Radial characteristics of radiation of high-frequency electrodeless lamps

The radial dependences of the radiative characteristics of high-frequency electrodeless lamps (HFELs) using as a working medium either a mixture of mercury and argon or helium have been investigated in experiments and numerical simulations. The intensities of the mercury line at a wavelength of 546.1 nm and the helium line at 587.6 nm have been measured. The measurements were conducted at different points lying on the central chord of the circular end of a cylindrical lamp. As the power of the pumping generator increases, a decrease in the radiation intensity near the axis of the discharge in a mercury vapor HFEL is observed, while, in the helium lamp, on the contrary, the intensity increases. On the basis of models of HFELs developed earlier, we have calculated the radial dependences of the radiation intensity of the mercury line at 546.1 nm and the helium line at 587.6 nm. A satisfactory agreement with the data of experimental measurements has been attained. A comparative analysis has been carried out, and an explanation has been proposed for the difference in the observed radial intensity profiles of these two lines.     

Producing pulsed luminescence of a high-frequency ring discharge

The results of a study of luminescence from an electrodeless high-frequency (2-Mc) ring discharge in air (0.02–10 mm Hg) are described. The discharge luminescence was pulsed. The pulse height varied within time intervals equal to the period of the external field. The qualitative effect of the constant internal electric field on pulse height is discussed.     

Calculations of the chemical composition of helium–silane plasma

A model describing the process of silane dissociation in a high-frequency helium plasma discharge is proposed. The concentrations of the silane dissociation products are calculated numerically, and the role of metastable helium atoms in the synthesis of film-forming radicals is analyzed.     

Increase in the efficiency of energy injection into discharge plasma and the luminous efficiency of luminescent lamps during high-frequency pumping

It is experimentally justified for the first time that electrodeless induction pump of plasma of standard cylindrical luminescent lamps provides optimization of the high-frequency inductive–capacitive (HFI) discharge conditions. The acceptable frequency range and the effect of the capacitance between the inductor and plasma on the efficiency of resonant energy injection into discharge plasma are revealed. An increase in the luminous efficiency to 25% in the range of pump powers multiple of the lowest nominal power for the lamp under standard operating conditions is detected. Physics of the found phenomenon and the range of application of the power saving technology for electrodeless pumping of luminescent lamps with increased operation life are discussed.     

Electrophysical and Thermal Parameters of Thermal Plasma in a High-Frequency Induction Discharge

A semiempirical model is proposed for the calculation of electrical, magnetic and thermal parameters of the plasma of a high-frequency induction discharge. The model is based on solving a system of two-dimensional Maxwell equations written for a cylindrical coordinate system.     

冷端温度对无极灯253.7nm共振谱线的影响

无极灯是一种长寿命、低汞害、无频闪的新型电光源,其光效在很大程度上取决于253.7nm共振谱线的辐射效率。通过原子发射光谱分析,实验研究了冷端温度对253.7nm共振谱线的影响规律。研究发现,253.7nm共振谱线的辐射效率随冷端温度变化近似呈正态分布,即无极灯工作存在一个最佳冷端温度。运用气体放电理论对实验结果进行了定性分析,对无极灯光效的提高具有指导意义。     

Plasma cleaning of multilayer mirrors in EUV lithography from amorphous carbon contaminations

The feasibility of plasma cleaning of the multilayer mirrors used in 13.5-nm EUV lithography from carbon contaminations is studied. Experiments conducted in electrodeless plasma of the surface-wave low-pressure discharge in helium and hydrogen demonstrated the high rate, efficiency, and selectivity of this cleaning without any damage of the mirror’s upper protection layer, even at the atomic level. The optimal working parameters of plasma cleaning are determined and its possible mechanism is discussed.     

铟网位置对无极灯253.7 nm共振谱线的影响

无极灯是一种基于高频电磁感应和无极气体放电的新型电光源,由Hg 253.7 nm共振谱线激发荧光粉进而发出可见光。通过原子发射光谱分析,实验研究了铟网位置对Hg 253.7 nm共振谱线的影响规律。研究发现,Hg 253.7 nm共振谱线的相对强度,当铟网位于耦合线圈两端时最强,位于耦合线圈中部时较弱,远离耦合线圈时最弱。并推断,存在一个最佳的铟网位置,对应最高的发光效率。结合Maxwell 3D有限元仿真,从气体放电角度对实验结果进行了定性分析,对无极灯模型设计与参数优化具有指导意义。     

Study of the dependence of the radiative properties of high-frequency electrodeless lamps in an Hg-Ar mixture on the pressure of mercury vapor

The radiative characteristics of high-frequency electrodeless lamps in a mixture of mercury and argon have been studied theoretically and experimentally as functions of the cold spot temperature (the pressure of mercury vapor). The intensity of the mercury lines at 404.7, 435.8, and 546.1 nm, corresponding to the triplet transition (7³ S ₁-6³ P _0,1,2) in the visible spectral region, as well as the intensity of the UV resonance line (6³ P ₁-6¹ S ₀) at 253.7 nm, has been measured. A model describing the physical processes in the discharge plasma and including the kinetics of excited states of mercury and argon atoms has been suggested. The parameters of the discharge plasma and the electromagnetic field have been calculated self-consistently through the numerical solution of the system of equations of electron density and energy balance and population balance of excited levels of argon and mercury atoms, as well as the Maxwell equations. The model developed has allowed us to calculate the intensities of the mercury emission lines at 253.7, 404.7, 435.8, and 546.1 nm and to compare the results with experimental data. The relative intensities of the mercury spectral lines corresponding to the triplet transition 7³ S ₁-6³ P _0,1,2 have been calculated for the first time on the basis of a self-consistent model of the discharge.     

Calculation of the electrode surface temperature in the cathode spot of normal glow discharge at atmospheric pressure

The system of equations relating the electrode surface temperature in the cathode spot of normal glow discharge at atmospheric pressure to the discharge cathode sheath parameters is formulated. An analytical expression for the cathode surface temperature in the spot has been obtained, and the parameters of the spot and discharge cathode sheath in helium have been calculated.     

Calculation of time dependence of the electrode surface temperature in the cathode spot of atmospheric pressure normal glow discharge

Non-stationary heat transfer in the volume of the electrode with the cathode spot of atmospheric pressure normal glow discharge on its surface is calculated in case the spot radius is much less than the electrode dimensions. A system of equations describing variation of the temperature in the spot and the discharge cathode sheath parameters after discharge ignition is formulated, and the time dependence of the electrode temperature in the spot for discharge in helium is found. It is shown that within a short time fast heating of the electrode surface in the spot proceeds and then its temperature is slowly approaching the equilibrium value.     

Reflectance spectra and thermoluminescence of NaF coloured in an electrodeless discharge

A comparative study ofγ-ray colouration and electrodeless discharge excitation is reported for NaF. New absorption bands and glow peaks were found. These are shown to be characteristic of electrodeless discharge method of colouration. These are attributed to the multiple types of defects. Further, it is shown that the process by which such defects are formed is strongly temperature dependant. A tentative explanation for the peculiar characteristic of the electrodeless discharge excitation is put forth. The possibility of exploiting these peculiarities for the study of certain properties of colour centres is pointed out.     

无极脉冲放电激光器激发光源及其受激光输出特性的观察

高电压无电极强脉冲气体放电,可以用作激光器的激发光源。本文所叙述的内容即是在这方面的若干实验结果。文章的前一部分包括光源的装置及特性的测量等,第二部分的内容为利用这种光源作红宝石与钕玻璃激光器的激发光源时,对于激光器的光输出特性的研究结果,其中包括阈值的测定,尖峯的观察、单模振荡和规则的阻尼振荡等。最后对于这种光源的特点作了分析,认为这种光源为固体激光器的发展提供了一个新型的激发光源,对于发展大能量器件、高功率器件以及高重复频率器件都是有前途的。     

Spatial and time characteristics of short gap, highdi/dt discharges

Under certain network conditions, vacuum circuit breakers may generate high-frequency currents. The quenching capability of vacuum circuit breakers for line-frequency currents and high-frequency currents plays an important role in the generation of unwanted voltage transients. This may occur when the gap distance at current zero is still too short to withstand the external voltage to the switch (TRV). The results of simulation calculations regarding these phenomena in the vicinity of current zero are described. Simulations are based on a detailed physical model, taking into consideration the basic conservation laws, the Maxwell equations, and the current continuity. The numerical solution takes into account the results of experimental streak photographs, revealing that the visible discharge covers only a small part of the contact diameter     

Generation and investigation of a parallel-plate DBD driven at 1.6 MHz with flowing helium

The development of a new driven circuit that can drive a parallel-plate dielectric barrier discharge with flowing helium at atmospheric pressure is presented. The operating principle is based on the capability of a Tesla coil to generate high voltages with high oscillating frequencies. The discharge is generated inside a one open end parallelepipedic plasma chamber made of glass, using two outside parallel-plate electrodes. Depending on the helium flow-rate the plasma has three developing stages. In the homogeneous developing stage (1 l/min helium flow-rate) the plasma is characterized by using an electric model and based on its emission spectrum.     

大气压低温氦等离子体射流的诊断研究

为了加快低温氦气等离子体射流的工程化进程,通过自主设计的同轴式介质阻挡放电等离子体射流发生器,在放电频率10 kHz,一个大气压条件下产生了稳定的氦气等离子体射流。通过分析不同工况下的电压电流波形可以发现单纯增加氦气体积流量只能小幅的增加电流脉冲幅值,而对放电时间、电流脉冲数的影响不大。增加放电峰值电压时电流脉冲幅值会得到较大幅度增加。通过发射光谱法对大气压氦气等离子射流的活性粒子种类、电子激发温度、电子密度进行了诊断。结果表明,大气压氦气等离子体射流中的主要活性粒子为He Ⅰ原子、N₂第二正带系、N+₂的第一负带系、羟基（OH）,H原子的巴尔末线系（H_α和H_β）与O原子,这表明虽然该试验中使用的氦气纯度已达99.99%,但其中仍残留有少量的空气,同时放电时大气中的空气会被卷吸到放电空间发生电离。还可以发现,主要活性粒子的相对光谱强度随氦气体积流量的增加及放电峰值电压的增大均呈现上涨的趋势。选用He Ⅰ原子的四条谱线对不同试验工况下的电子激发温度进行了计算,得到大气压氦气等离子体射流的电子激发温度在3 500~6 300 K之间,电子激发温度随放电峰值电压与氦气体积流量的增大总体上呈现上升的趋势。但由于反向电场的存在,某些峰值电压可能会出现电子激发温度下降的情况;根据Stark展宽原理对大气压氦气等离子体射流的电子密度进行了计算,发现电子密度的数量级可达1015 cm-3,同时增大峰值电压与氦气体积流量均可有效的提高射流中的电子密度。这些参数的研究对氦气等离子体射流在工程实际中的应用具有重要意义。     

Laser oscillations on HgII transitions in a transverse HF discharge

Laser oscillation in a mixture of helium and mercury on the HgII transitions (=615 and 794.5 nm) in a transverse high-frequency excitation is obtained. Two types of self-heated laser tubes are investigated. The optimal oscillation conditions are found. The peculiarities of the generated pulse and their dependence on the discharge conditions are discussed.     

Electric discharge in air in a deeply subcritical field of a quasi-optical microwave beam

We describe the results of experiments on initiation of an electric discharge in air in a quasi-optical microwave beam by an electromagnetic vibrator fixed above the screen. This method for initiating the electrical breakdown makes it possible to obtain a discharge at a level of the electric field component in the microwave, which two orders of magnitude lower than the minimal critical field of the electrodeless breakdown of air. In our experiments, the threshold value of the air pressure determining the low- and high-temperature forms of the microwave discharge are determined depending on the field level.     

Two-dimensional numerical study of an atmospheric pressure helium plasma jet with dual-power electrode

In this paper,the characteristics of an atmospheric pressure helium plasma jet generated by a dual-power electrode(DPE) configuration are investigated by using a two-dimensional fluid model.The effect of a needle electrode on the discharge is studied by comparing the results of the DPE configuration with those of the single ring electrode configuration.It is found that the existence of the needle leads to the generation of a helium plasma jet with a higher propagation velocity,higher species density,and larger discharge width.Furthermore,the influences of the needle radius and needle-to-ring discharge gap on the generation of a plasma jet are also studied.The simulation results indicate that the needle electrode has an evident influence on the plasma jet characteristics.