Tunable bulk acoustic wave resonators with the induced piezoelectric effect in a ferroelectric

An electromechanical model of the piezoelectric effect induced in an acoustic resonator based on a ferroelectric film under the action of a dc or weak ac voltage is developed. The basic equation is obtained by expansion of the free energy in a series with respect to the electric induction and the mechanical deformation. The system of electromechanical equations for variable components of the induction and the mechanical deformation involves all linear terms along with the component of the electrostriction nonlinear with respect to the mechanical deformation. These electromechanical equations made it possible to obtain a one-dimensional approximation for the effective parameters of the material: the piezoelectric modulus and the elastic modulus as a function of the strength of the electric field applied to the acoustic layer. Expressions for the controlled electromechanical coupling coefficient and resonance frequencies of the tunable acoustic resonator are found. It is shown that the most significant parameter responsible for the tuning is the nonlinear electros-triction coefficient M, whose magnitude and sign were evaluated from the available experimental data.     

Measurements of attenuation and electromechanic coupling constant of piezoelectric films in microwave resonators

It was found that for arbitrary high overtone and thin film microwave resonators the results of the measurements of the difference between frequencies of resonance and antiresonance on any harmonic of the resonator together with the measurement of the frequency difference between the peculiarities on the frequency dependence of imagine part of the electric impedance of the resonator give a simple way of the evaluation of the losses in the materials composing resonator structures and of the evaluation of the electromechanical constant of the piezoelectric film exciting acoustic waves.     

The pure-shear mode solidly mounted resonator based on c-axis oriented ZnO film

In this paper, we fabricate a pure-shear mode film bulk acoustic resonator based on c-axis oriented ZnO film. The resonator is consisted of an in-plane electrode, a highly c-axis oriented ZnO film and a SiO₂/W Bragg reflector. The shear mode wave is excited by the lateral electric field. The resonator works in a pure-shear mode with the resonance frequency near 1.5 GHz and the Q-factor of 479 in air. There is no obvious longitudinal mode resonance in the frequency response, which can be explained that the electric field component normal to the surface is very weak and the Bragg reflector has the effective frequency selectivity for the shear mode. Importantly for sensors, the immersion into de-ionized water and glycerol liquid still allows for a Q-factor up to 335 and 220, respectively. This resonator shows the potential as mass loading sensors for biochemical application.     

The impact of the neck material on the sound absorption performance of Helmholtz resonators

Helmholtz resonators with sound absorption materials filling the neck may have an improved sound absorption capacity. In this work, parallel perforated ceramics with different perforation diameters were installed into the neck of a Helmholtz resonator to improve its acoustic impedance to simultaneously achieve a better acoustic absorption coefficient and a wider absorption bandwidth. An experimental system was built to investigate the effect of the perforation diameters on the sound absorption performance of the resonator. It is found that nonlinear effects near the resonance frequency affect the resonator?s neck mouth impedance and further its sound absorption performance significantly. For frequency range 50–500 Hz, a model of the neck mouth impedance is developed based on a revised Forchheimer relationship. The experimental results are in good agreement with the theoretical model.     

Nonlinear vibrations of electroelastic shells with relatively large shear deformations

A set of two-dimensional nonlinear equations for thin electroelastic shells in vibrations with moderately large thickness-shear deformations are obtained from the variational formulation of the three-dimensional equations of nonlinear electroelasticity by expanding the mechanical displacement vector and the electric potential into power series in the shell thickness coordinate and retaining lower order terms. As an example, the equations are used to study nonlinear thickness-shear vibrations of a circular cylindrical shell driven by an electric voltage. Nonlinear amplitude-frequency behavior of electric current near strong resonance is obtained.     

Nonlinear asymptotic impedance model for a Helmholtz resonator liner

The usual nonlinear corrections for a Helmholtz resonator type impedance do not seem to be based on a systematic asymptotic solution of the pertaining equations. We aim to present a systematic derivation of a solution of the nonlinear Helmholtz resonator equation, in order to obtain analytically expressions for impedances close to resonance, while including nonlinear effects. The amplitude regime considered is such that when we stay away from the resonance condition, the nonlinear terms are relatively small and the solution obtained is of the linear equation (formed after neglecting the nonlinear terms). Close to the resonance frequency, the nonlinear terms can no longer be neglected and algebraic equations are obtained that describe the corresponding nonlinear impedance. Sample results are presented including a few comparisons with measurements available in the literature. The validity of the model is understood in the near resonance and non-resonance regimes.     

Definition and measurement of the normalized electrical impedance of lossy piezoelectric resonators for ultrasonic transducers

Relevant equivalent circuit parameters and values of material constants of a piezoelectric resonator can be determined from measurements of its electrical input impedance as a function of frequency. The complex electrical impedance curves and the associated critical frequencies are the basis of this characterization by the piezoelectric resonance method. In this paper, the previously introduced concept of normalized electrical impedance of the lossy resonator, extended to include piezoelectric losses, is applied to the analysis of the effects of different types of intrinsic losses on peak values, bandwidths and characteristic frequencies. The resulting impedance patterns depend solely on the electromechanical coupling coefficient and the loss tangents, providing a useful tool for the analysis of low-Q resonators. The normalized impedance is experimentally evaluated from the basic data provided by an HP 4194A impedance analyser by means of specifically developed ASP programs.     

Theoretical modeling and experimental realization of dynamically magnified thermoacoustic-piezoelectric energy harvesters

Conventional thermoacoustic-piezoelectric (TAP) harvesters convert thermal energy, such as solar or waste heat energy, directly into electrical energy without the need for any moving components. The input thermal energy generates a steep temperature gradient along a porous medium. At a critical threshold of the temperature gradient, self-sustained acoustic waves are developed inside an acoustic resonator. The associated pressure fluctuations impinge on a piezoelectric diaphragm, placed at the end of the resonator. In this study, the TAP harvester is coupled with an auxiliary elastic structure in the form of a simple spring–mass system to amplify the strain experienced by the piezoelectric element. The auxiliary structure is referred to as a dynamic magnifier and has been shown in different areas to significantly amplify the deflection of vibrating structures. A comprehensive model of the dynamically magnified thermoacoustic-piezoelectric (DMTAP) harvester has been developed that includes equations of motions of the system?s mechanical components, the harvested voltage, the mechanical impedance of the coupled structure at the resonator end and the equations necessary to compute the self-excited frequencies of oscillations inside the acoustic resonator. Theoretical results confirmed that significant amplification of the harvested power is feasible if the magnifier?s parameters are properly chosen. The performance characteristics of experimental prototypes of a thermoacoustic-piezoelectric resonator with and without the magnifier are examined. The obtained experimental findings are validated against the theoretical results. Dynamic magnifiers serve as a novel approach to enhance the effectiveness of thermoacoustic energy harvested from waste heat by increasing the efficiency of their harvesting components.     

性能可调的纵向振动圆锥形超声变幅杆*

提出了一种基于压电效应的性能可调纵向振动圆锥形超声变幅杆,并对其振动性能进行了研究。该变幅杆由传统的圆锥形超声变幅杆和压电陶瓷材料组合而成。论文研究了圆锥变幅杆中压电陶瓷材料的厚度、位置以及电阻抗的改变对变幅杆性能参数的影响,并进行了数值模拟仿真及实验验证。结果表明,通过改变压电陶瓷材料的厚度、位置和电阻抗值,可以实现变幅杆共振频率和位移放大系数的改变。理论计算结果与数值模拟值和实验测试值符合得很好。     

Effect of resonator dimensions on nonlinear standing waves

An investigation of the effect of resonator dimensions on nonlinear standing waves in shaped resonators is conducted. Simple forms of the shear viscosity term in the momentum equations are developed for an axisymmetric (2D) resonator and a low aspect ratio rectangular (3D) resonator. The cross sections of the resonators are exponentially expanded and the one-dimensional wave equations are solved by using the Galerkin's method. The quality factors, pressure waveforms, compression ratios, and resonance frequencies are calculated for different dimensionless cross sections and lengths of the resonators. The results show that, apart from the resonator length, the ratio of the cross-section dimension to the length of the resonator is an important parameter. If the ratio is greater than 0.04, the characteristics of the shaped resonator are not affected significantly. However, when the ratio is less than 0.01, the resonance becomes weak, the compression ratio drops substantially, and the frequency response changes as well.     

高次谐波体声波谐振器的有效机电耦合系数

高次谐波体声波谐振器HBAR (High-overtone Bulk Acoustic Resonator)由基底、压电薄膜和上下电极组成,系统地研究了它们的结构参数(厚度)和性能参数(特性阻抗)对HBAR的重要性能参数有效机电耦合系数K_eff2的影响。在谐振频率附近,通过将HBAR的分布参数等效电路简化为集总参数等效电路得到了它们之间的关系表达式,分析了K_eff2在所关心频率最近谐振点的变化情况。结果表明,保持压电薄膜厚度不变,连续增加基底厚度,K_eff2呈振荡(非单调)下降,当基底厚度达到一定值时K_eff2与厚度成反比下降;保持基底厚度不变,连续增加压电薄膜厚度,K_eff2的峰值随基底和压电层的特性阻抗之比增加快速下降,到达极小值后缓慢增加;选择低阻抗的熔融石英作为基底可以获得较大的K_eff2;与Al电极相比,Au电极选择适当厚度可以获得较高的K_eff2。上述揭示的一些规律为HBAR的优化设计提供了理论依据。      

Improving low-frequency sound absorption of micro-perforated panel absorbers by using mechanical impedance plate combined with Helmholtz resonators

The traditional Micro-perforated plate (MPP) is a kind of clean and non-polluting absorption structure in the middle and high frequency and has been widely used in the field of noise control. However, the sound absorption performance is dissatisfied at low frequencies when the air-cavity depth is restricted. In this paper, a mechanical impedance plate (MIP) is introduced into the traditional MPP structure and a Helmholtz resonator is attached to the MIP. Mechanical impedance plate (MIP) provides a good absorption at low frequency by using mechanism of mechanical resonance and the acoustic energy is dissipated in the form of heat with viscoelastic material. Helmholtz resonator can fill in the defect of the poor absorption effect between the Micro-perforated plate (MPP) and the mechanical impedance plate (MIP). The acoustic impedance of the proposed sound absorber is investigated by using acoustic electric analogy method and impedance transfer method. The influence of the tube’s length of Helmholtz resonator and the number of Helmholtz resonator on the sound absorption is studied. The corresponding results are in agreement with the theoretical calculation and prove that the composite structure has the characteristics of improving the low frequency sound absorption property.     

Effects of mode coupling on the admittance of an AT-cut quartz thickness-shear resonator

We study the effects of couplings to flexure and face-shear modes on the admittance of an AT-cut quartz plate thickness-shear mode resonator. Mindlin’s two-dimensional equations for piezoelectric plates are employed. Electrically forced vibration solutions are obtained for three cases: pure thickness-shear mode alone; two coupled modes of thickness shear and flexure; and three coupled modes of thickness shear, flexure, and face shear. Admittance is calculated and its dependence on the driving frequency and the length/thickness ratio of the resonator is examined. Results show that near the thickness-shear resonance, admittance assumes maxima, and that for certain values of the length/thickness ratio, the coupling to flexure causes severe admittance drops, while the coupling to the face-shear mode causes additional admittance changes that were previously unknown and hence are not considered in current resonator design practice.     

Propagation of waves and chaos in transmission line with strongly anharmonic dangling resonator

Delayed differential equation of motion with multiple lags is derived for an anharmonic stub resonator coupled to a monomode transmission line. Transmission and reflection coefficients are found analytically in the harmonic approximation. Nonlinear response of the system is analysed by an electric circuit obeying the same equations of motion. Enhanced second harmonic generation is found at the frequencies, which in the harmonic approximation correspond to the zeros of transmission. An aperiodic (chaotic) response is found mainly in the frequency range close to the resonance of the dangling resonator. Zeros of transmission and total transmissions are shown to be lifted by the anharmonicity nearly in the same frequency region. Higher harmonics are preferentially transmitted at the zero transmission points in the presence of anharmonicity. Received 14 March 2002 / Received in final form 25 November 2002 Published online 14 March 2003     

Dynamic modeling of thickness-mode piezoelectric transducer using the block diagram approach

This paper aims to provide an alternative method to determine the characteristics of a piezoelectric transducer from measurement. A block diagram approach is proposed to analyze the dynamic characteristics of a thickness-mode piezoelectric transducer at its resonance frequency. Based on the feedback loop framework, the input-output relations of the electromechanical interaction of the transducer are described in terms of linear block diagram models. Furthermore, the closed-loop relations from external force to vibration velocity and electric current from generated voltage are easily found by Mason’s rule to characterize the equivalent mechanical admittance and electrical impedance, respectively. An example of a Langevin transducer with 28.15 kHz resonance frequency is illustrated for dynamics analysis. The frequency responses of the piezoelectric transducer, resulting from a force and current input, are respectively measured to identify the system parameters of the feedback model. The experimental results demonstrate the effectiveness of the proposed method.     

Low-frequency shear parameters of liquid viscoelastic materials

An experimental study of the shear parameters of viscoelastic liquids is carried out by the acoustic resonance method based on the changes in the natural frequency and Q factor of a piezoelectric quartz resonator. The liquid to be studied is placed between a stationary quartz strap and the piezoelectric quartz crystal vibrating at the resonance frequency. For a set of drilling muds, the values of the real and imaginary shear moduli are obtained at a frequency of 74 kHz. The measurements are performed with a liquid layer thickness much smaller than the shear wavelength. It is shown that the shear modulus decreases with increasing strain amplitude. A cluster model based on the Isakovich-Chaban nonlocal diffusion theory is proposed for explaining the low-frequency viscoelastic relaxation process.     

Harvesting base vibration energy by a piezoelectric inverted beam with pendulum

We proposed a two-degrees-of-freedom inverted piezoelectric beam with pendulum to promote the performance of vibration energy harvesting. This configuration is composed of an inverted elastic beam and a pendulum attached to its free end. The electromechanical equations governing the nonlinear system were derived. The harmonic balance method(HBM)is applied to solve the equation and the results prove that there exists a 1:3 super-harmonic resonance. The simulation results show that owing to the particular nonlinearity, there appears a special bending effect in the amplitude-frequency response, i.e., bending right for the first natural frequency and left for the second natural frequency, which is beneficial for harvesting vibration energy. The HBM results are verified by the entity simulations. Furthermore, over a relatively wide range of power spectral density, it could reach a dense jumping and give a dense high pulse voltage.     

Effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator

A high-overtone bulk acoustic resonator(HEAR) is composed of a substrate,a piezoelectric film and upper and lower electrodes,the influences of their structure parameter(thickness) and performance parameter(characteristic impedance) on effective electromechanical coupling coefficient K_(eff)~2 are investigated systematically.The relationship between K_(eff)~2 and these parameters is obtained by a lumped parameter equivalent circuit instead of distributed parameter equivalent circuit near the resonant frequency,and K_(eff)~2 at the resonance frequency closest to the given frequency is analyzed.The results show that K_(eff)~2 declines rapidly and oscillatorily with the continuous increase of the substrate thickness when the piezoelectric film thickness is fixed,and decreases inversely proportion to the thickness when the substrate thickness is greater than a certain value.With the ratio of the characteristic impedance of the substrate to the piezoelectric layer increasing,the maximum of K_(eff)~2 obtained from the variation curve of K_(eff)~2 with the continuous increase of the piezoelectric film thickness decreases rapidly before reaching the minimum value,and later increases slowly.Fused silica with low impedance is appropriate as the substrate of HBAR to get a larger K_(eff)~2.Compared with Al electrode,Au electrode can obtain larger K_(eff)~2 when the appropriate electrode thickness is selected.The revealed laws above mentioned provide the theoretical basis for optimizing parameters of HBAR.     

Piezoelectric resonators with mechanical damping and resistance in current conduction

A novel design method for high Q piezoelectric resonators was presented and proposed using the 3-D equations of linear piezoelectricity with quasi-electrostatic approximation which include losses attributed to mechanical damping in solid and resistance in current conduction. There is currently no finite element sofware for estimating the Q of a resonator without apriori assumptions of the resonator impedance or damping. There is a necessity for better and more realistic modeling of resonators and filters due to miniaturization and the rapid advances in frequency ranges in telecommunication. We presented new three-dimensional finite element models of quartz and barium titanate resonators with mechanical damping and resistance in current conduction. Lee, Liu and Ballato’s 3-D equations of linear piezoelectricity with quasi-electrostatic approximation which include losses attributed to mechanical damping in solid and resistance in current conduction were formulated in a weak form and implemented in COMSOL. The resulting finite element model could predict the Q and other electrical parameters for any piezoelectric resonator without apriori assumptions of damping or resistance. Forced and free vibration analyses were performed and the results for the Q and other electrical parameters were obtained. Comparisons of the Q and other electrical parameters obtained from the free vibration analysis with their corresponding values from the forced vibration analysis were found to be in excellent agreement. Hence, the frequency spectra obtained from the free vibration analysis could be used for designing high Q resonators. Results for quartz thickness shear AT-cut and SC-cut resonators and thickness stretch poled barium titanate resonators were presented. An unexpected benefit of the model was the prediction of resonator Q with energy losses via the mounting supports.