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1.
采用HF酸刻蚀和紫外激光预处理相结合的方式提升熔石英元件的负载能力,用质量分数为1%的HF缓冲溶液对熔石英刻蚀1~100 min,综合透过率、粗糙度和损伤阈值测试结果,发现刻蚀时间为10min的熔石英抗损伤能力最佳。采用355 nm紫外激光对HF酸刻蚀10 min的熔石英进行预处理,结果表明:紫外预处理能量密度在熔石英零损伤阈值的60%以下时,激光损伤阈值单调递增;能量到达80%时,阈值反而低于原始样片的损伤阈值。适当地控制酸蚀时间和紫外激光预处理参数能有效提高熔石英的抗损伤能力。 相似文献
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The combination of deep wet etching and a magneto-rheological finishing(MRF) process is investigated to simultaneously improve laser damage resistance of a fused-silica surface at 355 nm. The subsequently deposited SiO2 coatings are researched to clarify the impact of substrate finishing technology on the coatings. It is revealed that a deep removal proceeding from the single side or double side had a significant impact on the laser-induced damage threshold(LIDT) of the fused silica, especially for the rear surface. After the deep etching, the MRF process that followed does not actually increase the LIDT, but it does ameliorate the surface qualities without additional LIDT degradation. The combination guarantee both the integrity of the surface’s finish and the laser damage resistance of the fused silica and subsequent SiO2 coatings. 相似文献
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研究了CO2激光局域辐照对熔石英损伤特性的影响, 发现当辐照中心温度较低时(1139 K), 辐照对损伤阈值没有明显影响, 但辐照中心温度较高时(1638 K), 辐照对损伤阈值有明显的影响, 损伤阈值随距离辐照中心间距的增大而减小, 在残余应力产生光程差最大处附近, 损伤阈值降到最小, 随着与辐照中心间距的进一步增加, 损伤阈值略有上升. 对导致此现象的原因做了分析. 由于残余应力的存在, 在辐照中心发生再损伤产生的裂纹后, 裂纹先沿径向扩展, 在残余应力产生光程差最大处附近, 裂纹转而向切向扩展, 这可能与径向和环向张应力随半径的变化有关. 在采用热处理炉退火消除残余应力时, 必须注意元件的洁净处理, 否则退火会出现析晶现象, 对损伤阈值和透射率造成不良影响.
关键词:
2激光局域辐照')" href="#">CO2激光局域辐照
熔石英
损伤特性 相似文献
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环境气氛压强对熔石英紫外激光损伤阈值的影响 总被引:2,自引:1,他引:1
利用1∶1, S∶1, R∶1方法,测试了不同真空度(10-3~105 Pa)和不同气氛(空气、氮气、氧气)环境下熔石英351 nm激光损伤阈值,测试结果表明,用1∶1, S∶1方法测试得到的阈值在不同气氛压强下几乎相等;R∶1损伤阈值受气压的影响较大,在小于等于103 Pa气压下,较105 Pa气压的阈值降低28%~41%;但R∶1损伤阈值同气氛的关系不大,在同气压下差别小于10%,在测量值误差范围内。利用50%破坏几率对应的损伤阈值Fth(R∶1)一半的激光能量密度辐照样品,考察其抗多脉冲辐照的能力,分析表明,在同样的能量密度辐照下,103 Pa空气及氮气环境和105 Pa氮气环境下同样具有高的寿命;而10-3 Pa高真空环境下其寿命较短,在10-1 Pa低真空环境下其寿命最短。 相似文献
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研究了不同剂量的60 kW高功率脉冲电子束辐照对高纯熔石英玻璃的微观结构、光学性能和激光损伤特性的影响规律. 光学显微图像表明, 辐照后熔石英样品由于热效应导致表面破裂, 裂纹密度和尺寸随辐照剂量增加而增大, 采用原子力显微镜分析表面裂纹的微观形貌, 裂纹宽度约1 um, 同时样品表面分布着大量尺寸约0.1–1μm的碎片颗粒. 吸收光谱测试表明, 所有样品均在394 nm处出现微弱的吸收峰, 吸收强度随着电子束辐照剂量增大呈现先增加后减小的趋势. 荧光光谱测试发现辐照前后样品均有3个荧光带, 分别位于460, 494和520 nm, 荧光强度随辐照剂量的变化趋势与吸收光谱一致. 利用355 nm激光研究了不同剂量电子束辐照对熔石英激光损伤阈值的影响, 结果表明熔石英的损伤阈值随着辐照剂量的增加而降低. 在剂量较低时, 导致熔石英激光损伤阈值下降的原因主要是色心缺陷; 剂量较高时, 导致损伤阈值降低的原因主要是样品表面产生的大量微裂纹和碎片颗粒对激光的调制和吸收.
关键词:
熔石英
电子束辐照
色心
激光损伤阈值 相似文献
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采用溶胶-凝胶技术分别在K9基片上镀制了光学厚度相近的单层SiO2酸性膜和碱性膜。测试了两类薄膜的激光损伤阈值;分别采用透射式光热透镜技术、椭偏仪、原子力显微镜、扫描电镜和光学显微镜研究了两类薄膜的热吸收、孔隙率、微观表面形貌、激光辐照前薄膜的杂质和缺陷状况以及激光辐照后薄膜的损伤形貌。实验结果表明:相对于碱性膜,酸性膜有更大的热吸收和更小的孔隙率,因此其激光损伤阈值较小;两类薄膜不同的损伤形貌与薄膜的热吸收系数与微观结构有关。 相似文献
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Mahdieh Khatiri Fereshteh Hajiesmaeilbaigi Hosein Razaghi Ali Panahpour Alireza Bananej 《Optical and Quantum Electronics》2018,50(8):312
In this work, nano-porous anti-reflective silica thin films are deposited on the quartz samples by dip-coating in silica sol–gel. After dip-coating, the samples are divided into three groups and each group is heated in an oven with a different drying method. The effect of the heating methods on the morphology and optical properties of the coated layers are studied by SEM imaging and measuring optical transmission of the samples. Then based on the transmission data and calculation of absorption coefficient of the layers, the band gap energy of the silica thin films is calculated. In addition, laser induced damage threshold (LIDT) of the samples are measured by using 35 fs, 100 mJ femtosecond laser pulses. It can be seen that there is a distinct correlation between band gap energy and LIDT of the samples which both of them have been affected by heating method of the coated samples. 相似文献
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用光学显微镜和原子力显微镜记录HF酸刻蚀后熔石英元件后表面划痕的形貌结构,并利用单脉冲激光对其进行辐照测试,以研究不同结构参数划痕的激光损伤特性.实验结果表明,由于HF酸的腐蚀钝化作用,划痕结构横向截面呈余弦形分布;其初始损伤阈值并非由单一的划痕宽度或深度参数决定,而是与其横向剖面结构的宽深比值密切相关;通过实验得到了二者之间的关系曲线,并采用时域有限差分算法对不同结构参数划痕附近光场分布进行理论模拟,理论场计算得到的增强结果与实验值符合得很好. 相似文献
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Experimental investigation was performed with a 1064-nm, 10-ns Nd:YAG laser to determine the effects of the surface hydrogen acid etching on laser damage, compared with damage of conventionally polished surface. The investigation was helpful for us to understand the negative effects of Nd-doped phosphate glass surface and subsurface damage (SSD) on laser induced damage threshold (LIDT). A set of samples was polished, and then chemically etched in a cool buffered 10%HF 20%H2SO4 solution at different times. Another set of samples was ground and etched in the hot-buffered solution, and then polished. All the samples were irradiated with Nd: YAG laser and characterized by optical microscopy. Results of LIDT were obtained according to International standard ISO/DIS 11254-1.2. Chemical treatment can remove the contaminants in the polished re-deposition layer and the SSD for improving the laser damage resistance of Nd-doped phosphate glass surfaces. The method of using hot solution was more effective than that ofusing cool solution. 相似文献
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采用溶胶-凝胶提拉技术制备了SiO2疏水减反膜.使用Nd:YAG激光(波长为1064nm,脉宽为7.5ns)采用“R on 1”方式对所得膜层进行了激光预处理.在预处理前后采用“1 on 1”方式考察了薄膜的激光损伤阈值的变化,使用原子力显微镜(AFM)观察了薄膜的表面形貌的变化,并使用多重分形谱(MFS)方法分析了薄膜分形结构的变化.结果表明经过激光预处理后薄膜的抗激光损伤阈值有了明显提高,均方根表面粗糙度(Rq)稍有减小,膜面变平整,多重分形谱宽度收缩,分形区间的分布均匀性改善.这说明经过激光预处理后薄膜表面微结构趋向规整,使之能够承受更强的激光的辐照.同时也说明借助多重分形谱可以获得更多薄膜表面结构变化的信息,多重分形谱是探索强激光对光学薄膜辐照作用机理的一个十分有用的方法.
关键词:
2疏水减反膜')" href="#">SiO2疏水减反膜
激光预处理
多重分形谱
激光损伤阈值 相似文献
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针对高功率激光装置内部最易产生受激布里渊散射(SBS)效应的大口径取样光栅(BSG)元件,测试了经过化学刻蚀、紫外激光清洗作用处理后,大口径光学元件BSG侧面在355 nm激光辐照下的损伤阈值、损伤形态以及产生的石英颗粒气溶胶对环境污染程度的分析。结果表明:经过化学刻蚀,BSG侧面的损伤阈值提高78%,基本与通光面的损伤阈值相当,而经过紫外激光处理后的损伤阈值提升不高,仅为通光面损伤阈值的56%。侧面对比分析了相同激光能量辐照下样片侧面产生的气溶胶污染状况,结果表明紫外激光处理同样可以提高光学元件侧面产生污染物的阈值,且对光学元件性能没有影响。通过微观形貌和对通光口径影响分析表明,紫外激光清洗处理比化学刻蚀具有更好的安全性和适用性。 相似文献
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Enhancement of CsLiB(6)O(10) surface-damage resistance by improved crystallinity and ion-beam etching 总被引:1,自引:0,他引:1
Kamimura T Fukumoto S Ono R Yap YK Yoshimura M Mori Y Sasaki T Yoshida K 《Optics letters》2002,27(8):616-618
The surface laser-induced damage threshold (LIDT) of CsLiB(6)O(10) (CLBO) crystal was enhanced twofold with improved crystallinity and ion-beam etching. For crystals with high crystal quality (bulk LIDT, 15.0-19.0 GW/cm(2)), the surface LIDT was 1.4-fold higher than for those with conventional crystal quality (bulk LIDT, 9.0-12.0 GW/cm(2)). In addition, removal of residual surface-polishing compounds by means of ion-beam etching can further enhance the surface LIDT by another 1.5-fold. Thus, CLBO crystals with high crystal quality and ion-beam etching are now more reliable for high-power UV light generation. 相似文献
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利用Nd∶YAG调Q单脉冲激光和自由脉冲激光对硬膜窄带干涉滤光片进行激光损伤阈值的测试,并且采用表面热透镜技术测量了滤光片的吸收率。实验发现:窄带干涉滤光片的吸收率和激光损伤阈值强烈依赖于辐照激光波长与窄带干涉滤光片通带的相对位置;在调Q单脉冲激光作用下,不同中心波长的滤光片损伤形貌存在明显的差别,而在自由脉冲激光作用下,各滤光片的损伤形貌则趋于相同,均表现为典型的热熔烧蚀破坏。根据实验结果,结合损伤形貌,通过驻波场理论对激光作用下滤光片内电场分布的分析与模拟,探讨了两种激光模式作用下滤光片的损伤特征和损伤机理的不同特点。 相似文献
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The sol-gel monolayer silica films on K9 glass substrates were prepared with the dip method, and then treated in saturated ammonia gas. The laser-induced damage threshold (LIDT) of silica films with and without ammonia treatment was measured. Properties of the films were analyzed by using Stanford photo-thermal solutions (SPTS), ellipsometry, atomic force microscopy (AFM), and optical microscopy to study the effect of ammonia treatment on laser-induced damage of sol-gel monolayer silica film under laser irradiation. The experimental results showed that compared with the as-grown silica film, the silica film with ammonia treatment had larger absorption and smaller porous ratio, and it had smaller LIDT. Considering the improved abrasion resistance of films with ammonia treatment, a trade-off is always needed between abrasion resistance and LIDT in practice. 相似文献
17.
Nd-doped phosphate glass is the dominant amplifier material used in solid state high average power laser systems.Surface imperfection and subsurface damage(SSD)of the glass,resulting from the optical fabrica-tion process,limit the increment of laser system energy output.Thus,it is important to enhance the surface damage threshold of Nd-doped phosphate glass surface.The influence of abrasive size,polishing powder,grinding mode,and chemical treatment on the laser-induced damage threshold(LIDT)of Nd-doped phos-phate glass surface is investigated.Results show that the LIDT is affected little by different polishing powders and grinding modes.The LIDT correlates with the abrasive size,which produced different depths of SSD.A suitable acid etching treatment can remove the imperfection and the SSD for improving the LIDT of Nd-doped phosphate glass surface.The combination of several effective techniques and methods,which are low-cost and practical,should be useful to enhance the LIDT of Nd-doped phosphate glass surface. 相似文献
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The roles of laser-induced defects and native defects in multilayer mirrors under multi-shot irradiation condition are investigated. The HfO 2 /SiO 2 dielectric mirrors are deposited by electron beam evaporation(EBE) . Laser damage testing is carried out on both the 1-on-1 and S-on-1 regimes using 355-nm pulsed laser at a duration of 8 ns. It is found that the single-shot laser-induced damage threshold(LIDT) is much higher than the multi-shot LIDT. In the multi-shot mode,the main factor influencing LIDT is the accumulation of irreversible laser-induced defects and native defects. The surface morphologies of the samples are observed by optical microscopy. Moreover,the number of laser-induced defects affects the damage probability of the samples. A correlative model based on critical conduction band(CB) electron density(ED) is presented to simulate the multi-shot damage behavior. 相似文献
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光学减反膜是激光系统的重要组成部分,也是在激光照射下最容易发生损伤的部分,如何提高减反膜的激光损伤阈值是研究的热点之一。在保持目标透射光谱要求和膜系总光学厚度不变的前提下,研究了不同梯度化减反膜与激光损伤阈值之间的关系。首先采用混合渐变膜系设计方法设计了一种渐变减反膜系,G/H1→H/L/A;其次通过渐变折射率分层等效方法将渐变减反膜系进行不同的梯度化,并利用PECVD技术,在K9玻璃上沉积了满足光学性能指标要求的不同渐变减反膜系(多层梯度渐变膜系和相应的坡度渐变膜系);最后进行了激光损伤阈值(LIDT)测量。研究结果表明:在保持目标透射光谱要求和膜系总光学厚度不变的前提下,渐变减反膜系相比于传统减反膜系,抗激光损伤阈值有明显的提高;随着梯度化层数的增加,渐变减反膜系的激光损伤阈值呈减小的趋势;对于相同膜层的渐变折射率薄膜,采用坡度法制备的样片抗激光损伤阈值均优于采用梯度化制备的样片。 相似文献