移相干涉仪的抗振技术研究进展

在对光学元件面形进行检测和光学系统成像质量的评价中,移相干涉测量技术有着广泛地应用。但是,光学干涉仪的测量精度对环境的要求非常苛刻,环境的振动和空气的扰动会对测量结果产生很大影响。提高移相干涉仪的抗振性很有必要,受到广泛重视。国际上移相干涉仪的抗振技术主要包括主动抗振和被动抗振两方面,两种技术具有各自特点。     

光学移相干涉仪抗振系统的鲁棒控制系统仿真分析

将被动抗振和主动抗振相结合的混合控制技术应用于解决光学移相干涉仪抗振系统的不确定性问题,其中主动抗振采用鲁棒控制策略.该方法克服了由模型和干扰所引起的不确定性,使得控制系统能够有效地抑制抗振模型的不确定性和外部振动的干扰.仿真结果表明,该方法使光学移相干涉仪在振动的干扰下具有较好的鲁棒稳定性和控制准确度.     

移相干涉测量术及其应用

为了对移相式数字干涉仪在光学元件测量中的应用有全面了解，介绍了移相干涉术的基本原理。结合激光数字波面干涉仪，阐述移相干涉术的四步重叠平均算法、压电晶体移相器(PZT)的结构、3 PZT的组合方法、移相器的标定误差和非线性误差的校正方法、波面相位解包的自适应种子算法、波面相位的评价指标等内容。结合移相数字波面干涉仪，叙述了移相干涉测量技术在普通光学元件、红外光学元件、大口径光学元件、非球面光学元件等测量中的应用并指出了应用过程中的注意事项。最后明确指出光干涉技术正沿着高相位分辨率、高空间分辨率、宽波段和瞬态高速测量的方向发展，并将会在瞬态波前测量、微机械的微结构动态分析等方面有着越来越广泛的应用。     

基于二维光栅分光的同步移相干涉测量技术

为了干涉测量的抗振目的,提出了一种新的同步移相干涉测量方案并搭建了实验装置。整个测量系统在迈克耳孙偏振移相干涉仪的基础上,利用一个正交的二维光栅产生对称分光,选取对于理想光栅衍射效率一致的(±1,±1)级衍射光作为测量分光路,使之分别通过偏振方向依次相差45°的一个偏振片组,从而分别形成0°、90°、180°和270°相移的四幅移相干涉图,按照传统的四步移相算法,对被测波面进行了复原。分析了光强畸变和移相误差对系统的测量误差的影响。利用该系统测量一球面系统,结果与在ZYGO干涉仪上相比较,球面系统的均方根误差相差0.012λ,峰谷值相差0.051λ。     

干涉仪自适应抗振的空间移相术

根据时域移相算法的概念,提出了一种空间移相术,它能够检测因外界振动导致条纹抖动而引起的干涉图样的空间相位变化.运用这种技术在TwymanGreen移相式干涉仪中建立了一套自适应抗振系统,它可以实时测量振动引起的相位变化大小,并通过反馈器件PZT实时校正干涉条纹的相位,使得干涉条纹稳定以保证光学测量的正常进行,与此同时PZT还作为移相器件.     

消除移相干涉测量中线性移相误差的五帧算法

在移相干涉测量中存在着移相器的移相误差,这对测量结果的精度有很大的影响。提出了消除移相器线性误差的五帧算法,使用该算法对五帧干涉图像进行处理。使用MATLAB软件针对移相干涉测量过程进行了模拟仿真。仿真结果表明,该算法在相位提取过程中可以消除移相器的线性误差因子,并对于常见的高斯噪声影响不敏感,从而提高了表面形貌测量精度。     

光学移相干涉仪抗振系统的鲁棒u控制器设计

将结构奇异值u综合鲁棒控制技术应用于主动抗振控制系统中,并用于解决光学移相干涉仪抗振系统的不确定性问题．采用小波分析方法将随机振动信号进行时频分析后得到低频全局信息,随后运用u综合D-K迭代法设计鲁棒u控制器对低频振动进行抑制．该方法克服了由模型自身和外部干扰所引起的不确定性,使得控制系统能够有效地抑制抗振模型的不确定性和外部振动的干扰,同时也具有很高的控制准确度和灵敏度．仿真结果表明,该方法使光学移相干涉仪在外部振动的干扰下具有较好的鲁棒稳定性和控制准确度,同时也能较好地抑制低频振动．     

光学移相干涉仪抗振系统的鲁棒μ控制器设计

将结构奇异值μ综合鲁棒控制技术应用于主动抗振控制系统中,并用于解决光学移相干涉仪抗振系统的不确定性问题.采用小波分析方法将随机振动信号进行时频分析后得到低频全局信息,随后运用μ综合D-K迭代法设计鲁棒μ控制器对低频振动进行抑制.该方法克服了由模型自身和外部干扰所引起的不确定性,使得控制系统能够有效地抑制抗振模型的不确定性和外部振动的干扰,同时也具有很高的控制准确度和灵敏度.仿真结果表明,该方法使光学移相干涉仪在外部振动的干扰下具有较好的鲁棒稳定性和控制准确度,同时也能较好地抑制低频振动.     

一种同步移相干涉测量系统的误差研究

根据偏振光的琼斯矩阵理论,分析了一种基于二维光栅分光的同步移相干涉测量系统的工作原理。从干涉系统、分光系统以及移相系统三个部分详细研究了该系统的误差产生原因和作用机理,并针对各种误差源提出了相应的解决办法,为同步移相干涉测量系统中光学元件的选择、光路的调整及其误差的补偿提供了理论依据。结果表明,干涉部分的误差影响较小,可以通过光路的设计降低分光部分的误差;移相系统的误差最大,必须要对移相误差进行标定。     

同步移相干涉仪中的延迟阵列移相特性研究

为了研究同步移相干涉仪中延迟阵列的移相特性,采用琼斯矢量和琼斯矩阵作为偏振光和偏振光传递的参量和模型,分析推导了延迟阵列的移相量与快轴方位角误差之间的传递关系,给出了误差传递函数公式,在没有精确校准延迟阵列快轴方位角的情况下,搭建了基于延迟阵列移相的测量装置,利用该装置和Zygo GPI XP型干涉仪测量同一块球面镜,测量波面均方根值相差0.003λ,峰谷值相差0.033λ。讨论了延迟阵列方位角误差容限和延迟量误差、偏振片透光轴方位角误差对测量结果的影响。     

Fast image-processing technique in phase-shifting holographic interferometry

A fast image-processing method in phase shifting holographic interferometry is proposed, in which the complicated phase calculation is completed with a logic circuit and look-up table. An electronic circuit was designed for the purpose. With these techniques, the processing time can be greatly reduced.     

Polarization phase-shifting Jamin shearing interferometer

The Jamin shearing interferometer is very useful in wavefront testing, especially for the low coherent light. Based on this interferometer, a polarization phase-shifting Jamin shearing interferometer is proposed to improve the performance. In the interferometer, two interference beams are linearly polarized and a polarization phase shifter is applied to realize the phase shifting. Different types of configurations of the interferometer are given. With phase-shifting interferograms, the precision of the interferometer can be improved. The interferometer is kept as an equal optical path system and its shearing amount remains changeable with simple structure and easy operation. In experiments, phase-shifting interferograms are obtained by rotating the analyzer. The usefulness of the interferometer is verified.     

Wave optics analysis by phase-shifting real-time holographic interferometry

The purpose of this work is to study the potentialities in the phase-shifting real-time holographic interferometry using photorefractive crystals as the recording medium for wave-optics analysis in optical elements and non-linear optical materials. This technique was used for obtaining quantitative measurements from the phase distributions of the wave front of lens and lens systems along the propagation direction with in situ visualization, monitoring and analysis in real time.     

一种基于移相误差估计的5步移相算法

移相误差是用移相法进行相位测量的主要误差。本文提出一种 5步移相算法 ,分两步进行相位计算 ,首先估计实际步进移相的线性移相误差 ,然后再利用此移相误差估计值计算相位分布。移相误差估计公式和相位计算公式简洁 ,算法简单易行 ,对线性移相误差和二次谐波的敏感度低 ,可基本消除线性移相误差对解调相位的影响。对本文提出的算法进行了仿真研究 ,同时给出了 Hariharan 5步算法、Surrel 6步最小算法的仿真结果。结果表明 :本算法明显优于以上两种算法 ,可基本消除线性移相误差引起的相位偏移。本算法适用于作等步移相的相位测量或移相的标定。     

An effective method in calibrating nonlinear errors for phase-shifting interferometry

In phase measurement or digital holography for phase-shifting interferometry, the key role is the variation of reference light wave and recover algorithm based on interferograms and reference phase, so the calculation result is directly affected by phase-shift accuracy. However, because of the errors of nonlinear and other random factors, it is difficult to control the actual phase-shifting amount accurately. In this paper, we aim to propose an efficient method for phase-shifting interferometry which does not require accurate initial estimation of phase-shift amounts, only a few pixels with several randomly shifted interferograms are sufficient for accurate extraction of phase information. This method has reduced the dependence of reference phase, and can obtain phase-shifting amount directly without using complex revised algorithm for correcting phase-shifting nonlinear errors.     

Comparative analysis of phase extraction methods based on phase-stepping and shifting curve in grating interferometry

Two phase extraction methods which are based separately on phase-stepping and shifting curve are mainly used in phase-sensitive imaging in gating interferometry to determine the x-ray phase shift induced by an object in the beam. In this paper, the authors perform a full comparative analysis and present the main virtues and limitations of these two methods according to the theoretical analysis of the grating interferometry.     

Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry

In-process measurement has been the requirement of the precision industries, but due to vibrations while manufacturing, in-process measurement has been difficult to achieve. There is little work on in-process measurement using phase shifting interferometry, as phase shifting is extremely sensitive to vibrations. In this work, the advantage of the developed non-mechanical and instantaneous phase shifting interferometry is felt while measuring surface profile of large flat surfaces under vibrating conditions which can be extended for in-process measurement of surface profile. A near common path optical configuration is achieved and the effect of the environment is reduced. Moreover, the measurement of phase is instantaneous which increases the versatility of this technique for measuring vibrating objects. Profile measurements were carried out on a smooth mirror surface excited with vibrations of different frequencies and the technique was found to be immune to vibrations of up to 1000 Hz.     

相移干涉术及广义相移数字全息干涉术

在基础光学框架内说明了传统的相移干涉术及近年来发展的广义相移数字全息干涉术的基本原理;前者要求特殊值等步长相移,而后者则可以采用任意未知相移值.着重介绍了广义相移干涉术中的物波恢复算法,以及基于衍射场统计特性的未知相移提取算法.从一个侧面沟通了基础光学与近代光学之间的关系.     

Three-step self-calibrating generalized phase-shifting interferometry

An accurate and fast three-step self-calibrating generalized phase-shifting interferomertry (SGPSI) is proposed. In this approach, two new phase-shifting signals are constructed by the difference interferograms normalization and noise suppressing, then the unknown phase shift between the two difference phase-shifting signals is estimated quickly through searching the minimum coefficient of variation of the modulation amplitude, a limited number of pixels are selected to participate in the search process to further save time, and finally the phase is reconstructed through the searched phase shift. Through the reconstruction of phase map by the simulation and experiment, and the comparison with several mature algorithms, the good performance of the proposed algorithm is proved, and it eliminates the limitation of requiring more than three phase-shifting interferograms for high-precision SGPSI. We expect this method to be widely used in the future.     

Wavefront measurement with a phase-shifting lateral-shearing Sagnac interferometer operating in broadband light

A phase-stepping lateral shearing Sagnac interferometer for wavefront measurement is described. Phase shifting is implemented using a polarisation modulator operating on the wavelength independent Pancharatnam's phase allowing accurate measurement of phase maps even with broadband light. We demonstrate the interferometer by measuring a range of different wavefront shapes using both laser and white light.