Enhancement of MR ratios using thin oxide layers in PtMn and α-Fe2O3-based spin valves

Spin valves having thin oxide layers in the pinned and/or free layers were prepared by sputtering. MR ratios of the spin valves were increased from 8.1 to 11.9% by inserting the oxide layer into the pinned layer in Ta/PtMn/CoFe/Cu/CoFe/Ta spin valves. MR ratio of 13.9% and considerably large sheet ΔR of 2.55 Ω were obtained in the PtMn-based spin valves having the oxide layer in the pinned and free layer. Larger MR ratio of 17.3% and the sheet ΔR of 1.3 Ω were obtained in the PtMn-based dual-type spin valves having the oxide layer in both pinned layers. α-Fe₂O₃ based spin valves having thin oxide layers were also prepared. MR ratios of the spin valves were increased from 11.9 to 14.3% by inserting the oxide layer into the free layer in α-Fe₂O₃/CoFe/Cu/CoFe/Ta spin valves. The enhancement of the MR ratios may be attributed to the specular scattering effect of the conduction electrons by the thin oxide layers.     

Synthetic Co50Pt50/Ru/CoFe hard–soft trilayer in spin valves

The influence of deposition power and seedlayer on the properties of hard magnet Co₅₀Pt₅₀ was studied. Co₅₀Pt₅₀(/Co₉₀Fe₁₀)/Ru/Co₉₀Fe₁₀ trilayer was used as pining/pinned layer in spin valves. The influences of different hard layer, soft layer and free layer on exchange bias, interlayer coupling, and magnetoresistance (MR) ratio were studied. Weak antiferromagnetic interlayer coupling was obtained by adjusting the thickness of hard and soft layers. MR of a spin valve with structure Cr2/CoFe0.5/CoPt4/CoFe0.5/Ru0.8/CoFe2.2/Cu2.05/CoFe2.6/Cu1.1/Ta1 reached 10.68% (unit in nm), which is comparable to those of IrMn-based synthetic spin valves. The increment of the coercivity of the free layer is mainly due to the static magnetic interaction between the hard layer and the free layer.     

一种非连续纳米氧化层自旋阀的显微结构研究

利用高分辨电子显微学方法(HREM)研究了纳米氧化层镜面反射自旋阀多层结构Ta(35nm)Ni80Fe20(2nm)Ir17Mn83(6nm)Co90Fe10(15nm)NOL1Co90Fe10(2nm)Cu(22nm)Co90Fe10(15nm)NOL2Ta(3nm).该自旋阀的巨磁电阻(GMR)效应高达15%,较无此镜面反射纳米氧化层(NOL)的自旋阀提高近1倍,同时交换偏置场亦有所增强.高分辨显微结构分析表明,介于钉扎层与被钉扎层之间的氧化层(NOL1)并未完全氧化,即除氧化过程生成的CoFe氧化物 关键词： 自旋阀 纳米氧化层 高分辨电子显微学 巨磁电阻效应     

Dual spin valves with nano-oxide layers

A novel method is proposed for increasing the giant magnetoresistance (GMR) of dual spin valves of the CoFe/Cu/CoFe/Cu/CoFe type by inserting nano-oxide layers (NOLs) into the pinned layers. Using this method, MR ratio of 23.5% was obtained, a value equal to those of specular spin valves with antiferromagnetic oxide, e.g., NiO. This method allows the selection of metallic materials for the antiferromagnetic layer. In addition, we obtained the specularity factor of upper NOLs, 0.8, and that of lower NOLs, 0.7, by calculating Boltzmann equations taking into account the roughness of each interlayer. This model shows that the MR ratio would be 27.5% for dual spin valves with ideal NOLs.     

Thermal Stability of CoFe/Cu/CoFe/IrMn Top Spin Valve

We present a study of thermal stability of the top spin valve with a structure of seed Ta （Snm）/Co75Fe25 （5 nm ） /Cu （2.5 nm） /Co75Fe25 （5 nm ） /Ir20Mn80（12 nm） /cap Ta （8 nm） deposited at room temperature by magnetron sputtering. A vibrating sample magnetometer fixed with a heater was used to record the magnetic hysteresis loops at variational temperatures and x-ray diffraction was performed to characterize the structure of the multilayer. The exchange field Hex and the coercivity of the pinned CoFe layer Hop decrease monotonically with increasing temperature. The coercivity of the free CoFe layer Hcf in the spin valve shows a maximum at 498K. The temperature dependences of Hex, Hop and Hcf have also been discussed.     

Thermally assisted writing for perpendicular MRAM

Spin valves composed of TbCo/CoFe/Cu/CoFe/TbFeCo were fabricated with perpendicular magnetization and GMR ratios of 4.5%. The (TbCo/CoFe) layers and (CoFe/TbFeCo) layers are referred to the free and the pinned layers, respectively. The compositions of two layers were chosen to have a lower Curie temperature (130 °C) but higher coercivity (13.2 kOe) of the free layer at room temperature than those of the pinned layer; therefore, the free layer is quite stable at room temperature but its magnetization can be easily switched at a relatively low temperature. Spin valves were patterned into 100-μm-wide cells and their coercivity was reduced with increasing writing current due to the temperature rise by current-heating. When the current density of the writing current was increased to 2.1×10⁶ A/cm², the required switching field for the free layer was only 10 Oe.     

Effect of thermal deformation on giant magnetoresistance of flexible spin valves grown on polyvinylidene fluoride membranes

We fabricated flexible spin valves on polyvinylidene fluoride(PVDF) membranes and investigated the influence of thermal deformation of substrates on the giant magnetoresistance(GMR) behaviors. The large magnetostrictive Fe_(81)Ga_(19)(Fe Ga) alloy and the low magnetostrictive Fe_(19)Ni_(81)(Fe Ni) alloy were selected as the free and pinned ferromagnetic layers.In addition, the exchange bias(EB) of the pinned layer was set along the different thermal deformation axes α_(31) or α_(32) of PVDF. The GMR ratio of the reference spin valves grown on Si intrinsically increases with lowering temperature due to an enhancement of spontaneous magnetization. For flexible spin valves, when decreasing temperature, the anisotropic thermal deformation of PVDF produces a uniaxial anisotropy along the α_(32) direction, which changes the distribution of magnetic domains. As a result, the GMR ratio at low temperature for spin valves with EB α_(32)becomes close to that on Si, but for spin valves with EB α_(31)is far away from that on Si. This thermal effect on GMR behaviors is more significant when using magnetostrictive Fe Ga as the free layer.     

Effect of nano-oxide layers on giant magnetoresistance in pseudo-spin-valves using Co2FeAl electrodes

We studied the pseudo-spin-valves (PSVs) with a structure of Ta/Co₂FeAl/NOL₁/Co₂FeAl/Cu/Co₂FeAl/NOL₂/Ta, where NOL represents the nano-oxide layer. Compared with the normal Co₂FeAl (CFA) PSV with a structure of Ta/Co₂FeAl/Cu/Co₂FeAl/Ta, which shows only a current-in-plane (CIP) giant magnetoresistance (GMR) of 0.03%, the CFA PSV with NOLs shows a large CIP-GMR of 5.84%. The enhanced GMR by the NOLs inserted in the CFA PSV is due to the large specular reflection caused by [(CoO)(Fe₂O₃)(Al₂O₃)] in NOL₁ and [(Fe₂O₃)(Al₂O₃)(Ta₂O₅)] in NOL₂. Another reason is that the roughness of the interface between Ta and CFA is improved by the oxidation procedure.     

Magnetotransport and interdiffusion characteristics of magnetic tunnel junctions comprising nano-oxide layers upon exposure to postdeposition annealing

Magnetic tunnel junction (MTJ) structures based on underlayer (CoNbZr)/bufferlayer (CoFe)/antiferromagnet (IrMn)/pinned layer (CoFe)/tunnel barrier (AlO_x)/free layer (CoFe)/capping (CoNbZr) have been prepared to investigate thermal degradation of magnetoresistive responses. Some junctions possess a nano-oxide layer (NOL) inside either in the underlayer or bufferlayer. The main purpose of the NOL inclusion was to control interdiffusion path of Mn from the antiferromagnet so that improved thermal stability could be achieved. The MTJs with NOLs were found to have reduced interfacial roughness, resulting in improved tunneling magnetoresistance (TMR) and reduced interlayer coupling field. We also confirmed that the NOL effectively suppressed the Mn interdiffusion toward the tunnel barrier by dragging Mn atoms toward NOL during annealing.     

Magnetostrictive GMR sensor on flexible polyimide substrates

The feasibility of a stress sensor based on giant magneto-resistance (GMR) on a flexible polyimide substrate is presented. Therefore, a stack system with a GMR effect of up to 8.6%$8.6\%$ has been deposited on a polyimide substrate and patterned to micrometer scaled sensor elements. An in-plane tensile stress was applied to the sensor to achieve a rotation of the anisotropy of the magnetostrictive free layer. The magneto-optical and magneto-resistive effect was measured. The stress dependence of the Co₅₀Fe₅₀ free-layer magnetization was measured up to an elongation of 2.5% in a CoFe/Cu/CoFe spin valve. The magneto-optical results are compared to the resistance loops of the sample. Furthermore, the normalized sensor output is shown as a function of the applied stress at several bias fields and at the remanent state.     

Temperature dependence of giant magneto-resistance in PtMn- and Fe2O3-based specular spin valves

Temperature dependence of the giant magneto-resistance (MR) was measured for spin valves with and without nano-oxide layer (NOL). In spin valves with NOL, the MR ratio increased more remarkably on lowering the temperature than in those without NOL. The temperature dependence of MR ratio and that of the resistivity were explained by using two-current model. The MR ratio enhanced with NOL is attributed to the increase of the mean free path of up-spin electrons.     

TaN underlayers for spin valves deposited directly on top of Si substrates

TaN underlayers for spin valves were studied, which were deposited directly on top of Si substrates. The experimental results obtained with the TaN underlayer were compared with those obtained with other (Ta, Mo, and MoN) underlayers. The spin valve structure was Si/Underlayer(tÅ)/NiFe(21 Å)/CoFe(28 Å)/Cu(22 Å)/CoFe(18 Å)/IrMn(65 Å)/Ta(25 Å). The TaN underlayer for a spin valve element exhibited good adhesion to the Si substrate. The XRD patterns of the annealed TaN on bare Si substrate at 900 °C showed no Ta silicide phases, which suggests that the TaN layer may also be used as a diffusion barrier between Si substrate and the ensuing spin valve active layers, as well as an underlayer. A spin valve element having TaN underlayer deposited directly on top of a Si substrate showed a high MR ratio of about 8.3% after annealing at 200 °C. It is concluded that it is advantageous to use a TaN underlayer if one wants to fabricate spin valve elements directly on top of Si substrates.     

Difference between chemical structures of the interface at the Al-oxide tunneling barrier prepared by plasma or by radical oxidation

We have studied chemical structures of the interface between the Al-oxide tunneling barrier and the underlying Co₉₀Fe₁₀ layer in magnetic tunnel junctions when a 1-nm thick metallic Al barrier was oxidized by two different methods: plasma oxidation and radical oxidation. Our chemical analyses confirmed that the underlying CoFe layer was unavoidably attacked by oxygen during the oxidation and that this left different oxide states at the AlO_x/CoFe interface, depending on the oxidation method. The radical oxidation required long oxidation time for optimizing tunneling performance and resulted in a large amount of oxygen at the interface, which, in turn, resulted in the formation of mostly α-Fe₂O₃ and Al₂O₃. Conversely, the plasma oxidation required a relatively short oxidation time for optimization and left FeO as a dominant phase at the interface. Our results also show that the thermal treatment helped AlO_x, an oxygen-deficient phase, to be re-oxidized and transformed into Al₂O₃, the thermodynamically stable stoichiometric phase. The oxygen that diffused from the reduced CoFe layer into the barrier is likely responsible for this oxygen enrichment. We show that such differences in the chemical structure of the interface are critical clues to understanding what causes the change in tunneling properties of magnetic tunnel junctions.     

Spin valves with CoO as an exchange bias layer

The temperature dependence (50–300 K) of the magnetoresistance and exchange bias field of spin valves with a CoO exchange bias layer have been investigated. At room temperature the GMR effect is enhanced in comparison with spin valves with a FeMn biasing layer. This enhancement increases for decreasing temperature for small Cu thicknesses. No influence of the antiferromagnetism of CoO on the GMR has been observed upon crossing of the Néel temperature.     

A new rf plasma oxidation method for the insulating AlOx barrier in magnetic tunneling junctions

An rf remote plasma oxidation technique to form an insulating barrier was carried out to enhance properties of CoFe/AlO_x/CoFe magnetic tunneling junctions. The rf remote plasma method was found to reduce self-bias effect on the barrier during the rf oxidation process and to increase atomic oxygen concentration in a plasma state. Experimentally observed rms roughness of the barrier in our magnetic tunnel junction was decreased from 5 to 1.5 Å. In addition, electrical breakdown voltage and magnetoresistance of our magnetic tunnel junction devices were increased from 0.8 V up to 1.2 V and from 7% up to 30%, respectively.     

Pseudo spin-valves with Al or Nb as spacer layer: GMR and search for spin switch behaviour

The magnetoresistance of several Ferromagnet/Normal metal/Ferromagnet spin-valve type structures has been investigated using Al as normal spacer layer. A magnetoresistance ratio up to 4.1% at room temperature and 5.7% at 0.3 K is found for the sandwich with both Co layers, while slightly lower signals are found for the structures involving CoFe and NiFe layers. The magnetoresistance dependence for Co/Al/Co, Co/Al/CoFe and Co/Al/NiFe on the spacer layer thickness exhibits the familiar non monotonic behaviour with second peak slightly larger than the one reported for Cu based pseudo spin valves. At cryogenic temperatures, preliminary results on the onset of spin switch effects in Co/Al/Co and the full spin switch effect in Co/Nb/Co are also reported here.     

Effect of Ta buffer and NiFe seed layers on pulsed-DC magnetron sputtered Ir20Mn80/Co90Fe10 exchange bias

A systematic investigation has been done on the correlation between texture, grain size evolution and magnetic properties in Ta/Ni₈₁Fe₁₉/Ir₂₀Mn₈₀/Co₉₀Fe₁₀/Ta exchange bias in dependence of Ta buffer and NiFe seed layer thickness in the range of 2-10 nm, deposited by pulsed DC magnetron sputtering technique. A strong dependence of 〈1 1 1〉 texture on the Ta/NiFe thicknesses was found, where the reducing and increasing texture was correlated with exchange bias field and unidirectional anisotropy energy constant at both NiFe/IrMn and IrMn/CoFe interfaces. However, a direct correlation between average grain size in IrMn and H_ex and H_c was not observed. L1₂ phase IrMn₃ could be formed by thickness optimization of Ta/NiFe layers by deposition at room temperature, for which the maximum exchange coupling parameters were achieved. We conclude finally that the coercivity is mainly influenced by texture induced interfacial effects at NiFe/IrMn/CoFe interfaces developing with Ta/NiFe thicknesses.     

X-ray photoelectron spectroscopy study of magnetic films

Ta/NiO_x/Ni₈₁Fe₁₉/Ta films were prepared by rf reactive and dc magnetron sputtering. The exchange coupling field H_ex and the coercivity H_c of NiO_x/Ni₈₁Fe₁₉ as a function of the ratio of Ar to O₂ during the deposition process were studied. The composition and the chemical states in the interface region of NiO_x/NiFe were also investigated using X-ray photoelectron spectroscopy (XPS) and the peak decomposition technique. The results show that the ratio of Ar to O₂ has a great effect on the chemical states of nickel in NiO_x films. The exchange coupling field H_ex and the coercivity H_c of Ta/NiO_x/Ni₈₁Fe₁₉/Ta are thus seriously affected. XPS is shown to be a powerful tool for characterizing magnetic films. Received: 18 July 2001 / Accepted: 21 December 2001 / Published online: 3 June 2002 RID="*" ID="*"Corresponding author. Fax: +86-010/6232-7283, E-mail: guanghua_yu@263.net     

Bias voltage and temperature dependence of magneto-electric properties in double-barrier magnetic tunnel junction with amorphous Co-Fe-B electrodes

Bias voltage and temperature dependence of magneto-electric properties in double-barrier magnetic tunnel junctions(DBMTJs) with a structure of [IrMn/CoFe/Ru/CoFeB]/Al-O/CoFeB/Al-O/[CoFeB/Ru/CoFe/IrMn], have been investigated. The DBMTJs show a large tunnel magnetoresistance (TMR) ratio of up to 57.6%, a high V_1/2 value of 1.26 V and small switching field H_c of 9.5 Oe at room temperature (RT). The TMR reaches the maximum at 30 K, about 89.0%, and decreases slightly from 30 to 4.2 K. A novel zero-bias anomaly (ZBA) in the P state is found and is temperature dependent, more sharply at low temperature, whereas a normal ZBA exists in the AP state. These effects are ascribed to magnon-, phonon- and impurity-assisted tunneling, and variation of density of states. The DBMTJ with a large TMR ratio, a high V_1/2, and small switching field H_c is promising for developing the future spin electronic devices.     

IrMn基反铁磁自旋阀的巨磁电阻效应

用第一性原理方法研究了在微观尺度具有三重对称磁结构的IrMn合金的反铁磁自旋阀(AFSV)的电子输运.研究表明:基于有序L1₂相IrMn合金的Co/Cu/IrMn自旋阀的巨磁电阻(GMR)效应具有三重对称性,可以利用这一特性区分反铁磁材料的GMR与传统铁磁材料的GMR.基于无序γ相IrMn合金的IrMn(0.84 nm)/Cu(0.42 nm)/IrMn(0.42 nm)/Cu(0.42 nm)(111) AFSV的电流平行平面构型的GMR约为7.7％,大约是电流垂直平面构型的GMR(3.4％)的两倍,明显大于实验中观测到的基于共线磁结构的FeMn基AFSV的GMR. 关键词： 反铁磁自旋阀 巨磁电阻效应 非共线磁结构 电流平行平面结构