate.     

Retrieval of currents of multiply charged ions emitted from laser-produced carbon plasma

The emission of ions from laser-produced carbon plasmas is investigated by a deconvolution of ion collector signals. The deconvolution is based on the use of Kelly and Dreyfus function expressing the time-resolved ion current to recover hidden peaks in an ion collector signal. The parameters of recovered C ^q+ (1?≤?q?≤?6) currents make possible the quantification of properties of laser-produced plasmas. The drift and peak velocities of C ^q+ ions, the abundance of ions and the plasma temperature are presented in the dependence on focused laser beam energy. The carbon plasma was generated employing either single 9-ns pulses of second harmonics (532 nm) of Nd:YAG laser or pulses repeated at a stable repetition rate of 30 Hz.     

Many-body effects in the formation of multiply charged ions in a strong laser field

Some of the many-body effects in the formation of multiply charged ions in a laser field have been taken into account: inelastic tunneling, collective tunneling, and magnetic moment projection relaxation of the atomic core. Strong fields with an intensity exceeding 10¹⁷ W cm⁻² are considered when the magnetic component of the laser field acts on the free motion of a photoelectron; therefore, the formation of multiply charged ions through rescattering becomes unlikely. Numerical calculations have been performed for Ar⁹⁺ … Ar¹³⁺, Kr¹⁹⁺ … Kr²³⁺, Rb¹⁰⁺, and Rb¹¹⁺ ions. A significant contribution of collective tunneling, which was not observed in weaker fields investigated previously, has been revealed. Allowance for collective tunneling is shown to reduce the intensity leading to saturation by more than 10%. In this case, the yield of multiply charged Rb ions changes by an order of magnitude, while the yield of multiply charged Ar and Kr ions changes by more than a factor of 2. Comparison with experimental data on the formation of argon ions under the action of a linearly polarized laser pulse is made.     

Neutralization of multiply charged ions at a surface

We report on emission processes induced by particle-solid interaction involving ions with a large potential (i.e., high ion charge state) and low kinetic energy. After an introduction into existing neutralization models for ion scattering at a metal surface a detailed discussion on the electron emission processes is presented.The number of electrons emitted per incident ion is shown to be proportional to the potential energy only within a restricted parameter field involving charge state and ion velocity. The kinetic energy distribution of emitted electrons is dominated by low-energetic electrons (30 eV), while inner shell holes of the projectile ion can initiate high-energetic characteristic Auger electrons. The presence of inner shell holes is also of importance for the charge state of highly charged ions being scattered at surfaces whereas normally the charge state distribution of scattered ions depends on the impact parameter only.The influence of the primary ion charge state on the sputtering yield of insulating surfaces is seen for the charge state of sputtered particles, whereas the total sputtering yield seems to be insensitive. This question is still subject to controversy, however.Photon emission dependent on the charge state of the impinging ion has been observed up to now only for extremely highly charged ions as hydrogenlike Ar or Kr.     

Production of multiply charged xenon ions

A multiply charged ion source based on E.C.R. heating is described and abundances for xenon ions up to Xe¹³⁺ are given.     

Three-electron auger process from beam-foil excited multiply charged ions

Electron emission from collisions of C3+ ions (22.7 A MeV) with carbon foils (21, 49 and 90 microg/cm(2)) was studied by the time-of-flight method. Two prominent emission patterns can be readily identified as "binary encounter" electrons and "cusp" electrons. With the thinnest target only, a third structure is visible at slightly lower time-of-flight (thus slightly higher energy) than the cusp electrons. The energy of these electrons would correspond to 647(+116)/(-104) eV if they were emitted from the projectile frame of reference. A possible explanation is a rare three-electron-Auger K(2)L(2)L(1) process.     

Generation of multiply charged silicon and germanium ions by excimer laser pulses

Plasma bursts were produced by focusing excimer-laser (XeCl, 308 nm) pulses on Ge and Si targets. At moderate laser fluences (30 MW/cm²) high-intensity Ge³⁺ and Si³⁺ ion pulses were extracted from the laser-produced plasma. A peculiar electrical circuit allows a self-bunching of the beam. By time-of-flight method, the currents produced by the ions of different charge number were measured. Peak currents of 620 mA and 800 mA were recorded for Ge³⁺ and Si³⁺ ions, respectively, with an extraction voltage of only 400 V.     

Energy loss of relativistic, multiply charged ions in an electron plasma

A simple equation is derived for calculating the energy loss of a relativistic, multiply charged ion moving in an electron plasma in the region where the Born approximation fails. The contribution of the energy losses from collisions with solitary electrons is calculated using the exact Dirac equation for relativistic Coulomb scattering. Zh. Tekh. Fiz. 68, 9–12 (February 1998)     

Preparing a laser cooled plasma for stopping highly charged ions

We present a new cooling scheme for the preparation of highly charged ions for future in-trap precision experiments. A plasma of laser cooled ²⁴Mg⁺ ions trapped in a 3D harmonic confinement potential is used as a stopping medium for the highly charged ions. We focus on the dynamic evolution of the plasma, determining suitable cooling conditions for fast recooling of the ²⁴Mg⁺ ions. The results of a realistic parallel simulation of the complete stopping process presented here indicate that a small, constant detuning of the laser frequency is sufficient for subsequent recooling of the plasma, thus maintaining the stability of the plasma.     

Effect of an electron beam generated in an X-pinch plasma on the structure of the K spectra of multiply charged ions

The first experimental studies of an electron beam generated in an X pinch on the XP machine (Cornell University, USA) and the BIN machine (P. N. Lebedev Physical Institute, Russian Academy of Sciences) are reported. It is shown that it is possible in an X pinch to isolate the effect of a plasma-generated electron beam on the multiply charged ion radiation. The intensities of the satellite lines corresponding to Li-, Be-, B-, and C-like ions are calculated for the Al spectrum on the basis of a collisional-radiative model with a non-Maxwellian electron distribution in the plasma. The effect of an electron beam on the multiply charged light ion radiation in an X-pinch plasma is demonstrated. Comparing our calculations with the experimental spectra, we conclude that the present model can be used to estimate the electron beam intensity. Zh. éksp. Teor. Fiz. 112, 894–909 (September 1997)     

Quantum electrodynamic theory of multiply charged ions

A Rayleigh-Schrödinger perturbation theory is constructed within quantum electrodynamics so as to calculate energy levels nad transition probabilities in multiply charged ions. The basic features of the suggested model are renormalization and its relative simplicity. Renormalization is guaranteed by the fact that all interesting quantities (energy levels, transition probabilities, and cross sections of various processes) are expressed in terms of many-electron Green's functions, whose renormalization is achieved by standard methods. To demonstrate the simplicity of the suggested method, expressions are obtained for corrections to the ground state energy of a two-electron multiply charged ion due to two-photon exchange diagrams, whose derivation by other methods is, in our opinion, quite more complicated.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 8, pp. 43–54, August, 1990.     

Calculation of spectral and Rosseland paths in a plasma with multiply charged ions based on a statistical approach

The semiclassical approach to determine the Fourier components of the electron dipole moment disregarding polarization (noninteracting electron model) is used for analyzing ion oscillator strengths and determining the radiation properties of plasmas consisting of multiply charged ions of heavy elements. The oscillator strength distribution df/d?? (proportional to the photoabsorption cross section) is calculated as a function of the degree of ionization and self-similar frequency ?? = ??/Z. It is found that for low degrees of ionization, function df/d?? for an ion is close to function df/d?? for a neutral atom; upon an increase in the degree of ionization, regions are formed in which df/d?? = 0 (transparency windows) and the photoabsorption cross section for high degrees of ionization differs from zero only in small frequency ranges. The resultant distribution of the ion oscillator strengths is used for calculating the polarizability of ions as a function of frequency and the cross section of radiation scattering on ions. For a gold plasma, the absorbance and opacity (both spectral and averaged according to Rosseland and Planck) are calculated. The results of computing the paths and absorption coefficients coincide in order of magnitude with the available data. The effect of scattering on the Rosseland path is estimated.     

High-power 20-channel neodymium glass laser and combined laser and beam heating of a plasma

A high-power 20-channel neodymium-glass laser is described (energy i kJ, pulse duration 2 nsec). It is part of the Flora facility intended for combined simultaneous heating of a plasma by powerful laser radiation (PLR) and by a relativistic electron beam (REB) produced in a facility of the plasma focus type. The paper deals theoretically with the processes of combined interaction of PLR and REB with a current plasma and a solid target.Translated from Trudy Ordena Lenina Fizicheskogo Instituta im. P. N. Lebedeva, Vol. 103, pp. 202–230, 1978.