Collapse in the Stoner-Wohlfarth noninteracting-particle model

A theory of Mössbauer spectra of noninteracting Stoner-Wohlfarth (SW) particles interacting with rf magnetic fields is developed. The theory makes it possible to calculate the absorption spectra for arbitrary frequency and amplitude of the rf field. The main features of the Stoner-Wohlfarth model are discussed. The Liouville superoperator formalism is used to generalize the results to the case of arbitrarily time-varying hyperfine fields at a nucleus. To understand the qualitative features of the collapse effect that are observed in the Mössbauer spectra of SW particles the particular case of a circularly polarized hyperfine field is studied, and an analytical expression is obtained describing the Mössbauer spectra for this case. An analysis is also made for weak rf magnetic fields and in this case the resonance behavior of the Mössbauer lines is traced as a function of the frequency of the rf field.     

Gas molecule dissociation effect on rf discharge burning in low pressure ammonia

This Letter outlines the experimental study of molecule dissociation effect on rf capacitive discharge burning. We show that for each ammonia pressure value there exists some threshold rf voltage value below which the dissociation degree does not exceed 3%, but at higher rf voltage it grows to 30%. Increasing NH₃ dissociation degree accelerates the discharge current growth against rf voltage. The rf discharge remains in a weak-current α-mode at low as well as at high dissociation degree because all ammonia dissociation products possess ionization potentials exceeding that for NH₃.     

Elektrische Charakterisierung von Hochfrequenz-Niederdruck-Gasentladungen

In recent years there has emerged significant interest in low pressure radio frequency (rf) glow discharges which are used widely particulary in IC fabrication. Various parameters of the rf glow discharge have been found to be useful for its electrical characterization; however, there is no uniformity and agreement. Extensive experimental investigations on various discharge systems have shown, that the self-bias on the rf driven electrode, the complex conductivity and the breakdown characteristic are preferable parameters of rf discharges. Advantageously the self-bias and the complex conductivity should be presented in dependence on the pressure and the applied rf voltage. The discharge current cannot be measured quite accurately due to currents via leaky capacitors and the deviations from a sinusoidal form of the current due to nonlinearities.     

Self-consistent charge-up simulation for the microscopic feature of SiO2 layer in rf capacitive discharge

The charge-up simulation of the microscopic feature with SiO₂ layer was investigated in various conditions of rf capacitive discharge by using the three-dimensional (3-D) particle-in-cell (PIC) charge-up simulation coupled with the one-dimensional (1-D) particle-in-cell Monte Carlo collision (PIC-MCC) simulation of rf capacitive argon discharge. The result showed that the charge-up effect on the micro-trench was greatly influenced by the conditions of the gas pressure and the discharge voltage in rf capacitive discharge. Based on the analysis of the distributions of electrons and ions arriving at the substrate in various plasma conditions, the charge-up effect and its reduction mechanisms on the micro-trench of capacitive discharge were discussed. This article is expected to provide qualitative and quantitative insight for the understanding of charging and its reduction mechanism on many plasma processes performed by the rf capacitive discharge.     

氮气射频放电与直流放电PIC/MC模拟的比较

建立氮气容性射频等离子体过程的PIC/MC模型,将模拟结果与直流放电进行比较.结果表明:射频等离子体粒子(e,N₂⁺,N⁺)的平均密度较直流放电约大-个量级,在射频电极附近粒子(e,N₂⁺,N⁺)的平均能量比直流放电阴极附近的能量低3倍左右;密度偏低的原子离子N⁺在两电极附近具较高的能量,能量较低的分子离子N₂⁺在放电空间具较高密度,N₂⁺的密度大约是N⁺的6倍;计算的电子能量几率分布与测量结果-致.     

Analysis of macroparticle charging in the near-electrode layer of a high-frequency capacitive discharge

Spatial variation of dust particle charges are estimated numerically for typical laboratory experiment conditions in a radio-frequency (rf) capacitive discharge. The surface potentials of macroparticles levitating in the upper part of the near-electrode layer of the rf discharge are measured. A model is proposed for the formation of irregular dust oscillations due to stochastic motion of dust in the bulk of a spatially inhomogeneous plasma (in the presence of a dust charge gradient). This mechanism is used for analyzing the results of measurements of the amplitude of vertical vibrations of dust particles in the near-electrode layer of the rf discharge. It is found that the dust charge gradient may be responsible for the development of such vibrations.     

Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge

The gas heating mechanism in the pulse-modulated radio-frequency(rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature(T_g)in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that T_gdecreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the T_g, were studied.It was found that T_gdecreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the T_gcan be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from α to γ mode in the pulse-modulated rf discharge was investigated, the spatial distributions of T_gin the two modes show different features and the ion Joule heating is more important during the mode transition.     

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采用PIC-MC自洽模型,模拟了氮气电容性耦合射频放电的微观等离子体过程及带电粒子(e,N2+,N+)的行为。结果表明,离子(N2+,N+)的运动状态滞后瞬时射频电场的变化;在两极附近,N2+具较高密度,但能量较低,N+具较低的密度但能量较高,两者的密度差6倍左右。两种离子轰击射频电极的能量分布变化规律类似,随放电参数变化,离子(N2+,N+)能量变化显著,其密度变化不明显。模拟的电子能量几率分布与测量结果一致。     

Features of the α-γ transition in a low-pressure rf argon discharge

It is found that the region for the stable existence of the aregime of a radio-frequency (rf) discharge is bounded not only on the moderate-pressure side, but also on the low-pressure side. One feature of the α-γ transition in a low-pressure rf discharge is that the criterion for breakdown of the electrode sheath is not satisfied. It is shown that at low pressures the α-γ transition of an rf argon discharge takes place abruptly and exhibits hysteresis. At intermediate pressures the α-γ transition is continuous and lacks jumps; negative differential conductivity appears, double layers form, and nonmonotonic behavior of the plasma density is observed at the center of the discharge. The role of stochastic (collisionless) electron heating in sustaining an rf discharge at intermediate gas pressures is discussed. Zh. Tekh. Fiz. 68, 52–60 (May 1998)     

Analytical model for the behavior of electric fields in a collisional low-pressure RF discharge

A simple analytical model is presented making it possible to determine the amplitudes and phases of the rf field in the electrode sheaths and quasineutral plasma of an rf discharge in the presence of electronneural collisions. The collisional case ω≪ν is considered in detail. Measurements are also made of the electron temperature, plasma density, thickness of the electrode sheaths, and rf field amplitude in the quasineutral plasma of an rf discharge in argon. The rf field amplitudes predicted by this model are in satisfactory agreement with both our experimental data and the results of theoretical calculations of other authors. Kharkov State University, Kharkov. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, Vol. 41, No. 12, pp. 31–38, December, 1998.     

Radio-frequency ion source generating beams with an increased proton content

The results of experiments with an rf ion source generating a beam with an improved mass composition are reported. The proton content in the beam is increased by raising the rf power density in the discharge under the antenna and installing a magnetic filter near the plasma grid. Additional steps are taken to prevent the earlier observed degradation of the beam composition because of aluminum reduction on the inner surface of the ceramic discharge chamber and water release. Specifically, the chamber is lined with pyrolytic boron nitride sheets.     

RF generation of the plasma jet channel for the jet PCVD

Breakdown conditions for creation of the hollow cathode discharge in the nozzle passed through the rf powered electrode and creation of the plasma jet channel in PCVD reactor are studied. Pure nitrogen is used for measurements. The creation of jet channel is easier for smaller rf electrodes. The breakdown depends on the pressure and on the gas inflow rate. The plasma potential and the self-bias potential is influenced by the covering of reactor walls and the rf electrode by a dielectric layer.     

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N2-Ar射频放电等离子体广泛应用于微电子工业的刻蚀、氮化物薄膜的制备及金属表面氮化等技术领域。开发了N2-Ar混合气体容性耦合射频放电PIC/MC自洽模型,模型主要描述了e-,N2+,N+,Ar+等主要带电粒子的行为分布。等离子体的碰撞过程分别考虑了带电粒子(e-,N2+,N+,Ar+)与基态中性N2分子和Ar原子的21种碰撞反应过程。模拟结果表明,在纯N2及N2-Ar混合气体容性耦合射频放电中,各种带电粒子的数密度都在等离子体区达到最大值,且氮分子离子为主要粒子;在N2容性耦合射频放电中,加入10%氩气时,N+平均能量有所增加,在射频电极处两种氮离子(N2+,N+)高能粒子所占比例增加。本研究对认识N2-Ar射频放电等离子体过程微观机理具重要意义。     

Optical and electronic properties of hydrogenated amorphous silicon films deposited by square-wave modulated RF discharges of silane-he mixtures

The optoelectronic properties of a-Si: H films deposited under very different plasma conditions have been studied as functions of the square-wave modulation frequency of a 13.56 MHz rf discharge. Results for two extreme deposition conditions are presented. At both high and low deposition rates, the modulation of the rf discharge results in a negligible effect or a deterioration of the film properties, particularly the photoconductivity which we have found to be the most sensitive parameter. At high deposition rates, modulation of the discharge at 10 Hz results in the incorporation of particles into the film which produce enhanced absorption in the film. Therefore, for our reactor configuration, the modulation of the discharge does not produce an improvement but rather a degradation of the film properties.     

Evolution of discharge structure in capacitive radio-frequency atmospheric microplasmas

Conventional radio-frequency (rf) nonthermal atmospheric plasmas are generated in a millimeter gap. In this Letter, we present a self-consistent numerical study of rf atmospheric microplasmas in a submillimeter gap comparable to their sheath thickness. It is shown that the narrow electrode gap deforms the discharge structure, ultimately removing the bulk-plasma region and disabling electron trapping. Significantly, these properties permit rf atmospheric microplasmas to operate at very high current densities thus simultaneously achieving higher stability and greater chemical reactivity.     

Laser-excited dust lattice waves in plasma crystals

Laser-excited waves in a two-dimensional dust plasma crystal have been observed experimentally in a parallel plate rf discharge. The measured dispersion relation is compared with theoretical models. Agreement is found with dust lattice waves, whereas deviations from dust acoustic waves exist. From the dispersion relation of a dust lattice wave the screening of the particles in the rf sheath is determined.     

Modelling of Secondary Electron Impact on the Self-Consistent RF Bulk Plasma Description

The impact of a secondary electron beam, generated at the electrodes and accelerated in the sheaths, on the self-consistent treatment of the electron behaviour in an rf bulk plasma has been investigated by a parametric study. Source of electrons in the plasma are collisional ionization and secondary electron injection. Electrons are lost by ambipolar diffusion to the electrodes of a parallel plate rf discharge configuration. The non-stationary Boltzmann equation is used to determine self-consistently the rf field amplitude necessary for maintaining the steady-state rf bulk plasma as well as the time resolved behaviour of the electron energy distribution function and of all contributions to the electron particle and power balance, at given source rate and energy distribution of secondary electron injection.     

Ion bombardment of amorphous silicon films during plasma-enhanced chemical vapor deposition in an rf discharge

The characteristics of ion and electron fluxes to the surface of a growing silicon film are investigated in various rf discharge regimes in silane at frequencies of 13.56 MHz and 58 MHz in plasma-enhanced chemical vapor-deposition (PECVD) apparatus. The energy spectra of the ions and electrons bombarding the growing film are measured. The electronic properties of films grown under various degrees of ion bombardment are studied. The correlation of these properties with the ion parameters in the rf discharge plasma during film growth is discussed. Zh. Tekh. Fiz. 68, 52–59 (February 1998)     

射频辉光放电等离子体的电探针诊断及数据处理

Langmuir探针是等离子体诊断的一个重要方法.对探针I-V曲线进行求解二次微商是获得等离子体中的电子能量分布函数的关键.由Fourier变换导出一个求解微商的数值解方法.克服了现有方法所存在的缺点.实现了对探针I-V曲线求解二次微商的精确、自动运算.测量了硅烷射频辉光放电等离子体的平均电子能量(温度)和浓度随放电功率的变化. 关键词：     

Raman scattering in ion-implanted silicon exposed to rf-plasma treatment

The structural changes in implantation-amorphized silicon layers under radio-frequency (rf) discharge treatment, are studied by the Raman technique. The results are compared with those of thermally annealed samples. The rf treatment is shown to result in amorphous phase relaxation in silicon, while the thermal annealing converts a-Si into c-Si. The a-Si relaxation model under rf-plasma treatment is discussed.