基于严格耦合波理论的多层介质膜光栅衍射特性分析

基于严格耦合波理论建立了多层介质膜光栅的衍射机理模型,给出了TE波自准直条件下多层介质膜光栅衍射效率的表达式.以－1级衍射效率为评价函数,分析了表面浮雕结构分别为HfO₂和SiO₂材料的介质膜光栅获得衍射效率优于96%的结构参数.数值计算表明,顶层材料为HfO₂的介质膜光栅具有更宽的结构选择范围.最后分析了介质膜光栅的制备容差和允许的入射角度范围. 关键词： 衍射效率 多层介质膜光栅 严格耦合波理论     

亚波长闪耀光栅矢量衍射效率计算

将矢量衍射数值算法—严格耦合波分析用于精确计算亚波长闪耀光栅的衍射效率,并分析其衍射特性。建立了闪耀光栅的电磁介质模型,并将楔形不规则结构简化为多层矩形光栅结构,通过电磁场的介质分布建立严格耦合波方程。根据边界条件求解出各层的电磁场分布,再通过增透矩阵方法将各层电磁场依次迭代,求解出了整个结构的衍射效率。计算分析显示,对闪耀角为11.3°、周期为500 nm的金属铝闪耀光栅可以得到高于90%的衍射效率和相应的闪耀级次。实验表明这种矢量衍射数值算法具有较高的准确性,可以推广应用于高致密刻线复杂光栅的衍射计算分析。     

梯形介质膜光栅衍射特性分析

基于严格耦合波理论建立了梯形介质膜光栅的衍射机理模型,利用该模型讨论了底角为70°的梯形介质膜光栅-1级的衍射行为.通过对梯形介质膜光栅的占空比、槽深和剩余厚度的优化,设计了应用于1053 nm和51.2°角度入射的梯形介质膜光栅.对于顶层为HfO2的介质膜光栅,当槽深为200 nm,剩余厚度为100 nm,占空比为0.35时.其衍射效率优于99.5%,而对于顶层为SiO2的梯形光栅,为获得99.5%的衍射效率.其槽深为800 nm,剩余厚度为320 nm.而且,获得同样的衍射效率,顶层为HfO2的梯形光栅具有更宽的光谱特性.数值计算表明,严格耦合波理论模型对梯形介质膜光栅衍射效率的计算具有很好的收敛性和稳定性.     

基底微缺陷对介质薄膜光学性能影响的理论研究

基于非均匀膜理论提出一种存在微缺陷的介质基底的折射率分层模型，将基底依次分为表面层、亚表面层和体材料层，其中表面层和亚面层分别等效为折射率服从统计分布的非均匀膜，将它们分别再次细分为N₁和N₂个子层，每一子层均视为均匀介质 膜.应用光学薄膜特征矩阵法对其进行理论分析，并对单层介质膜的光学性能进行数值计算. 研究结果表明：基底的表面和亚表面微缺陷改变了薄膜和基底的等效折射率，导致了准Brew ster角和组合反射率与理想情形的偏离.同时这些微缺陷也改变了光在薄膜和基底中的传播 特性，因此反射相移和相位差均偏离理想情形.在研究基底的微缺陷对多层介质膜光学性能 影响的分析和计算时，该模型同样适用. 关键词： 微缺陷 介质薄膜 非均匀膜 光学性能     

耦合可激发介质中螺旋波的控制研究

采用Br模型研究了三层耦合可激发介质中螺旋波的控制.相邻层之间采用双向耦合.利用加在第二层介质上的局域周期信号产生的平面波来消除螺旋波.数值模拟表明:只有当三层介质的耦合满足一定条件才可能实现螺旋波的控制,可以通过耦合互补方式实现螺旋波的控制;平面波与低频螺旋波的相互作用可以产生高频螺旋波,导致螺旋波不能被消除;存在优化的驱动宽度,过大或过小的驱动宽度需要增加第一、三层介质的耦合强度.观察到控制结果依赖控制时机的现象.研究结果可用于植入式心脏除颤器的设计.     

基于严格耦合波理论的宽光谱金属介质膜光栅衍射特性分析

基于严格耦合波理论建立了金属介质膜光栅的衍射机理模型,给出了TE模式金属介质膜光栅衍射效率的表达式.以-1级衍射效率和工作带宽为评价函数,对金属介质膜光栅的表面浮雕结构进行了优化设计.对于800 nm和1053 nm为中心的TE波,设计的金属介质膜光栅-1级衍射效率优于97%的工作带宽分别达到130 nm和150 nm,最后讨论了设计的宽光谱高衍射效率金属介质膜光栅的制备工艺容差.此研究对于提高脉宽压缩光栅的性能具有重要的意义. 关键词： 衍射效率 金属介质膜光栅 严格耦合波理论     

超高精细度微光学腔共振频率及有效腔长的精密测量

超高精细度微共振器是实现原子或者其他偶极子与腔强耦合作用的基本部分, 在腔量子电动力学(QED)、弱光非线性效应及微光学器件研究中扮演着重要的角色. 微腔基本参数的精密测量最终可以确定腔与原子的耦合系数、腔场衰减率, 对决定系统的动力学特性具有重要的意义. 但是由于超高精细度光学微腔本身的构造和多层镀膜的特点, 高精度地确定其共振频率及有效腔长存在一定困难. 本文结合修正的多层介质膜模型, 实验上完成了膜层为37层的超高精细度光学微腔在不同共振频率下有效腔长的精密测量, 获得了超高精细度光学微腔的共振频率及波长; 理论计算分析与实验测量结果相符, 对纵模间隔的测量精度误差低于0.004 nm, 较为修正前提高了约两个量级. 同时给出了对应不同模式数下, 光波渗入到介质中的深度. 该方法可望应用到其他微共振器的精密测量中. 关键词： 光学微腔 高精细度 共振频率     

间接延迟耦合可激发介质中螺旋波的演化

采用Bär 模型研究了通过被动介质间接延迟耦合的两层可激发介质中螺旋波的相互作用. 数值模拟结果表明: 延迟耦合可以促进两个螺旋波的同步, 也可导致从螺旋波到集体振荡、各种靶波、时空混沌态或静息态的转变; 在这个耦合系统中还观察到周期 2和周期3螺旋波以及螺旋波漫游和漂移现象; 对产生这些现象的物理机制做了讨论. 关键词： 螺旋波 被动介质 时间延迟耦合 同步     

两层耦合可激发介质中螺旋波转变为平面波

采用Br-Eiswirth模型研究了两层耦合可激发介质中螺旋波的动力学,两层介质通过网络连接,即在每一层介质上,每一列选一个可激发单元作为中心点,在一层介质上同一列的可激发单元只与另一层介质上对应的中心点及其8个邻居有耦合.数值模拟结果表明:通过这种局部耦合,在适当小的耦合强度下两耦合螺旋波可实现同步,增大耦合强度会导致螺旋波漫游和漂移,造成螺旋波不同步,观察到螺旋波与静息态、低频平面波和不规则斑图共存现象.在适当强的耦合强度下,还观察到两螺旋波转变成同步的平面波消失现象.对产生这些现象的物理机理做了讨论.     

负折射率介质层中光波的相位和传输特性研究

针对在理解负折射率材料中光波的传播特性时相位的特殊性质 ,详细分析推证了负折射率介质中折射率、波矢k的大小和方向、空间坐标系以及波相相位互之间的关系。分析结果表明负折射率介质层中的波矢k的反常取向是由于其标量值为负 ;在统一的坐标系下 ,由该标量值参与数值计算和分析 ,k则由标量值和单位矢量k0 (k0 >0 )共同决定 ,而不必再考虑左、右手系的区别。在此基础上依据电磁场理论推导了光波在负折射率介质层中的传输矩阵 ,用以分析含有负折射率介质层的复杂薄膜系统的光学性质。初步计算结果显示含有负折射率介质层的膜系对TE和TM波的光谱特性都有显著改变     

Broadband and high efficiency metal multi-layer dielectric grating based on non-quarter wave coatings as reflective mirror

This article deals with designing broadband and high efficiency metal multi-layer dielectric grating (MMDG) used to compress and stretch ultra-short laser pulse. The diffraction characteristics of MMDG are analysed with the method of rigorous coupled-wave method. The multi-layer dielectric used as reflective mirror is made up of non-quarter wave coatings. Taking the diffraction efficiency of the -1 order as the value of merit function, the parameters such as groove depth, residual thickness, duty cycle, and reflective mirror are optimized to obtain broadband and high diffraction efficiency. The optimized MMDG shows an ultra-broadband working spectrum with the average efficiency exceeding 97% over 160 nm wavelength centred at 1053 nm and TE polarization. The optimized MMDG should be useful for chirped pulse amplification.     

Broadband and high efficiency metal multi-layer dielectric grating based on non-quarter-wave coatings as a reflective mirror

This article deals with designing a broadband and high efficiency metal multi-layer dielectric grating (MMDG) used to compress and stretch an ultrashort laser pulse. The diffraction characteristics of the MMDG are analysed by using the rigorous coupled-wave method. The multi-layer dielectric used as the reflective mirror is made up of non- quarter-wave coatings. Taking the diffraction efficiency of the 1 order as the value of merit function, the parameters such as groove depth, residual thickness, duty cycle, and reflective mirror are optimized to obtain broadband and high diffraction efficiency. The optimized MMDG shows an ultra-broadband working spectrum with the average efficiency exceeding 97% over 160 nm wavelength centred at 1053 nm and TE polarization. The optimized MMDG should be useful for chirped pulse amplification.     

Spectrum splitting using multi-layer dielectric meta-surfaces for efficient solar energy harvesting

We designed a high-efficiency dispersive mirror based on multi-layer dielectric meta-surfaces. By replacing the secondary mirror of a dome solar concentrator with this dispersive mirror, the solar concentrator can be converted into a spectrum-splitting photovoltaic system with higher energy harvesting efficiency and potentially lower cost. The meta-surfaces are consisted of high-index contrast gratings (HCG). The structures and parameters of the dispersive mirror (i.e. stacked HCG) are optimized based on finite-difference time-domain and rigorous coupled-wave analysis method. Our numerical study shows that the dispersive mirror can direct light with different wavelengths into different angles in the entire solar spectrum, maintaining very low energy loss. Our approach will not only improve the energy harvesting efficiency, but also lower the cost by using single junction cells instead of multi-layer tandem solar cells. Moreover, this approach has the minimal disruption to the existing solar concentrator infrastructures.     

宽光谱高衍射效率脉宽压缩光栅设计和性能分析

基于飞秒激光对脉宽压缩光栅宽光谱和高衍射效率的要求,提出了一种金属介质膜结构的宽光谱高衍射效率脉宽压缩光栅,该光栅由基底、金属介质膜和表面浮雕结构组成.为获得宽光谱高衍射效率的脉宽压缩光栅,采用严格耦合波理论对金属介质膜光栅的结构参数进行优化设计.数值分析表明当金属介质光栅的槽深、剩余厚度、占空比和入射角分别为272 ...     

基于RCWA的太阳能电池抗反射膜分析研究

利用严格耦合波分析法（RCWA）分别计算了五种不同形貌的亚波长浮雕结构的太阳能电池抗反射膜性能,分别从占空比、光栅高度和周期等结构参数以及入射光角度进行模拟。研究结果表明：周期为200rim,高度为400nm,占空比为1的金字塔型浮雕结构的抗反射效果令人满意,且平均反射率低于1％;光波的入射角对光栅的反射率影响较大,光波在光栅法线的角度控制在40°以下合适。通过对亚波长浮雕结构的反射特性模拟和分析,为太阳能电池抗反射膜设计与制作提供理论支持。     

亚波长介质光栅的闪耀特性分析

采用严格耦合波理论与矩阵LU分解法,求解了亚波长矩形介质光栅的衍射场,给出了TE和TM偏振波的耦合波方程组及其矩阵形式.通过数值计算分析了TE和TM偏振波的入射角、刻槽深度、入射波长等参量对＋1级衍射波衍射效率的影响.结果表明,当Λ=0.5λ0,θ=55°,d=0.38λ0,λ=10.6 μm时可以实现对TE偏振波＋1级的闪耀,衍射效率达到近90%,同时具有较宽广的角度适应范围.     

Optimal design of sub-wavelength metal rectangular gratings for polarizing beam splitter based on effective medium theory

A novel optimal design of sub-wavelength metal rectangular gratings for the polarizing beam splitter (PBS) is proposed. The method is based on effective medium theory and the method of designing single layer antireflection coating. The polarization performance of PBS is discussed by rigorous couple-wave analysis (RCWA) method at a wavelength of 1550~nm. The result shows that sub-wavelength metal rectangular grating is characterized by a high reflectivity, like metal films for TE polarization, and high transmissivity, like dielectric films for TM polarization. The optimal design accords well with the results simulated by RCWA method.     

Analysis of Near-Field Intensity Distributions of High-Compression Talbot Array Illuminators Using Rigorous Diffraction Theory

The technology nowadays employed in the field of binary optics allows a relatively easy fabrication of grating structures down to the wavelength region. The analysis of light propagation through such grating structures requires the use of rigorous diffraction theories such as the rigorous coupled-wave analysis (RCWA), in order to take proper account of polarization effects in the electric and magnetic field and the thickness of the grating. In this paper, we examine the near-field intensity distributions and associated illumination efficiencies of Talbot array illuminators (TAIL#x0027;s) with compression ratios of 8 and 16 using RCWA. The high illumination efficiency observed close to the grating surface is expected to bring about new applications of TAIL#x0027;s in the field of super-resolution and near-field optics.This paper was originally presented at the 2nd International Conference on Optical Design and Fabrication, ODF2000 which was held on November 15-17, 2000 at the International Conference Center, Tokyo, Waseda University, Japan.     

Modal analysis of deep-etched low-contrast two-port beam splitter grating

Modal analysis of a deep-etched low-contrast two-port beam splitter grating under Littrow mounting is presented. The guideline for the design of a subwavelength transmission fused-silica phase grating as high-efficiency grating, polarizing beam splitter (PBS), and two-port beam splitter, is summarized. As an example, a polarization-independent two-port beam splitter grating is designed at wavelength of 1064 nm. We firstly analyzed the physical essence of the grating by the simplified modal method. The guideline for the grating design and the approximate grating parameters are obtained. Then using the rigorous coupled-wave analysis (RCWA) with parameters varying around the approximate ones, optimum grating parameters can be determined. With the design guideline, the time for the rigorous calculation of the grating profile parameters can be reduced significantly.     

提高光栅衍射计算收敛性的途径

从数学原理、几何分层,以及数值计算三方面,分析了耦合波法在计算光栅衍射时的收敛性问题,提出了改善计算收敛性的途径.并明确指出对于不同的光栅问题,影响计算收敛性的主要因素是各不相同的,计算时应该针对具体的问题采用相应的改善方法. 关键词： 耦合波法 校正傅里叶展开 多层近似 收敛