磁控溅射CNx薄膜的附着力、粗糙度与衬底偏压的关系

对磁控溅射生长在单晶Si(001)衬底上的CNx薄膜的附着力、粗糙度与衬底偏压的关系进行了研究。CNx薄膜沉积实验在纯N2的环境下进行．衬底温度(Ts)保持在350℃．衬底偏压(Vb)在0～-150V之间变化。利用原子力显微镜(AFM)和划痕试验机来测量CNx薄膜的表面粗糙度及对衬底的附着力。AFM和划痕实验的结果显示衬底偏压Vb对CNx薄膜的附着力和表面粗糙程度的影响很大，在-100V偏压下生长的CNx薄膜表面最光滑(粗糙度最小)，同时对Si(001)衬底的附着力最好。最后根据实验结果确定了在单晶Si(001)衬底上生长光滑而且附着力好的CNx薄膜的最佳实验条件。     

低真空条件下制备的银薄膜的电阻率特性及结构

研究了在2.2 Pa低真空条件下用直流溅射法制备的银薄膜的电阻率特性和薄膜结构.实验表明,薄膜厚度对薄膜电阻率有显著影响,随膜厚的增加薄膜电阻率降低,在膜厚大于200 nm时趋于稳定,电阻率为2.54×10-8Ω.m.薄膜表面和晶粒间界对传导电子的散射导致了银薄膜电阻率的尺寸效应.研究结果表明,可以在2.2 Pa的低真空条件下制备金属银薄膜,将银靶用于目前大学物理实验课中金属薄膜制备及金属薄膜电阻率测量实验是可行的.     

用干涉方法测量薄膜应力

基于基片弯曲法和牛顿环的基本原理,使用He-Ne激光器、扩束镜、凸透镜和带分光镜的移测显微镜,搭建了薄膜应力测量装置.采用直流溅射法制备了厚度为30~144 nm的银薄膜,衬底采用厚度为0.15 mm、直径为18 mm的圆形玻璃片.实验发现,薄膜厚度对银薄膜的内应力有显著的影响,在薄膜厚度很小时,随着薄膜厚度的增加,应力迅速增大,达到最大值后,随着厚度的继续增加,薄膜应力下降较快并趋于稳定值.     

增加平面玻璃板的反射率测量不同浓度NaCl液体折射率

利用牛顿环干涉法分别测量了空气,水和不同溶度NaCl溶液的折射率。实验发现牛顿环中先后有空气薄膜和水薄膜时,干涉条纹变得模糊,尤其较大级次的条纹很难分辨,经研究发现增大牛顿环下表面玻璃板的反射率可提高条纹的清晰度,实验中在清晰度良好条件下用牛顿环干涉法测量了不同浓度NaCl溶液折射率,其实验结果与理论值符合的较好,其结果很大程度上扩充和丰富了大学物理和大学物理实验中的内容。     

用热应力法研究二氧化碲晶体表面连接层材料的特性

以声光晶体TeO_2为衬底,设计并研制了1 300~3 400nm波段超宽带减反射膜.从薄膜热应力理论出发,建立膜层热应力受力示意图,结合TeO_2晶体的特性和力矩判定方法,采用解析法逆向计算分析薄膜材料的热膨胀系数及杨氏模量.实验验证表明:所制备的膜层附着力在1300~3400nm波段平均透过率为96.8%;在相同工艺条件下,采用连接层所制备的薄膜附着力更好,可以解决脱膜问题,满足相应的附着力检测要求.     

用椭偏术研究与接触介质有关的贵金属的介电函数

为了研究接触介质对金属光学性质的影响，实验中使用具有不同折射率的梯形棱镜作为衬底，将金和银蒸发到棱镜底部，用椭偏术分别测量了薄膜在金属-空气、金属-衬底界面的介电函数.结果表明：无论在Drude区，还是在带间跃迁区，金属-衬底界面处薄膜介电函数不仅与金属-空气界面处的测量值不同，而且随衬底折射率改变而改变.在固体接触条件下获得的结果与其他作者在液体接触条件下获得的结果相一致，但尚难被现有机制所解释. 关键词：     

无规分形衬底上银薄膜的I-V特性

在无规分形结构的α氧化铝陶瓷断面上，用射频溅射法镀制了银薄膜，其Ｉ－Ｖ特性在空气中呈非线性行为，而在原位真空测量中表现为开关形式的电压击穿效应。基于衬底的结构特性，作者对上述现象作了合理的解释。     

无规分形衬底上银薄膜的I—V特性

在无规分形结构的α氧化铝陶新断面上，用射频溅射法镀制了银薄膜，其Ｉ－Ｖ特性在空气中呈非线性行为，而在原位真空测量中表现了为形关形式的电压击穿效应，基于衬底的结构特性，作者对上述现象作了合理的解释。     

利用高活性和重复性的银薄膜衬底SERS检测芥子气及其水解产物

通过化学浴沉积的方法制备了一种高SERS活性和重复性的银薄膜衬底。分别采用扫描电子显微镜和拉曼光谱研究了沉积时间对银薄膜微观形貌和SERS活性的影响, 优化的沉积时间为120分钟。利用优化的银薄膜衬底, 可以检测到10-9 M 的罗丹明分子的SERS谱图, 表明该银薄膜衬底具有很高的SERS活性。相同实验条件下, 在一片银薄膜衬底上任意选择16个点测试R6G的SERS谱图。分别计算了R6G的8个特征峰16次检测的相对标准偏差, 最大相对标准偏差小于13% 。实验结果表明, 该衬底具有很好的重复性, 可应用于SERS 的定量分析。采用优化的银薄膜衬底检测了不同浓度的芥子气及其水解产物硫二甘醇。分别结合芥子气和硫二甘醇的常规拉曼光谱和文献报道, 对它们的SERS谱图进行了指认和归属。20分钟内, 对芥子气和硫二甘醇的检测限可分别达到320 ppm和1 ppm (g/g)。     

生长温度对ZnO薄膜晶体质量和发光特性的影响

采用激光脉冲沉积法在Si(100)衬底上生长ZnO薄膜,衬底温度分别为室温,200℃,300℃,400℃和500℃.用X射线衍射仪、拉曼光谱、扫描电子显微镜对薄膜的微结构进行了测量,并测量了室温下薄膜的光致发光特性.结果表明,300℃时.ZnO具有最佳择优取向,随着衬底温度升高.衍射峰半峰全宽减小,薄膜晶粒尺寸增大,400℃时,薄膜具有各向等大的品粒尺寸.同时拉曼谱结果显示,薄膜内部的缺陷随衬底温度变化无明显差别,应力表现为张应力,400℃时应力最小,紫外发光峰在衬底温度为400℃时最强,而黄绿光带最弱.在减少薄膜缺陷,提高择优长向和晶粒尺寸的同时.使晶粒横向尺寸和纵向尺寸尽可能相同,可极大提高薄膜的发光特性.     

光学膜层激光损伤阈值均匀性的实验研究

 镀制了多种氧化物介质薄膜。用R-on-1方法测定了膜层的激光损伤阈值。引入数据处理方法，对测试数据进行分析。结果表明，基片清洗后，若放置一段时间再镀膜，则会影响到镀膜后膜层损伤阈值的均匀性，但对损伤阈值自身大小没有影响。测试激光参数对阈值均匀性也有一定影响。     

Experimental approach on interfacial properties for Cr/Al double nanometer films under different temperature environment mode

In this paper, a typical interfacial structure sample between the materials Cr and Al was fabricated. To investigate the interfacial characteristics, the mechanical properties of the Cr/Al double interfacial structure were tested using the nanoindenter and the nanoscratch. The test results show that both of the values are easily influenced by the different depth h. In the nanoscratch experiment, the bilayer films are set off as two groups, one of which is tested after the thermal cycling load while the other is not. The test results show that the interface formation and the binding force in the interface can be easily influenced by the difference thermal characteristic of the each single film. The elastic modulus and the hardness of the bilayer films are investigated using the nanoindentation.     

用表面磁光克尔效应实验系统测量铁磁性薄膜的磁滞回线

用自制的表面磁光克尔效应实验系统开发了研究性近代物理实验,测出铁磁性薄膜的磁滞回线,并求得克尔旋转角和克尔椭偏率.     

中频孪生磁控溅射WO3薄膜及变色性能研究

采用先进的中频孪生非平衡磁控溅射技术,以金属钨为靶材,制备非晶态WO3电致变色薄膜。用X射线衍射(XRD)、X射线光电子能谱(XPS)、紫外分光光度计等测试手段分析薄膜的结构、表面形貌、成分以及透射光谱特性。研究了氧气流量比及热处理温度对WO3薄膜变色性能的影响。结果表明,中频孪生非平衡磁控溅射技术是制备WO3变色薄膜的一种有效方法;室温条件下沉积获得的原始态薄膜为非晶态WO3;提高氧气流量比和适当热处理温度能有效改善薄膜的电致变色性能。实验中在较高氧气流量比,200℃热处理条件下制备的薄膜在380~780 nm的可见光范围内着色态和褪色态平均透光率差值高达50%以上,表现出较好的电致变色性能。     

Experimental and numerical approach on interfacial properties of W/Al bilayer films for electronic devices manufacturing

The aim of this article is to provide a systematic method for performing experimental tests and theoretical evaluations on interfacial adhesion properties of the W/Al bilayer thin films interface. Samples W/Al bilayer thin films assembly is deposited on the quartz glass by using radio frequency magnetron sputtering. Based on the analysis of the experimental indentation data, the elastic modulus and hardness of the sample are investigated. The test results show that both of the values are easily influenced by the indentation depth. At the meantime, a finite element model is built to simulate the interface mechanical properties. The analysis shows that stress is mainly centralized close to the indenter and the maximum stress occurs in the lower layer Al film, not in the upper W film. The comparison between the experiment and the simulation shows the validity of the test and the modeling of each other to a certain extent. The investigation builds a basis for future work such as the fabrication of W/Al bilayer thin films for micro/nano manufacturing.     

真空沉积法制备InSb纳米颗粒

采用真空沉积的方法在SiO₂基片上制备出了纳米InSb颗粒薄膜.利用原子力显微镜对4片样品表面进行分析,从其表面形貌图和三维图中可以观察到有粒径均匀的纳米InSb颗粒形成并且均匀地分布在SiO₂基片表面.实验表明,通过改变镀膜时间可以得到具有不同颗粒尺寸的InSb纳米颗粒,并且颗粒直径与沉积时间和厚度成正比.     

Test investigation on interfacial characteristics of Cr/Al nanofilms structure

The objective of this paper is to provide a systematic test for fabrication or evaluation of a bilayer film structure between Cr and Al in micro/nanoelectronic manufacturing. The Cr/Al bilayer film is fabricated by using the magnetron sputtering. To understand the basic mechanical properties of the Cr/Al bilayer films, the elastic modulus and the hardness of the sample are investigated by using a nanoindenter test. The test can show the changing trend of the Cr/Al sample structure. To investigate the integrating characteristics of the sample in progress, the effect of the thermal cycling loading and no-thermal cycling loading on the integrating force of the Cr/Al samples is tested by using nanoscratch. The interfacial binding force in the films can be obtained for understanding the integrating characteristics. It builds a basis for future work on progress investigation of physical property of Cr/Al bilayer film structure.     

Growth mechanism and stress relief patterns of Ni films deposited on silicone oil surfaces

The growth mechanism and stress relief patterns of nickel (Ni) films, deposited on silicone oil surfaces by a thermal evaporation method, have been studied systematically. Our experiment shows that the growth mechanism of the Ni films approximately obeys a two-stage growth model. Characteristic cracks with sinusoidal appearance resulted from the internal stress can be frequently observed in the continuous Ni films after the samples are removed from the vacuum chamber. Several crack modes including the regularly sinusoidal cracks, zigzag cracks, attenuation cracks and self-similar cracks are described and analyzed by using the general theory of buckling of plates in detail. The internal stress and propagating velocity of the sinusoidal cracks are also discussed in this paper.     

高速率沉积磁控溅射技术制备Ge点的退火生长研究

采用磁控溅射技术在Si衬底上以350?C沉积14 nm的非晶Ge薄膜,通过退火改变系统生长热能,实现了低维Ge/Si点的生长.利用原子力显微镜(AFM)和拉曼(Raman)光谱所获得的形貌和声子振动信息,对Ge点的形成机理和演变规律进行了研究.实验结果表明:在675?C退火30 min后,非晶Ge薄膜转变为密度高达8.5×109cm-2的Ge点.通过Ostwald熟化理论、表面扩散模型和对激活能的计算,很好地解释了退火过程中,Ge原子在Si表面迁移、最终形成纳米点的行为.研究结果表明用高速沉积磁控溅射配合热退火制备Ge/Si纳米点的方法,可为自组织量子点生长实验提供一定的理论支撑.     

Chemically induced graft copolymerization of 2-hydroxyethyl methacrylate onto polyurethane surface for improving blood compatibility

To improve hydrophilicity and blood compatibility properties of polyurethane (PU) film, we chemically induced graft copolymerization of 2-hydroxyethyl methacrylate (HEMA) onto the surface of polyurethane film using benzoyl peroxide as an initiator. The effects of grafting temperature, grafting time, monomer and initiator concentrations on the grafting yields were studied. The maximum grafting yield value was obtained 0.0275 g/cm² for HEMA. Characterization of the films was carried out by attenuated total reflection Fourier transform infrared spectroscopy (ATR-FTIR), water contact angle measurements. ATR-FTIR data showed that HEMA was successfully grafted onto the PU films surface. Water contact angle measurement demonstrated the grafted films possessed a relatively hydrophilic surface. The blood compatibility of the grafted films was preliminarily evaluated by a platelet-rich plasma adhesion test and hemolysis test. The results of platelet adhesion experiment showed that polyurethane grafted polymerization with monomer of 2-hydroxyethyl methacrylate had good blood compatibility featured by the low platelet adhesion. Hemolysis rate of the PU-g-PHEMA films was dramatically decreased than the ungrafted PU films. This kind of new biomaterials grafted with HEMA monomers might have a potential usage for biomedical applications.