有像差情况下的全息光栅拼接研究EI北大核心CSCD

激光约束核聚变系统需要大口径脉冲压缩光栅。全息光栅拼接法是制造大口径光栅的重要手段。针对有像差的全息曝光系统,提出了一种拼缝处光栅对准拼接方法。为研究像差对光栅拼接特性的影响,用随机波面进行了光栅模拟拼接,计算了远场衍射能量分布与拼接误差的关系。实验拼接了(150+150)×200 mm2口径光栅,其拼接均方根误差值为0.034λ,峰-峰误差值为0.110λ。利用光栅±1级衍射波面,计算得到了曝光系统像差,并模拟了拼缝处最小拼接误差,其均方根误差值为0.016λ,峰-峰误差值为0.105λ。结果表明,拼接误差与理论模拟结果相近。该误差不会造成远场衍射光斑能量明显下降。由此证明了该方法的可行性。     

基于配对误差补偿方法的拼接光栅压缩池理论研究

利用傅里叶光学方法，研究了一个基于配对误差补偿方法的单程拼接光栅压缩池系统，得到远场时域关于系统拼接误差的积分表达式，揭示了配对误差补偿方案下系统的群延迟、脉冲前沿倾斜、剩余啁啾效应对叠加后远场时域的影响规律.数值模拟表明：随着带宽增加，配对补偿法将导致脉冲远场时域展宽；对一个利用配对误差补偿的单程拼接光栅压缩池系统进行计算，得到该方案下各种拼接误差的容限；同时考虑所有误差的情况下得到系统的允许带宽曲线. 关键词： 拼接光栅压缩池 配对补偿 相干叠加 远场     

高精度2×2阵列拼接光栅结构设计北大核心CSCD

提出了一种大口径高精度2×2阵列光栅拼接结构,采用模块化和框架式结构设计,保证拼接结构的稳定性;设计了差动螺纹微调组件与压电驱动器相结合的微纳调整组件结构,实现拼接光栅微纳量级的调整要求;讨论了关键组件的设计和制造问题。设计制造的2×2阵列光栅实验样机的最大相对共面误差为17μm,微纳调整组件的最小调整精度可以达到1.8 nm,分辨力为0.9 nm,初步光路实验表明,设计的拼接调整机构可以快速实时地调整2×2阵列光栅达到要求的精度,且稳定时间大于1 h。     

高精度2×2阵列拼接光栅结构设计

 提出了一种大口径高精度2×2阵列光栅拼接结构,采用模块化和框架式结构设计,保证拼接结构的稳定性;设计了差动螺纹微调组件与压电驱动器相结合的微纳调整组件结构,实现拼接光栅微纳量级的调整要求;讨论了关键组件的设计和制造问题。设计制造的2×2阵列光栅实验样机的最大相对共面误差为17 μm,微纳调整组件的最小调整精度可以达到1.8 nm,分辨力为0.9 nm,初步光路实验表明,设计的拼接调整机构可以快速实时地调整2×2阵列光栅达到要求的精度,且稳定时间大于1 h。     

基于波前法的光栅拼接误差检测及计算方法

光栅拼接法是目前制作大尺寸平面衍射光栅的重要方法之一,而拼接误差是评价拼接光栅是否能够使用的重要指标之一。实时定量测量拼接误差,能够实现对拼接误差的自动闭环调整,通过实时指导拼接提高光栅拼接的精度。建立了衍射波前与光栅拼接误差关系的数学模型,分析了干涉仪测量光栅拼接误差的原理,用ZYGO干涉仪实现拼接光栅0级及-1级衍射波前的数字化定量提取,分析并计算了拼接误差波前,得到五维拼接误差的数值解。利用拼接光栅-2级的衍射波前验证五维拼接误差结果的准确性,实验结果表明由0级、-1级、-2级拼接波前计算的拼接误差具有较好的一致性,为利用波前检测光栅拼接误差并实现自动化闭环调整提供了理论指导。     

拼接光栅对压缩系统中的误差补偿

 根据失调拼接光栅对压缩系统模型,推导了拼接误差引起的角色散公式。针对光栅拼接中的转角误差和光栅常数误差,得到了误差间的相互补偿关系式,并对补偿方式进行了讨论。研究结果表明：绕光栅平面内垂直于刻线方向的转角在一定范围内可以补偿绕光栅厚度方向旋转造成的误差;绕光栅刻线方向的转角可以补偿光栅常数不同造成的误差;绕光栅平面内垂直于刻线方向或绕光栅厚度方向的转角在一定范围内也可以补偿由光栅常数不同造成的误差。前两种补偿方式的补偿效果较好。     

单程拼接光栅压缩池系统中光栅缝隙的衍射效应

利用傅里叶光学方法，建立了一个基于远场的高斯光束数学模型.该模型能够分析单程拼接光栅压缩池系统中拼接光栅的缝隙对远场时空特性的影响.数值模拟得到了不同系统参数时远场时空特性关于缝隙宽度的变化曲线.揭示了光栅缝隙对远场的影响规律：对于双光栅拼接的压缩池系统，若只是压缩池中第二块光栅为拼接光栅，则光栅缝隙导致远场时域略微变窄；若压缩池中的两块光栅都是拼接光栅，则缝隙导致远场时域展宽或者变窄，依赖于入射脉冲的傅里叶变换极限型脉宽大小；光栅缝隙对于远场强度分布的影响是导致中央主峰能量下降，并且出现两个子峰，子峰的峰值随缝宽的增大而增大.     

Ronchi光栅光密度的一种测试方法

本文提出利用衍射光栅的反射特性,在自光图像处理系统中对光栅进行实时无损伤检验.这种方法灵敏度高、简便易行,有较高的实用价值.理论与实验结果一致.     

脉冲压缩光栅光学拼接方法研究

脉冲压缩光栅是激光约束核聚变系统中的重要光学元件.随着激光约束核聚变工程的快速发展,对光栅的口径要求越来越大.全息技术是制造大口径脉冲压缩光栅的重要手段,其制作的光栅大小受限于记录光学系统口径.为了制造出超大口径的脉冲压缩光栅,提出了一种采用多次曝光拼接技术制作大口径脉冲压缩光栅的方法.该方法采用参考光栅作为检测元件,利用其再现的光学特性,以检测记录干涉光场与已记录光栅之间位相匹配情况,并利用条纹锁定系统控制记录干涉光场的相位,实现光学拼接制作大口径脉冲压缩光栅的目的.开展了1740lp/mm光栅拼接实验研究.拼接对准精度优于30 nm.     

大面积拼接光栅的远场衍射分析

针对大面积光栅制作过程易出现的拼接偏差问题,基于标量衍射理论推导拼接光栅远场衍射的光强分布,计算分析几种常见拼接误差对拼接光栅性能的影响,以确定光栅拼接过程的误差容限.研究表明:拼接光栅的远场衍射光场随纵向和横向平移误差的变化呈周期性,且这两种平移误差带来的影响可相互补偿;而拼接光栅的旋转误差对远场衍射光场分布的影响较严重,当旋转误差增大到9.5875×10－5度时,衍射光场的峰值光强降为0.9,且两光栅各自峰值出现的方向成9.5875×10－5度.     

Eliminating the longitudinal piston error between tiled gratings by angle tuning

In a tiled-grating system, it is difficult to make two tiled gratings strictly coplanar. We propose and demonstrate for the first time, as far as we know, a simple method by which the longitudinal piston error between two tiled gratings can be reduced below lambda/10, close to the influence of the environmental factors. The alignment precision of the method increases with the tiled-grating system's stability to environmental factors.     

Spatial Fourier-transform polarimetry using space-variant subwavelength metal-stripe polarizers

A novel method for rapid polarization measurement is suggested. The method is based on a periodic space-variant polarizer that can be realized by use of subwavelength metal-stripe gratings. The Stokes parameters of the incident beam are determined by Fourier analysis of the space-variant intensity transmitted through the grating, thus permitting real-time polarization measurement. We discuss the design and realization of such polarizers and demonstrate our technique with polarization measurements of CO(2)-laser radiation at a wavelength of 10.6mum.     

A flexible fast 3D profilometry based on modulation measurement

This paper proposes a flexible fast profilometry based on modulation measurement. Two orthogonal gratings through a beam splitter are vertically projected on an object surface, and the measured object is placed between the imaging planes of the two gratings. Then the image of the object surface modulated by the orthogonal gratings can be obtained by a CCD camera in the same direction as the grating projection. This image is processed by the operations consisting of performing the Fourier transform, spatial frequency filtering and inverse Fourier transform. Using the modulation distributions of two grating patterns, we can reconstruct the 3D shape of the object. In the measurement process, we only need to capture one fringe pattern, so it is faster than the MMP and remains the advantages of it. In the article, the principle of this method, the setup of the measurement system, some simulations and primary experiment results are given. The simulative and experimental result proves it can restore the 3D shape of the complex object fast and comparatively accurate. Because only one fringe pattern is needed in the testing, our method has a promising extensive application prospect in real-time acquiring and dynamic measurement of 3D data of complex objects.     

Demonstration of coherent addition of multiple gratings for high-energy chirped-pulse-amplified lasers

Petawatt solid-state lasers require meter-sized gratings to reach multiple-kilojoule energy levels without laser-induced damage. As an alternative to large single gratings, we demonstrate that smaller, coherently added (tiled) gratings can be used for subpicosecond-pulse compression. A Fourier-transform-limited, 650-fs chirped-pulse-amplified laser pulse is maintained by replacing a single compression grating with a tiled-grating assembly. Grating tiling provides a means to scale the energy and irradiance of short-pulse lasers.     

拼接光栅压缩器的时域特性

在拼接光栅和拼接光栅压缩器的设计中,子光栅调节偏差不可避免,各维偏差与拼接光栅的时间特性之间的关系很关键。通过脉冲压缩理论分析得到各维偏差和聚焦脉冲时间宽度展宽之间的解析关系,从数值计算结果分析,面平行左右偏差对脉冲的时间宽度影响较大,必须控制在21.08μrad内;条纹密度差异对脉冲宽度的影响很显著,相对条纹密度的比值应控制在10-5以内;从消除角色散的角度分析,面平行俯仰偏差和条纹平行度偏差可以相互补偿,条纹密度差异和面平行左右偏差也可以相互补偿。     

基于光纤Bragg光栅的行车模型主梁挠度的测量

简易桥式起重机的力学结构是一种简支梁,研制了一种行车模型,主要包括工字梁及一个可吊挂重物的滑块.光纤Bragg光栅沿工字梁的轴向均匀粘贴于行车主梁的下表面,侧点分别位于离主梁的1/4、1/2和3/4等三个位置.在测量中,通过吊挂重物对主梁产生挠度,从而导致粘贴其下表面的光纤Bragg光栅产生波长移位.载荷试验表明,在主...     

Matched wavelength and incident angle for the diagnostic beam to achieve coherent grating tiling

Design and operation of a practical, accurate alignment diagnostic system is important for the grating tiling technology, which is supposed to be applied in a chirped-pulse amplification system to increase the output power. A diagnostic method is proposed and demonstrated for grating tiling. Provided that the wavelength and incident angle of the diagnostic beam are properly set, the far-field of the main laser beam and that of the diagnostic beam can vary in the same way with the tiling errors between the sub-aperture gratings. Therefore, rotational and translational errors can be controlled and compensated according to the far-field of the diagnostic beam. The real-time monitoring and alignment can be achieved without disturbing the main beam.     

基于一种新微细加工技术的亚波长光栅的研制

描述了一种新的亚波长光栅的微细加工技术，即电子束（EB）扫描曝光得到相应的亚微米级的线宽图形，再利用快速原子束刻蚀设备获得了高深宽比的立体结构。用此加工技术获得了100nm以下的刻蚀精度，并研制成功亚波长光栅。该亚微米线宽微细加工技术可用于布拉格光栅、半导体激光器、无反射表面等需要亚微米结构的器件中。     

Novel method for testing the long focal length lens of large aperture

In this paper, we present a novel method for testing the long focal length lens of large aperture, which is realized by calculating the angle of moiré fringe formed by Talbot image of two Ronchi gratings. A scanning method was developed to measure the focal length with the collimated lights projected on the different aperture position of the lens. Experiment data demonstrates that this method can be applied to the real-time long focal length measurement with high accuracy.     

基于高重复频率飞秒激光直写技术制作衍射光栅的研究

基于由光子晶体光纤飞秒激光器产生的高重复频率飞秒激光搭建了飞秒激光微加工系统,利用LabVIEW编写程序精密控制三维移动平台的移动路径和高速快门,在加工功率为1.5W、移动速率为1mm/s时,利用直写技术在无胶铬版上得到了微米量级的任意形状的平面衍射光栅。利用CCD相机对光栅制备过程进行实时监视,保证了光栅的加工质量。制备的光栅在显微镜下观察,条纹边缘清晰、线纹粗细均匀。使用He-Ne激光照射加工的光栅,可以获得清晰、稳定、与理论符合很好的夫琅和费(Frauhofer)衍射图样,显示了所加工的光栅具有良好的光学性能。实验结果也表明了光子晶体光纤飞秒激光在光栅制作过程中所具备的良好的加工性能。