CO2激光-化学腐蚀制作金阵列微电极

微电极的制作是微流控芯片电化学检测的关键技术.本文提出CO2激光烧蚀结合化学腐蚀快速制作微流控芯片阵列微电极的方法.在溅射Au/Cr的玻璃基片上涂敷指甲油作牺牲层,利用CO2激光烧蚀开窗口,经化学腐蚀后获得阵列电极,电极宽度为100μm.考察了激光加工参数及牺牲层对电极加工质量的影响,对由键合包封制作的微流控芯片,循环伏安及流动注射分析测试表明,该电极芯片可用于微流控芯片的安培检测.     

一种玻璃微流控芯片的实用制作工艺研究

本文提出了一种在商品化的SG4009玻璃上制作50×50 mm微流控芯片的方法。SG4009玻璃表面有厚度570 nm的光刻胶S-1085和厚度145 nm的Cr层组成的掩蔽层,省去制作掩蔽层的时间和设备,降低了生产成本,缩短了生产周期。对芯片制作过程中的一些问题进行分析研究,提出相应的解决方案,保证了芯片的制作质量。     

聚合酶链式反应微流控芯片的准分子激光制备和应用研究

摘要采用价格便宜的聚甲基丙烯酸甲酯(PMMA)代替价格昂贵的硅或玻璃作为聚合酶链式反应(PCR)微流控芯片的基片材料,采用柔性大且自动化程度高的准分子激光微加工方法代替加工工艺复杂的光刻化学腐蚀方法,在19 kV和18 mm/min的优化加工参数下,在48 mm×67 mm×1 mm的PMMA基片上制备出20个循环的PCR微流控芯片. 芯片微通道横截面呈梯形,底面光滑. 微通道宽104 μm,深56 μm,长2 060 mm,加工耗时约110 min. 该芯片和相同尺寸的盖片在160 N和105 ℃条件下通过热压经20 min键合在一起,键合强度为0.85 MPa. 键合后的芯片和温控系统集成在一起,采用比例积分微分(PID)方法得到的控温精度为±0.2 ℃,采用红外热像仪得到的相邻温区间的温度梯度分别为16.5和22.2 ℃,最后利用该芯片在对170 bp的DNA片段实现了体外扩增.     

玻璃基质微流控芯片的室温键合技术

芯片键合是微流控芯片加工的一个重要步骤.目前玻璃芯片的键合多采用高温键合技术(500~650℃).     

键合方法对聚二甲基硅氧烷液滴型微流控芯片的影响

液滴型微流控芯片表面性质是影响其性能的重要因素. 研究了不同键合方法对基于聚二甲基硅氧烷(PDMS)的液滴型微流控芯片微管道表面性质的影响, 并分别观察和评价了不同键合方法所制作液滴型微流控芯片应用于制备油包水和水包油两种液滴分散体系的效果. 结果显示热扩散键合方法适用于制作油包水型PDMS液滴型微流控芯片, 而等离子键合方法制作的PDMS芯片适于形成水包油型的液滴分散体系.     

微流控电阻抗检测系统构建及其应用

凝血时间检测主要用于凝血障碍性疾病的初步诊断、抗凝药物的监测以及外科手术前的评估,是医生对患者自身凝血功能进行评价的一项重要指标。本文应用微流控电阻抗技术,提出了一种基于叉指电极的微流体凝血时间检测方法。使用软刻蚀方式制作微流控芯片,将固化后带有微通道的聚二甲基硅氧烷(PDMS)与带有刻蚀电极的导电玻璃键合,搭建微流控电阻抗检测系统。本实验通过对血浆活化部分凝血活酶时间(APTT)的检测,得出血液凝固过程中阻抗值的变化曲线,引入微积分概念,确定血液凝固时间。     

简易型微流控芯片捕获循环肿瘤细胞的研究

本研究以循环肿瘤细胞(乳腺肿瘤细胞)为研究对象,以聚二甲基硅氧烷(PDMS)、双面粘性薄膜(DSA)、玻片为原材料,采用激光雕刻技术制作微流控芯片,结合巯基-马来酰亚胺基团硅烷化偶联法和免疫荧光技术进行芯片内捕获检测实验,并使用外周血肿瘤细胞来验证此微流控芯片的实用性,使用具有高速摄像功能的荧光显微镜进行镜下观察及拍摄. 成功构建了一种简易型微流控芯片系统,利用此系统可实现对乳腺肿瘤细胞(92±3)%的捕获率,对外周血肿瘤细胞(88±3)%的捕获率,而且芯片的制作工艺简单,对实验仪器要求低,1 min内即可制作完成,简化了制作过程,弥补了传统光刻工艺复杂繁琐的不足,为临床检测疾病的发生与发展提供了新的研究方向.     

激光诱导荧光微流控芯片分析仪的研制

研制了一种基于激光诱导荧光检测方法的微流控芯片分析仪。该分析仪使用玻璃基质聚二甲基硅氧烷(PDMS)微流控芯片,可一次性进行12通道的电泳分离实验。仪器采用共聚焦式光路结构,并可通过检测由微流控芯片反射的激光信息,控制步进电机实现芯片的自动精确定位。实验结束自动保存数据,绘制分离图谱。。对9种不同长度的50 bp DNA Ladder片段进行电泳分离及数据分析,耗时在5 min内,且分离效果良好。     

微流控SERS芯片的设计制备及其在细菌检测中的应用

微流控芯片分析平台与表面增强拉曼散射(Surface enhanced Raman scattering,SERS)光谱分析方法结合,充分利用了SERS法所具备的样品前处理简便、检测无损、成分辨识度高以及适宜水环境检测等优点,在生化分析检测领域备受关注。微流控SERS芯片设计及芯片上SERS增强基质的制备是构建微流控SERS芯片分析方法和系统的关键,也是提高检测灵敏度和可重复性的核心问题。该文在介绍微流控SERS芯片的基本构型和功能的基础上,重点综述了微流控SERS芯片上SERS基质的制备方法及其测试效果。基于微电子机械系统(Micro-Electro-mechanical-System,MEMS)加工技术制备的SERS基质,具有纳米粒径有序可控、便于集成制备但增强基质材料种类有限的特点;基于化学沉积和自组装等理化方法制备的SERS基质具有基质种类易拓展、成本低、与微流控通道结合方法灵活等特点。在这些基础上构建的微流控SERS芯片及其分析测试方法和系统,在细菌等许多生化检测领域显示出强大的发展潜力。     

微泵驱动的微流控芯片流动注射气体扩散分离系统的研究(英文)

本文提出一种毛细-蒸发作用力微泵作为液流驱动力的微流控芯片流动注射气体扩散分离检测系统,该系统可以连续、选择性地检测溶液中的NH+4。微流控芯片为六层结构,包含五层聚二甲基硅氧烷(PDMS)及一层玻璃。采用PDMS加工透气膜,并与其它PDMS层和玻璃层通过等离子体处理后封接。液芯波导管用作检测流通池,以提高检测光程。通过检测溶液中NH+4验证了微流控流动注射系统的性能。系统的检出限(3σ)为40μmol·L-1,分析通量可达60h-1,试样消耗仅100nL。     

Rapid fabrication of microfluidic devices in poly(dimethylsiloxane) by photocopying

A very simple and fast method for the fabrication of poly(dimethylsiloxane) (PDMS) microfluidic devices is introduced. By using a photocopying machine to make a master on transparency instead of using lithographic equipment and photoresist, the fabrication process is greatly simplified and speeded up, requiring less than 1.5 h from design to device. Through SEM characterization, any micro-channel network with a width greater than 50 microm and a depth in the range of 8-14 microm can be made by this method. After sealing to a Pyrex glass plate with micromachined platinum electrodes, a microfluidic device was made and the device was tested in FIA mode with on-chip conductometric detection without using either high voltage or other pumping methods.     

Planar thin film device for capillary electrophoresis

Hollow tubular microfluidic channels were fabricated on quartz substrates using sacrificial layer, planar micromachining processes. The channels were created using a bottom-up fabrication technique, namely patterning a photoresist/aluminum sacrificial layer and depositing SiO(2) over the substrate. The photoresist/aluminum layer was removed by etching first with HCl/HNO(3), followed by etching in Nano-Strip, a more stable form of piranha (H(2)SO(4)/H(2)O(2)) stripper. Rapid separation of fluorescently labeled amino acids was performed on a device made with these channels. The fabrication process presented here provides unique control over channel composition and geometry. Future work should allow the fabrication of highly complex and precise devices with integrated analytical capabilities essential for the development of micro-total analysis systems.     

Fast production of microfluidic devices by CO2 laser engraving of wax‐coated glass slides

Glass is one of the most convenient materials for the development of microfluidic devices. However, most fabrication protocols require long processing times and expensive facilities. As a convenient alternative, polymeric materials have been extensively used due their lower cost and versatility. Although CO₂ laser ablation has been used for fast prototyping on polymeric materials, it cannot be applied to glass devices because the local heating causes thermal stress and results in extensive cracking. A few papers have shown the ablation of channels or thin holes (used as reservoirs) on glass but the process is still far away from yielding functional glass microfluidic devices. To address these shortcomings, this communication describes a simple method to engrave glass‐based capillary electrophoresis devices using standard (1 mm‐thick) microscope glass slides. The process uses a sacrificial layer of wax as heat sink and enables the development of both channels (with semicircular shape) and pass‐through reservoirs. Although microscope images showed some small cracks around the channels (that became irrelevant after sealing the engraved glass layer to PDMS) the proposed strategy is a leap forward in the application of the technology to glass. In order to demonstrate the capabilities of the approach, the separation of dopamine, catechol and uric acid was accomplished in less than 100 s.     

Rapid prototyping of poly(methyl methacrylate) microfluidic systems using solvent imprinting and bonding

We have developed a method for rapid prototyping of hard polymer microfluidic systems using solvent imprinting and bonding. We investigated the applicability of patterned SU-8 photoresist on glass as an easily fabricated template for solvent imprinting. Poly(methyl methacrylate) (PMMA) exposed to acetonitrile for 2 min then had an SU-8 template pressed into the surface for 10 min, which provided appropriately imprinted channels and a suitable surface for bonding. After a PMMA cover plate had also been exposed to acetonitrile for 2 min, the imprinted and top PMMA pieces could be bonded together at room temperature with appropriate pressure. The total fabrication time was less than 15 min. Under the optimized fabrication conditions, nearly 30 PMMA chips could be replicated using a single patterned SU-8 master with high chip-to-chip reproducibility. Relative standard deviations were 2.3% and 5.4% for the widths and depths of the replicated channels, respectively. Fluorescently labeled amino acid and peptide mixtures were baseline separated using these PMMA microchips in <15s. Theoretical plate numbers in excess of 5000 were obtained for a approximately 3 cm separation distance, and the migration time relative standard deviation for an amino acid peak was 1.5% for intra-day and 2.2% for inter-day analysis. This new solvent imprinting and bonding approach significantly simplifies the process for fabricating microfluidic structures in hard polymers such as PMMA.     

Study of SU-8 to make a Ni master-mold: Adhesion, sidewall profile, and removal

For disposable microfluidic devices, easy and inexpensive fabrication is essential. Consequently, replication of microfluidic devices, using injection molding or hot embossing, from a master-mold is widely used. However, the conventional master-mold fabrication technique is unsatisfactory in terms of time and costs. In this regard, direct Ni growth (electroplating) from a back plate is promising when the photoresist is well-defined. Here, we demonstrate the use of SU-8 as a photoresist to define the Ni-growth region. We accomplish this application by focusing on the adhesion, the sidewall profile, and the removal of SU-8: the adhesion is enhanced by controlling the exposure dose, the soft-baking time, and by choosing the adhesion-promoting layer; the sidewall profile is regulated by selecting the intensity of each exposed wavelength, showing an aspect ratio of up to 20.9; and, easy removal is achieved by choosing a proper photoresist-stripper. Using the master-mold fabricated by this method, we test the mechanical stability of the features according to the aspect ratio and length; in the hot embossing process, the features are stable in the aspect ratio of up to 5.8 at a length of 200 microm. In addition, the plastic devices fabricated from this method are applied to the passive stop valves, showing a capillary pressure (-0.2 to -7.2 kPa).     

Fabrication improvements for thermoset polyester (TPE) microfluidic devices

Thermoset polyester (TPE) microfluidic devices were previously developed as an alternative to poly(dimethylsiloxane) (PDMS) devices, fabricated similarly by replica molding, yet offering stable surface properties and good chemical compatibility with some organics that are incompatible with PDMS. This paper describes a number of improvements in the fabrication of TPE chips. Specifically, we describe methods to form TPE devices with a thin bottom layer for use with high numerical aperture (NA) objectives for sensitive fluorescence detection and optical manipulation. We also describe plasma-bonding of TPE to glass to create hybrid TPE-glass devices. We further present a simple master-pretreatment method to replace our original technique that required the use of specialized equipment.     

高聚物微流控芯片镍阳模的简易加工技术

提出了一种简便快速制作高聚物微流控芯片镍阳模的新方法。采用抛光镍片作为电铸基底,涂覆SU-8光胶层后,光刻得到SU-8微结构。以镍基片作为阳极,用16～30A/dm2的电流密度电解刻蚀5min,清除SU-8微结构间隙底部镍片表面的氧化物,并刻蚀得到10～20μm深的凹坑,有效地提高了随后电沉积镍结构和基底镍片间结合力。利用SU-8微结构作为电铸模板,以镍基片作为阴极,电铸5h后制得了微结构倾角为83°深宽比较大的镍阳模。实现了在普通化学实验室中长寿命镍阳模的制作。用热压法制得500多片聚甲基丙烯酸甲酯(PMMA)聚合物芯片,并成功用于DNA片段的分离。     

Microfluidic chip fabrication using hot embossing and thermal bonding of COP

The application of silicon mold inserts by micro‐hot embossing molding has been explored in microfluidic chip fabrication. For the mold insert, this study employed an SU‐8 photoresist to coat the silicon wafer. Ultraviolet light was then used to expose the pattern on the SU‐8 photoresist surface. This study replicates the microstructure of the silicon mold insert by micro‐hot embossing molding. Different processing parameters (embossing temperature, embossing pressure, embossing time, and de‐molding temperature) for the cycle‐olefin polymer (COP) film of microfluidic chips are evaluated. The results showed that the most important parameter for replication of molded microfluidic chip is embossing temperature. De‐molding temperature is the most important parameter for surface roughness of the molded microfluidic chip. The microchannel is bonded with a cover by thermal bonding processing to form the sealed microfluidic chip. The bonding temperature is the most important factor in the bonding strength of the sealed microfluidic chip. Copyright © 2009 John Wiley & Sons, Ltd.     

Disposable roll-to-roll hot embossed electrophoresis chip for detection of antibiotic resistance gene mecA in bacteria

We present a high-throughput roll-to-roll (R2R) manufacturing process for foil-based polymethyl methacrylate (PMMA) chips of excellent optical quality. These disposable, R2R hot embossed microfluidic chips are used for the identification of the antibiotic resistance gene mecA in Staphylococcus epidermidis. R2R hot embossing is an emerging manufacturing technology for polymer microfluidic devices. It is based on continuous feeding of a thermoplastic foil through a pressurized area between a heated embossing cylinder and a blank counter cylinder. Although mass fabrication of foil-based microfluidic chips and their use for biological applications were foreseen already some years ago, no such studies have been published previously.     

Polyimide and SU-8 microfluidic devices manufactured by heat-depolymerizable sacrificial material technique

The following paper describes a sacrificial layer method for the manufacturing of microfluidic devices in polyimide and SU-8. The technique uses heat-depolymerizable polycarbonates embedded in polyimide or SU-8 for the generation of microchannels and sealed cavities. The volatile decomposition products originating from thermolysis of the sacrificial material escape out of the embedding material by diffusion through the cover layer. The fabrication process was studied experimentally and theoretically with a focus on the decomposition of the sacrificial materials and their diffusion through the polyimide or SU-8 cover layer. It is demonstrated that the sacrificial material removal process is independent of the actual channel geometry and advances linearly with time unlike conventional sacrificial layer techniques. The fabrication method provides a versatile and fast technique for the manufacturing of microfluidic devices for applications in the field of microTAS and Lab-on-a-Chip.