Study on inspection method of glass defect based on phase image processing

To solve the problem in projecting grating method, the paper presents an inspection method based on phase image processing for glass defects. In the proposed method, the wrapped phase difference is achieved according to the images of defect-free and defect-containing. The unwrapping phase algorithm, based on jump corrected is used to eliminate jump error. The segmentation of defect region is implemented by integrating grayscale mathematical morphology with high-low threshold segmentation, and the boundary coordinate of connected region is used to calculate the size and location of defect. The results demonstrate that the proposed method provides reliable identification of defects.     

Defect detection and evaluation of ultrasonic infrared thermography for aerospace CFRP composites

The ultrasonic infrared thermography Non-destructive Testing is introduced for detecting the impact damage of a CFRP specimen for Unmanned Aerial Vehicles. The characteristics of thermal images with damage are particularly analyzed. A Local Binary Fitting (LBF) model based on a non-Gaussian kernel function is used to segment the defect edge. In view of the discontinuity of defect in thermal images due to multilayered structure of composite materials, defect merging algorithms are proposed including time domain and space domain methods by using a few thermal images, and the defect geometric distortion during camera imaging is also compensated. The defect in the composite material can be quantitatively analyzed after the defect reconstruction. The experimental result has shown that the proposed algorithm can effectively detect and evaluate the impact damage of thermal images and the accuracy of quantitative assessment is correspondingly increased.     

Characterization of {111} planar defects induced in silicon by hydrogen plasma treatments

Microstructural characterization by transmission electron microscopy of the {111} planar defects induced in Si by treatment in hydrogen plasma is discussed. The {111} defects are analyzed by conventional (TEM) and high-resolution transmission electron microscopy (HRTEM). Quantitative image processing by the geometrical phase method is applied to the experimental high-resolution image of an edge-on oriented {111} defect to measure the local displacements and strain field around it. Using these data, a structural model of the defect is derived. The validity of the structural model is checked by high-resolution image simulation and comparison with experimental images.     

基于锥束CT序列图像的三维缺陷检测方法

根据锥束CT序列图像各向同性及缺陷实体在序列图像层间位移和变化较小的特点,提出了一种适合锥束CT序列图像的三维缺陷检测方法。首先结合多目标跟踪思想,利用三维连通区域标记算法提取三维缺陷实体,并建立缺陷对应关系哈希表,以解决缺陷检测中目标轨迹的分叉;然后根据噪声目标的固有特性,对虚假缺陷信息进行有效删除,最终可获得真实缺陷目标实体,缺陷提取精度可达到像素。通过对空心涡轮叶片蜡模锥束CT图像进行实验,结果表明。该方法能准确地提取有较强噪声影响的序列图像的三维缺陷。     

基于ICT切片图像相邻层信息的缺陷自动识别方法

 现有的工业计算机断层成像（ICT）图像缺陷识方法中,多采用对单张图像进行孤立评判方法,此类方法未能考虑到单张图像在相邻层图像信息关联性,因而易将孤立的噪音视为缺陷,造成误判。为解决这一问题,提出一种基于序列ICT切片图像自动识别方法,该方法将识别过程分为两步：单张图像的潜在缺陷提取和相邻层图像缺陷的匹配。第一步运用传统方法识别出每张图像中所有潜在缺陷;第二步根据真缺陷在相邻层具有匹配关系而伪缺陷则相对孤立的特点,通过分步匹配的方法确定每张图像上所有潜在缺陷在相邻层图像上的匹配关系,区分出真伪缺陷。最后通过实例验证表明：利用该方法可以有效得提高真缺陷得识别率,降低误判率。     

纳秒激光诱导损伤熔石英玻璃的动力学过程

采用超快时间分辨阴影成像技术研究了纳秒激光诱导损伤熔石英玻璃前后表面和体内的动力学过程,对比分析了前后表面和体内的损伤差异及损伤机制。在前表面,观察了空气和材料中的等离子体和冲击波的产生与发展过程;亚纳秒激光辐照下,前表面材料内观察到三个应力波,并观察到材料体内的损伤过程。在后表面,除观察到冲击波的产生与发展过程,还观察到表面物质的烧蚀去除与喷发过程。在材料内部,损伤由自聚焦和点缺陷吸收两种机制主导,而且点缺陷吸收诱导材料体内损伤有时间先后顺序。     

基于频域变换的MEMS声学薄膜缺陷检测算法

The micro-electro-mechanical system (MEMS) acoustic film has extremely high requirements for tape-out, storage and packaging environments, and its surface defects will affect the quality and performance of MEMS devices. The image defects detection is an effective non-contact optical detection means that can effectively improve the yield rate of MEMS production. However, the periodic structure texture of the MEMS devices surface will interfere with defect detection. A acoustic film defect detection algorithm based on frequency domain transformation was proposed. By calculating the gradient distribution of spectrogram and establishing the Boolean mask, the dominant frequency components corresponding to the periodic structure texture were eliminated. The residual spectrograms were subjected to a Fourier inversion to reconstruct the defect images. The reconstructed images were decomposed by single-layer Haar wavelet to obtain the low-frequency sub-band image and the defect information was extracted by simple threshold segmentation. The defect detection effects of different types of MEMS acoustic film were showed. The experimental results show that it is reasonable to set the zoom constant in the range of 0.7~1.0.     

At-wavelength inspection of sub-40 nm defects in extreme ultraviolet lithography mask blank by photoemission electron microscopy

A new at-wavelength inspection technology to probe nanoscale defects buried underneath Mo/Si multilayers on an extreme ultraviolet (EUV) lithography mask blank has been implemented using EUV photoemission electron microscopy (EUV-PEEM). EUV-PEEM images of programmed defect structures of various lateral and vertical sizes recorded at an ~13.5 nm wavelength show that 35 nm wide and 4 nm high buried line defects are clearly detectable. The imaging technique proves to be sensitive to small phase jumps, enhancing the edge visibility of the phase defects, which is explained in terms of a standing wave enhanced image contrast at resonant EUV illumination.     

Hartman effect in one-dimensional photonic crystals with a three-level atomic defect layer

The Hartman effect in one-dimensional photonic crystals contained a defect layer doped with two-level, and three-level atoms is discussed. It is shown that the transmitted phase time in one-dimensional photonic crystals contained a defect layer reaches to a positive constant as the periodic number N increases. However, for a defect layer doped by two-level atoms, the transmitted phase time reaches to negative constant by increasing periodic number N. In addition, for defect layer doped by three-level atoms, the transmitted phase time can be controlled from positive to negative just by the Rabi-frequency of coupling field.     

TDI imaging-a tool for profilometry and automated visual inspection

TDI imaging is introduced as a solution to industrial web inspection under low-light illumination. In addition to the original purpose of recording clear blur-free images of the objects moving over industrial platforms, it can also be used as a tool for profilometry and automated visual inspection when coupled with proper structured light illumination modules. This paper illustrates a system employing a pulsed laser diode, uniform intensity line generating optics and a high-speed TDI imager for recording structured light patterns from rotating cylindrical objects. Defect or shape information is coded as distortions in a regular grating pattern recorded by the TDI imager. The shape or defect profile is retrieved by employing Fourier transform and scanning spatial phase detection techniques.     

利用扩散场信息的超声兰姆波全聚焦成像

利用兰姆波的扩散场信号,实现了距离传感器较近缺陷的全聚焦成像.通过两传感器接收的扩散场全矩阵信号进行互相关,恢复出两传感器之间的格林函数响应,重建新的全矩阵.该重建全矩阵削弱了直接耦合采集响应信号中存在的早期饱和非线性效应信号,恢复了被遮盖的近距离缺陷散射信号.在含缺陷的各向同性铝板中激发兰姆波,重建信号的早期信息与直接俘获信号的后期信息相结合形成混合全矩阵,结合全聚焦成像,优化成像效果.所提方法为薄板类结构中距离传感器较近缺陷的兰姆波无损检测提供了理论指导.     

闪光照相图像缺陷消除方法

 介绍了一种检测闪光照相图像缺陷以及消除这些缺陷的方法。在闪光照相实验中,底片图像会出现一些小尺寸的缺陷影响了底片信息的精确提取。根据闪光照相实验中采用完全一样的多张底片接收的特点,提出了一种闪光照相多底片图像的缺陷消除方法。首先对这些底片图像进行精确配准,将这些图像进行简单平均以获得均值图像,利用均值图像与各底片图像的差值获得缺陷图像,然后根据缺陷图像的特点对缺陷进行分割并判断各缺陷的归属。最后根据均值图像与缺陷图像以及缺陷分割与判断结果获得修补后的底片图像。实验结果证明该方法可以有效地消除多底片图像中的各类缺陷。     

SUSAN算子在微小轴承表面缺陷图像分割中的应用

采用计算机视觉识别技术对微小轴承端盖上的缺陷进行了自动识别。运用现代控制理论、图像采集与处理技术、软件编程技术,针对缺陷的位置、面积和深度所具有的随机性,设计了一套适合于检测微小轴承表面缺陷的系统。该系统可以采集到高质量的图像信息。利用SUSAN算子实现了对图像的分割和微小轴承表面缺陷的快速检测。实验结果表明,该方法的识别率可达到96%,并具有方法简单、定位准确、抗噪能力强、计算速度快、实时性好等优点。     

Automatic defect recognition of TFT array process using gray level co-occurrence matrix

This study proposed an automatic optical inspection (AOI) system for detection of thin-film transistor (TFT) array defects. gray level co-occurrence matrix (GLCM) and MATLAB regionprops function were used to calculate 53 TFT array defect features, which were inputted into the neural network to train the defect classifier. The images to be inspected were compared with a standard image first, in order to judge whether the TFT array samples have defects. For defective images of a TFT array, the proposed defect classifier can successfully recognize five kinds of defects in the process. According to the experimental results, the defect recognition rate of proposed system is verified to be 83.3%, which can replace manual inspection and reduce the risks of false inspections due to long duration manual work. Moreover, the proposed AOI system can improve testing efficiency and reduce manufacturing costs.     

Film thickness measurement and defect inspection using optical coherence tomography

An optical sensing technology based on optical coherence tomography is presented for film thickness measurement and defect inspection. In order to improve the imaging quality, a simple interference spectrum processing procedure is proposed to eliminate the DC and the autocorrelation noise. With the proposed method, we obtain high quality one-dimensional depth and two-dimensional cross-sectional images of the films. Then, the thickness and the defect information of the film can be obtained from the acquired images. The experiment result demonstrates that this nondestructive imaging technique is applicable for measuring film thickness and inspecting defects.     

Lock-in thermography for nondestructive evaluation of materials

Photothermal radiometry allows for remote measurement of local harmonic heat transport where the phase angle (between remote optical energy deposition and resulting temperature modulation) is sensitive to subsurface features or defects. Phase sensitive modulation thermography (or ‘lock-in thermography’) combines the advantages of photothermal radiometry with the fast technique of infrared imaging thereby revealing hidden defects in a short time. In this paper the principle and various applications are described and analyzed. While this lock-in thermography is based on remote optical heating of the whole area of interest, one can heat defects selectively with modulated ultrasound which is converted into heat by the mechanical loss angle effect which is enhanced in defect regions. This ‘ultrasonic lock-in thermography’ provides images showing defects in a way that is similar to dark field imaging in optical microscopy.     

双波长数字全息相位解包裹方法研究

使用两个不同的波长分别记录数字全息图,分别由数值再现得到每个波长对应的包裹相位图,再求得两者的相位差得到等效波长的相位图,通过此双波长相位解包裹方法得到连续的相位分布以消除相位包裹。通过数值模拟研究了双波长相位解包裹方法,搭建了双波长数字全息实验系统,并利用660nm和671nm两个波长的激光对标准石英平片和平凹透镜进行了相衬成像。通过双波长相位解包裹方法得到了连续的相位分布,实验结果与数值模拟结果具有较好的一致性,证明了双波长相位解包裹方法的有效性。     

Interface delocalization in the three-dimensional Ising model

The interface delocalization in the three-dimensional Ising model is studied by real-space renormalization group methods. The first-order cumulant expansion approximation is used. Defect free energies for a boundary plane of defects and an internal plane of defects are calculated in the whole temperature region. The phase diagrams are also obtained. The method and the model analyzed may give a correct phase diagram only in the regime of continuous interface delocalization. The interface delocalization is obtained for the boundary defect and also for the internal defect if the systems on two sides of the internal defect plane have a different degree of order. The delocalization transition does not occur in the case of the internal defect plane between two equally ordered systems.     

基于脉冲耦合神经网络的弹簧卡箍缺陷检测

传统的弹簧卡箍缺陷多为产后人工全检,存在漏检与缺陷率上升等现象,这不但会使成本上升、也对人力资源提出了考验。为此实现自动实时在线全检就成为急需解决的课题,设计了基于机器视觉的弹簧卡箍在线自动检测系统,该系统安装在弹簧卡箍流水线两侧,搭建特定光源,通过激光传感器外部触发工业相机对其表面进行图像捕获,送上位机进行缺陷判定与定位,最后通过RS485将判定结果送下位机来控制剔除机制。实验结果显示：该系统采用改进的脉冲神经网络(PCNN)能准确提取目标缺陷区域并对缺陷进行判定,可在0.348 s每个零件的速度下,检测出弹簧卡箍表面大于10像素的缺陷。通过对不同弹簧卡箍进行检测验证实验,证明了PCNN算法对缺陷分割的准确性和有效性。     

Evaluation of the susceptibility effect on gradient echo phase images in vivo: a sequential study of intracerebral hematoma.

Susceptibility effect of intracerebral hematoma was estimated on the phase images of gradient echo (GrE). Thirty-five hematomas were studied 3 hr to 5 yr after the onset, a total of 72 times with use of phase and magnitude images of GrE, as well as T1-, T2-, and density-weighted spin-echo (SE) images at 1.5 T. On the basis of the theory of electromagnetism, phase shift to hematoma was calculated for simplified models with concentric distribution of paramagnetic susceptibility. All hematomas were well visualized by the phase images, the pattern of which changed sequentially. The distribution of paramagnetic susceptibility could be estimated by correlating the observed phase shifts with the calculated one. SE images were necessary to presume the type of magnetic substances. A probable hypothesis of the evolution of intracerebral hematoma is proposed.