超声手术刀声学系统设计和实验*

为兼顾阶梯型变幅杆的高放大系数以及曲线过渡变幅杆突变截面处的高疲劳强度,本文提出了一种最速曲线过渡段的超声刀换能器。首先,基于等效电路法,设计了夹心式压电换能器的基本结构。在此基础上,结合超声刀的工作条件和材料特性,对换能器基本结构进行精确设计;然后,利用FEM法和实验法获取了换能器纵振频率以及频率响应曲线,进一步证明了本文所设计换能器的有效性;最后,对所设计的换能器进行了一系列测试,结果表明：测定了无负载换能器谐振频率与输出端振幅,与设计目标、仿真结果相吻合;连接负载后凝血,切割效果良好。     

New technology for the design of advanced ultrasonic transducers for high-power applications

A new high-frequency ultrasonic transducer for wire bonding has been conceived, designed, prototyped and tested. In the design phase an advanced approach was used and established. The method is based on the two basic principles of modularity and iteration. The transducer is decomposed to its elementary components. For each component an initial design is obtained with finite elements method (FEM) simulations. The simulated ultrasonic modules are then built and characterized experimentally through laser-interferometry measurements and electrical resonance spectra. The comparison of simulation results with experimental data allows the parameters of FEM models to be iteratively adjusted and optimized. The achieved FEM simulations exhibit a remarkably high-predictive potential and allow full control on the vibration behavior of the ultrasonic modules and of the whole transducer. The new transducer is fixed on the wire bonder with a flange whose special geometry was calculated by means of FEM simulations. This flange allows the converter to be attached on the wire bonder not only in longitudinal nodes but also in radial nodes of the ultrasonic field excited in the horn. This leads to a nearly complete decoupling of the transducer to the wire bonder, which has not been previously obtained. The new approach to mount ultrasonic transducers on a welding-device is of major importance not only for wire bonding but also for all high-power ultrasound applications and has been patented.     

Study on the multifrequency Langevin ultrasonic transducer

Langevin ultrasonic transducers are widely used in high-power ultrasonics and underwater sound. In ultrasonic cleaning, a matching metal horn rather than a metal cylinder is used as the radiator in order to enhance the radiating surface and improve the acoustic matching between the transducer and the processed medium. To raise the effect of ultrasonic cleaning, the standing wave in the cleaning tank should be eliminated. One method to eliminate the standing wave in the tank is to use the multifrequency ultrasonic transducer. In this paper, the Langevin ultrasonic horn transducer, with two resonance frequencies, is studied. The transducer consists of two groups of piezoelectric ceramic elements: the back metal cylinder, the middle metal cylinder and the front matching metal horn. The vibrational modes of the transducer are analysed, and resonance frequency equations of the transducer in the half-wave and the all-wave vibrational modes are derived. According to the resonance frequency equations, transducers with two resonance frequencies are designed and made. The resonance frequencies, the effective electromechanical coupling coefficients and the equivalent electric impedances of the transducers are measured. It is shown that the measured resonance frequencies are in good agreement with the computed results, and the transducer can be excited to vibrate at two resonance frequencies, which correspond to the half-wave and the all-wave vibrational modes of the transducer.     

幂函数型环形聚能器径向振动的等效电路

基于机电类比原理和变厚度薄圆环的平面应力方程,推导了幂函数型环形聚能器径向振动的等效电路、共振频率方程和位移放大系数。讨论了第一、二阶径向共振频率及相应的位移放大系数随圆环半径比的变化关系。结果表明,幂函数型环形聚能器径向振动的等效电路是一种非互易二端口等效网络;一阶和二阶共振频率随圆环内外半径比的增大而增大;一阶径向共振模式下位移放大系数随圆环半径比的增大先降低后升高,二阶径向共振模式下位移放大系数随圆环半径比的增大而降低,但二阶时的位移放大系数整体大于一阶,因此二阶径向共振模式具有更好的径向振动性能。用COMSOL有限元软件对解析理论分析结果进行了验证,仿真模拟结果与解析理论符合良好。根据幂函数型环形聚能器的等效电路模型,进一步设计了一种压电环形换能器,计算了第一、二阶径向共振频率、反共振频率及有效机电耦合系数,通过与COMSOL有限元软件模拟结果对比,符合良好。本文研究结果为幂函数型环形聚能器及压电环形换能器的工程应用提供了简明设计理论,文中研究结论可作为一种径向超声切割刀在超声工程中获得重要应用。      

大负载超声振动磨削系统的设计

设计了一种大负载超声振动磨削系统,超声系统由换能器、圆柱圆锥形变幅杆和轮辐式砂轮组成.首先将轮辐式砂轮等效成轮毂为圆柱杆、辐板与轮缘为中厚板的复合模型,利用各接触面边界连续的条件推导系统的频率方程,完成了超声磨削系统的设计,制作了实验装置并分析验证了其声学振动特性.实验结果表明:利用轮辐式砂轮复合模型求解系统频率方程,...     

阶梯圆环压电超声换能器径向振动性能的理论研究*

提出了一种阶梯圆环径向振动压电超声换能器,根据力电类比原理建立了阶梯圆环及阶梯圆环换能器的径向振动等效电路,推导了阶梯圆环的径向共振频率方程和位移放大系数,在此基础上进一步推导了换能器的径向共振和反共振频率方程。通过理论推导和有限元仿真模拟分析了阶梯圆环压电超声换能器的径向振动性能。结果表明,增大阶梯圆环中内外环的径向厚度之比K1或减小轴向厚度之比K2,阶梯圆环的一阶径向共振频率减小,二阶径向共振频率增大;在二阶径向共振模式下,K1、K2值在一定范围内阶梯圆环可实现由内向外的径向位移振幅放大;随着压电陶瓷圆环的内半径增大,阶梯圆环压电超声换能器的一阶、二阶径向共振和反共振频率减小,二阶径向共振下的有效机电转换系数趋于零;增大阶梯圆环内环的外半径,换能器的一阶径向共振和反共振频率减小,二阶径向共振和反共振频率先增大后减小,理论推导与仿真模拟结果符合良好。本文研究结果为阶梯圆环压电超声换能器的工程应用提供理论参考。     

模式转换型超声塑焊振动系统的设计

基于弯曲振动理论和耦合振动理论,设计了一种新型大尺寸筒形超声塑焊振动系统。该振动系统由纵向振动换能器及变幅杆、弯曲振动金属圆盘和耦合振动圆筒四部分组成。换能器和变幅杆的纵向振动驱动圆盘的二次弯曲模式振动,圆盘的二次弯曲模式振动激励圆筒的纵向模式振动,实现了工具头在较高频率下谐振。实验结果表明,振动系统的测试频率与计算频率比较符合,在大信号下测试的纵-弯-纵振动模式转换效果很好。研究结果为高频大尺寸超声焊接系统的设计提供了思路。      

Radial vibration of a slit-type annular ultrasonic concentrator

The radial vibration characteristic of an annular ultrasonic concentrator with multislits is studied.Based on the electro-mechanical analogy and by introducing an area ratio coefficient,the radial vibrational equivalent circuit and the frequency equation of the concentrator are derived.The radial displacement amplitude magnification factor of it is obtained.By numerical calculating,the relationship between the radial displacement amplitude magnification factor,the resonance frequency of the concentrator at the first and second resonance and its radius ratio are investigated.Also,the relationship between the radial displacement amplitude magnification factor,the resonance frequency of the concentrator and the length,the angle and the number of the silts are analyzed.It is illustrated that a maximum of displacement amplitude magnification factor of the concentrator appears with the increase of the radius ratio,and the amplitude magnification factor increase as the length,the angle and the number of the silts increase,while the radial resonance frequency of the concentrator decreases as the length,the angle and the number of the silts increase.The theoretical resonance frequencies are in good agreement with that of the FEM simulations and measurement.     

狭缝式环形超声聚能器的径向振动特性

对一种狭缝式环形超声聚能器的径向振动特性进行了研究。基于机电类比原理,通过引入面积比系数,推出了聚能器的径向振动机电等效电路及频率方程;得出了其径向位移振幅放大系数表达式。通过数值计算,探讨了聚能器第1、2阶径向共振频率及振幅放大系数与其半径比的关系;分析了狭缝长度、角度及数目对聚能器振幅放大系数及共振频率的影响,并进行了有限元仿真。研究表明,聚能器的振幅放大系数随其半径比的变化存在极大值,并随狭缝数量、长度及宽度增加而增大;而其径向共振频率则随三者的增加而减小,理论与有限元仿真及实验结果符合较好。      

Analysis of the sandwich piezoelectric ultrasonic transducer in coupled vibration

The coupled vibration of the sandwich piezoelectric transducer with a large cross-section is analyzed using an approximate analytic method. The resonance frequency equations of the transducer are derived and the effect of the geometrical dimensions on the resonance frequency is studied. It is illustrated that when the radial vibration in the transducer is considered, the vibration of the sandwich transducer becomes more complex. Apart from the longitudinal resonance frequency, the radial resonance frequency can also be obtained. For comparison, numerical methods are also used to simulate the coupled vibration; the resonance frequency and the vibrational displacement distribution are computed. Compared with one-dimensional longitudinal theory, the radial dimensions of the transducer are no longer limited because the coupled vibration is considered. Compared with numerical methods, the physical meaning of the analytic method is concise. It is illustrated that the resonance frequencies obtained from the coupled resonance frequency equations are in good agreement with those from numerical methods, and they are in better agreement with the measured results than those from one-dimensional theory. Since the radial and the coupled vibration are considered in the analysis, more resonance frequencies can be obtained. Therefore, using the coupled resonance frequency equations, the sandwich transducer with multifrequency or wide frequency bandwidth can be designed and used in ultrasonic cleaning, ultrasonic sonochemistry and other applications.     

Load characteristics of high power sandwich piezoelectric ultrasonic transducers

Based on the equivalent circuit theory, the load characteristics of high power piezoelectric ultrasonic sandwich transducers are studied. Two types of loads are studied. One is liquid load as in ultrasonic cleaning, and the other is solid load as in ultrasonic drilling and machining. The effect of load and structure of the transducer on the resonance frequency of the transducer is analyzed. It is shown that the effect of load on the resonance frequency of sandwich transducers with different structures is different. For liquid load as in ultrasonic cleaning, the effect of the load on the resonance frequency of the sandwich transducer with symmetrical structure is the largest. It is the smallest for the transducer with its displacement node in the back metal cylinder. For solid load as in ultrasonic drilling and machining, the effect of the load on the resonance frequency of the sandwich transducer with its displacement node in the front metal cylinder is the largest. It is also the smallest for the transducer with its displacement node in the back metal cylinder. On the other hand, for some applications, such as ultrasonic drilling, when the lateral dimension of the tool is much less than that of the transducer, its effect on the resonance frequency of the transducer is small. The conclusions are useful in designing vibrating systems for different ultrasonic applications.     

Some properties of horn equation model of ultrasonic system vibration and of transfer matrix and equivalent circuit methods of its solution

Traditional technique of horn equation solved by transfer matrices as a model of vibration of ultrasonic systems consisting of sectional transducer, horn and load is discussed. Expression of vibration modes as a ratio of solutions of two Schrödinger equations gives better insight to the structure of a transfer matrix and properties of amplitudes of displacement and strain, and enables more systematic search for analytic solutions. Incorrectness of impedance matrix method and of equivalent circuit method on one hand and correctness and advantages of transfer matrix method in avoiding numerical artifacts and revealing the real features of the model on the other hand are demonstrated on examples. Discontinuous dependence of the nth resonant value on parameters of ultrasonic system, recently described in Sturm–Liouville theory, and consequently, a jump from half-wave to full-wave mode, is observed in a transducer model.     

超声换能器表面的振动状态

从超声波在波密介质和波疏介质之间的传播以及诱发共振发射超声波的角度,讨论了空气中超声声速测量实验所用超声换能器的表面振动状态.理论分析及实验测量结果表明:超声换能器表面振动状态与其结构有关,超声接收器表面位移振幅一般不为零.     

A new type of high power composite ultrasonic transducer

A new type of high power composite ultrasonic transducer was proposed and studied. The composite transducer consists of a sandwich longitudinal piezoelectric transducer, an isotropic metal hollow cylinder with large radial dimension, and the front and back metal radiation mass. By means of its special structure and Poisson’s effect, the composite transducer can produce vibrations both in its longitudinal and radial directions, and therefore, it can radiate sound waves in three-dimensional space. The electro-mechanical equivalent circuit of the composite transducer was derived and the resonance frequency equation was obtained analytically. Numerical methods were used to simulate the vibration of the composite transducer, and the vibrational displacement distribution, the resonance frequency and the radiation sound field are given. Some composite transducers are designed and manufactured; their resonance frequencies and the radiation acoustic field are measured and compared with the analytical and numerical results. It can be seen that the measured frequencies and acoustic field contour are in good agreement with the analytical and numerical results. It is expected that this kind of composite ultrasonic transducer can be used in more and more power ultrasonic applications, such as ultrasonic cleaning, ultrasonic extraction, ultrasonic sonochemistry and other ultrasonic liquid processing, where high ultrasonic power and large ultrasonic processing space are needed increasingly.     

Rare earth ultrasonic transducer technique research

Transducer is the necessary and most important part in the maxonics. New applications demand for new transducer, and the renovation of the transducer will open a new field for the application of the maxonics. The important method to develop new transducer is to find and develop new material. The rare earth giant magnetostrictive material Terfenol-D is a new functional material with good performance. In this paper, the rare earth ultrasonic transducer was analyzed theoretically and devised in four-port method and FEM software ANSYS. A rare earth ultrasonic transducer and the transducer with the half wave horn are developed, whose performance has shown unique advantage compared with the piezoelectric transducer.     

Enhanced vibration performance of ultrasonic block horns

Block horns are tuned components designed to vibrate in a longitudinal mode at a low ultrasonic frequency. Reliable performance of such horns is normally associated with the amplitude of vibration, uniformity of vibration amplitude at the working surface and the avoidance of modal participation by non-tuned modes at the operating frequency. In order to maximise vibration amplitude uniformity, standard slotting configurations are included in the horn design. However, defining a slotted block geometry which guarantees sufficient tuned frequency isolation from nearby modes as well as high amplitude and amplitude uniformity, is not straightforward. This paper discusses horn configurations which satisfy these criteria and investigates the design requirements of block horns which operate as intermediate components in ultrasonic systems, where the block horn dominates the vibration behaviour of the system. The importance of mode shape characterisation is discussed and modes are classified using experimental data from 3D laser Doppler vibrometer measurements and finite element analysis. In particular, the role of additional fine slots and castellations are studied with reference to two distinct ultrasonic applications involving a similar block horn.     

Effects of driving frequency of longitudinal transducer on the vibration characteristics of a stepped plate

The flexural vibration characteristics of a stepped plate, driven at its center by different frequency of longitudinal transducer with a certain area are investigated. The variation in the nodal circle, fundamental frequency and displacement distribution of the stepped plate are calculated by using finite element method (FEM) under different driving frequencies. The results show that the fundamental frequency and nodal circle of the flexural-vibration stepped plate (FVSP) increase with an increase in the driving frequency of the longitudinal vibration ultrasonic transducer (LVUT), before the second-order flexural vibration occurs. When the driving frequency is f = 28 kHz, the displacement amplitude of the stepped plate can achieve the maximum, and the nodal circle radius of the stepped plate is 2.61 cm which fits evenly the edge of stepped profile. Meanwhile, the directivity and radiation efficiency of the FVSP would be greatly improved in a special driving frequency. The conclusions agree with the experimental ones and are significant for both design and applications of the stepped plate.     

矩形辐射器压电多频超声换能器的研究

研究了一种具有多个共振频率的矩形辐射器夹心式超声换能器,换能器由圆柱形后盖板、压电陶瓷晶堆及矩形六面体辐射器前盖板组合而成。利用表观弹性法和一维近似理论给出了多频换能器横向及纵向理论共振频率方程。对一种特殊情况下的此类换能器进行了有限元及实验分析,给出了各自的频率输入导纳曲线。对理论和实验结果进行分析后表明,此类矩形辐射器夹心式超声换能器可以在不同的振动模态上工作,具有多个共振频率.     

功率超声振动系统的研究进展

功率超声振动系统是功率超声技术中的关键部分,其主要部分包括功率超声换能器、超声变幅杆以及超声工具头或超声辐射器。本文就功率超声换能振动系统设计中经常遇到的一些关键问题进行了简要的归纳和总结,目的在于为功率超声换能器的优化设计和性能改善提供一些有用的设计指南和解决措施。同时,对一些新的功率超声振动系统进行了介绍,并简要分析了其发展趋势和应用领域。     

模式转换环形耦合振动超声辐射器

提出了一种新型耦合振动环形超声辐射器,辐射器由纵振换能器及变幅杆激励特定尺寸的金属圆环,使其能有效地将纵向振动转化为圆环的径向轴向耦合振动从而向环的径向、轴向辐射超声波,并且在环的中心形成聚焦声场。推导了该辐射器的等效电路,给出了等效电路法和有限元法优化设计环形超声辐射器的详细过程。研究了耦合振动环形超声辐射器的谐振特性及其辐射声场特性,根据理论计算结果加工了相应的环形超声辐射器,实验测试结果与理论计算结果符合得较好。本文提出的模式转换环形耦合超声辐射器可望在声化学等液体处理领域获得应用。