分子束外延生长过程中GaAs(001)表面铝液滴的扩散成核过程

量子点的性质主要由其密度及尺寸参数控制,而原子在衬底上的成核运动又决定了量子点的密度、直径、高度等参数,因此研究原子的扩散成核过程对自组装制备量子点具有重要意义.本文通过分子束外延生长技术研究了GaAs(001)表面金属铝液滴的成核过程,发现衬底温度和金属铝沉积速率的变化直接影响了液滴的尺寸、密度以及形状等特征.根据经...     

基于液滴外延法的Al(In)纳米结构在GaAs(001)的形成机制

采用液滴外延法在GaAs(001)衬底上同时沉积In、Al液滴形成纳米结构,利用原子力显微镜(AFM)对实验样品进行形貌表征,并通过X射线光电子能谱(XPS)与扫描电子显微镜分析In、Al组分比样品表面元素分布。实验结果显示,混合沉积后的表面InAlAs纳米结构密度随着In组分的降低而降低,而单个纳米结构的尺寸变大。SEM与XPS测试结果证明表面的In并没有因为衬底温度过高而全部偏析。根据实验结果推测,In&Al液滴同时沉积到表面形成InAl混合液滴。当液滴完全晶化后纳米结构中心出现孔洞,而产生这一现象的主要原因是液滴向下刻蚀。     

Al液滴在GaAs表面的熟化行为研究

为探究Al液滴在GaAs表面的熟化行为,利用液滴外延法在GaAs衬底表面制备Al液滴。在零As压环境下,通过控制退火时间有效控制Al液滴的生长、成核。结合热力学原理和晶体生长理论对样品形貌变化现象进行物理解释,构建出液滴形貌变化过程中熟化、刻蚀和扩散行为的基本模型。理论计算表明,液滴在熟化行为达到退火239 s的平衡点后,被向下刻蚀和向外扩散两个行为同时消耗。     

Cu(In,Ga)Se2薄膜太阳电池二极管特性的研究

本文采用线性拟合光态和暗态J-V(电流-电压)曲线的方法计算了不同效率的Cu(In,Ga)Se2(CIGS)薄膜太阳电池的二极管性能参数.在一定范围内,CIGS薄膜电池的二极管品质因子A和反向饱和电流J0值越小,电池的转换效率越高,这说明CIGS电池的复合主要发生在PN结区内.量子效率分析表明,不同效率的CIGS电池在短波区(λ<520 nm)的光谱响应相差不大,而在长波区(520～1100 nm),低效率电池存在很大的吸收,这是由低质量的CIGS吸收层造成的.这进一步验证了光-暗态J-V曲线的分析结果,即高质量的吸收层是制备CIGS电池的关键.     

利用Al/AlAs中间层调控GaAs在Si(111)上外延生长的研究

为了实现Ⅲ-V器件在硅基平台上单片集成,近年来Ⅲ-V半导体在硅衬底上的异质外延得到了广泛研究。由于Ⅲ-V半导体与Si之间大的晶格失配以及晶格结构不同,在Si上生长的Ⅲ-V半导体中存在较多的失配位错及反相畴,对器件性能造成严重影响。而Si(111)表面的双原子台阶可以避免Ⅲ-V异质外延过程中形成反相畴。本文利用分子束外延技术通过Al/AlAs作为中间层首次在Si(111)衬底上外延生长了GaAs(111)薄膜。通过一系列对比实验验证了Al/AlAs中间层的插入对GaAs薄膜质量的调控作用,并在此基础上通过低温-高温两步法优化了GaAs的生长条件。结果表明Al/AlAs插层可以为GaAs外延生长提供模板,并在一定程度上释放GaAs与Si之间的失配应力,从而使GaAs薄膜的晶体质量得到提高。以上工作为Ⅲ-V半导体在硅上的生长提供了新思路。     

SiH4在Si(001)-(2×1)表面吸附的第一性原理研究

用第一性原理密度泛函理论研究SiH4在Si(001)-(2×1)表面的分裂吸附及吸附后的结构、能量和成键特性,计算了反应物、过渡态及生成物三个状态的能量,吸附能和反应能.计算结果表明:SiH4在Si(001)-(2×1)重构表面吸附的可能反应路径是由于SiH4中Si-H键的拉长和二聚体键的断裂导致的,形成产物Si(001)-(2×1)(SiH3:H);由SiH4分裂的能量势垒0.78 eV说明所推测的反应路径是合理的.     

单粒子在金刚石(001)表面吸附与迁移的第一性原理计算

为了探究纳米金刚石复合薄膜中界面相粒子的微观行为,采用第一性原理方法计算了碳、硅单粒子在清洁金刚石(001)表面的吸附作用与迁移行为.包括C、Si粒子在金刚石(001)面四个高对称位置的构型总能和吸附能以及其在金刚石(001)表面的迁移激活能.结果表明:最稳定的构型是沿(001)生长方向沉积粒子与表面层两粒子相接,且C、Si粒子迁移激活能分别为2.824 eV、0.475 eV.两激活能的差异表明:添加Si能显著促进碳粒子的扩散并形成更加致密的纳米金刚石复合薄膜.     

Ti/Au复合电极在CdZnTe(111)B面上的表面结构与性能研究

近年来,碲锌镉(CdZnTe)材料制成的探测器已经成为研究热点,适当的接触特性已经成为提高探测器性能的关键问题。本文主要探讨了弱n型CdZnTe晶体(111)B面Ti/Au复合电极的欧姆接触性能,采用两步沉积工艺制备Ti/Au复合电极。通过AFM、FIB/TEM、XPS、I-V等测试方法研究了电极与CdZnTe的界面结构、化学成分和电学性能。结果表明,Ti过渡层的引入可以减轻和改善晶片抛光过程中形成的损伤层,增加了电极与晶体之间的欧姆特性。相比于CdZnTe (111)B面上的Cr/Au复合电极,Ti/Au复合电极的粗糙度更低、接触界面更平整,晶格失配层厚度也更低。Ti中间层促进了金/半界面的互扩散现象, 有利于增加黏附性和降低肖特基势垒,并且在Ti/Au复合电极与CdZnTe接触的界面上没有观察到氧元素的存在。I-V测试表明Ti/Au复合电极具有更加良好的欧姆特性和更低的肖特基势垒。     

Difference of anisotropic structures of InAs/GaAs quantum dots between organometallic vapor-phase epitaxy and molecular beam epitaxy

The anisotropies of the baseline in and [1 1 0] of InAs quantum dots (QDs) fabricated by molecular beam epitaxy (MBE) and organometallic vapor-phase epitaxy (OMVPE) are investigated. The structural and optical difference between QDs by MBE and OMVPE are investigated through an atomic force microscopy, a transmission electron microscopy, and a photoluminescence polarization measurement. It is found that the InAs QD structural anisotropy in MBE agrees with the individual growth rate anisotropy. Moreover, it is found that the mixture of the different structural anisotropies is unique in OMVPE at low growth temperature (440°C) and the growth mode is complex. From the photoluminescence polarization measurement, the InAs QD structures which mainly contribute to the optical property are decided by the plus and minus of the polarization degree of the ground state, and it is shown that the baseline anisotropy of the QDs mainly agrees with the growth rate anisotropy.     

Large area lateral overgrowth of mismatched InGaP on GaAs(111)B substrates

Application of InGaAs/InGaP double‐heterostructure (DH) lasers increases the band offset between the cladding layer and the active layer more than the use of conventional 1.3 µm InGaAsP/InP lasers. As a first step in realizing 1.3 µm InGaP/InGaAs/InGaP DH lasers, we proposed InGaP lattice‐mismatched epitaxial lateral overgrowth (ELO) technique and successfully carried out the InGaP growth on both GaAs (100), (111)B and InP (100) substrates by liquid phase epitaxy. In this work, we grew the InGaP crystal on GaAs (111)B substrate by adjusting Ga and P composition in In solution, to obtain In_0.79Ga_0.21P (λ = 820 nm) virtual substrate for 1.3 µm InGaAs/InGaP DH lasers. To grow the InGaP all over the lateral surface of the substrate, the growth time was extended to 6 hours. The amount of InGaP lateral growth up to 2 hours was gradually increased, but the lateral growth was saturated. The InGaP lateral width was about 250 µm at the growth time of 6 hours. We report the result that optical microscope observation, CL and X‐ray rocking curve measurements and reciprocal lattice space mapping were carried out to evaluate the crystal quality of the grown InGaP layers. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

热注入法合成PbX(X=S,Se)量子点的结构和性能研究

采用热注入的方法在空气氛围中合成PbX(X=S,Se)量子点,液体石蜡和磷酸三丁酯(TBP)作为不同的溶剂优化PbSe量子点的合成;使用六甲基二硅硫烷(TMS)作为硫源合成了第一激子吸收峰在900 ～ 1500 nm分布的PbS量子点.通过透射电镜(TEM)、X射线衍射(XRD)和吸收光谱等测试手段对合成的物质进行成分与光学性能分析表征,对比研究了Ⅳ-Ⅵ族化合物量子点在成核过程中的差异.结果表明在相同的实验条件下PbS量子点的反应条件相对温和,量子限域效应明显;而PbSe量子点的合成对环境的要求更加严苛,反应温度更高,量子点的尺寸分布更宽.     

应变对Mo2C(001)表面电子结构及光学性质的影响

采用第一性原理方法研究应变对Mo₂C(001)表面电子结构及光学性质的影响。研究表明,在应变作用下Mo₂C(001)表面均为间接带隙半导体,带隙随着压应变和拉应变的增加而减小。当应变为-20%时,Mo₂C(001)表面由间接带隙半导体转变为金属性质。当应变为-20%、-15%、-10%、-5%、0%、5%、10%、15%、20%时,其带隙分别为0 eV、0.162 eV、0.376 eV、0.574 eV、0.696 eV、0.708 eV、0.604 eV、0.437 eV、0.309 eV。带隙变化的原因主要是Mo 4p、4d、5s态电子和C 3p态电子对应变敏感,在应变作用下受激发,活性增强导致价带顶在布里渊区G、A、L、M点之间变化,导带底在K、H点之间变化;当应变由-15%逐渐变化到20%时,吸收谱的第一峰逐渐减弱,并且第一峰对应的光电子能量减小,吸收带边向低能方向移动,表明光吸收随着压应变增大而增加,吸收带边随着拉应变增加向低能方向移动。其他光学性质表现出类似的变化规律,光学性质计算结果表明应变能够有效调节光吸收特性,增强光学利用率,研究结果为Mo₂C(001)作为新型光电子材料的应用提供理论支撑。     

Growth kinetics on the (100) and (001) faces of TGS crystals

The growth kinetics and mechanisms on the (001) and (100) faces of TGS crystals were investigated. A phase contrast microscope with a CCD camera was used to observe the growth of the crystal. We found the growth on the (001) and (100) faces at high supersaturation was mainly controlled by a BCF surface diffusion mechanism. The kinetic data for the (100) face were also fitted by the nucleation and layer growth model of two-dimension nucleation at high supersaturation. Some important growth parameters for TGS crystals, such as edge energy, activation energy, and so on, were estimated.     

采用MOCVD方法在GaAs衬底上生长ZnO(002)和ZnO(100)薄膜

采用金属有机化学汽相沉积生长法（MOCVD）,在不同的衬底表面处理条件和生长温度下,在GaAs衬底上生长出了ZnO薄膜。随着化学腐蚀条件的不同,可生长出优先定位不同的ZnO（100）和ZnO（002）薄膜。该薄膜的晶体结构特性是由X光衍射谱仪（XRD）所获得的,而其光学特性是由光荧光谱仪（PL）来测的。与ZnO（002）相比,ZnO（100）薄膜具有更优越的晶体结构特性,并且在同样的生长温度下都具有相似的光学特性。对于腐蚀条件不同的GaAs衬底所进行的XPS分析结果表明,ZnO薄膜优先定位变化的主要原因在于腐蚀过程中形成的富As层。     

Growth of InAs on GaAs(1 0 0) by low-pressure metalorganic chemical vapor deposition employing in situ generated arsine radicals

InAs was grown by low-pressure metalorganic chemical vapor deposition on vicinal GaAs(1 0 0) substrates misoriented by 2° toward [0 0 1]. We observed InAs crystal growth, at substrate temperatures down to 300°C, employing in situ plasma-generated arsine radicals as the arsenic source. The in situ generated arsine was produced by placing solid arsenic downstream of a microwave driven hydrogen plasma. Trimethylindium (TMIn) feedstock carried by hydrogen gas was used as the indium source. The Arrhenius plot of InAs growth rate vs. reciprocal substrate temperature displayed an activation energy of 46.1 kcal/mol in the temperature range of 300–350°C. This measured activation energy value is very close to the energy necessary to remove the first methyl radical from the TMIn molecule, which has never been reported in prior InAs growth to the best of authors’ knowledge. The film growth mechanism is discussed. The crystallinity, infrared spectrum, electrical properties and impurity levels of grown InAs are also presented.