A methodology for determining mechanical properties of freestanding thin films and MEMS materials

We have developed a novel chip-level membrane deflection experiment particularly suited for the investigation of sub-micron thin films and microelectro-mechanical systems. The experiment consists of loading a fixed-fixed membrane with a line load applied at the middle of the span using a nanoindenter. A Mirau microscope interferometer is positioned below the membrane to observe its response in real time. This is accomplished through a micromachined wafer containing a window that exposes the bottom surface of the specimen. A combined atomic force microscope/nanoindenter incorporates the interferometer to allow continuous monitoring of the membrane deflection during both loading and unloading. As the nanoindenter engages and deflects the sample downward, fringes are formed and acquired by means of a CCD camera. Digital monochromatic images are obtained and stored at periodic intervals of time to map the strain field. Stresses and strains are computed independently without recourse to mathematical assumptions or numerical calibrations. Additionally, no restrictions on the material behavior are imposed in the interpretation of the data. In fact, inelastic mechanisms including strain gradient plasticity, piezo and shape memory effects can be characterized by this technique.The test methodology, data acquisition and reduction are illustrated by investigating the response of 1-μm thick gold membranes. A Young's modulus of , a yield stress of and a residual stress of are consistently measured. The post-yield behavior leading to fracture exhibits typical statistical variations associated to plasticity and microcrack initiation.     

A new type of atomic force microscope based on chaotic motions

Local flow variation (LFV) method of non-linear time series analysis is applied to develop a chaotic motion-based atomic force microscope (AFM). The method is validated by analyzing time series from a simple numerical model of a tapping mode AFM. For both calibration and measurement procedures the simulated motions of the AFM are nominally chaotic. However, the distance between a tip of the AFM and a sample surface is still measured accurately. The LFV approach is independent of any particular model of the system and is expected to be applicable to other micro-electro-mechanical system sensors where chaotic motions are observed or can be introduced.     

Theory of amplitude modulation atomic force microscopy with and without Q-Control

The present text reviews the fundamentals of amplitude-modulation atomic force microscopy (AM-AFM), which is frequently also referred to as dynamic force microscopy, non-contact atomic force microscopy, or “tapping mode” AFM. It is intended to address two different kinds of readerships. First, due to a thorough coverage of the theory necessary to explain the basic features observed in AM-AFM, it serves theoreticians that would like to gain overview on how nanoscale cantilevers interacting with the surrounding environment can be used to characterize nanoscale features and properties of suitable sample surfaces. On the other hand, it is designed to introduce experimentalists to the physics underlying AM-AFM measurements to a degree that is not too specialized, but sufficient to allow them measuring the quantities they need with optimized imaging parameters.More specifically, this article first covers the basics of the various driving mechanisms that are used in AFM imaging modes relying on oscillating cantilevers. From this starting point, an analytical theory of AM-AFM is developed, which also includes the effects of external resonance enhancement (“Q-Control”). This theory is then applied in conjunction with numerical simulations to various situations occurring while imaging in air or liquids. In particular, benefits and drawbacks of driving exactly at resonance frequency are examined as opposed to detuned driving. Finally, a new method for the continuous measurement of the tip-sample interaction force is discussed.     

Experimental determination of cohesive failure properties of a photodegradable copolymer

In this paper we present a methodology to measure the material traction-separation relation for a poly(ethylene carbon monoxide) copolymer, ECO. This material exhibits a ductile-to-brittle transition when subjected to ultraviolet irradiation and undergoes a change of failure mechanism, from shear yielding to crazing, in the process. Single edge notched tension specimens of ECO irradiated for 50 h were used to generate slow-speed stable crack growth, predominantly from material crazing. Full-field measurements of the in-plane deformation around the growing crack tip were performed using the optical technique of digital image correlation. A multicamera setup was used in which simultaneous measurement of both the far-field displacement and that directly surrounding the craze was performed. The far-field results were used to obtain a value of the energy release rate supplied to the crack tip region. The near-tip results were used to extract a material traction-separation law in the regime of steady-state crack growth. A softening traction-separation relation was measured. The area under the traction-separation curve was then compared with the simultaneous far-field measurements and the agreement was very good (within 6.5%) validating the experimental methodology used.     

A critical review of microscale mechanical testing methods used in the design of microelectromechanical systems

Microelectromechanical systems (MEMS) technologies are evolving at a rapid rate with increasing activity in the design, fabrication, and commercialization of a wide variety of microscale systems and devices. The importance of accurate mechanical property measurement for successful design was realized early on in the development of this field. Consequently, there exist many different techniques to measure quantities such as the Young's modulus (E), yield strength (σ _Y ), fracture strength (σ _F ), residual stress (σ _F ), and residual stress gradient (∇σ _R ) of microscale structures and materials. We review and critically compare several of the important techniques including the microtension test, axisymmetric plate bend test, microbeam bend test, M-test, wafer curvature measurements, dynamic (resonant) tests, fabrication of passive strain sensors, and Raman spectroscopy. We discuss the characteristics of typical test structures, and the common sources of structure-related errors in measurement. A rational approach for the selection of test techniques for the design of microsystems is suggested.     

On-Chip Electrostatically Actuated Bending Tests for the Mechanical Characterization of Polysilicon at the Micro Scale

The issue of mechanical characterization of polysilicon used in micro electro mechanical systems (MEMS) is discussed in this paper. An innovative approach based on a fully on-chip testing procedure is described; two ad hoc designed electrostatically actuated microsystems are here used in order to determine experimentally the Young’s modulus and the rupture strength of polysilicon. The first device is based on a rotational test structure actuated by a system of comb-finger capacitors which load up to rupture a couple of tapered beams under bending in the plane parallel to the substrate. The second microsystem is based on a large plate with holes. It constitutes with the substrate a parallel plate capacitor moving in the direction orthogonal to the substrate itself. A couple of tapered beams placed at the centre of the plate is loaded up to rupture in bending in the plane orthogonal to the substrate. By means of the two devices, experimental data are obtained: they allow for a careful determination of Young’s modulus and rupture strength. The rupture values are interpreted by means of the Weibull approach; statistical size effects and stress gradient effect are taken into account thus allowing for a direct comparison between the data obtained from the two test structures.     

数字图像相关计算中的识别函数构造

本文通过建立数字图像相关检测的数学模型和构造新的识别函数。解决了在确定图像位移时图像之间伴随有较大刚体转动情况下的相关检测问题。为利用数字图像相关计算。进行微细观层次上的位移和变形测量提供了一种途径。     

A new method for characterizing the interphase regions of carbon nanotube composites

The elastic properties of a carbon nanotube (CNT) reinforced composite are affected by many factors such as the CNT–matrix interphase. As such, mechanical analysis without sufficient consideration of these factors can give rise to incorrect predictions. Using single-walled carbon nanotube (SWCNT) reinforced Polyvinylchloride (PVC) as an example, this paper presents a new technique to characterize interphase regions. The representative volume element (RVE) of the SWCNT–PVC system is modeled as an assemblage of three phases, the equivalent solid fiber (ESF) mimicking the SWCNT under the van der Waals (vdW) forces, the dense interphase PVC of appropriate thickness and density, and the bulk PVC matrix. Two methods are proposed to extract the elastic properties of the ESF from the atomistic RVE and the CNT-cluster. Using atomistic simulations, the thickness and the average density of interphase matrix are determined and the elastic properties of amorphous interphase matrix are characterized as a function of density. The method is examined in a continuum-based three-phase model developed with the aid of molecular mechanics (MM) and the finite element (FE) method. The predictions of the continuum-based model show a good agreement with the atomistic results verifies that the interphase properties of amorphous matrix in CNT-composites could be approximated as a function of density. The results show that ignoring either the vdW interaction region or the interphase matrix layer can bring about misleading results, and that the effect of internal walls of multi-walled carbon nanotubes (MWCNTs) on the density and thickness of the dense interphase is negligible.     

On the secondary resonance of a MEMS resonator: A conceptual study based on shooting and perturbation methods

Nonlinear dynamics of a clamped–clamped capacitive micro-beam resonator subjected to subharmonic excitation of order one-half is studied. The micro-beam resonator is sandwiched with two piezoelectric layers throughout the length, and as a result of piezoelectric actuation a tensile/compressive axial load is induced along the length which is used as a frequency tuning tool. The resonator is subjected to a combination of a bias DC and harmonic AC electrostatic actuations. In order to determine the frequency response subharmonic resonance condition, both perturbation and shooting methods are applied. The stability of the periodic solutions and the bifurcations types are also studied. It is shown that the application of perturbation method imposes some limitations on the order of magnitudes of the terms in the differential equation of the motion; as a result out of the domain where the ordering assumption of the perturbation solution does not hold, some periodic solutions as well as some vital bifurcation points are missed. It is shown that on the frequency domain, the resonator exhibits both softening and hardening behaviors whereas this is not predicted by the perturbation scheme. The effect of DC and AC actuation voltages on the qualitative response of the system is determined. It is shown that based on the polarity of the piezoelectric actuation, the frequency response curves can be shifted both in forward and backward directions which can be used in the design of novel RF MEMS filters/sensors.     

孔边循环应变与疲劳循环次数相关性实验研究

材料的应变疲劳寿命与裂端的塑性应变有关。研究孔边循环应变与疲劳循环次数的相关性,对于研究材料损伤及微裂纹的产生,预防宏观裂纹的产生及扩展具有十分重要的意义。所以本文对有限宽板中心带孔试件进行了拉伸疲劳试验,用以研究这种相关性。在疲劳试验前首先进行逐级的加、卸载缓慢循环实验,同时利用数字图像相关技术测量孔周的位移场,进而求出孔边应变。在疲劳试验过程中,每当疲劳循环1500次就停机,进行同样的缓慢循环实验,并测量出孔周的位移场及孔边应变。实验研究中获得了一些很重要的结果。     

Methods for Examining the Fatigue and Fracture Behavior of Hard Tissues

An understanding of the fatigue and fracture behavior of hard tissues (e.g., bone and tissues of the human tooth) is critical to the maintenance of physical and oral health. Recent studies suggest that there are a number of mechanisms contributing to crack extension and crack arrest in these materials, and that they appear to be a function of moisture and age of the tissue. An understanding of these processes can provide new ideas that are relevant to the design of multi-functional engineering materials. As a result, we have adopted the use of microscopic Digital Image Correlation (DIC) to examine the mechanisms of crack growth resistance and near-tip displacement distribution for cracks in human dentin that are subjected to opening mode loads. We have also developed a special compact tension (CT) specimen that permits evaluation of crack extension within small portions of tissue under both quasi-static and fatigue loads. The specimen embodies a selected portion of hard tissue within a resin composite restorative and enables an examination of diseased tissue, or portion with specific physiology, that would otherwise be impossible to evaluate. In this paper we describe application of these experimental methods and present some recent results concerning fatigue crack growth and stable crack extension in dentin and across the dentin-enamel-junction (DEJ) of human teeth.

基于同步辐射原位CT的聚氨酯泡沫微观变形机理研究

为揭示聚氨酯泡沫的微观结构性能关系,本文依靠自主研发的微型材料试验机,在美国APS光源2BM线站上搭建了原位CT系统,对闭孔硬质聚氨酯泡沫在准静态压缩加载下的变形损伤行为进行了三维实时表征,分辨率可达0.87μm。通过原位CT试验获取了硬质聚氨酯泡沫的应力应变关系,以及三个变形阶段(弹性、平台、压实)的三维结构演化过程。三维图像显示,在平台段会观察到局部压缩带从样品两端向中间传播的过程,且压缩带传播速度会超过压头速度。同时,利用数字体图像相关技术精确计算了聚氨酯泡沫的三维变形场,表明压缩变形主要集中在变形带内部。通过追踪胞元变形过程并利用表面曲率场来量化胞壁变形,发现胞元坍塌主要源于包壁屈曲形成的褶皱。     

基于DIC技术的爆炸应力波过异质界面应变场演化规律实验研究

采用氯仿粘结聚碳酸酯（polycarbonate, PC）板和聚甲基丙烯酸甲酯（polymethylmethacrylate, PMMA）板模拟含异质界面模型;在PC介质中布置柱状炮孔并与界面呈一定角度,根据炮孔端部与界面相对位置,分别于柱状炮孔两个端部设置起爆点,起爆点远离界面端部时定义为孔口起爆,靠近界面端部时定义为孔底起爆;借助数字图像相关实验系统,研究爆炸应力波通过异质界面后PMMA介质应变场演化过程及炮孔底部区域拉、压应变变化规律。实验结果表明,异质界面改变了爆炸应力波过界面后的传播形态。孔口起爆时,异质界面受爆破荷载作用后易形成应力集中区,界面处产生开裂,横向拉伸波作用是造成异质界面开裂的主要原因。起爆方式对过界面后介质PMMA的横/纵向拉、压应变场作用贡献不同,主要体现在应变场强度、拉/压应变场位置分布2个方面。在炮孔底部区域,起爆方式对应变场时程特性的影响主要体现在作用时效长短和应变强度2个方面。孔口起爆时,横/纵向应变体现出短时效、高强度的变化特征。就应变强度而言,起爆方式对横向压应变的影响显著强于其对纵向拉应变的影响。对空间分布特性影响主要体现在衰减程度,起爆方式对纵向应变衰减程度影响较大。无论采用何种起爆方式,爆炸应变场在PC介质中衰减速度较快,进入PMMA介质后衰减速度显著降低。

     

含孔复合材料层合板静拉伸损伤演化的实验和表征方法

为了深入探究复合材料层合板结构的损伤机理和损伤演化,应用声发射技术和图像相关技术同步实时监测含孔碳纤维复合材料层合板试样在静拉伸过程中的损伤演化。实验结果表明,试样表面应变场呈现局部化特征。对应变集中带在加载方向的应变值进行了统计分析,获得了应变场的特征统计量(标准差)随加载的演化模型。层合板损伤时产生声发射信号的峰值频率大小能够有效区分复合材料的损伤模式,由此,建立了基于损伤模式累积声发射数的损伤演化模型。通过对应变场演化模型和声发射损伤演化模型的分析,可以将复合材料的损伤演化分为损伤初始阶段、损伤平稳扩展期、损伤严重阶段三个部分。统计分析结果表明:在损伤严重阶段,基于声发射事件数的各种损伤的损伤变量和局部应变场标准差快速增长,因此局部应变场统计标准差可以作为后期局部损伤严重程度的识别指标。     

Stochastic framework for modeling the linear apparent behavior of complex materials: Application to random porous materials with interphases

This paper is concerned with the modeling of randomness in multiscale analysis of heterogeneous materials. More specifically, a framework dedicated to the stochastic modeling of random properties is first introduced. A probabilistic model for matrix-valued second-order random fields with symmetry propertries, recently proposed in the literature, is further reviewed. Algorithms adapted to the Monte Carlo simulation of the proposed representation are also provided. The derivations and calibration procedure are finally exemplified through the modeling of the apparent properties associated with an elastic porous microstructure containing stochastic interphases.     

A novel technique for the fabrication of laboratory scale model functionally graded materials

In this work, the authors describe the design, fabrication and testing of model functionally graded materials (FGMs). The inhomogeneous property variations were generated by altering material properties through selective ultraviolet (UV) irradiation. Poly(ethylene co-carbon monoxide) (ECO) was chosen to make the FGMs because of its rapid degradation under UV light. Irradiated ECO becomes stiffer, stronger and more brittle with increasing irradiation time. Through a series of tension tests, the authors characterized the mechanical behavior of the specific ECO used as a function of UV exposure time. Furthermore, by controlling exposure time, specimens with continuously and discretely varying mechanical properties were produced. The resulting graded materials exhibited a Young's modulus that varied from about 160 MPa to 250 MPa and a strain to failure that varied from about 900 percent to 10 percent over the width in a 150 mm wide specimen. Microhardness measurements were used to determine the differences between discretely and continuously varying mechanical properties.     

A new method for the biaxial testing of cellular solids

Commercial cellular solids such as metal foams and honeycombs exhibit deformation and failure responses that are dependent on specimen size during testing. For foams, this size dependence originates from the fabrication-induced material and structural inhomogeneities, which cause the uncontrolled localization of deformation during the testing of foam cubes. Different peak loads and failure modes are observed in honeycomb specimens in the plate-shear configuration depending on specimen height. This size dependence causes difficulty in obtaining a more representative constitutive behavior of the material. It has recently been established that the size dependence under uniaxial compression can be eliminated with tapered cellular specimens, which enable controlled deformation at a given region of the specimen. This concept is extended in this paper to the biaxial testing of butterfly-shaped cellular specimens in the Arcan apparatus, which focuses deformation at the central section of the specimen. The Arcan apparatus has been modified such that all displacements at the boundaries of the specimen could be controlled during testing. As a consequence of this fully displacement controlled Arcan apparatus, a force perpendicular to that applied by the standard universal testing machine is generated and becomes significant. Thus, an additional load cell is integrated on the apparatus to measure this load. Example responses of butterfly-shaped specimens composed of aluminum alloy honeycomb, aluminum alloy foam and hybrid stainless-steel assembly are presented to illustrate the capabilities of this new testing method.     

A new model for the study of rain-wind-induced vibrations of a simple oscillator

In this paper, a model equation is presented for the study of rain-wind-induced vibrations of a simple oscillator. As will be shown the presence of raindrops in the wind-field may have an essential influence on the dynamic stability of the oscillator. In this model equation the influence of the variation of the mass of the oscillator due to an incoming flow of raindrops hitting the oscillator and a mass flow which is blown and shaken off is investigated. The time-varying mass is modeled by a time harmonic function whereas simultaneously also time-varying lift and drag forces are considered.     

A study on validity of using average fiber aspect ratio for mechanical properties of aligned short fiber composites with different fiber aspect ratios

A closed-form solution using the actual distribution of the fiber aspect ratio is proposed for predicting the stiffness of aligned short fiber composite. The present model is the simplified form of Takao and Taya’s model and the extended version of Taya and Chou’s model, where Eshelby’s equivalent inclusion method modified for finite fiber volume fraction is employed. The validity of using average fiber aspect ratio for predicting the composite stiffness is justified in terms of the scatter of fiber aspect ratio, fiber volume fraction, and constituents‘ Young’s modulus ratio, comparing with the results by the present model. The guideline for selection of either the actual distribution or the average fiber aspect ratio is presented for the better prediction of the composite stiffness.