基于X射线塔尔博特效应的纳米光栅制作模拟研究

沿纳米多层膜生长方向切割可制成周期只有几纳米而厚度几十微米的切片多层膜光栅. 基于该切片多层膜光栅塔尔博特自成像效应的X射线光刻是一种新型的纳米图样制作方法. 已有学者用该方法完成了百纳米结构光栅的制作. 采用严格耦合波方法, 本文模拟计算了切片多层膜光栅在满足塔尔博特自成像条件下的后表面光场分布, 详细讨论三个影响光栅后表面成像质量的重要参数:光栅厚度、材料厚度所占比例和多层膜周期. 模拟结果表明, 光栅厚度不仅影响X射线透射率, 还会改变像面条纹衬比度. 材料厚度比的大小直接决定像面是否存在清晰条纹, 选取合适的材料厚度比, 得到了前人实验中近场反常成像现象. 计算还表明, 在一定条件下, 采用周期更小的多层膜光栅有望获得更高分辨率的纳米图形, 这说明使用塔尔博特效应制作更加精细的纳米结构图形具有可行性.     

部分相干同步辐射照射下光栅分数塔尔博特效应

基于高斯谢尔光束的相干模式分解理论和波动光学,建立了部分相干同步辐射硬X射线光束通过光学器件的传播模型。模拟了微聚焦X射线光束照射下光栅的分数塔尔博特效应,得到了聚焦光束的光强分布和相干特性变化,并分析了散焦光束入射下的光栅自成像。然后通过模拟准直光束入射下的光栅塔尔博特效应,得到了不同传播距离处自成像条纹的变化情况,分析了影响光栅自成像条纹形状的因素。通过光栅衍射条纹测量同步辐射相干度,发现对矩形相位光栅来说,应该对衍射图样进行傅里叶分解,求出各级傅里叶系数随传播距离的变化曲线,从而得到入射光束相干特性。     

基于叠栅技术的二维亚波长周期结构成像设计

用光子学方法研究了叠栅技术中,当试件光栅被拉压和旋转后,叠栅条纹的空间周期和相对于基准光栅的取向,试件光栅被拉压后的节距等相关问题。根据衍射光波的空间周期可能大于试件光栅空间周期的特点,对二维亚波长周期结构衍射成像进行了设计研究。首先,对二维亚波长周期结构衍射物进行编码,以获得包含编码光栅空间信息的均匀波;其次,使编码得到的均匀波通过光学系统,并被放大到CCD相机所能辨识的大小;再次,经解码光栅解码,滤掉编码波,最终获得二维亚波长周期结构物的空间结构信息,达到超分辨的目的。同时,对成像过程进行了较为详尽的分析,对编码器、解码器的位置以及它们相对衍射物的取向进行了设计研究,对滤波器的选择给予了必要的说明,指出了取得超分辨成像的关键。     

扫描积分塔尔博特光刻条纹质量影响因素模拟分析

基于角谱衍射理论,对扫描积分塔尔博特光刻术进行了理论分析与数值模拟。研究了扫描距离、扫描起始位置、扫描速度非匀速以及照明光源不同特性对扫描积分塔尔博特光刻所得光栅条纹质量的影响。模拟结果表明,当扫描距离为塔尔博特周期的整数倍时,扫描起始位置、扫描速度的非匀速性对扫描积分塔尔博特光刻的成像质量影响较小;当入射光源存在一定谱宽或发散角不大于0.05°时,扫描积分塔尔博特光刻仍可得到对比度较一致的倍频光栅条纹,证实了扫描积分塔尔博特光刻具有良好的工艺适用性。扫描积分塔尔博特光刻不需要昂贵而复杂的投影光学系统,可克服塔尔博特自成像有限焦深问题,对掩模与基片的定位精度及涂胶基片的平整度容忍度较高。该方法具有在非平面基底上制备大面积、低成本、高精度周期微纳结构的应用前景。     

全息曝光系统轴向调节误差对光栅衍射波像差的影响

光栅衍射波像差作为全息光栅重要的技术指标之一,直接影响光栅分辨率,其中曝光光学系统的调节误差是引起光栅衍射波像差的主要因素。采用q参数讨论了高斯光束在光栅曝光光学系统中的传播和变换,通过计算高斯光束经准直系统后的相位给出了叠栅条纹相位分布的解析表达式,由此系统分析了曝光系统调节误差与光栅衍射波像差的关系。理论分析结果表明:左右曝光光路准直系统的相对离焦对光栅衍射波像差的影响最为显著;相对离焦量相同时,光栅衍射波像差随曝光系统焦距的减小而逐渐增大;理论模拟的条纹分布与实验中获得的叠栅条纹能够很好吻合。     

中能X射线光栅相衬显微成像分析及模拟

理论分析了基于相位光栅分数塔尔博特效应的X射线相衬显微成像原理,采用菲涅耳衍射公式推导出相位光栅在两个不同距离处的成像结果公式.然后建立一个水合蛋白质细胞模型,对成像系统进行了参数设计,得出1～2 keY的中能波段X射线是兼顾大景深和高成像衬度的最优选择.针对10μm厚的细胞模型,选取1.5 keY的中能X射线做模拟计...     

软X射线全息平焦场光栅的条纹弯曲现象及其对光谱分辨率的影响

软X射线平焦场光栅光谱仪是等离子体诊断的重要仪器,其核心光学元件全息平焦场光栅通常采用非球面波记录光路制作,因此光栅条纹存在弯曲的现象.光栅条纹的弯曲会影响光谱成像质量,从而影响系统的光谱分辨率.记录光路的优化,只保证光栅子午面的线密度分布,因此优化的记录光路并不是惟一的,所以在保证子午面的线密度分布的同时能制作具有不同弯曲程度条纹的光栅.针对应用于0.8—6 nm的全息平焦场光栅,利用光线追迹方法分析了不同弯曲程度条纹光栅的光谱成像,发现采用柱面反射镜制作的接近于直条纹的光栅具有较好的光谱成像质量.相对于弯曲条纹的光栅,接近于直条纹的光栅理论光谱分辨率有明显的提高,入射波长为3 nm时,光谱分辨率从626提升到953,入射波长为5 nm时,光谱分辨率从635提高到1222.     

基于塔尔博特效应的分波器和分束器

给出一个单一器件同时具有分波器和大规模分束器功能的实验结果，其设计原理基于塔尔博特自成像效应。以两波长为例，通过改变分数塔尔博特距离和光栅周期等参量，实验上实现了两波长光信号在空间上的交叉分离。     

基于扫描白光干涉法的LCOS芯片像素级相位分析

提出了一种扫描白光干涉法,用于获取LCOS芯片的相位调制特性曲线并对其进行相位校准,而且实现了对LCOS芯片建立的相位光栅的像素级相位分析.将补偿玻璃平板紧贴于参考镜处,克服了白光短相干长度的限制,提高了干涉条纹间的对比度.利用Morlet小波变换法求取白光干涉信号包络曲线的峰值点进行相位值重构,实现了0.01π的相位测量精度,同时保证了横向分辨率为0.79μm.利用Logistics函数对相位调制幅度为2π的二元光栅相位轮廓进行拟合,得到其相位回程区宽度为11.49μm.小像素LCOS芯片构建的闪耀光栅存在相位线性增长区和相位回程区.周期为40μm的闪耀光栅相位回程区宽度为8.81μm,其衍射效率为71.9%.对不同周期的闪耀光栅的相位轮廓进行分析,结果表明:闪耀光栅的周期越小,相位回程区相对宽度越大,衍射效率降低.     

声光Naman-Nath衍射特性的研究

讨论了液体介质中的超声相位光栅的形成,根据声光相互作用类型的区分标准,在液体介质的超声光栅实验中声光相互作用一般为Naman-Nath衍射;相位光栅可以由声行波和声驻波形成,且形成的各级衍射条纹极大均由相同的光栅方程决定,各级衍射条纹的强度由相应阶次的J2m函数值决定;在此基础上给出了衍射条纹和衍射光强的分布特点.     

Wavelength-scanning Talbot effect and its application for arbitrary three-dimensional step-height measurement

We demonstrate the phenomenon of Talbot self-image plane shift by tuning the wavelength of the broadband light source. A superluminescent diode (SLD) is used as a broad-band light source and an acousto-optic tunable filter (AOTF) as wavelength-scanning device. A periodic grating is illuminated by the wavelength tuned light of SLD using AOTF and Talbot self-image plane is shifted continuously in the longitudinal direction without mechanically moving the grating. The wavelength-scanning Talbot effect is then implemented for the measurement of arbitrary step-height of discontinuous objects with extended range. The main advantages of the proposed system are non-mechanical scanning, high stability because of it’s common-path geometry and compactness. Since the measurement of the phase is not required the system is free from phase ambiguity problem and therefore, the range of measurement is large as compare to interferometric techniques.     

一般多值相位光栅菲涅耳衍射光场的分析

基于光栅结构与距离的关系,给出了一种求解一般多值相位光栅菲涅耳衍射光场的解析表达式利用该表达式可以直接分析一般多值相位光栅的分数泰伯数效应及在阵列照明中的应用,克服了间接分析法只能分析某些类型的泰伯阵列照明器的不足之处.     

Talbot效应的空间方法

对于照明光束方向与物光栅平面法线方向呈任意角度的情况作了研究。证明了Talbot像平面与物光栅平面平行。还给出了特殊情况下的Talbot像强度的分布。     

基于Talbot-Moiré法的长焦透镜焦距

 长焦距测量的Talbot Moiré法是研究热点,目前很多方法虽然都是基于Talbot现象和Moiré技术,但基本原理和实验方案各不相同,因此焦距计算公式也不相同。基于透镜位相变换作用,利用Talbot效应和Moiré条纹,通过图像处理的方法获得条纹的斜率变化,根据焦距与莫尔条纹斜率之间的关系求得透镜焦距。由于长焦透镜的焦距相对于被测透镜厚度大得多,完全可以看作是薄透镜对光束的变换,可用薄透镜对球面波的变换作用来近似表示其对高斯光束的变换。因此,该方法测量长焦透镜焦距对于高斯光束与非高斯光束焦距测量结果无差别,均适用。最后全面分析了该测量方法的误差及精度极限。在影响测量精度的各个误差因素中,光栅节距误差对焦距测量的影响最为显著。     

Theory of an X-ray interferometer in the form of an array of planar compound refractive lenses

The results of theoretical analysis of the interference pattern created by an X-ray multilens interferometer in the case of an arbitrary number of planar compound refractive lenses are presented. The full widths at half maximum of the resonance peaks in the transverse and longitudinal directions relative to the direction of synchrotron radiation are calculated at distances corresponding to the fractional Talbot effect. A relation between the widths is shown to exist that is very close to the width relation in the case of focusing by a single lens. A difference between the fractional and full Talbot effects is discussed, and the necessary conditions for the transverse and longitudinal coherence of radiation are analyzed, the satisfaction of which guarantees that undistorted interference peaks will be observed experimentally.     

Two-Dimensional Talbot Effect with Atomic Density Gratings

We report the experimental observation of two-dimensional Talbot effect when a resonance plane wave interacts with a two-dimensional atomic density grating generated by standing wave manipulation of ultracold Bose gases.Clear self-images of the grating and sub-images with reversed phase or fractal patterns are observed. By calculating the autocorrelation functions of the images, the behavior of periodic Talbot images is studied. The Talbot effect with two-dimensional atomic density grating expands the applications of the Talbot effect in a wide variety of research fields.     

二维阵列光场衍射自成像效应的倒格矢分析

基于衍射的角谱理论,分析了一般二维周期阵列光场的衍射特性.提出了一种用阵列光场的倒格矢来研究和描述衍射自成像（或泰伯效应）的方法.给出了用倒格矢表示的一般衍射自成像条件.在此基础上,对典型的非正交六方型二维周期阵列光场的泰伯效应和分数泰伯效应进行了定量分析和计算机模拟.     

Measurement of Wavefront Aberration of Human Eye Using Talbot Image of Two-Dimensional Grating

The measurement of human ocular aberration is now frequently performed because of the increase in refractive surgery on the human cornea. The Hartmann-Shack (H-S) wavefront sensor is considered to be the most useful wavefront sensor, and a calculation method for wavefront aberration has been established. New methods of measuring wavefront aberrations of human eyes, using the Talbot image of a two-dimensional grating as a wavefront sensor and local shift of the Talbot image to calculate tilt of the wavefront are shown. The shift of the Talbot image was determined by comparing the phases of fundamental spatial frequency between the grating and the local patch of the Talbot image by Fourier transformation. The actual experiment was performed using a modified commercially available wavefront analyzer. Using these methods, Talbot images were obtained from model eyes and a human eye, and wavefront shapes were successfully reconstructed. Wavefront aberrations can be measured even when the obtained image is degraded by defocusing or scattering.     

Talbot self-image effect in digital holography and its application to spectrometry

For the first time to the authors' knowledge, the Talbot effect has been observed and investigated in digital holography. By numerical reconstruction of holograms, the Talbot self-imaging phenomenon is observed by reconstruction of the amplitude of the image at different distances and (or) wavelengths. A simple spectrometer based on Talbot self-imaging in digital holography is proposed and demonstrated.     

Talbot effect under illumination of double femtosecond laser pulses

The Talbot effect under illumination of double femtosecond laser pulses has been reported. Spectrums of double femtosecond laser pulses with phase differences are quite different from that of one single femtosecond laser pulse. Therefore, the Talbot images of the double femtosecond laser pulses with phase differences are different from that of one single femtosecond laser pulse. Specifically, for the phase difference corresponding to π, the Talbot image shows the largest difference from that of one single pulse. Experimental results are in good agreement with the theoretical analysis. The behaviors of Talbot images under double femtosecond laser pulses illumination cannot be obtained under one femtosecond laser pulse, monochromatic or polychromatic light illumination. Therefore, it is a new interesting optical phenomenon for the Talbot effect which should have potential applications.