提高红外器件磁控溅射沉积镀膜厚度均匀性的一种方法

介绍了一种提高红外器件磁控溅射沉积镀膜厚度均匀性的方法.这种方法被称为基片离心旋转法,是在保持磁控溅射靶不动及靶和样品台间距不变的情况下,通过样品台离心旋转的方法,补偿或改善圆形磁控靶在正对的基片上沿径向的溅射沉积不均匀分布,是一种动态沉积法.这种方法可以在不改变磁控靶结构的情况下大大提高磁控溅射沉积镀膜的厚度均匀性.     

磁控溅射技术的研究与应用

随着市场对各种新型功能薄膜需求的日益增加，磁控溅射技术在科学研究和工业生产领域获得迅速发展。本文介绍了磁控溅射技术的研究进展以及国内外利用磁控溅射技术在薄膜制备方面所取得的一些成果。     

真空磁控溅射镀膜设备及工艺技术研究

磁控溅射技术在薄膜制备领域广泛应用,适合的工艺和制造技术对磁控溅射镀膜有着重要的影响。介绍了用于薄膜电路的生产工艺流程以及由此而决定的设备组成及控制技术,并重点叙述了薄膜制备的方法、参数选择、设备设计方法。     

磁控溅射技术及其发展

磁控溅射技术可制备超硬膜、耐腐蚀摩擦薄膜、超导薄膜、磁性薄膜、光学薄膜,以及各种具有特殊功能的薄膜,在工业薄膜制备领域的应用非常广泛.本文着重介绍了磁控溅射技术原理、特点、磁控溅射技术的发展史及其发展趋势.     

磁控溅射台镀膜形貌及均匀性改善研究

针对目标磁控溅射台通孔结构侧壁覆盖能力差、镀膜均匀性差(8％左右)的问题进行设备优化改造;通过结构优化,其在高深宽比结构上的镀膜能力显著提升;同时将各类金属镀膜的均匀性指标提升至3.5％左右,提高金属薄膜性能可靠性,满足了工艺上各种高深宽比加工工艺的要求.     

磁控溅射二氧化硅薄膜的制备工艺

研究了在半绝缘ＧａＡｓ衬底上磁控溅射ＳｉＯ＿２薄膜的工艺技术。对影响生长薄膜的因素进行了实验分析，给出了生长速率、腐蚀速率及组分等参数与工艺条件的关系。实验证明，和其它镀膜技术相比，磁控溅射可以在更低的温度下制作致密、均匀、重复性好的ＳｉＯ＿２膜。     

交流磁控溅射技术及其应用

本文阐述了交流溅射技术的原理，特点及其应用。     

Thermal conductivity of AlN thin films deposited by RF magnetron sputtering

Aluminum nitride (AlN) film, which is being investigated as a possible passivation layer in inkjet printheads, was deposited on a Si (1 0 0) substrate at 400 °C by radio frequency (RF) magnetron sputtering using an AlN ceramic target. Dependence on various reactive gas compositions (Ar, Ar:H₂, Ar:N₂) during sputtering was investigated to determine thermal conductivity. The crystallinity, grain size, and Al–N bonding changes by the gas compositions were examined and are discussed in relation to thermal conductivity. Using an Ar and 4% H₂, the deposited AlN films were crystalline with larger grains. Using a higher nitrogen concentration of 10%, a near amorphous phase, finer morphology, and an enhanced Al–N bonding ratio were achieved. A high thermal conductivity of 134 W/mk, which is nine times higher than that of the conventional Si₃N₄ passivation film, was obtained with a 10% N₂ reactive gas mixture. A high Al–N bonding ratio in AlN film is considered the most important factor for higher thermal conductivity.     

RF磁控溅射制备N掺杂Cu2O薄膜及光学特性研究

利用射频(RF)磁控溅射沉积技术,采用Cu2O陶瓷靶作为溅射靶,在N2和Ar气的混合气氛下制备了Cu2O薄膜。通过改变衬底温度和N2流量,研究了RF磁控溅射沉积法对Cu2O薄膜的生长行为、物相结构、表面形貌及光学性能的影响。结果表明,衬底温度为300℃时,低N2流量(12sccm)下沉积的薄膜结构为Cu2O和CuO的混合相,N2流量增大至12sccm时薄膜结构转变为单相的Cu2O;不同N2流量下制备的薄膜均呈现三维的结核生长模式,其表面粗糙度的均方根(RMS)值依赖于N2流量,低N2流量下薄膜表面粗糙度的RMS值随N2流量的增大而增大,高N2流量下,RMS值随N2流量的增大而减小,并在一定N2流量范围内趋于稳定;不同N2流量下制备的薄膜均在475nm附近出现发光峰,峰的相对强度随N2流量的增加而减弱,峰位随N2流量的增加出现蓝移,薄膜的光学带隙Eg约为(2.61±0.03)eV。     

Enhanced photoluminescence properties of Cu-doped ZnO thin films deposited by simultaneous RF and DC magnetron sputtering

Copper (Cu)-doped ZnO thin films were grown on unheated glass substrates at various doping concentrations of Cu (0, 5.1, 6.2 and 7.5 at%) by simultaneous RF and DC magnetron sputtering technique. The influence of Cu atomic concentration on structural, electrical and optical properties of ZnO films was discussed in detail. Elemental composition from EDAX analysis confirmed the presence of Cu as a doping material in ZnO host lattice. XRD patterns show that the films were polycrystalline in nature with (002) as a predominant reflection of ZnO exhibited hexagonal wurtzite structure toward c-axis. From AFM analysis, films displayed needle-like shaped grains throughout the substrate surface. The electrical resistivity was found to be increased with increase of Cu content from 0 to 7.5 at%. Films have shown an average optical transmittance about 80% in the visible region and decreased optical band gap values from 3.2 to 3.01 eV with increasing of Cu doping content from 0 to 7.5 at% respectively. Furthermore, remarkably enhanced photoluminescence (PL) properties have been observed with prominent violet emission band corresponding to 3.06 eV (405 nm) in the visible region through the increase of Cu doping content in ZnO host lattice.     

退火处理对磁控溅射制备Ga掺杂ZnO薄膜性能的影响

采用磁控溅射法在普通玻璃上制备了Ga掺杂ZnO(GZO)薄膜,研究了退火处理对GZO薄膜组织结构、表面形貌及光电性能的影响,并利用扫描电子显微镜、X射线衍射仪、紫外分光光度计、四探针测试仪等对GZO薄膜的表面形貌、晶体结构、透光率及电阻率等进行测量与表征。结果表明:400~800℃退火对GZO薄膜的生长方式影响较小,所制薄膜均在(002)晶向沿c轴择优取向,退火温度对薄膜表面形貌影响较大,退火温度为600℃时,薄膜表面致密、平整,结晶质量最好,薄膜的透光率超过95%,电阻率最低为4.9×10~(-4)?·cm。     

Optical and structural properties of CuCrO2 thin films on c-face sapphire substrate deposited by reactive RF magnetron sputtering

Reactive sputtering with Ar/N₂ mixture gas was introduced to improve stoichiometry of p-type transparent CuCrO₂ films, and effects of N₂ partial pressure ratio (α_N) on optical and structural properties were investigated. Film composition was changed from Cu rich (i.e. Cr poor) to Cr rich (i.e. Cu poor) by N₂ addition, and the stoichiometric film was grown at α_N of about 20%. Although N atoms were not incorporated into the films from analyses of crystal structure and chemical bonding state, both transmittance from visible to near-infrared wavelength and crystallinity were improved at α_N up to 10%. These improvements were attributed to suppression of the CuO formation and promotion of the O-Cu-O dumbbell bonds formation. This was confirmed by the decrease of diffraction intensity from CuO and the increase of vibrational intensity corresponding A_1g mode. From these results, it can be considered that N atoms decreased not only Cu but also excess O in the film. At α_N of 20% or above, transmittance at wavelength of 450 nm and crystallinity deteriorated. This is supposed that excessive N₂ addition probably generated both O and Cu deficiencies. As a result, it was found that slightly Cu-rich composition is suitable to obtain high-transparency CuCrO₂ thin films for practical use.     

Properties of V–Ce mixed-oxide thin films deposited by RF magnetron sputtering

Thin films of vanadium cerium mixed oxides are good counter-electrodes for electrochromic devices because of their passive optical behavior and very good charge capacity. We deposited thin films of V–Ce mixed oxides on glass substrates by RF magnetron sputtering under argon at room temperature using different power settings. The targets were pressed into pellets of a powder mixture of V₂O₅ and CeO₂ at molar ratios of 2:1, 1:1, and 1:2. For a molar ratio of 2:1, the resulting crystalline film comprised an orthorhombic CeVO₃ phase and the average grain size was 89 nm. For molar ratios of 1:1 and 1:2, the resulting films were completely amorphous in nature. Scanning electron microscopy images and energy-dispersive X-ray spectroscopy data confirmed these results. The optical properties of the films were studied using UV-Vis-NIR spectrophotometry. The transmittance and indirect allowed bandgap for the films increased with the RF power, corresponding to a blue shift of the UV cutoff. The average transmittance increased from 60.9% to 85.3% as the amount of CeO₂ in the target material increased. The optical bandgap also increased from 1.94 to 2.34 eV with increasing CeO₂ content for films prepared at 200 W. Photoacoustic amplitude (PA) spectra were recorded in the range 300–1000 nm. The optical bandgap was calculated from wavelength-dependent normalized PA data and values were in good agreement with those obtained from UV-Vis-NIR data. The thermal diffusivity calculated for the films increased with deposition power. For thin films deposited at 200 W, values of 53.556×10⁻⁸, 1.069×10⁻⁸, and 0.2198×10⁻⁸ m²/s were obtained for 2:1, 1:1, and 1:2 V₂O₅/CeO₂, respectively.     

射频磁控溅射制备钛酸锶钡薄膜的研究进展

综述了射频磁控溅射制备钛酸锶钡(BST)薄膜的国内外研究动态,详细阐述了溅射工艺参数(电极、溅射气压、氧分压、温度)对BST薄膜微结构和电性能的影响,提出了射频磁控溅射制备BST薄膜中亟待解决的问题。     

Photoelectric properties of ITO thin films deposited by DC magnetron sputtering

As anti-reflecting thin films and transparent electrodes of solar cells,indium tin oxide（ITO） thin films were prepared on glass substrates by DC magnetron sputtering process.The main sputtering conditions were sputtering power,substrate temperature and work pressure.The influence of the above sputtering conditions on the transmittance and conductivity of the deposited ITO films was investigated.The experimental results show that, the transmittance and the resistivity decrease as the sputtering power increases from 30 to 90 W.When the substrate temperature increases from 25 to 150℃,the transmittance increases slightly whereas the resistivity decreases.As the work pressure increases from 0.4 to 2.0 Pa,the transmittance decreases and the resistivity increases.When the sputtering power,substrate temperature and work pressure are 30 W,150℃,0.4 Pa respectively,the ITO thin films exhibit good electrical and optical properties,with resistivity below 10^-4Ω·cm and the transmittance in the visible wave band beyond 80%.Therefore,the ITO thin films are suitable as transparent electrodes of solar cells.     

用直流磁控溅射法制备的ＩＴＯ薄膜的光电性能研究

用直流磁控溅射法将ＩＴＯ薄膜制备在玻璃基片上以作为太阳电池的透明电极。通过改变溅射功率、基片温度和工作气压来研究它们对所沉积的ITO薄膜的透过率和电导率的影响。实验结果表明：当溅射功率从30W增加到90W时,薄膜的透过率和电阻率都将减小;当基片温度从25℃ 增加到 150℃时,透过率稍微有点增大但电阻率减小;当工作气压从0.4Pa 增大到2.0Pa时,透过率减小,但电阻率增大。因此,在溅射功率为30W、基片温度为150℃、工作气压为0.4Pa 时,ITO薄膜有比较好的光电性能,其电阻率小于10-4 Ω•cm ,在可见光波段的透过率大于80%,适合于作为太阳电池的透明电极。     

RF磁控溅射功率对ZnO:Al薄膜结构和性能的影响

采用RF磁控溅射技术以ZnO:Al2O3(2 wt%Al2O3)为靶材在石英玻璃衬底上制备多晶ZnO:Al(AZO)薄膜,通过XRD、AFM、AES以及Hall效应、透射光谱、折射率等手段研究了RF溅射功率(50～300 W)对薄膜的组织结构和电学,光学性能的影响.分析表明:所制备的AZO薄膜具有c轴择优取向,并且通过对不同功率下薄膜载流子浓度与迁移率的研究发现对于室温下沉积的AZO薄膜,晶粒间界中的O原子吸附是影响薄膜电学性能的主要因素.同时发现当功率为250 W时薄膜的电阻率降至最低(3.995×10-3 Ω·cm),可见光区平均透射率为91%.