使用环形子孔径拼接检测大口径非球面镜

针对高精度大口径非球面镜通常存在定量检验方法(补偿器法、全息法、自准直法)所需要的辅助元件制造困难、成本高这两个主要难点,利用不同曲率半径的参考球面波前来匹配被测非球面表面不同的环带区域,使它们之间的偏离量减小到在小口径干涉仪的测量范围内,每次测量仅是被测表面的一部分,通过算法"拼接"可得到全孔径的面形信息。给出了其拼接数学模型、参量求解方法及其精度评定判据。仿真分析表明,该技术是切实可行的,算法具有较高的拼接精度。该方法无需辅助光学元件就可实现对大口径、大相对口径非球面的直接测量,且具有很宽的适用范围。     

等宽圆环光瞳滤波器的超分辨性能研究

设计一种等宽圆环光瞳滤波器 ,并研究了它的超分辨性能。分析了光瞳中心半径和圆环数对斯特耳比、超分辨能力和旁瓣强度的影响 ,讨论了设计等宽圆环光瞳滤波器时中心半径和圆环数的优化问题。表明圆环数为奇数和偶数时 ,光瞳具有不同的超分辨性能 ;圆环数分别取 1和 2时 ,综合考虑超分辨性能较佳     

环形子孔径拼接干涉检测非球面的建模与实验

为实现球面波干涉检测非球面镜片,得到非球面镜片的完整面形信息,提出了基于标记的Givens变换,实现环形子孔径的精确定位和消旋转的处理.利用求解目标函数最小值的方法精确求解拟合波面以对子孔径数据进行处理,建立了全局优化拼接数学模型.对外径150 mm,内径100 mm的抛物面镜片进行三孔径拼接检测实验,均方根值为0.053 λ.对比补偿器法得到的全口径干涉检测结果均方根值△Wrms=0.052 λ,相对误差为1.92%.实验结果表明,该方法稳定可靠,降低了传统的环形子孔径拼接干涉检测方法中对导轨的高精度要求.     

Improvement of confocal microscope performance by shaped annular beam and heterodyne confocal techniques

In order to further improve the performance of a confocal microscope (CM) used for measurement of surface profiles and 3D microstructures, a shaped annular beam heterodyne confocal measurement method based on annular pupil filter technique and reflection confocal microscopy, is proposed to expand the measurement range and to improve the defocused property of CM. The approach proposed uses a confocal dual-receiving light path arrangement and a heterodyne subtraction of two signals received from detectors with axial offset to enable CM to be used for bipolar absolute measurement and to improve the defocused property of CM, and it uses the annular pupil filter technique to produce a binary optical shaped annular beam, which expands the measurement range by expanding the full-width at half-maximum of intensity curve received from two detectors in a heterodyne confocal microscopy system. Theoretical analyses and experimental results indicate that a shaped annular beam heterodyne microscope has a measurement range expanded from 4 to 14 μm, achieved an axial resolution of 2 nm and improved the defocused property, when ε=0.5 and NA=0.65. It can be therefore concluded that the shaped annular beam heterodyne confocal measuring method proposed is a new approach to ultraprecision measurement of surface profiles and 3D microstructures.     

大型环抛面形实时监测与控制

为解决大型激光驱动器建设中的关键工艺大型精密环形抛光技术一直存在着的控制困难、精度收敛不稳定的难题,分析了环形抛光加工中面形调整控制机理和本质,找到了传统调节控制和判断方法中的缺陷,提出了一种对环抛机面形变化基本实时的离线监测方法。这种监测方法具有结构简单、检测判断时间短和面形变化反应直观的优点。通过建立实验监测装置和实际加工验证,获得了较好的面形趋势判断和实时控制效果。     

Transverse Properties of Light Distribution in the Focal Plane for Rectangular Annular Pupil Plane Filters

1　Ｉｎｔｒｏｄｕｃｔｉｏｎ　　Ｐｕｐｉｌ ｐｌａｎｅｆｉｌｔｅｒｓｃａｎｂｅｕｓｅｄｔｏｃｈａｎｇｅｔｈｅｌｉｇｈｔｉｎｔｅｎｓｉｔｙｄｉｓｔｒｉｂｕｔｉｏｎｉｎｔｈｅｆｏｃａｌｐｌａｎｅ ,ｓｏｔｈｅｙｈａｖｅｐｏｔｅｎｔｉａｌａｐｐｌｉｃａｔｉｏｎｓｉｎｔｈｅａｒｅａｓｏｆｏｐｔｉｃａｌｄａｔａｓｔｏｒａｇｅ[1～ 3 ] ,ｌｉｔｈｏｇｒａｐｈｙ[4] ,ａｎｄｍｉｃｒｏｓｃｏｐｙ[5～ 7] .Ｍａｎｙｐｕｐｉｌｆｉｌｔｅｒｓｈａｖｅｂｅｅｎｓｔｕｄｉｅｄ ,ｓｕｃｈａｓｆｉｌｔｅｒｓｗｉｔｈｖａｒｉｅｄａｍｐ…     

Transverse Properties of Light Distribution in the Focal Plane for Rectangular Annular Pupil Plane Filters

Rectangular annular pupils are designed. The transverse intensity distribution and the superresolving characteristics of the pupils in the focal plane are analyzed. The influences of total annular zone numbers and the central core magnitude on the light efficiency (the Strehl ratio S), the superresolving power (the normalized spot size G) and the intensity of sidelobe are studied in detail. The properties are different for two kinds of pupils: one with total odd annular zone numbers and another with total even annular zone numbers. Circular annular pupils are also discussed and the comparison between them is given.     

线性偏振光激发的错位表面等离子体激元纳米结构聚焦

利用扫描近场光学显微镜观测并分析了两种表面等离子体激元纳米结构对表面等离子体激元(SPP)的激发和聚焦现象.用线偏振光照射有半个周期相位差的环状沟槽结构与有半个周期位相差的环状狭缝结构,得到了单点的SPP聚焦.有限时域差分法的模拟结果验证了实验中观测的现象.这两种相位错位的表面等离子体激元纳米结构,突破了由于干涉导致的线偏振光不能得到单个聚焦点的限制.与采用径向偏振光激发而得到单个聚焦点的方法相比,线偏振光不需要聚焦,也不需要将光束中心对准纳米结构的几何中心即可得到单点聚焦。     

气动驱动变厚变曲率反射镜技术

以环形线负载驱动模型为基础,分析了环形线负载驱动变曲率反射镜难以兼顾大中心形变与高精度面形保持的原因;从薄板弹性理论出发,得到了一种气动驱动变厚变曲率反射镜物理模型.理论分析表明,将反射镜的厚度分布从等厚改为变厚,并采用气压均匀驱动替代推力环环形驱动,反射镜不仅能产生大的中心形变,而且在形变过程中的面形精度也远高于环形线负载驱动变曲率反射镜的.基于超硬铝反射镜样片的试验验证了对变厚变曲率反射镜的理论分析;试验中,反射镜初始面形精度接近λ/50(632.8nm),施加0.032 MPa驱动气压产生约22μm中心形变时,反射镜面形精度依然优于λ/20(632.8nm),证明该气动驱动结合变厚设计这一技术具有较大的应用潜力.     

Propagation characteristics of flattened Gaussian beams through a misaligned optical system with a misaligned annular aperture

The approximate analytical formula for flattened Gaussian beams through a misaligned optical system with a misaligned annular aperture was derived by the extended Huygens–Fresnel principle. Some numerical simulations are illustrated to the effects on the propagation of flattened Gaussian beams by the misaligned annular aperture. To compare the difference between annular apertured system and circular apertured system, the circular apertured system is also studied. The results show that angle misalignments and lateral displacements of aperture create asymmetrical average intensity distribution at receiving plane z = 500. The effects on intensity distribution by angle misalignments of annular aperture were small. In annular aperture case, the smooth of intensity distribution was worse with escalating obscure ratio ? in near-field; the side-lobes increased and the central lobe decreased with escalating obscure ratio ? in far-field. At receiving plane z = 500: for circular aperture, the side-lobes decreased, even to be neglected, with the increasing of truncation parameter δ; for annular aperture, the side-lobes increased with the increasing of truncation parameter δ. In addition, it is found that the aligned thin lens can fix asymmetry of intensity distribution which was caused by the misaligned annular aperture.     

环形狭缝腔阵列光学特性的研究

设计了一种六角密排的二维环形纳米腔阵列结构, 利用时域有限差分算法对该结构的光学特性进行了探究. 仿真结果表明, 在线性偏振光入射时, 环形腔内可以形成多重圆柱形表面等离激元谐振, 谐振波长的个数和大小与环形腔的结构参数相关. 根据透、反射光谱, 电场矢量的模式分布及截面电荷密度的分布, 谐振波长处形成圆柱形表面等离激元, 谐振波长处入射光能量大部分在环形腔内损耗, 此时反射率为极小值, 环形腔内的电场增强效应为极大值(光强增强可达1065倍). 谐振波长与环形腔的结构参数(狭缝内径、狭缝外径、膜厚、环境介质折射率、金属的材质)相关, 通过调节结构参数, 谐振波长在350–2000 nm范围内可调. 通过对比相同结构参数的单个环形腔和环形腔阵列的仿真结果, 周期排布对环形腔内的圆柱形表面等离激元吸收峰位置影响不明显. 该结构反射光谱对入射光电矢量偏振方向不敏感. 谐振波长的可调控性对于表面拉曼增强和表面等离激元共振传感器的设计与优化具有指导性意义, 且应用于折射率传感器时灵敏度可达1850 nm/RIU.     

基于大数值孔径环形光锥照明的超分辨光学 显微成像方法研究

提出和发展了一种基于大数值孔径环形光锥照明的远场超分辨光学显微成像新方法, 采用将发光二极管(LED)面光源、窄带滤光和环形光锥照明相结合的特种照明方式, 实现超分辨显微成像. 建立了大数值孔径环形光锥照明成像的物理模型, 根据标量衍射理论, 在不同环形光锥照明时, 推导出光学显微系统像面衍射斑光强分布的理论计算公式; 通过Matlab求解和绘图, 得到衍射斑光强的分布图样, 从理论上证明这一成像方法可以有效提高光学显微镜的分辨率; 建立了相应的显微成像系统, 通过实验验证了该方法可有效改善显微镜的成像质量, 显著提高分辨率; 在中心波长450 nm、环形光锥数值孔径1.125—1.25时, 实验获得的分辨率至少优于150 nm, 与理论研究结果相符合, 从而证明了这一方法的可行性.     

相位板偏振偏转角对径向偏振光的梯度力分布的影响

 研究了同心分区偏振偏转相位板对径向偏振光梯度力的调制效应。给出了相位板各部分偏振偏转角不同时,光学梯度力的分布情况。模拟结果表明:随着同心分区相位板各部分的半径和偏振旋转角的改变,光学梯度力方向及大小明显变化,且会产生许多可控的梯度力分布模式,可应用于微粒的收集、分离和合并。结果显示同心分区相位板对径向偏振光的调制可以用来生成可调光镊。     

A study of the optical transfer function for annular binary filters

The annular binary pupil filters consist of two transparent annuli obstructed by an annular mask. The optical transfer functions for them are analytically derived under paraxial approximation, and three- and two- as well as one-dimensional numerical plots are presented. It is shown that by changing the parameters of transparent regions it is possible to improve the axial resolution whilst the transverse resolution remains unchanged, compared with an annular lens. Results indicate, as is well known, that this kind of filters can be applied to three-dimensional confocal microscopy.     

An approach to achieve lateral superresolution for small probe confocal measurement system and its element

A shaped annular beam superresolution approach is proposed to improve a lateral resolution of a small probe laser confocal measurement system (LCMS). The approach proposed enables lateral superresolution measurement of LCMS to be achieved by using a binary optical diffractive element to shape a He–Ne Gaussian laser beam into an annular beam with an inner diameter of 0.87 mm and an outer diameter of 1.8 mm required for superresolution measurement, and shift the beam spatial frequency from low to high. And a binary optical element (BOE) with 16 phase levels is designed and fabricated to shape a Gaussian laser beam into an annular beam. Preliminary experimental results indicate that an intensity distribution of a shaped annular beam is in agreement with simulation results, the diffractive efficiency is 87.2%; LCMS lateral and axial resolutions of 0.2 μm and 3 nm are achieved, respectively, and its measurement range is expanded nearly to double, when BOE is used in LCMS and , NA=0.85.     

低散斑环形光束整形器件的设计及实验

提出一种可有效抑制散斑噪声的衍射元件设计方法.在传统Gerchberg-Saxton算法的基础上,通过选择一种特殊的初始相位,在不降低衍射效率的同时,有效提升光斑的均匀性.以将高斯光束整形成环形平顶光束为例,开展了数值仿真和光学实验.结果表明,利用该方法和传统Gerchberg-Saxton算法设计得到的环形平顶光束散斑对比度分别为11%和34%,验证了该方法可以获得低散斑噪声的环形平顶光束.     

三环位相型光瞳滤波器的横向超分辨与轴向焦深扩展

用矢量衍射方法分析了线偏振光入射到带有三环位相型光瞳滤波器的高数值孔径物镜时,焦点的轴向和横向光强分布.数值模拟结果表明,高数值孔径物镜聚焦时需同时考虑光强的轴向和横向分布.通过加入三环位相光瞳滤波器,在实现横向超分辨的同时实现了光学系统轴向焦深扩展和轴向光强分布平坦化,并且位相调制深度变化时,会出现轴向焦移现象.对三环位相光瞳滤波器结构进行了优化,得出了优化结果. 关键词： 光学超分辨 扩展焦深 位相型光瞳滤波器 矢量衍射方法     

Different optical properties in different periodic slot cavity geometrical morphologies

In this paper,optical properties of two-dimensional periodic annular slot cavity arrays in hexagonal close-packing on a silica substrate are theoretically characterized by finite difference time domain(FDTD) simulation method.By simulating reflectance spectra,electric field distribution,and charge distribution,we confirm that multiple cylindrical surface plasmon resonances can be excited in annular inclined slot cavities by linearly polarized light,in which the four reflectance dips are attributed to Fabry–Perot cavity resonances in the coaxial cavity.A coaxial waveguide mode TE11 will exist in these annular cavities,and the wavelengths of these reflectance dips are effectively tailored by changing the geometrical pattern of slot cavity and the dielectric materials filled in the cavities.These resonant wavelengths are localized in annular cavities with large electric field enhancement and dissipate gradually due to metal loss.The formation of an absorption peak can be explained from the aspect of phase matching conditions.We observed that the proposed structure can be tuned over the broad spectral range of 600–4000 nm by changing the outer and inner radii of the annular gaps,gap surface topography.Meanwhile,different lengths of the cavity may cause the shift of resonance dips.Also,we study the field enhancement at different vertical locations of the slit.In addition,dielectric materials filling in the annular gaps will result in a shift of the resonance wavelengths,which make the annular cavities good candidates for refractive index sensors.The refractive index sensitivity of annular cavities can also be tuned by the geometry size and the media around the cavity.Annular cavities with novel applications can be implied as surface enhanced Raman spectra substrates,refractive index sensors,nano-lasers,and optical trappers.     

ADF STEM imaging of screw dislocations viewed end-on

This paper presents annular dark-field scanning transmission electron microscope image simulations of a screw dislocation viewed end-on in a thin single crystal of Mo, taking into account surface relaxation (the Eshelby twist). The image contrast can be understood in terms of the effects of the displacements normal to the dislocation arising from the Eshelby twist on the channelling behaviour and interband scattering of the incident beam. With the beam focussed at the entrance surface, the image peak positions reflect the positions of the atoms at the entrance surface. For atomic columns at distances from the core less than the foil thickness, the image peak positions are predicted to lie between the perfect crystal and actual surface atom positions. The predicted intensity distribution of the image is qualitatively similar to that of a published experimental image of a screw dislocation in GaN [Phys. Rev. Lett. 91 (2003) p. 165501]. An assessment is made of the possibility of imaging core displacements by focussing near the foil centre, where surface relaxation effects should be minimised.     

环形定子的激光致表面波机理及可视化探测研究

开展了用于新型激光驱动马达的环形定子的激光致表面波机理及实验研究. 提出一种带有凹槽阵列结构的环形定子新设计, 建立了激光在环形定子表面激发表面波的物理模型, 揭示了影响表面波幅值的关键因素; 采用一种新颖的激光致表面波可视化探测方法, 在波长1053 nm, 脉宽30 ns, 单脉冲能量1 mJ的激光激发下, 对表面波在铜质环形定子表面的传播特性进行了可视化探测实验. 理论与实验研究表明: 当激发光斑的位置紧邻凹槽阵列时, 沿着圆环向凹槽方向传播的表面波会被齿状凹槽阵列迅速衰减和吸收, 而沿着圆环向远离凹槽方向传播的表面波能够持续传递, 从而首次实现了激光致表面波在环形定子上的单向传播; 而对没有凹槽阵列结构的圆环进行的对比实验表明, 激光致表面波在圆环表面双向传播, 最终因相互混叠和串扰等而处于混乱状态. 由激光在该种环形定子表面激发出的单向表面波, 可望在光致表面波马达及驱动机构中获得应用. 关键词： 激光致表面波 环形定子 表面波可视化 激光驱动