Plasmonic sensors based on thick metal film perforated with rectangular nanohole arrays

The dependence of optical properties on the ambient medium, the period of nanohole arrays and the metal film thickness in a thick silver film perforated with rectangular nanohole arrays is investigated using the finite‐difference time‐domain technique. As a result of the coupling between top and down surface plasmon polaritons, mediated by localized surface plasmon resonances supported by the metallic rectangular nano‐ holes, interesting light phenomena are observed for varying thickness of the metal film and period of the rectangular nanohole arrays. Based on the dependence of the optical properties on the ambient medium, the possibility of exploiting thick metal rectangular nanohole arrays as plasmonic sensors is further discussed, the potential application as plasmonic sensors is revealed. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

The surface plasmon resonance of metal-film nanohole arrays

In this paper we investigated the enhanced transmission and surface plasmon resonance through a thin gold film with a periodic array of subwavelength nanoholes. Both freestanding gold-film nanohole arrays and gold-film nanohole arrays deposited on a gallium arsenide (GaAs) substrate are considered. Periodic arrays of nanoholes exhibit two different surface plasmon resonance features: localized waveguide resonance and the well-recognized photonic crystal resonance. The tangential electric field component $Ey$ is nonzero only in the hole region for a freestanding gold-film nanohole array, but it can exist in the hole region and in the metallic region for a gold-film nanohole array deposited on a GaAs substrate.     

Microscopic origin of surface-plasmon radiation in plasmonic band-gap nanostructures

We report spatial domain measurements of the damping of surface-plasmon excitations in metal films with periodic nanohole arrays. The measurements reveal a short coherent propagation length of a few microm inside nanohole arrays, consistent with delays of about 10 fs in ultrafast transmission experiments. This implies that the transmission spectra of the entire plasmonic band-gap structure are homogeneously broadened by radiative damping of surface-plasmon excitations. We show that a Rayleigh-like scattering of surface plasmons by the periodic hole array is the microscopic origin of this damping, allowing the reradiation rate to be controlled.     

基于直接胶体晶体刻蚀技术的高度有序纳米硅阵列的尺寸及形貌控制

以自组装单层胶体小球阵列为掩模，采用直接胶体晶体刻蚀技术在硅表面制备二维有序尺寸可控的纳米结构.在样品制备过程中，首先通过自组装法在硅表面制备了直径200nm的单层聚苯乙烯(PS)胶体小球的二维有序阵列；然后对样品直接进行反应离子刻蚀(RIE)，以氧气为气源，利用氧等离子体对聚苯乙烯小球和对硅的选择性刻蚀作用，通过改变刻蚀时间，制备出不同尺寸的PS胶体小球的有序单层阵列；接着以此二维PS胶体单层膜为掩模，以四氟化碳为气源对样品进行刻蚀；最后去除胶体球后得到二维有序的硅柱阵列.SEM和AFM的测量结果表明：改变氧等离子体对胶体球的刻蚀时间和四氟化碳对硅的刻蚀时间，可以控制硅柱的尺寸以及形貌，而硅柱阵列的周期取决于原始胶体球的直径. 关键词： 胶体晶体刻蚀 纳米硅柱阵列     

Enhanced optical absorption in nanopatterned silicon thin films with a nano-cone-hole structure for photovoltaic applications

In this paper, the optical properties of the silicon nano-cone-hole (NCH) structure array are studied. The ultimate efficiency of the optimized NCH array is enhanced by 23.11% compared to an optimized nanohole array of the same thickness. The absorptance enhancement of the NCH arrays is attributed to its lowered reflectance, more supported resonant modes, and enhanced mode interaction. The angular dependence of ultimate efficiency is also investigated.     

基于纳米孔阵列增透膜的光伏器件特性分析及实验研究

利用严格耦合波理论分析了纳米孔阵列薄膜的光学特性,提出将纳米孔阵列薄膜作为光伏器件 增透膜来提高器件的光吸收和转换效率.理论分析表明:纳米孔阵列薄膜比单层增透膜有更好的增透效果, 能够更好地提高光伏器件的转换效率,在400 nm-600 nm波段尤为显著.纳米孔阵列薄膜的最优结构参数: 周期为500 nm,填充率为0.2,厚度为110 nm.采用微纳加工技术,在Φ 200 μm Si 探测器的增透膜上制作了不同周期的纳米孔阵列,并搭建了相应的测试系统.实验结果表明: 周期为500 nm时器件的性能提高最为明显,短路电流在400 nm-1100 nm波段提高约为6%, 在400 nm-600 nm波段提高约为15%;开路电压提高约为2%.纳米孔阵列薄膜能够很好地提高光伏器件 的转换效率.     

Surface acoustic waves in the GHz range generated by periodically patterned metallic stripes illuminated by an ultrashort laser pulse.

The photoelastic response of periodic arrays of stripes attached to the surface of a substrate and illuminated by an ultrashort laser pulse were investigated. The samples were gold arrays on silicon and aluminum arrays either on crystalline quartz or on silicon. The metallic stripes had submicrometer lateral dimensions and the spatial periods ranged from about 1 microm up to 5 microm. The substrate being transparent (quartz) or slightly absorbing (silicon) at the laser wavelength (lambda = 750 nm), a laterally modulated thermal stress is generated near the surface of the substrate when a light pulse illuminates the structure. The studies of vibrations involved by the subsequent relaxation processes show that surface acoustic waves at frequency as high as about 5 GHz are excited with the samples consisting of aluminum stripes. In the case of the aluminum samples with the largest lateral spatial periods (aluminum on quartz), the surface acoustic wave propagates outside the illuminated area. In the case of the gold samples, a normal mode of individual bars is observed instead. Experimental evidence shows that these behaviors are mainly governed both by the lateral spatial period of the structure and by the density of the metal.     

One-dimensional photonic crystal fabricated by the photochemical etching of silicon

The formation of periodic wall arrays on an n-type (100) Si substrate with V-shaped seed grooves on the surface was investigated. The influence of silicon sidewall roughness on the optical properties of onedimensional (1D) of photonic crystals obtained on the basis of the arrays was studied. The reflection spectra of the 1D photonic crystals exhibit a high modulation level of up to 95% and photonic band gaps of a high order that are in good agreement with calculations over a wide spectral range (1.5—15 μm).     

Conversion efficiency enhanced photovoltaic device with nanohole arrays in antireflection coating layer

In this paper, the authors introduce an enhanced photovoltaic device with nanohole arrays only in its antireflection coating. These nanoholes can improve light trapping efficiency as well as photoelectric conversion efficiency of the device. The authors analyze the light absorption of the devices with nanohole arrays by Finite-Difference Time Domain method and calculate the photoelectric conversion efficiency. The results show that the nanohole arrays can improve the light trapping more efficiently than the Si₃N₄ antireflection coating, especially, in 400-600 nm spectral range. Nanohole arrays with different characteristic parameters were fabricated in the antireflection coating layer of a Φ200 μm Si detector by using focused-ion beam system. With the optimized nanohole arrays, the enhancements factor of the experimental sample's photoelectric conversion efficiency is ~ 16% within the 400-600 nm spectral range and ~ 10% within the 400-1100 nm spectral range.     

Fano-type interference in the point-spread function of nanohole arrays

Measurement of the point-spread function of metal nanohole arrays by using microscopic imaging reveals two contributions. The first of these is due to propagating resonant surface plasmons and the second to nonresonant transmission through the holes. We observe a Fano-type interference between these contributions.     

Nanostructuring Si surface and Si/SiO2 interface using porous-alumina-on-Si template technology. Electrical characterization of Si/SiO2 interface

In this work, anodic porous alumina thin films with pores in the nanometer range are grown on silicon by electrochemistry and are used as masking material for the nanopatterning of the silicon substrate. The pore diameter and density are controlled by the electrochemical process. Through the pores of the alumina film chemical oxidation of the silicon substrate is performed, leading to the formation of regular arrays of well-separated stoichiometric silicon dioxide nanodots on silicon, with a density following the alumina pores density and a diameter adjustable by adjusting the chemical oxidation time. The alumina film is dissolved chemically after the SiO₂ nanodots growth, revealing the arrays of silicon dioxide dots on silicon. In a next step, the nanodots are also removed, leaving a nanopatterned bare silicon surface with regular arrays of nanopits at the footprint of each nanodot. This silicon surface structuring finds interesting applications in nanoelectronics. One such application is in silicon nanocrystals memories, where the structuring of the oxidized silicon surface leads to the growth of discrete silicon nanocrystals of uniform size. In this work, we examine the electrical quality of the Si/SiO₂ interface of a nanostructured oxidized silicon surface fabricated as above and we find that it is appropriate for electronic applications (an interface trap density below 1–3×10¹⁰ eV⁻¹ cm⁻² is obtained, indicative of the high quality of the thermal silicon oxide).     

Fabrication and characterization of polycrystalline silicon nanowires with silver-assistance by electroless deposition

Single crystal silicon wafers are widely used as the precursors to prepare silicon nanowires by employing a silver-assisted chemical etching process. In this work, we prepared polycrystalline silicon nanowire arrays by using solar-grade multicrystalline silicon wafers. The chemical composition and bonding on the surface of silicon nanowire arrays were characterized by Fourier Transform Infrared spectroscope, and X-ray photoelectron spectroscope. The photoluminescence spectra of silicon nanowires show red light emissions centered around 700 nm. Due to the passivation effect of Si dangling bonds by concentrated HNO₃ aqueous solution, the photoluminescence intensities are improved by 2 times. The influences of surface chemical states on the wettability of silicon nanowire arrays were also studied. We obtained a superhydrophobic surface on the as-etched silicon nanowire arrays without surface modification with any organic low-surface-energy materials, and realized the evolution from superhydrophobicity to superhydrophilicity via surface modifications with HNO₃ solutions.     

Polarization tomography of metallic nanohole arrays

We report polarization tomography experiments on metallic nanohole arrays with square and hexagonal symmetry. As a main result we find that a fully polarized input beam is partly depolarized after transmission through a nanohole array. This loss of polarization coherence is found to be anisotropic; i.e., it depends on the polarization state of the input beam. The depolarization is ascribed to a combination of two factors: (i) the nonlocal response of the array as a result of surface-plasmon propagation and (ii) the non-plane-wave nature of a practical input beam.     

Aluminium nanohole arrays enhanced resonance Raman scattering spectra in the near ultraviolet region

Aluminium nanohole arrays with fixed diameter were fabricated by focused ion beam and the periodicities were turned.Aluminium nanohole arrays enhanced resonance Raman scattering spectra in the near ultraviolet region were studied experimentally and theoretically,which revealed that the SERRS enhancement factor was as high as 6 orders.     

Phase change associated with resonant surface plasmon polariton-assisted transmission in nanohole arrays

We report FDTD simulation results demonstrating that the optical phase change of surface plasmon polariton-assisted transmission through nanohole arrays in a metal film undergoes a sharp change under resonant conditions. The phenomenon can be explained by various resonant modes between the nanoholes. We further explore the possibility of using this effect for phase-sensitive surface plasmon resonance biosensing applications.     

一种简单高效的制备硅纳米孔阵结构的方法

本文介绍了一种简单高效的制备硅纳米孔阵结构的方法. 利用激光干涉光刻技术, 结合干法和湿法刻蚀工艺, 直接将光刻胶点阵刻蚀为硅纳米孔阵结构, 省去了图形反转工艺中的金属蒸镀和光刻胶剥离等必要步骤, 在2英寸的硅 (001) 衬底上制备了高度有序的二维纳米孔阵结构. 利用干法刻蚀产生的氟碳有机聚合物作为湿法刻蚀的掩膜, 以及在干法刻蚀时对样品进行轻微的过刻蚀, 使SiO₂点阵图形下形成一层很薄的硅台面, 是本方法的两个关键工艺步骤. 扫描电子显微镜图片结果表明制备的孔阵图形大小均匀, 尺寸可控, 孔阵周期为450 nm, 方孔大小为200–280 nm. 关键词： 激光干涉光刻 纳米阵列 刻蚀 氟碳有机聚合物     

Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography

We present a fabrication procedure that can form large-scale periodic silicon nanopillar arrays for 2D nanomold which determines the feature size of nanoimprint lithography, using modified nanosphere lithography. The size of silicon nanopillars can be easily controlled by an etching and oxidation process. The period and density of nanopillar arrays are determined by the initial diameter of polystyrene (PS) spheres. In our experiment, the smallest nanopillar has a full width half maximum (FWHM) of approximately 50 nm, and the density of silicon pillar is ∼10⁹/cm². Using this approach, it is possible to fabricate 2D nanoimprint lithography mask with 50 nm resolution.     

Ultrafast response of surface electromagnetic waves in an aluminum film perforated with subwavelength hole arrays

The ultrafast dynamics of surface electromagnetic waves photogenerated on aluminum film perforated with subwavelength arrays of holes was studied in the visible spectral range by the technique of transient photomodulation with approximately 100 fs time resolution. We observed a pronounced blueshift of the resonant transmission band that reveals the important role of plasma attenuation in the optical response of nanohole arrays. The blueshift is inconsistent with plasmonic mechanism of extraordinary transmission and points to the crucial role of interference in the formation of transmission bands. The transient photomodulation spectra were successfully modeled within the Boltzmann equation approach for the electron-phonon relaxation dynamics, involving nonequilibrium hot electrons and quasiequilibrium phonons.     

Optimizing the resolution of nanohole arrays in metal films for refractive-index sensing

We optimized the resolution of nanohole arrays in metal films for refractive-index sensing by increasing the sensitivity with modifications to the hole-array parameters and by increasing the signal to noise ratio of the sensor system. The nanohole-array parameters (including film thickness, periodicity and diameter) were first optimized by finite-difference time-domain simulations, and then the arrays were fabricated and tested, showing good agreement between the two cases (theory and experiment) in terms of optimal parameters. To improve the sensitivity and to reduce the noise, the laser source wavelength was optimized (including the efficiency of the camera for detection) and the intensity was increased. A?bulk resolution of 6×10^?7 refractive-index units was demonstrated. Due to the collinear microscope geometry and potential for multiplexing of nanohole arrays, these results are encouraging for future biosensing applications.     

Strong polarization in the optical transmission through elliptical nanohole arrays

Strong polarization dependence is observed in the optical transmission through nanohole arrays in metals. It is shown that the degree of polarization is determined by the ellipticity and orientation of the holes; the polarization axis lies perpendicular to the broad edge of the ellipse. Furthermore, the depolarization ratio shows a squared dependence on the aspect ratio of the holes, which is discussed in terms of coupling into and out of the surface plasmon modes. The observed results will be useful for tailoring the polarization behavior of metallic nanophotonic elements in many applications, including surface plasmon enhanced optical sensing and ultrafast optical switching.