Tetrachlorosilane Consumption in Radio Frequency Glow Discharge

Time-resolved mass spectrometry was used for analysis of the plasma reactions in radio frequency (RF) SiCl ₄ and SiCl ₄ –O ₂ discharges as functions of starting partial pressure and electrical power. Molecular concentrations of the reactants and products from SiCl ₄ alone and with O ₂ were obtained from the mass spectra and used for plotting the kinetic curves. The SiCl ₄ and O ₂ consumption rates were calculated from the kinetic curves and compared with results of theoretical simulation of the reaction. Direct electron impact decomposition was found to be the main pathway for pure SiCl ₄ conversion. On the contrary, the consumption of SiCl ₄ in the SiCl ₄ +O ₂ mixtures was largely chemical. The experimental macrokinetics are in agreement with a model in which oxidation is caused by the atomic oxygen.     

Deposition of SiOx Films from Hexamethyldisiloxane/Oxygen Radiofrequency Glow Discharges: Process Optimization by Plasma Diagnostics

Optical emission and Fourier transform infrared absorption diagnostics have been carried out in hexamethyldisiloxane/oxygen RF discharges for studying the effects of the feed composition and the power on the deposition of SiO₂—like thin films. Ex situ FTIR absorption has been utilized to monitor organic moieties and silanol groups in the film. It is shown that carbon-free films can be obtained by highly diluting the monomer in oxygen, while medium-to-high power is necessary to abate silanol groups. These two conditions represent the optimization criterion to obtain excellent barrier films for food packaging applications.     

Comparison Between Air Filamentary and Helium Glow Dielectric Barrier Discharges for the Polypropylene Surface Treatment

Recently, a glow like dielectric controlled barrier discharge (GDBD) working at atmospheric pressure has been observed. Such a discharge could replace a filamentary dielectric controlled barrier discharge (FDBD) used in corona treatment systems to improve the wettability or the adhesion of polymers. So it is of interest to compare these two types of discharges and their respective effect on a polymer surface. This is the aim of an extensive study we have undertaken. The first step presented here is the comparison of a filamentary discharge in air with a glow discharge in helium. Helium is the most appropriate gas to realize a glow discharge at atmospheric pressure. Air is the usual atmosphere for a corona treatment. The plasma was characterized by emission spectroscopy and current measurements. The surface transformations were indicated by the water contact angle, the leakage current measurement and the X-ray photoelectron spectroscopy. Results show that the helium GDBD is better than air FDBD to increase polypropylene wettability without decreasing the bulk electrical properties below a certain level. Contact angle scattering as well as leakage current measurements confirm that the GDBD clearly results in more reproducible and homogeneous treatment than the FDBD.     

Plasma Polymerization Inside Tubes in Hexamethyldisiloxanes and Ethyne Glow Discharges: Effects of Deposition Atmosphere on Wetting and Ageing in Solvents

The coating deposition inside tubes becomes increasingly important for fluidic applications, in which inner surfaces are chemically and mechanically strained by the flowing liquid and by scratching of particles. The developed process for tube coating, presented in this work, is based on the discharge in the precursor gas atmosphere between two mesh electrodes at the ends of the tube. The gas mixture is introduced on one end and pumped through the electrode on the other end. Igniting plasma inside the tube, the tube walls are the barrier to the atmosphere. Especially pulsed DC discharges for plasma polymerization in this alignment lead to good coating results, which is shown in this work focusing on deposition in pure and mixed hexamethyldisiloxane, ethyne, and oxygen atmospheres. Chemical binding, wetting, and ageing are strongly influenced by the choice of the gas mixtures. Sufficient oxygen partial pressure in the deposition atmosphere leads to hydrophilic behavior of the SiO₂-like polymer-like carbon coatings, all other applied atmospheres to generally hydrophobic behavior of pure and Si-doped plasma polymers, respectively.     

Kinetics of the Electrons in Striations of Spherical Glow Discharges

Recent observations of spherical striations in large-volume nitrogen dcdischarges with a central anode have stimulated investigations of thenonlocal electron kinetics in these striations by solving the spatiallyinhomogeneous Boltzmann equation adapted to spherical geometry. Becausethe radial course of the electric potential is largely unknown in thisdischarge, different models concerning its radial course have been developedand used. These models are based on the measured radii of the striationsand the assumption that the potential drop between successive striationsdoes not change. As a consequence, with decreasing distance between thestriations the electric field strongly increases toward the centralanode. It has been found that spherical striations are only obtained ifthe electric field is strongly modulated. In this case, a highly nonlocalbehavior of the velocity distribution function and strongly modulatedradial courses of the macroscopic quantities have been obtained.     

Investigation of Soot Deposition and Composition in a Radio Frequency Plasma of Benzene

A radio frequency (rf) discharge has been utilized to study the decomposition of benzene. SEM inspection has shown that the size of soot particles ranged from 0.5 to several μm. The soot deposited on silicon wafers was analyzed by gas chromatography/mass spectrometry (GC/MS). It was shown that the main components of the soot are polyphenyls (biphenyl and terphenyls) and a trace amount of polycyclic aromatic hydrocarbons (PAHs). Acetylene and hydrogen have been detected by plasma diagnostics techniques using Fourier transform infrared (FTIR) and optical emission spectroscopic techniques. However, GC/MS analysis has shown that the relative yields of PAHs are much less than those of polyphenyls, which indicates that the conventional hydrogen abstraction-acetylene addition (HACA) model for soot formation is not applicable to the benzene plasma due to the reason of temperature. The rf power, the carrier gas flow-rate, the relative yields of polyphenyls, and plasma temperatures were correlated. The reaction pathways of benzene elimination and soot formation in plasma are discussed. This study has provided a new route to control the contamination due to PAHs.     

Plasma Reaction Behaviors of Carbon Disulfide and Carbon Dioxide in Glow Discharges

Reaction behaviors of carbon disulfide and carbon dioxide in plasma were investigated and compared. It was found that carbon disulfide is very reactive in plasma to produce dark brown filmy polymers, but carbon dioxide does not give polymeric products at all. The difference in plasma behaviors of the two monomers can be attributed to the roles of sulfur and oxygen in the monomers. There is also some discussion on the spectro-scopic data of carbon disulfide polymers.     

Organic Syntheses in the Plasma of Glow Discharges and Their Preparative Application

It is only during the last few years that reactions of organic substances as a result of electron collisions in the cold plasma of glow and corona discharges have been developed into a preparatively useful method with a wide range of possibilities. Its basic principles and development prospects are discussed in the present progress report on the basis of the research results that are known at present.     

超疏水表面微纳二级结构对冷凝液滴最终状态的影响

从超疏水表面(SHS)上初始冷凝液核长大、合并、形成初始液斑开始,分析计算了冷凝液斑变形成为Wenzel或Cassie液滴过程中界面能量的变化,并以界面能曲线降低、是否取最小值为判据,确定冷凝液滴的最终稳定状态.计算结果表明:在只有微米尺度的粗糙结构表面上,冷凝液滴的界面能曲线一般都是先降低再升高,呈现Wenzel状态;而当表面具有微纳米二级粗糙结构,且纳米结构的表面空气面积分率较高时,冷凝液滴的能量曲线持续降低,直至界面能最小的Cassie状态,因此可以自发地形成Cassie液滴.还计算了文献中具有不同结构参数的SHS上冷凝液滴的状态和接触角,并与实验结果进行了比较,结果表明,计算的冷凝液滴状态与实验观察结果完全吻合.因此,微纳二级结构是保持冷凝液滴在SHS上呈现Cassie状态的重要因素.     

射频供能辉光放电原子发射光谱分析导体的基本特性

自行设计组装了射频供能辉光放电原子发射光谱仪器(rf-GD-AES),并对其分析导体试样的基本特性(包括光源的稳定性、电学特性和光谱特性)进行了研究。在此基础上建立了rf-GD-AES分析导电试样的方法,并用于铜合金标准样品中的A l和Mn的分析,其测定结果与标准值吻合很好,充分地显示了rf-GD-AES在固体样品直接分析中的潜力。     

Effects of Cathode and Anode on Deposition of Trimethylsilane in Glow Discharge

DC cathodic polymerization of trimethylsilane (TMS) was carried out in plasma reactors with and without using anode assembly. In DC cathodic polymerization, the TMS plasma polymers are mainly deposited on the cathode (substrate) surface. As a result, fast deposition of TMS plasma polymers was easily achieved in DC cathodic polymerization as compared with AF or RF plasma polymerization. DC cathodic polymerization without using anode assembly has its advantageous features that the size and number of substrates (as cathodes) are not restricted by the size and the location of anode assembly. It was found that the maximum deposition rate on the cathode surfaces was obtained without anode assembly. The DC cathodic polymerization of TMS was conducted also in a large volume reactor with multiple cathodes (substrates). The same deposition mechanisms for DC cathodic polymerization with a single cathode also apply to the multiple cathodes. Uniform deposition on each cathode could be obtained with appropriate spacing of multiple cathodes and by adjusting the operational parameters, which are based on the current density and the system pressure.     

Adsorption Properties of Hydrocarbon and Fluorocarbon Surfactants Ternary Mixture at the Water-Air Interface

Measurements were made of the surface tension of the aqueous solutions of p-(1,1,3,3-tetramethylbutyl) phenoxypoly(ethylene glycols) having 10 oxyethylene groups in the molecule (Triton X-100, TX100) and cetyltrimethylammonium bromide (CTAB) with Zonyl FSN-100 (FC6EO14, FC1) as well as with Zonyl FSO-100 (FC5EO10, FC2) ternary mixtures. The obtained results were compared to those provided by the Fainerman and Miller equation and to the values of the solution surface tension calculated, based on the contribution of a particular surfactant in the mixture to the reduction of water surface tension. The changes of the aqueous solution ternary surfactants mixture surface tension at the constant concentration of TX100 and CTAB mixture at which the water surface tension was reduced to 60 and 50 mN/m as a function of fluorocarbon surfactant concentration, were considered with regard to the composition of the mixed monolayer at the water-air interface. Next, this composition was applied for the calculation of the concentration of the particular surfactants in the monolayer using the Frumkin equation. On the other hand, the Gibbs surface excess concentration was determined only for the fluorocarbon surfactants. The tendency of the particular surfactants to adsorb at the water-air interface was discussed, based on the Gibbs standard free energy of adsorption which was determined using different methods. This energy was also deduced, based on the surfactant tail surface tension and tail-water interface tension.     

A Mechanisms and Kinetics Study of Polymeric Thin-Film Deposition in Glow Discharge

Polymeric thin-film deposition in a capacitively coupled rf glow discharge of styrene has been investigated. A kinetic scheme for the polymerization was proposed in which initiation of monomers by electron impact was followed by propagation and termination as in conventional polymerization, the initiation rate constant being a function of electron temperature alone. Four mechanism models were examined, depending on where each reaction step takes place: in the gas phase or on the substrate. Free-radical polymerization was assumed. Experiments were carried out at pressures ranging from 0.25 to 1.05 Torr and at voltages and currents that yielded cold and stable discharges. Substrate temperature was controlled. Deposition rate was determined by weighing. A regression program was used in addition to experimental tests in which substrate temperature was varied. The best approximation to the plasma polymer deposition process was found to be the following model: monomers are activated in the gas phase by electron bombardment and subsequently diffuse to the substrate where they propagate and terminate, adsorption of monomers on the substrate playing an important role. A rate expression relating polymer film deposition rate to the experimental variables is presented.     

铝合金表面原位自组装超疏水膜层的制备及耐蚀性能

采用阳极氧化法在铝合金表面原位构造粗糙结构, 经表面自组装硅氧烷后得到超疏水自清洁表面, 与水滴的接触角最大可达157.5°±2.0°, 接触角滞后小于3°. 通过傅立叶变换红外(FT-IR)光谱分析仪、场发射扫描电子显微镜(FE-SEM)、能谱仪(EDS)、原子力显微镜(AFM)和接触角测试对阳极氧化电流密度、硅氧烷溶液中水的含量和自组装时间等参数进行了分析, 并得到制备超疏水自清洁表面的最优工艺参数. FE-SEM及AFM的测试结果表明, 由自组装硅氧烷膜层的无序性形成的纳米结构和阳极氧化构造的微米级粗糙结构与硅氧烷膜层的低表面能的协同作用构成了稳定的超疏水表面. 电化学测试(动电位极化)的结果表明, 原位自组装超疏水膜层极大地提高了铝合金的耐蚀性.     

Structure and surface properties of polyacrylates with short fluorocarbon side chain: Role of the main chain and spacer group

The degradation of poly(fluoroalkyl acrylate)s with long perfluoroalkyl groups, especially with perfluorooctyl group, leads to the release of biopersistent perfluorooctanoic acid (PFOA) or perfluorooctanesulfonic acid (PFOS). To find the environmentally friendly substitutes, a series of nonbiopersistant fluorinated polymers containing perfluorohexyl groups in the side chains have been synthesized and characterized. This study was then focused on the role played by the main chain and spacer group located in the side chain between the backbone and the fluorinated segment and, in particular, on the properties of poly[2‐[[[[2‐(perfluorohexyl)]‐sulfonyl]methyl]amino]ethyl] acrylate (PC6SA), methacrylate (PC6SMA) and poly[(perfluorohexyl)ethyl] methacrylate (PC6MA). Surface properties and bulk organization of fluorinated side chains of those polymers were investigated by contact angles, differential scanning calorimetry, optical polaring microscopy, and wide‐angle X‐ray scattering. Results were compared with those obtained with poly[(perfluorohexyl) ethyl] acrylate (PC6A). They all had very low surface free energies. Surprisingly, with the same perfluoalkyl chain, PC6SA and PC6SMA with a N‐methylsulfonamide spacer group were found to be organized in a liquid crystalline lamellar structure, whereas PC6A and PC6MA were found to be amorphous. This was mainly attributed to the steric term and polarity of N‐methylsulfonamide group that tended to facilitate the orientation of the perfluorinated segments in smectic phases. PC6SA, PC6SMA, and PC6MA had rich dynamic water repellency because of the low surface molecular mobility. This phenomenon relates to the crystallization of side chains or high glass transition temperature. © 2010 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 48: 2584–2593, 2010     

飞行时间质谱仪四极杆射频信号放大器的研制

根据自制质谱仪需求研制了一种射频放大装置,由放大电路模块和耦合线圈构成,将其与射频信号发生装置结合用以驱动射频四极杆.该射频放大器可将射频信号放大30倍,为自制射频四极杆提供共振频率1.4 MHz,射频电压峰峰值电压Vp-p可调范围0～600 V的射频信号.自制四极杆用于传输大气压下离子源产生的离子从离子源至工作在高真...     

Electrochemical Deposition of Azobenzene‐Containing Network Films with High‐Contrast and Stable Photoresponse

To fabricate stable photoresponsive films and devices, a cross‐linked network that firmly fixes the position of the chromophores is an ideal structure, because aggregation and/or phase separation effects of chromophores in matrix can be effectively restrained in such robust films. Herein, the in situ electrochemical deposition (ED) of azo‐based precursors containing multielectroactive carbazole units is utilized to construct highly cross‐linked photoresponsive films. 2‐(4‐(9,9‐bis(6‐(9H‐carbazol‐9‐yl)hexyl)‐9H‐fluoren‐2‐yl)phenyl)‐1‐(4‐(9,9‐bis(6‐(9H‐carbazol‐9‐yl)hexyl)‐9H‐fluoren‐7‐yl)phenyl)diazene (BFCzAzo) with high solvability in electrolyte solution, high electroactivity, and highly efficient photoresponsive ability is synthesized by Suzuki coupling reaction as a kind of ED precursor. A highly cross‐linked photoresponsive film is fabricated by ED method using BFCzAzo as ED precursor. The film can be patterned in large area by irradiation with interfering laser beam (355 nm), and the pattern possesses excellent thermal stability and insoluble ability in both organic and inorganic solvents. Excellent reversibility of the nanostructures is demonstrated by irradiation with 550 nm laser beam.

     

Biaxially Oriented Polypropylene (BOPP) Surface Modification by Nitrogen Atmospheric Pressure Glow Discharge (APGD) and by Air Corona

We compare two surface treatments of biaxially-oriented polypropylene (BOPP), which are carried out in the same dielectric barrier discharge (DBD) apparatus, namely air corona, and N₂ atmospheric pressure glow discharge (APGD). Changes in the surface energy and chemistry are investigated by contact angle measurements, by X-ray photoelectron spectroscopy (XPS) and by attenuated total reflectance infrared spectroscopy (ATR-FTIR). It is shown that N₂ APGD treatment leads to a higher surface energy than air corona treatment, and to the formation of mostly amine, amide, and hydroxyl functional groups at the polypropylene surface. Finally, hydrophobic recovery of the treated film is studied; for both treatment types, the increased surface energy is found to decay in a similar manner with increasing storage time after treatment.     

超疏水表面上冷凝液滴发生弹跳的机制与条件分析

使用液滴合并前后的体积和表面自由能守恒作为两个限制条件,确定了合并液滴的初始形状,即为偏离平衡态的亚稳态液滴,具有缩小其底半径而向平衡态液滴转变的推动力.进而分析了液滴变形过程中的推动力和三相线(TPCL)上的滞后阻力,建立了液滴变形的动态方程并进行了差分求解.如果液滴能够变形至底半径为0mm的状态,则根据该状态下液滴重心上移的速度确定液滴的弹跳高度.不同表面上冷凝液滴合并后的变形行为的计算结果表明,光滑表面上的液滴合并后,液滴只能发生有限的变形,一般都在达到平衡态之前就停止了变形,因此冷凝液滴不会发生弹跳;粗糙表面上的Wenzel态液滴的三相线上的滞后阻力更大,因而液滴更难以变形和弹跳;具有微纳二级结构表面上只润湿微米结构,但不润湿纳米结构的部分Wenzel态液滴能够变形至Cassie态,但没有明显的弹跳;只有在纳米或微纳二级结构表面上的较小Cassie态液滴合并后,液滴易于变形至底半径为0mm的状态并发生弹跳.因此,Cassie态合并液滴处于亚稳态,并且其三相线上的移动阻力很小,是导致冷凝液滴弹跳的关键因素.     

Molecular Design of Fluorocarbon Film Architecture by Pulsed Plasma Enhanced and Pyrolytic Chemical Vapor Deposition

Pulsed plasma enhanced chemical vapor deposition (pulsed PECVD) and pyrolytic chemical vapor deposition (pyrolyric CVD) of fluorocarbon films from hexafluoropropylene oxide (HFPO) have demonstrated the ability to molecularly design film architecture. Film structures ranging from highly amorphous crosslinked matrices to linear perfluoroalkyl chain crystallites can be established by reducing the modulation frequency of plasma discharge in plasma activated deposition and by eventually shifting mechanistically from an electrically activated to a thermally activated process. X-ray photoelectron spectroscopy (XPS) showed CF₂ content increasing from 39–65 mol%. Fourier transform infrared spectroscopy (FTIR) showed an increasing resolution between the symmetric and asymmetric CF₂ stretches, and a reduction in the intensity of the amorphous PTFE and CF₃ bands. High-resolution solid-state ¹⁹F nuclear magnetic resonance spectroscopy (NMR) revealed an increasing CF₂CF₂CF₂ character, with the pyrolytic CVD film much like bulk poly(tetrafluoroethylene) (PTFE). X-ray diffraction (XRD) patterns evidenced an increase in crystallinity, with the pyrolytic CVD film showing a characteristic peak at 2 = 18° representing the (100) plane of the hexagonal structure of crystalline PTFE above 19°C.