Optimization of EUV radiation yield from laser-produced plasma

We optimize the conversion of laser energy into extreme ultraviolet (EUV) radiation by tailoring the laser parameters for a laser-produced plasma generated from 20 μm diameter water droplets. It is shown that mass-limited targets require careful adaption of laser-pulse energy and laser-pulse duration separately, rather than laser intensity, which seems to be adequate for bulk targets. The optimal pulse duration scales with the droplet radius, and the optimal pulse energy with the droplet volume. With optimized parameters, we obtain a conversion efficiency of 0.23% in 4π and 2.5% bandwidth for 13 nm radiation, the future EUV lithography light. Received: 16 July 2001 / Revised version: 25 September 2001 / Published online: 7 November 2001     

Effect of focusing geometry on the continuous optical discharge properties

We studied the effect of the laser beam focusing geometry on the continuous optical discharge (COD) properties. We used a full two-dimensional radiative gas-dynamic model for the COD, maintained by a vertical CO₂ laser beam in free air atmosphere, in the Earth's gravitational field. The model takes into account all of the factors that are of importance in laser-sustained plasma processes, and uses realistic quasi optics to describe the laser radiation propagation. Results are presented for the optical discharge parameters as functions of applied laser power and degree (f-number) to which the laser beam is focused.     

Hot-electron-induced plasma formation on the rear surface of a foil

The plasma jet formed on the rear surface of a foil in laser–solid interaction is investigated by laser probing. The rear plasma jet, which is in line with the laser, formed a few picoseconds after the incidence of the focused laser, is due to a beam of fast electrons propagating through the target and is collimated by a strong magnetic field in the plasma. Received: 14 January 2003 / Revised version: 2 April 2003 / Published online: 2 June 2003 RID="*" ID="*"Corresponding author. Fax: +86-10/8264-9531 E-mail: jzhang@aphy.iphy.ac.cn     

Nanocylinder-array structure greatly increases the soft X-ray intensity generated from femtosecond-laser-produced plasma

In order to increase the soft X-ray conversion efficiency for the femtosecond-laser-produced plasma, we adopted a nanocylinder-array structure target. Gold nanocylinder-array targets with 70–90 nm cylinder diameter and 100 nm cylinder pitch were made. A continuous smooth soft X-ray spectrum adequate for X-ray absorption spectroscopy was obtained. An around 20-fold soft X-ray (7–20 nm) fluence enhancement compared with a flat-surface gold foil target was obtained when the cylinder height was 18 μm. X-ray (>0.06 keV) pulse duration was 17 ps, which is much shorter than that obtained by using the pre-pulse technique. The X-ray pulse peak intensity was 7-fold higher than that of a gold foil target. Received: 2 May 2001 / Revised version: 1 June 2001 / Published online: 18 July 2001     

Particle velocity, electron temperature, and density profiles of pulsed laser-induced plasmas in air at different ambient pressures

Received: 18 August 1997/Revised version: 9 March 1998     

EUV and fast ion emission from cryogenic liquid jet target laser-generated plasma

A liquid jet of either nitrogen or argon of 20 μm diameter was exposed to intense laser fields with pulse durations between 70 fs and 250 ps, leading to intensities of 10¹⁶ W cm^-2 and 10¹³ W cm^-2, respectively. The emission of extreme UV light and soft X-rays shows the characteristic lines of hydrogen-like nitrogen and carbon-like argon. For nitrogen the emitted photon flux at 250 ps was about two orders of magnitude higher than for 70 fs pulses. A weak dependence on the laser polarization with respect to the liquid jet axis was found. The kinetic energy of the emitted ions easily exceeded 100 keV for nitrogen and 200 keV for argon for a pulse duration close to 2 ps. Received: 21 August 2000 / Revised version: 20 December 2000 / Published online: 22 March 2001     

Mechanisms of absorption in pulsed excimer laser-induced plasma

2 . Received: 20 January 1997/Accepted: 23 June 1997     

Steady state ion acceleration by a circularly polarized laser pulse

The steady state ion acceleration at the front of a cold solid target by a circularly polarized flat-top laser pulse is studied with one-dimensional particle-in-cell (PIC) simulation. A model that ions are reflected by a steady laser-driven piston is used by comparing with the electrostatic shock acceleration. A stable profile with a double-flat-top structure in phase space forms after ions enter the undisturbed region of the target with a constant velocity.     

Ablation mechanism study on metallic materials with a 10 ps laser under high fluence

Single shot ablation of metallic materials of aluminium, titanium alloy (Ti6Al4V) and gold has been studied with 10 picoseconds (ps) laser pulses experimentally and theoretically. The ablation rate variation at high fluence was explained by a simplified predictive model based on critical-point phase separation (CPPS) theory. A comparison between experimental and numerical results inferred that CPPS may well be the dominant ablation mechanism for high fluence laser ablation at 10 ps laser duration.     

Parametric optimization of a narrow-band 13.5-nm emission from a Li-based liquid-jet target using dual nano-second laser pulses

We demonstrate the applicability of a Li-based liquid jet as a regenerative source of narrow-band extreme-ultraviolet (EUV) emission at 13.5 nm. It was found that a conventionally used single laser pulse did not produce optimum plasma conditions for a low-Z target, like Li. It was shown that deployment of dual nano-second laser pulses enhanced the in-band EUV conversion efficiency (CE) at 13.5 nm in 2 sr by three times its value using a single laser pulse. Dependence of the emission spectra and EUV CE on the delay time between dual laser pulses revealed that the emission at 13.5 nm from Li ions was preferably enhanced at a lower plasma temperature compared to that at 13.0 nm from oxygen ions.     

Studies of high-repetition-rate laser plasma EUV sources from droplet targets

The water droplet laser plasma source has been shown to have many attractive features as a continuous, almost debris-free source for extreme ultraviolet (EUV) and X-ray applications. Through a dual experimental and theoretical study, we analyze the interaction physics between the laser light and the target. The hydrodynamic laser plasma simulation code, Medusa103 is used to model the electron density distribution for comparison to electron density distributions obtained through Abel inversion of plasma interferograms. In addition, flat field EUV spectra are compared to synthetic spectra calculated with the atomic physics code RATION. Received: 31 October 2002 / Accepted: 8 February 2003 / Published online: 28 May 2003 RID="*" ID="*"Present address: Naval Reseach Laboratory, Washington D.C. RID="**" ID="**"Present address: Xtreme Technologies, G?ttingen, Germany. RID="***" ID="***"Corresponding author. Fax: +1-407/823-3570, E-mail: mrichard@mail.ucf.edu     

Porous layer effects on soft X-ray radiation emitted from a plasma generated by 130-fs laser pulses irradiating a porous silicon target

Received: 2 May 1997/Revised version: 17 October 1997     

The effect of prepulse on X-ray laser development using a powerful subpicosecond KrF laser

A high power UV laser has been developed as a pump source for short wavelength (down to 1 nm) X-ray lasers. Various schemes are considered and theoretical analysis is discussed. Spectroscopic studies of laser-target interaction have been performed and, in particular, the effect of a prepulse on plasma generation has been investigated. Analysis of the observed spectra indicates that reduction of the prepulse energy results in a higher temperature plasma. Investigation of the interaction using thin layered targets is also presented. These data provide evidence for initially hot plasma conditions generated from target layers 150 Å. Discussions of proposed laser schemes at 1–5 nm are presented.Also at the Mechanical and Aerospace Engineering Department, Princeton University, Princeton, NJ     

Imaging a tunneling ionization front by using a schlieren method

A schlieren method was used to generate time-resolved images of the tunneling ionization front produced when an ultrashort high-power laser pulse irradiates He gas. By superimposing sequential schlieren images, we obtained information about the laser propagation and found that the ionization front propagated farther with decreasing density of the target gas. Ray-tracing suggested that this density dependence is a result of the spatial distribution of the laser intensity. Received: 20 May 1999 / Revised version: 19 August 1999 / Published online: 27 January 2000     

Laser acceleration of light ions from high-intensity laser-target interactions

A systematic theoretical study of laser-irradiated targets made of material with increasing atomic number has been performed. The formation of energetic light ions resulting from the interaction of an intense ultrashort pulse laser with thin planar targets is investigated theoretically with a two-dimensional relativistic electromagnetic particle-in-cell model. A common parameter, the areal electron density of the foil, can be used to describe qualitatively targets made of different material. By varying either the laser intensity or the target thickness we observe a gradual transition of various ion acceleration mechanisms from one into another. Light ions, such as H⁺, Li³⁺, C⁶⁺, and Al¹³⁺, can be accelerated to GeV energies with existing laser systems at a laser fluence of 10–20 J/μm².     

Modelling and optimisation of fs laser-produced K<Subscript><Emphasis Type="Italic">α</Emphasis></Subscript> sources

Recent theoretical and numerical studies of laser-driven femtosecond K _α sources are presented, aimed at understanding a recent experimental campaign to optimize emission from thin coating targets. Particular attention is given to control over the laser–plasma interaction conditions defined by the interplay between a controlled prepulse and the angle of incidence. It is found that the x-ray efficiency for poor-contrast laser systems in which a large preplasma is suspected can be enhanced by using a near-normal incidence geometry even at high laser intensities. With high laser contrast, similar efficiencies can be achieved by going to larger incidence angles, but only at the expense of larger x-ray spot size. New developments in three-dimensional modelling are also reported with the goal of handling interactions with geometrically complex targets and finite resistivity.     

Effect of helium/argon gas ratio in a He-Ar-Cu<Superscript>+</Superscript> IR hollow-cathode discharge laser: modeling study and comparison with experiments

The He-Ar-Cu⁺ IR laser operates in a hollow-cathode discharge, typically in a mixture of helium with a few-% Ar. The population inversion of the Cu⁺ ion levels, responsible for laser action, is attributed to asymmetric charge transfer between He⁺ ions and sputtered Cu atoms. The Ar gas is added to promote sputtering of the Cu cathode. In this paper, a hybrid modeling network consisting of several different models for the various plasma species present in a He-Ar-Cu hollow-cathode discharge is applied to investigate the effect of Ar concentration in the gas mixture on the discharge behavior, and to find the optimum He/Ar gas ratio for laser operation. It is found that the densities of electrons, Ar⁺ ions, Ar_m ^* metastable atoms, sputtered Cu atoms and Cu⁺ ions increase upon the addition of more Ar gas, whereas the densities of He⁺ ions, He₂ ⁺ ions and He_m ^* metastable atoms drop considerably. The product of the calculated Cu atom and He⁺ ion densities, which determines the production rate of the upper laser levels, and hence probably also the laser output power, is found to reach a maximum around 1–5 % Ar addition. This calculation result is compared to experimental measurements, and reasonable agreement has been reached. Received: 14 October 2002 / Revised version: 28 November 2002 / Published online: 19 March 2003 RID="*" ID="*"Corresponding author. Fax: +32-3/820-23-76, E-mail: annemie.bogaerts@ua.ac.be     

Collective behavior of laser-produced plasma from a multicomponent YBa2Cu3O7 target in air

2 Cu₃O₇, using a Q-switched Nd:YAG laser is investigated by time-resolved emission-spectroscopic techniques at various laser irradiances. It is observed that beyond a laser irradiance of 2.6×10¹¹ W cm^-2, the ejected plume collectively drifts away from the target with a sharp increase in velocity to 1.25×10⁶ cm s^-1, which is twice its velocity observed at lower laser irradiances. This sudden drift apparently occurs as a result of the formation of a charged double layer at the external plume boundary. This diffusion is collective, that is, the electrons and ions inside the plume diffuse together simultaneously and hence it is similar to the ambipolar diffusion of charged particles in a discharge plasma. Received: 30 January 1998/Revised version: 12 June 1998     

Investigation of debris dynamics from laser-produced tin plasma for EUV lithography light source

The dynamics of debris from the laser-produced tin (Sn) plasma was investigated for an extreme ultraviolet light source in order to establish the guideline for the optimum design of a mitigation system, such as a mass-limited target. The dissemination of the Sn atoms from the different shapes of a wire and a mass-limited droplet target were investigated using the laser-induced fluorescence (LIF) imaging method. The Sn droplet targets with a diameter in the range of 5 to 17 μm were prepared by a new droplet generating technique using a pulsed laser. There was a large difference in the angular distribution of Sn atoms in the plane parallel and perpendicular to the wire axis, indicating the curvature of the target surface governed the angular distribution of the ablated species. The spatial distributions of Sn atoms from the droplet targets were similar to those from the curved surface of the wire targets. The ablation dynamics of the droplet observed by a high-speed imaging camera is also discussed.