Applications of excimer laser in nanofabrication

This paper addresses novel applications of an excimer laser (308 nm wavelength, 20 ns pulse duration) in nanofabrication. Specifically, laser assisted nanoimprint lithography (LAN), self-perfection by liquefaction (SPEL), fabrication of metal nanoparticle arrays, and the fabrication of sub-10-nm nanofluidic channels are covered. In LAN, a polymeric resist is melted by the laser pulse, and then imprinted with a fused silica mold within 200 ns. LAN has been demonstrated in patterning various polymer nanostructures on different substrates with high fidelity and uniformity, and negligible heat effect on both the mold and the substrate. SPEL is a novel technology that uses selective melting to remove fabrication defects in nanostructures post fabrication. Depending on the boundary conditions, SPEL is categorized into three basic types: Open-SPEL that takes place with surface open, Capped-SPEL where a cap plate holds the top surface of the nanostructures and Guided-SPEL where a plate held a distance above the structure guides the molten materials to rise and form a new structure with better profile. Using SPEL (in less than 200 ns), we have achieved a reduction of line edge roughness (LER) of Cr lines to 1.5 nm (3σ) (560% improvement from the original), which is well below what the previous technologies permit, and a dramatic increase of the aspect ratio of a nanostructure. We have used SPEL to make sub-25-nm smooth cylindrical NIL pillar molds and smoothing Si waveguides. Excimer laser is also used to make metal nanoparticles. Monolayers of particles are fabricated on various substrates (silicon, fused silica and plastics) by exposing thin metal films to a single laser pulse. Periodic nanoparticle arrays have been fabricated by fragmentation of metal grating lines. The periodicity of these nanoparticles can be regulated by surface topography such as shallow trenches. Finally, an excimer laser pulse has been used to melt the top portion of 1D and 2D Si gratings to seal off the top surface, forming enclosed nanofluidic channel arrays. The channel width has been further reduced to 9 nm using self-limited thermal oxidation. DNA stretching using 20 nm wide self-sealed channels is also demonstrated.     

Progressive formation of fine and coarse ripples on SiC surface by repeated irradiation of femtosecond laser pulses

In this work, we report the progressive formation of first nanoparticles, next fine ripples, and eventually coarse ripples during the irradiation of single-crystal 6H-SiC surfaces with increasing number of femtosecond laser pulses (λ = 515 nm, τ = 250 fs, repetition rate = 100 kHz). At laser fluences greater than the single-pulse ablation threshold, nanoparticles were produced on the surface by the first few pulses over which fine ripple patterns overlapped at increased pulse numbers. As the pulse number was further increased over ten, the surface was gradually transformed into a coarse ripple–covered one. At laser fluence below the threshold, however, only fine ripples were formed nonuniformly.     

Laser-induced fabrication of randomly distributed nanostructures in fused silica surfaces

The nanostructuring of dielectrics is a big challenge for laser patterning methods. In this study a novel laser structuring method for the fabrication of randomly distributed nanostructures, called laser-induced front side etching using in situ pre-structured metal layers (IPSM-LIFE), is presented. The pulsed laser irradiation of a thin metal film deposited onto a dielectric substrate with fluences below the ablation threshold results in the formation of randomly distributed metal structures by self-assembly processes. Further pulsed laser irradiation of these metal structures with higher or equal laser fluences causes the formation of complex patterns at the surface of the dielectric due to localized ablation and melting processes of the dielectric surface induced by the absorption of the laser energy by the metal structures and the local energy transfer into the dielectric surface. The pattern formation observed in the film and the dielectrics substrate after irradiation of 10 nm chromium layers on fused silica, with laser pulses (Δt _p =25 ns, λ=248 nm), was studied by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Different features with a lateral size down to a few tens of nanometers, like concentric ring patterns, donut-like structures, and bar patterns were observed at the dielectric.     

Pulsed-laser generation of gold nanoparticles with on-line surface plasmon resonance detection

Size of nanoparticles is an important parameter for their applications. The real-time monitoring is required for reliable and reproducible production of nanoparticles with controllable size. We present results of our research on development of the system for the online nanoparticle characterization during their production by a laser. The laser ablation chamber which allows measurements of surface plasmon resonance spectra during the nanoparticle generation process has been designed and fabricated. The online characterization system was tested by producing and modification of gold nanoparticles. Nanoparticles were generated by nanosecond-laser (wavelength 1064 nm) ablation of gold target in deionized water, and optimal conditions for the highest nanoparticle productivity were estimated. The mean diameter of nanoparticles was determined using their absorption spectra measured in the real-time during the ablation experiments and from the TEM images analysis, and it varied from 20 to 45 nm. The mismatch between nanoparticle diameters, estimated using these two methods, is due to the polydispersity of the generated nanoparticles. The further experiments of laser-induced modification of colloidal gold nanoparticles were carried out using second harmonic (wavelength 532 nm) of nanosecond Nd:YAG laser and alteration in nanoparticle size were acquired by the online measurement system.     

Guidelines for efficient direct ablation of dielectrics with single femtosecond pulses

We provide guidelines to femtosecond laser users to select ad hoc laser parameters, namely the fluence and pulse duration, in the context of the development of ablation processes at the surface of dielectrics using single femtosecond pulses. Our results and discussion are based on a comprehensive experimental and theoretical analysis of the energy deposition process at the surface of fused silica samples and of their postmortem ablation characteristics, in the range of intensities from 10¹³ to 10¹⁵ W/cm². We show experimentally and numerically that self-induced plasma transient properties at the pulse timescale dramatically determine the efficiency of energy deposition and affect the resulting ablation morphology. In practice, we determine that the precise measurement of two characteristic fluence values, namely the laser-induced ablation threshold F _th,LIAT and the fluence F _opt for maximum ablation efficiency, are only required to qualify the outcomes of laser ablation at the surface of a dielectric in an extended range of applied fluence.     

Parametric study on femtosecond laser pulse ablation of Au films

Ablation process of 1 kHz rate femtosecond lasers (pulse duration 148 fs, wavelength 775 nm) with Au films on silica substrates has been systemically studied. The single-pulse threshold can be obtained directly. For the multiple pulses the ablation threshold varies with the number of pulses applied to the surface due to the incubation effect. From the plot of accumulated laser fluence N × ?_th(N) and the number of laser pulses N, incubation coefficient of Au film can be obtained (s = 0.765). As the pulse energy is increased, the single pulse ablation rate is increasing following two ablation logarithmic regimes, which can be explained by previous research.     

Ad-hoc design of temporally shaped fs laser pulses based on plasma dynamics for deep ablation in fused silica

We have analyzed the ablation depth yield of fused silica irradiated with shaped pulse trains with a separation of 500 fs and increasing or decreasing intensity envelopes. This temporal separation value is extracted from previous studies on ablation dynamics upon irradiation with transform-limited 100 fs laser pulses. The use of decreasing intensity pulse trains leads to a strong increase of the induced ablation depth when compared to the behavior, at the same pulse fluence, of intensity increasing pulse trains. In addition, we have studied the material response under stretched (500 fs, FWHM) and transform-limited (100 fs, FWHM) pulses, for which avalanche or multiphoton ionization respectively dominates the carrier generation process. The comparison of the corresponding evolution of the ablated depth vs. fluence suggests that the use of pulse trains with decreasing intensity at high fluences should lead to enhanced single exposure ablation depths, beyond the limits corresponding to MPI- or AI-alone dominated processes.     

Silicon nanoparticles generated by femtosecond laser ablation in a liquid environment

Silicon nanoparticles were generated by femtosecond laser [387 nm, 180 fs, 1 kHz, pulse energy = 3.5 μJ (fluence = 0.8 J/cm²)] ablation of silicon in deionized water. Nanoparticles with diameters from ~5 up to ~200 nm were observed to be formed in the colloidal solution. Their size distribution follows log-normal function with statistical median diameter of ≈20 nm. Longer ablation time leads to a narrowing of the nanoparticle size distribution due to the interaction of the ablating laser beam with the produced nanoparticles. Raman spectroscopy measurements confirm that the nanoparticles exhibit phonon quantum confinement effects and indicate that under the present conditions of ablation they are partially amorphous.     

Dependence of ablation threshold and LIPSS formation on copper thin films by accumulative UV picosecond laser shots

The ablation threshold and Laser-induced periodic surface structure (LIPSS) formation on copper thin film were investigated using a picosecond laser (Nd:YAG laser: 266 nm, 42 ps, 10 Hz). We show that the ablation threshold varies with respect to the number of laser shots (N) on two different substrates. The single-shot ablation threshold was estimated to be close to 170 ± 20 mJ/cm². The incubation coefficient was estimated to be 0.68 ± 0.03 for copper thin films on silicon and glass substrates. In addition, morphology changes of the ablated regions, in the same spot area, were studied as a function of fluence and number of laser shots. An intermediate structure occurred with a mix of low spatial frequency LIPSS (LSFL), high spatial frequency LIPSS (HSFL) and regular spikes at a fluence F < 250 mJ/cm² and 1,000 < N ≤ 10.000 shots. LSFL was observed with a spatial period close to the irradiation wavelength and an orientation perpendicular to the laser polarization, and HSFL with a spatial period of ～120 nm and a parallel orientation. Lastly, the global relationship between the laser parameters (i.e. fluence and number of shots) and LIPSS formation was established in the form of a 2D map.     

Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences

The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of fused silica and silicon with multiple (N _DPS) irradiation sequences consisting of linearly polarized femtosecond laser pulse pairs (pulse duration ～150 fs, central wavelength ～800 nm) is studied experimentally. Nearly equal-energy double-pulse sequences are generated allowing the temporal pulse delay Δt between the cross-polarized individual fs-laser pulses to be varied from ?40 ps to +40 ps with a resolution of ～0.2 ps. The surface morphologies of the irradiated surface areas are characterized by means of scanning electron and scanning force microscopy. Particularly for dielectrics in the sub-ps delay range striking differences in the orientation and spatial characteristics of the LIPSS can be observed. For fused silica, a significant decrease of the LIPSS spatial periods from ～790 nm towards ～550 nm is demonstrated for delay changes of less than ～2 ps. In contrast, for silicon under similar irradiation conditions, the LIPSS periods remain constant (～760 nm) for delays up to 40 ps. The results prove the impact of laser-induced electrons in the conduction band of the solid and associated transient changes of the optical properties on fs-LIPSS formation.     

Comparison of silver nanoparticles confined in nanoporous silica prepared by chemical synthesis and by ultra-short pulsed laser ablation in liquid

Hexagonally ordered mesoporous silica materials, MCM-41 and SBA-15, have been synthesized and loaded with Ag nanoparticles, utilizing both chemical synthesis and ultra-short pulsed laser ablation in liquid. In laser ablation, a silver target, immersed in aqueous suspension of ordered mesoporous silica SBA-15, was irradiated by ultra-short laser pulses to generate silver nanoparticles. For comparison, samples of similar silver contents were prepared either by incorporating silver into the SBA-15 during a hydrothermal synthesis or by introducing silver in MCM-41 by template ion-exchange. Samples were characterized by XRD, N₂ physisorption, TEM and UV–vis spectroscopy. All preparations contained significant amount of 5–50 nm size silver agglomerates on the outer surface of the silica particles. The laser ablation process did not cause significant destruction of the SBA-15 structure and metallic silver (Ag⁰) nanoparticles were mainly generated. It is demonstrated that by laser ablation in aqueous silica suspension smaller and more uniform metallic silver particles can be produced and loaded on the surface of the silica support than by synthesis procedures. Catalytic properties of the samples have been tested in the total oxidation of toluene. Because of its favorable Ag dispersity, the Ag/SBA-15 catalyst, generated by the laser ablation method, had better catalytic stability and, relative to its Ag load, higher activity than the conventional Ag/SBA-15 preparations.     

Optodynamic energy conversion efficiency during laser ablation on metal surfaces measured by shadow photography

In this investigation, we used high-speed shadow photography to observe fast optodynamic phenomena such as shock waves and the ablation of flat metal surfaces. These phenomena were induced in air by a Q-switched Nd:YAG laser (λ = 1,064 nm) with a pulse duration of 4 ns and an excitation pulse energy between 10 and 55 mJ. For a good spatial resolution of the shadowgraphs, we used short illumination pulses (30 ps) from a frequency-doubled Nd:YAG laser (λ = 532 nm). Using the shadowgraphs of the shock wave expansion into a half-space, we measured the optodynamic energy conversion efficiency, defined as the ratio between the mechanical energy of the shock wave and the excitation pulse energy. This efficiency increases with an increasing excitation pulse energy. We also present the characteristic shadowgraphs of the ablation of a black-painted metal surface, where the macroscopic material particles are clearly visible. They follow the shock wave and eventually overtake it. As a result, the shape of the shock wave, which normally expands concentrically into the half-space, has an altered form. The presented results reveal the phenomenon of the laser ablation of coated metal surfaces.     

Dynamics of ultrashort pulsed laser radiation induced non-thermal ablation of graphite

We report on the dependence of a laser radiation induced ablation process of graphite on the applied pulse duration of ultrashort pulsed laser radiation smaller than 4 ps. The emerging so-called non-thermal ablation process of graphite has been confirmed to be capable to physically separate ultrathin graphitic layers from the surface of pristine graphite bulk crystal. This allows the deposition of ablated graphitic flakes on a substrate in the vicinity of the target. The observed ablation threshold determined at different pulse durations shows a modulation, which we ascribe to lattice motions along the c axis that are theoretically predicted to induce the non-thermal ablation process. In a simple approach, the ablation threshold can be described as a function of the energy penetration depth and the absorption of the applied ultrashort pulsed laser radiation. Based on the analysis of the pulse duration dependence of those two determining factors and the assumption of an invariant ablation process, we are able to reproduce the pulse duration dependence of the ablation threshold. Furthermore, the observed pulse duration dependences confirm the assumption of a fast material specific response of graphite target subsequent to optical excitation within the first 2 ps.     

Numerical model and experimental demonstration of high precision ablation of pulse CO_2 laser

To reveal the physical mechanism of laser ablation and establish the prediction model for figuring the surface of fused silica, a multi-physical transient numerical model coupled with heat transfer and fluid flow was developed under pulsed CO_2 laser irradiation. The model employed various heat transfer and hydrodynamic boundary and thermomechanical properties for assisting the understanding of the contributions of Marangoni convention,gravitational force, vaporization recoil pressure, and capillary force in the process of laser ablation and better prediction of laser processing. Simulation results indicated that the vaporization recoil pressure dominated the formation of the final ablation profile. The ablation depth increased exponentially with pulse duration and linearly with laser energy after homogenous evaporation. The model was validated by experimental data of pulse CO_2 laser ablation of fused silica. To further investigate laser beam figuring, local ablation by varying the overlap rate and laser energy was conducted, achieving down to 4 nm homogenous ablation depth.     

Ablation of transparent solids during self-limited deposition of diamond-like films from liquid hydrocarbons

A novel effect is studied of self-limitation of the diamond-like film thickness during laser irradiation of the interface of transparent substrates with liquid aromatic hydrocarbons. The interface is exposed through the transparent substrate to radiation of a copper vapor laser (wavelength of 510.6 nm, pulse duration of 20 ns). The thickness of diamond-like film increases linearly to 80-100 nm with the number of laser pulses and then saturates, while the substrate is ablated with nearly constant rate. This ablation rate depends on the thermal expansion coefficient of the substrate (glass, fused silica, sapphire, or CaF₂). The absorption of extinction coefficient of deposited films measured by ellipsometry is of order of 10⁴ cm^-1 and is sufficient to cause the significant heating of the interface. The ablation of the transparent substrates is due to their unequal thermal expansion compared to the diamond-like film having different thermal expansion coefficient. The measured ablation rates scale from 0.2 Å/pulse for glass to 4.5 Å/pulse for CaF₂. A 7m spatial resolution of the ablation process has been demonstrated for fused silica.     

Soft picosecond X-ray laser nanomodification of gold and aluminum surfaces

Experimental and theoretical investigations of aluminum (Al) and gold (Au) surface modification by soft X-ray laser pulse are presented. Well-polished samples of Al and Au are irradiated by ps-duration pulse with wavelength of 13.9 nm at the energy range of 24–72 nJ. Differences in the melting and the ablation processes for those materials are observed. It is shown that at low laser pulse energy, the nanoscale ripples on the surface may be induced by melting without following ablation. In that case, the nanoscale changes in the surface are caused by splash of molten metal under gradient of fluence. At higher laser pulse energy, the ablation process occurs and craters are formed on the surface. However, the melting determines the size of the modified surface at all ranges of the laser energies. For interpretation of experimental results, the atomistic simulations of melting and ablation processes in Al and Au are provided. The calculated threshold fluencies for melting and ablation are well consistent with measured ones.     

Femtosecond laser ablation characteristics of nickel-based superalloy C263

Femtosecond laser (180 fs, 775 nm, 1 kHz) ablation characteristics of the nickel-based superalloy C263 are investigated. The single pulse ablation threshold is measured to be 0.26±0.03 J/cm² and the incubation parameter ξ=0.72±0.03 by also measuring the dependence of ablation threshold on the number of laser pulses. The ablation rate exhibits two logarithmic dependencies on fluence corresponding to ablation determined by the optical penetration depth at fluences below ∼5 J/cm² (for single pulse) and by the electron thermal diffusion length above that fluence. The central surface morphology of ablated craters (dimples) with laser fluence and number of laser pulses shows the development of several kinds of periodic structures (ripples) with different periodicities as well as the formation of resolidified material and holes at the centre of the ablated crater at high fluences. The debris produced during ablation consists of crystalline C263 oxidized nanoparticles with diameters of ∼2–20 nm (for F=9.6 J/cm²). The mechanisms involved in femtosecond laser microprocessing of the superalloy C263 as well as in the synthesis of C263 nanoparticles are elucidated and discussed in terms of the properties of the material.     

High-intensity near-field generation for silicon nanoparticle arrays with oblique irradiation for large-area high-throughput nanopatterning

We present near-field distributions around an isolated 800-nm silica or silicon nanoparticle, and nanoparticle arrays of 800-nm silica or silicon nanoparticles, on a silicon substrate by the finite-difference time-domain method when 800-nm light is irradiated obliquely to the substrate. Nanopatterning mediated with the nanoparticle system is promising for large-area, high-throughput patterning by using an enhanced localized near-field ablation by the nanoscattered light lens effect. The irradiation area cannot be extended for silica nanoparticles, because the optical field enhancement factor is low. Gold nanoparticles can generate highly enhanced near fields, although at present there are no useful ways to arrange the gold nanoparticles on the substrate at a high throughput. Silicon nanoparticles with high dielectric permittivity have optical characteristics of both silica and gold nanoparticles. The particle arrangement on the Si substrate is technically easy using a wet pulling process. From the calculation, high optical field intensity is acquired with oblique s-polarized irradiation to the substrate under silicon nanoparticle arrays, and the intensity is almost the same as that under gold nanoparticle arrays under the same condition. With this method, high-throughput nanopatterning for a large area would be achievable.     

Noble metal nanoparticles produced by nanosecond laser ablation

Silver and gold thin films were deposited by pulsed laser ablation in a controlled Ar atmosphere at pressures between 10 and 100 Pa. Different morphologies, ranging from isolated nanoparticle arrays up to nanostructured thin films were observed. Fast imaging of the plasma allowed deducing the expansion dynamics of the ablated plume. Plasma velocity and volume were used together with the measured average ablated mass per pulse as input parameters in a model to estimate the average size of nanoparticles grown in the plume. The nanoparticle size is expected to decrease from 4 nm down to 1 nm with decreasing Ar pressure between 100 and 10 Pa: this was confirmed by transmission electron micrographs which indicate a reduced dispersion of particle size over narrow size ranges. The production of substrates for surface enhanced Raman scattering whose performances critically depend on nanoparticle size, shape, and structure is discussed.     

Nanoscale laser-induced forward transfer through patterned Cr films

The resolution enhancement of laser-induced forward transfer (LIFT) is investigated through the pre-patterning of Cr on the donor substrate. 85 nm dots are first patterned on a microscope slide, and an 800 nm wavelength and 130 fs pulse laser with a beam waist of ～9 μm is used to transfer the Cr dots to an acceptor substrate. The threshold fluence is found to be ～0.15 the threshold fluence of a similar continuous film, which is thought to be due to the fact that no force is needed to tear away Cr from the film itself, unlike in a continuous film experiment. Since the volume of the material limits the transfer feature sizes instead of the laser parameters, as in a continuous film system, minimum transferable feature diameters are significantly lower compared to the continuous film case. Also, the transferred feature diameters are not dependent on the laser parameters, so the diameters are consistent across a wide range of fluences. The force per unit area generated by the laser at threshold fluence is estimated to be ～3 GPa, which is consistent with previous results in the literature. The simplified model that our pre-patterned Cr LIFT experiment represents would make it an ideal case for benchmarking molecular dynamics simulations of femtosecond laser ablation.