抛物面型X射线组合折射透镜聚焦性能的理论与实验研究

结合衍射理论和矩阵光学方法得出抛物面型X射线组合折射透镜的光学性能指标(包括其焦距的严格表达式、薄透镜近似的判定准则、透过率和有效孔径,以及极限聚焦光斑尺寸等).采用X射线深度光刻技术实际制作了PMMA材料抛物面型X射线组合折射透镜并给出了工艺测试结果.最后在北京同步辐射装置(BSRF)上,实际构建了基于3种不同结构参数的PMMA材料抛物面型X射线组合折射透镜的微束聚焦实验系统.并实际测试了其聚焦性能,均获得了良好的聚焦效果,给出实测结果并对实测结果进行了分析和讨论.     

高能X射线组合透镜聚焦性能的实验结果

高能X射线组合透镜是一种基于折射效应的新型X射线光学元件。报道了这种新型X射线光学元件聚焦性能的最新实验结果。设计的高能X射线组合透镜为聚甲基丙烯酸甲酯(PMMA)材料,包括40个相同的、顺序排布的平凹折射单元,折射单元的球面半径为200μm,组合透镜的几何口径约为500μm,长度约为8 mm,焦距约为1.3 m。简要描述了PMMA材料X射线组合透镜的制作技术和制作过程。并给出了X射线组合透镜聚焦性能测试实验系统和实验条件。最后给出8 keV单色X射线辐射下,PMMA材料X射线组合透镜的聚焦性能的测试结果,对实际测试结果进行了分析和讨论,得出结论,焦距等参量与理论计算结果基本吻合。     

X射线长组合折射透镜的理论和实验研究

结合矩阵光学方法与衍射理论,得到研究X射线长组合折射透镜光学性能(包括焦斑尺寸、有效光束半径和强度增益等)的理论方法。设计并采用LIGA技术实际制作了顶点曲率半径50μm的抛物面型PMMA材料长X射线组合折射透镜,在北京同步辐射装置(BSRF)的形貌站(4W,1A)对其在8keV时的聚焦性能进行了实际测试。给出了模拟计算和实测结果,并进行了分析讨论,实测结果显示了良好的聚焦效果,理论与实验结果基本吻合。     

铜材料X射线聚焦组合透镜的设计与制作

铜材料X射线聚焦组合透镜是一种基于折射效应的X射线聚焦元件。简单介绍了组合透镜的设计理论研究结果,并据此对材料作了选择。针对铜材料组合透镜,分析了组合透镜结构参数、X射线工作波长的选择对组合透镜光学性能的影响。在此基础上,设计了组合透镜的结构参数,使其在硬X射线波段具有较好的聚焦性能,并能获得较高的焦斑强度。采用准LIGA技术制作了铜材料X射线组合透镜,给出了部分铜材料X射线组合透镜结构测量结果。     

背面曝光技术制作沙漏状X射线组合折射透镜

在分析沙漏状X射线组合折射透镜（X-ray compound refractive lens,XCRL）的折射聚焦理论的基础上,设计并利用背面曝光技术制作了SU-8材料的沙漏状XCRL,该技术在保证图形准确性的同时减少了工艺步骤,使制作更加简便易行.在10?keV单色X射线辐射下,对制作的透镜进行了聚焦性能的实验测试,结果表明,所制作的透镜较好地实现了一维聚焦. 关键词： 组合折射透镜 背面曝光 沙漏状 SU-8     

级联式平面抛物面型X射线组合折射透镜的设计与制作

X射线组合折射透镜(CRL)已逐步成为同步辐射光源下X射线聚焦光学器件的标准配件之一,它具有结构紧凑、易调节校准、适用光子能量范围大等优点.本文设计了一种级联式平面抛物面型CRL,它将N1个具有较大抛物面几何孔径(R0)的折射单元I与N2个具有较小抛物面顶点曲率半径(R)的折射单元II级联,以解决常规CRL设计过程中焦斑尺寸与透过率的矛盾.采用PMMA材料,利用LIGA技术制作了一组级联式平面抛物面型CRL,其中折射单元I的主要结构参数为N1=15,R1=200μm,2R01=564μm;折射单元II的主要结构参数为N2=20,R2=50μm,2R02=140μm.在上海光源同步辐射线束上,所制作的级联式平面抛物面型CRL实现了对初始光斑尺寸为200μm×100μm的入射X射线的一维聚焦,测试得到的焦距为1.052 m,横向焦斑尺寸为24.9μm@8 keV,透过率为2.19%.     

高能X射线聚焦组合透镜的理论研究

X射线聚焦组合透镜是一种利用折射效应对X射线辐射聚焦的新型元件。针对X射线波段的特性,综合考虑折射和吸收效应得出组合透镜的衍射屏函数,并利用衍射理论推导出X射线组合透镜的设计理论。利用统计学理论中一阶、二阶原点矩表征像面处的光学性能,使设计更简洁。该理论方法可方便地推广到双凹折射单元情况。通过数值计算分析了像向处强度分布的二阶中心矩以及焦点处辐射强度随组合透镜结构参最的变化关系,给出了一种铝基X射线组合透镜的结构参量设计结果。对于设计的组合透镜结构参量,计算了当X射线辐射能量分别为0．93 keV．9．89 keV和29．78 keV时,X射线辐射经过组合透镜后的焦点强度分布。     

Kinoform单透镜的硬X射线聚焦性能

Kinoform单透镜可以高效聚焦硬X射线至纳米量级, 在X射线纳米显微学和纳米光谱学领域有着重要的应用前景. 基于衍射光学和傅里叶光学理论, 给出了X射线经由Kinoform单透镜聚焦的物理模型, 基于数值模拟, 研究了不同材料、光子能量、台阶数量和顶点曲率半径对Kinoform单透镜聚焦性能的影响. 结果表明, 孔径为1 mm的Kinoform单透镜对30 keV的X射线聚焦, 可以得到14 nm焦斑、62 μm焦深, 且可实现4个量级的光强增益和大于30%的光强透过率.     

微束斑X射线源及X射线光学元件

高质量的X射线源,尤其高亮度的微纳束斑X射线源是现代X射线光学高清晰成像最为关键的部件之一,在工业无损探伤、生命科学、材料科学等科学研究和实际应用中具有重要的意义。简单介绍了微束斑X射线源的产生方法及发展历史,并对微束X射线光学涉及到的聚焦X射线光学元件（如X射线掠入射反射镜、布拉格法反射镜、多层膜反射镜、多层膜光栅、X射线波带片、毛细管聚焦透镜和复合折射透镜等）的主要特点作了简要的系统介绍。最后展望了微细束X射线在微纳检测与分析等方面的应用前景。     

整体毛细管X射线半会聚透镜在微区EXAFS分析技术中的应用

利用整体毛细管X射线半会聚透镜对同步辐射X射线进行聚焦, 经透镜会聚的微焦斑直径在10μm量级, 焦斑位置处的功率密度增益在10³量级. 在5.5—11.5keV能量范围内, 透镜焦斑直径由38μm变为29μm, 透镜传输效率由26.1%变为20.5%, 焦斑的中心位置移动了3μm; 透镜的出口焦距变化了155μm. 在上述透镜性能研究的基础上, 研究了该微焦斑同步辐射在微区EXAFS(Extended X-ray Absorption Fine Structure)分析技术中的应用.     

Focusing high-energy x-rays by a PMMA compound x-ray lens on Beijing synchrotron radiation facility

The x-ray compound lens is a novel refractive x-ray optical device. This paper reports the authors' recent research on a polymethyl methacrylate (PMMA) compound x-ray lens. Firstly the designing and LIGA fabrication process for the PMMA compound x-ray lens are briefly described. Then, a method for theoretical analysis, as well as the experimental system for measurement is also introduced. Finally, the focusing spots for 8keV monochromatic x-rays by the PMMA compound x-ray lens are measured and analysed. According to the experimental results, it is concluded that the PMMA compound x-ray lens promises a good focusing performance under the high-energy x-rays.     

A method based on diffraction theory for predicting 3D focusing performance of compound refractive X-ray lenses

A method based on the diffraction theory for estimating the three-dimensional (3D) focusing performance of the compound refractive X-ray lenses is presented in this paper. As a special application, the 3D X-ray intensity distribution near the focus is derived for a plano-concave compound refractive X-ray lens.Moreover, the computer codes are developed and some results of 3D focusing performance for a compound refractive X-ray lens with Si material are shown and discussed.     

X-ray focusing with compound lenses made from beryllium

We have measured the intensity profile and transmission of x rays focused by a series of biconcave spherical unit lenses fabricated from beryllium. The use of beryllium extends the range of operation of compound refractive lenses, improving transmission, aperture size, and gain. The compound refractive lens was composed of 160 biconcave unit lenses, each with a radius of curvature of 1.9 mm. Two-dimensional focusing with a gain of 1.5 was obtained at 6.5 keV with a focal length of 93 cm. The effective aperture of the compound refractive lens was measured as 600 mum , with 9% peak transmission.     

Toward one nanometer X-ray focusing: a complex refractive lens design

We report a design for one nanometer X-ray focusing by a complex refractive lens, which is capable of focusing 20 keV X-rays down to a lateral size of 0.92 nm （full-width at half-maximum （FWHM）） and an axial size of 98 nm （FWHM） with intensity gain of 49050. This complex refractive lens is comprised of a series of kinoform lenses, whose aperture is gradually matched to the converging trace of the X-ray beam so as to increase the numerical aperture （NA）. The theoretical principle of the proposed complex refractive lens is presented. The NAs of these lenses are calculated. The numerical simulation results demonstrate that the proposed design can focus the X-ray beam into sub-nanometer while remaining high gain.     

Application of the probability theory in predicting 3D focusing behaviors of compound X-ray refractive lenses

A theoretical method based on the diffractive theory is used for predicting three-dimensional (3D) focusing performances of the compound X-rays refractive lenses (CRLs). However, the derivation of the 3D intensity distribution near focus for the X-ray refractive lenses is quite complicated. In this paper, we introduce a simple theoretical method that is based on the first and second moments in the theory of probability. As an example, the 3D focusing performance of a CRL with Si material is predicted. Moreover, the results are compared with those obtained by the diffractive theory. It is shown that the method introduced in this paper is accurate enough.