Phase shifting nano-moiré method with scanning tunneling microscope

In this paper, a new nano-moiré method using scanning tunneling microscope (STM) is proposed. This method is capable of measuring nanoscopic deformation of matter. The formation mechanism of the STM moiré fringe and the phase shifting technique used in STM moiré fringes are explained in details. Typical experiments are conducted with the crystal lattices of freshly cleaved highly oriented pyrolytic graphite, are used as specimen grating, to generate STM moiré fringe patterns. Phase shifting is realized in four steps from 0 to 2π by controlling the PZT in the STM system to shift the specimen in the vertical direction. This method provides a new way for disposal of moiré fringes pattern in the nano-moiré measurement.     

Fabrication of high-frequency electron beam moiré grating using multi-deposited layer techniques

This paper proposed new ways for producing multi-layer model grids for electron beam moiré method. An electron beam lithography system was set up under scanning electron microscope which was equipped with a beam blanking device and a pattern generator. The two-deposited-metal layers method was used to manufacture electron beam grating for high-temperature use. The results verify that the Zr–Pt-type grating possesses heat resistance up to 1100°C in vacuum. A new type of composite grating with frequencies 100 lines/mm and 1000 lines/mm using three deposited layers was produced. A 10 000 lines/mm two-deposited-metal layers grating was successfully fabricated using electron beam lithography.     

Electron moiré method and its application to micro-deformation measurement

In this paper, the single and two deposited metal layers method were proposed to produce the model grating for electron moiré method. The measurement principle of electron moiré method and the techniques for manufacturing model grid are expounded in detail. The accuracy of measuring strain using this method is discussed. The gratings with single deposited layer and two deposited layers with high frequency up to 5000 lines/mm were produced on different substrates. From the experimental results, both single deposited metal layer and two deposited metal layers gratings showed their heat resistance ability. Using the gratings produced and a replicated model grid, the electron moiré method was applied to measure the deformation of the strain around holes in a polyimide resin substrate, thermal strain of electronic packaging component and tensile creep around grain boundary in a pure copper specimen.     

Realization of high sensitivity displacement field from moiré interferometer with rough phase shifting mechanism and pattern matching technique

In this study, phase shifting method is used to modify moiré system into micro moiré interferometer which can measure displacement field with highly improved sensitivity. Apart from existing micro moiré technique, a low cost and less precise translation stage with rough resolution (10 μm resolution) is adapted for the phase shifter. Least square algorithm is applied to estimate the arbitrary phase shifted amount and to minimize the errors induced by lowering the cost. Moreover, specimen grating is phase shifted instead of reference grating which enables simple construction from given moiré system. To compensate for rigid body in-plane translation of specimen that may occur during phase shifting, pattern matching algorithm is put into practice to ensure pixel correspondence for each phase shifted images. To verify the newly constructed micro moiré technique, local displacement fields of Fine pitch Ball Grid Array package and Wafer Level Chip Size Package with elevated sensitivity up to 26 nm per fringe was acquired.     

SEM扫描云纹法的相移技术研究

提出一种扫描电镜(SEM)扫描云纹法的相移新技术,通过SEM系统控制电镜电子束扫描线移动,对获取的云纹图像实现0-2π范围内的四步相移,从而获得了更高的位移测量灵敏度。同时对SEM扫描云纹法的测量原理以及相移实验技术的原理进行了详细的阐述。并将该技术应用到电子封装试件栅的相移分析中。实验结果证明了该方法的可行性,该方法为微米云纹法的条纹处理提供了一种新途径。     

A phase unwrapping technique for object relief determination

Phase shifting methods are widely used in photomechanics to analyse fringe patterns obtained from interferometry, moiré, etc. The phase is determined by modulo 2π and an unwrapping process is needed. An algorithm is presented which avoids most of the inconsistency of the phase field. It can be applied to the relief determination of virtually any object shape. In this paper, two applications are performed using the projection of a parallel line grating with a pitch equal to 4 mm. The accuracy is shown to be around 0…1 mm.     

Bandwidth controllable transmission filter based on Moiré fiber Bragg grating

A new and efficient technique for fabrication of bandwidth controllable π–phase-shifted fiber Bragg grating (FBG) based on moiré grating using a uniform phase mask is demonstrated. The feasibility of writing a moiré grating into an ordinary SMF-28 fiber using stretching and double exposure by ultraviolet fringe is reported. We analyzed the relation between the initial differentia of phase of two exposures and the transmission spectrum of phase-shifted FBG. Moreover, we present a novel method to control the initial differentia of phase of two exposures. Using this technique, two kinds of resonant filters with a 3-dB line-width of 0.01 nm centered at 1553.79 nm and of 0.5 nm centered at 1554.57 nm respectively were fabricated with same uniform phase mask.     

Bandwidth controllable transmission filter based on Moiré fiber Bragg grating

A new and efficient technique for fabrication of bandwidth controllable π–phase-shifted fiber Bragg grating (FBG) based on moiré grating using a uniform phase mask is demonstrated. The feasibility of writing a moiré grating into an ordinary SMF-28 fiber using stretching and double exposure by ultraviolet fringe is reported. We analyzed the relation between the initial differentia of phase of two exposures and the transmission spectrum of phase-shifted FBG. Moreover, we present a novel method to control the initial differentia of phase of two exposures. Using this technique, two kinds of resonant filters with a 3-dB line-width of 0.01 nm centered at 1553.79 nm and of 0.5 nm centered at 1554.57 nm respectively were fabricated with same uniform phase mask.     

The phase shift method applied to cross grating moiré measurements

The automatic evaluation of the grating deformation in a moiré image is greatly enhanced by the phase shift method. Based on three or more local grey values of a related number of phase shifted moiré patterns, the local displacement of a deformed grating against a reference grating, and hence the total displacement in one direction, is calculated. In this paper an extension to cross gratings is presented yielding a two- dimensional displacement field.     

Contribution to analysis of the reflection grating method

The reflection grating method is a special case of the well-known reflection moiré principle. Whereas this moiré effect is suitable for measurement of the slope and curvature of deformed object surfaces by superposition of at least two grating images, the same results can be determined using only one reflected grating image without moiré lines.Some fundamental relationships between grating lines, optical setup and the desired deformation are developed and compared with the simplifications that are known from the moiré principle. The theory is tested using a circular plate, uniformly loaded and clamped at the circumference.     

Formation of unsymmetric moiré fringes and their use in moiré topography

An analytical method of predicting the intensity profile of the moiré fringes formed by a three-dimensional grating is proposed. The proposed method is proved to be effective in determining the appropriate structure of the grating and the experimental conditions for directional moiré topography.     

Automatic fringe analysis for moiré topography

Two digital systems are developed for the automatic measurement of 3-D shapes using moiré techniques—an automatic 3-D shape measuring system using the scanning moiré method and an interactive fringe analysing system for moiré fringe photographs. In the automatic 3-D shape measuring system, a deformed grating is scanned and sampled with an electronic image scanning device so that moiré fringes are generated in a computer. This technique of electronic fringe generation eliminates ambiguity with regard to the sign of the moiré fringes. The interactive fringe analyser provides a flexible and versatile tool for moiré fringe analysis. Medical applications of these analysing systems are discussed.     

Holographic implementation of holographic moiré inspection

Implementation of holographic moiré inspection is demonstrated using one hologram to project the reference grating and a further hologram to produce moiré patterns. Well contrasted moiré fringes are obtained. Results of calibration tests are reported and an example of object contouring is presented.     

Geometric micron-moiré

A high spatial resolution and high-sensitivity geometric micron-moiré method is presented. The method is based upon classical geometric moiré method and microscopic principle, the frequency of the specimen and reference gratings used in this method can be higher than 1000 lines/mm. By a microscopic moiré system, the high-frequency gratings could be magnified to a low-frequency level, so geometric moiré patterns can be formed. Experiments show that both the spatial resolution and the sensitivity can reach or exceed micron-level.     

Experimental tire mechanics by moiré

Tires and their component parts are made from various low modulus rubbers and cord/rubber laminates. In service they typically undergo large deformations of about 1–30%. The accurate measurement of these deformations by either pointwise (strain gage) or full-field (optical) techniques is rendered difficult in these circumstances. Ordinary strain gages reinforce these soft structures and inhibit their deformation, whereas most optical methods are too sensitive to measure large motions. These difficulties can be overcome by the judicious use of various moiré methods: moiré interferometry, geometric moiré and shadow moiré.Several applications of moiré methods to tire mechanics problems are presented. The emphasis is on the range of problems that has been successfully approached and on the results obtained. Examples are drawn from work on belt-edge strains, tread groove strains, sidewall strains, dynamic sidewall deformations and material properties determination. Proprietary details of technique are not included.     

Analysis of moiré fringes for measuring the focal length of lenses

We describe a technique based on fast Fourier transform and least-squares fit for automated analysis of moiré fringe patterns for accurately measuring the focal length of lenses. An interference fringe pattern is produced by a reflective diffraction grating interferometer and illuminates the test lens. Moiré fringes are generated by digitally superimposing the magnified fringe pattern imaged by the lens on the interference fringe pattern without the test lens. We analyze two common ways to generate the digital moiré effect: multiplication and subtraction with successive rectification of the two digitally stored intensity distributions, and we show that in the latter case by means of the described technique it is possible to determine the moiré spatial frequency by a simple and fully automated procedure.     

A simple method for testing laser beam collimation

A simple and improved method is proposed for testing laser beam collimation by a new type of grating, comprising concentric equilateral triangles and the mirror images of these triangles. Although this type of grating possesses one-dimensional periodicity in a particular direction and inherent defects in periodicity, the moiréfringe pattern formed by placing an exact replica of such a grating at its self-imaging plane shows that the self-imaging phenomenon takes care of the defects in the periodic objects.     

Analysis of CCD moiré pattern for micro-range measurements using the wavelet transform

A new approach based on the moiré theory and wavelet transform (WT) is proposed for measuring the micro-range distance between a charge-couple-device (CCD) camera and a two-dimensional reference grating. The micro-range distance is determined by measuring the pitch of the moiré pattern image, which is digitized by a CCD camera. A one-dimensional WT algorithm is applied to estimate the pitch of the moiré pattern. Experimental results prove that this technique is very efficient and highly accurate. The moiré range finder is an economic technique for measuring a micro-range distance.     

A new real-time method of moiré interferometry for displacement derivative fringe patterns

A new method of moiré interferometry is proposed in this paper to obtain the strain fringe pattern in real time. The specimen grating is illuminated by dual beams whose optical path-difference is larger than the coherence length of the laser. The diffractions of the grating are sheared by a glass wedge to fulfil the optical differentiation. The principles based on wavefront analysis are shown and an experimental verification is reported.     

The optimization of three-mirror illuminating system for the four-beam Moiré interferometer

The three-mirror illuminating system for moiré interferometry consists of a Lloyds mirror and two additional mirrors at right angles to each other. This arrangement makes possible the design of a four-beam moiré interferometer system for a cross-lined specimen grating, to determine the u and v displacement components of the object under test. The design problems, including optimization of dimensions of the optical elements and adjustment by a user, are discussed and analytically solved. The analysis was verified by the construction and laboratory use of the interferometer.