Preparation and characterization of ZnO-TiO2 films obtained by sol-gel method

The sol-gel route has been applied to obtain ZnO-TiO₂ thin films. For comparison, pure TiO₂ and ZnO films are also prepared from the corresponding solutions. The films are deposited by a spin-coated method on silicon and glass substrates. Their structural and vibrational properties have been studied as a function of the annealing temperatures (400-750 °C). Pure ZnO films crystallize in a wurtzite modification at a relatively low temperature of 400 °C, whereas the mixed oxide films show predominantly amorphous structure at this temperature. XRD analysis shows that by increasing the annealing temperatures, the sol-gel Zn/Ti oxide films reveal a certain degree of crystallization and their structures are found to be mixtures of wurtzite ZnO, Zn₂TiO₄, anatase TiO₂ and amorphous fraction. The XRD analysis presumes that Zn₂TiO₄ becomes a favored phase at the highest annealing temperature of 750 °C. The obtained thin films are uniform with no visual defects. The optical properties of ZnO-TiO₂ films have been compared with those of single component films (ZnO and TiO₂). The mixed oxide films present a high transparency with a slight decrease by increasing the annealing temperature.     

Grain boundary defects induced room temperature ferromagnetism in V doped ZnO thin films

Vanadium (V) doped ZnO thin films (Zn_1‐xV_x O, where x = 0, 0.05, 0.10) have been grown on sapphire substrates by RF magnetron sputtering to realize room temperature ferromagnetism (RTFM). The grown films have been subjected to X‐ray diffraction (XRD), resonant Raman scattering, photoluminescence (PL) and vibrating sample magnetometer (VSM) measurements to investigate their structural, optical and magnetic properties, respectively. The full width at half maximum of XRD and Raman scattering peaks increases with V ion concentration indicates that the V ions have been substituted on Zn²⁺ ions in the ZnO matrix. The increase in oxygen vacancies with V concentration is evidenced by PL measurements. Rutherford backscattering spectrometry analysis confirms the presence of the V ions in the films. The room temperature VSM measurements reveal the signature of ferromagnetism in V doped ZnO thin films. It has been observed that the grain boundary defects, i.e., oxygen vacancies play a crucial role in inducing RTFM in V doped ZnO films. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

The influences of O/Zn ratio and growth temperature on carbon impurity incorporation in ZnO grown by metal-organic chemical vapor deposition

The strong correlations between the O/Zn ratio and carbon impurity incorporation have been observed on the ZnO films grown using N₂O or O₂ as oxygen source in metal-organic chemical vapor deposition (MOCVD). From in-situ mass spectrometric measurements, the O/Zn ratio in the MOCVD reactor is found to decrease to a minimum value as the growth temperature increased till a critical growth temperature T_c, and then increased above T_c due to different dissociation rates of the oxygen and Zn sources. The strongest D and G modes, which are ascribed to carbon clusters sp² related modes, have been observed in Raman scattering spectroscopy for the ZnO samples grown at T_c, indicating the highest incorporation rate of carbon impurity in the samples grown at T_c. Compared with O₂, N₂O has a low dissociation rate and that leads to a lower value of O/Zn ratio, resulting in much stronger D and G modes and higher incorporation rate of carbon impurities in the samples grown at T_c. It is interesting to note that the lowest specific resistances from Hall effect measurements were also obtained on the samples grown at T_c, indicating possible electrical contributions from the formation of carbon clusters, which should be highly conductive regions in ZnO. Furthermore, ionization or addition of H₂ in the case of N₂O can significantly enhance the dissociation of N₂O, with film quality improved significantly. This study shows that a high O/Zn ratio is critical to suppress carbon impurity incorporation and to grow high quality ZnO by MOCVD, especially at low growth temperature.     

Effect of substrate temperature on the room-temperature ferromagnetism of Cu-doped ZnO films

Wurtzite structure ZnO films doped with ~2 at% Cu were deposited at substrate temperatures (T_s) from 350 to 600 °C by helicon magnetron sputtering. All the films exhibited room-temperature (RT) ferromagnetism (FM) and the maximum saturation magnetization (M_s) was 1.2 emu/cm³ (~0.15 μ_B/Cu). Cu ions were mainly in a divalent state as identified by X-ray photoelectron spectroscopy. FM tended to increase with decreasing T_s, and vacuum annealing enhanced the M_s. These results suggested that oxygen vacancies and/or zinc interstitials might contribute to the ferromagnetic performance. Thus, the observed FM was explained in terms of the defect related mechanism.     

Structural and morphological studies on Mn substituted ZnO nanometer‐sized crystals

Mn substituted ZnO nanocrystals synthesized by a co‐precipitation method. X‐ray diffraction (XRD) studies confirms the presence of wurtzite (hexagonal) crystal structure similar to un doped ZnO, suggesting that doped Mn ions go at the regular Zn sites. The lattice parameters a and c are increasing with increasing Mn content. The unit cell volume increases with increasing Mn concentration, indicating the homogeneous substitution of Mn²⁺ for the Zn²⁺. The lattice distortion parameter (ε_v) is evaluated from XRD data and found that it enhances as Mn content increases. Transmission electron microscopy photographs show that the size of the ZnO crystals is in the range of 20‐50 nm. The SAED pattern confirms the hexagonal and crystalline nature of the samples which are in agreement with X‐ray analysis. The chemical groups of the samples have been identified by FTIR studies (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Effect of rapid thermal annealing on Zn1‐xCdxO layers grown by radio‐frequency magnetron co‐sputtering

Zn_1‐xCd_xO layers were deposited on the sapphire substrate using the radio‐frequency magnetron co‐sputtering system. The grown Zn_1‐xCd_xO layers were carried out in the post‐annealing treatment for 1 min at the 800 °C oxygen‐ambient by the rapid thermal annealing (RTA) method. X‐ray diffraction (XRD) experiment shows that the Zn_1‐xCd_xO layers are changed from the single phase of the hexagonal structure at 0≤x ≤0.08 to the double phase of hexagonal‐and‐cubic structure at x =0.13. Thus, the maximum Cd‐composition ratio with the hexagonal structure was found out to be x =0.08. Also, the crystallinity of Zn_1‐xCd_xO layers at x =0.13 was remarkably improved by the RTA annealing treatment. This crystal quality improvement was thought to be associated with the relaxation of the compressive strain remaining in the Zn_1‐xCd_xO layers. Therefore, the results of XRD and transmittance lead that the crystal quality of the Zn_1‐xCd_xO layers forming the hexagonal ZnO phase is better than that forming the cubic CdO phase. Consequently, the reliable formation and the crystallinity of the Zn_1‐xCd_xO layers were achieved by using the RTA method of short‐time thermal‐annealing at the high temperature. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Fabrication and characterization of transparent conductive ZnO:Al thin films prepared by direct current magnetron sputtering with highly conductive ZnO(ZnAl2O4) ceramic target

Using a highly conductive ZnO(ZnAl₂O₄) ceramic target, c-axis-oriented transparent conductive ZnO:Al₂O₃ (ZAO) thin films were prepared on glass sheet substrates by direct current planar magnetron sputtering. The structural, electrical and optical properties of the films (deposited at different temperatures and annealed at 400°C in vacuum) were characterized with several techniques. The experimental results show that the electrical resistivity of films deposited at 320°C is 2.67×10⁻⁴ Ω cm and can be further reduced to as low as 1.5×10⁻⁴ Ω cm by annealing at 400°C for 2 h in a vacuum pressure of 10⁻⁵ Torr. ZAO thin films deposited at room temperature have flaky crystallites with an average grain size of ∼100 nm; however those deposited at 320°C have tetrahedron grains with an average grain size of ∼150 nm. By increasing the deposition temperature or the post-deposition vacuum annealing, the carrier concentration of ZAO thin films increases, and the absorption edge in the transmission spectra shifts toward the shorter wavelength side (blue shift).     

Morphology,composition, structure and optical properties of thermally annealed Cu2O thin films prepared by reactive DC sputtering method

Abstract

Thin films copper oxides are perspective materials for many optoelectronic applications, including photovoltaics. The samples were deposited on glass and silicon substrates by magnetron sputtering method using Modular Platform PREVAC. After deposition the samples were thermally treated by annealing in oxygen atmosphere for 60?min at 450?°C. Morphology confirms that all the films have crystalline structure. Optical measurements show that the films have wide band gap within the range 2.20÷2.48?eV before and 2.03÷2.40?eV after annealing. The article presents the discussion about the influence of annealing on Cu₂O thin film parameters.     

Characterization of Vacuum Evaporated Polycrystalline Cd0.96Zn0.04Te Thin Films by XRD,Raman Scattering and Spectroscopic Ellipsometry

Cd_0.96Zn_0.04Te thin films are deposited onto well cleaned glass substrates (Corning 7059) kept at room temperature by vacuum evaporation and the films are annealed at 423 K. Rutherford Backscattering Spectrometry and X‐ray diffraction techniques are used to determine the thickness, composition and crystalline structure and grain size of the films respectively. The films exhibited zinc blende structure with predominant (111) orientation. The surface morphology of the films is studied by Atomic Force Microscopy. The rms roughness of the as‐deposited films is 3.7 nm and on annealing the films at 423K, the rms roughness value decreases to 3.4 nm. The Raman spectra of the Cd_0.96Zn_0.04Te films are recorded at room temperature to study lattice vibrations and their interactions with other excitations. The intensity of the peak increases and the FWHM decreases on annealing the films. The pseudodielectric‐function spectra, ε(E) = ε₁(E) + i ε₂(E), of polycrystalline Cd_0.96Zn_0.04Te thin films in the 1.3 ‐ 5.5eV photon energy range at room temperature are measured by spectroscopic ellipsometry. The measured dielectric function spectra reveal distinct structures at energies of the E₁, E₁+Δ₁ and E₂ critical points are due to interband transitions.     

Flux Bridgman growth and the influence of annealing temperatures on PL properties of ZnO single crystals

Transparent ZnO crystals were obtained by the flux Bridgman method from high temperature solution of 22 mol% ZnO‐78 mol% PbF₂ system. The influence of annealing temperatures on the photoluminescence (PL) of ZnO crystal was investigated. An ultraviolet emission peak at about 379 nm was observed in PL spectra and the peak position has a weak blueshift for annealed samples. A green band centered at 523 nm appeared in the annealed samples and its intensity enhanced with the increase of annealing temperatures, while the intensity of the ultraviolet peak decreased considerably. However, the ultraviolet emission peak became the strongest after annealing at 1000 °C. This phenomenon was considered to be associated with oxygen vacancy and F^‐ impurities induced by the PbF₂ flux. The results show that high temperature annealing in air seems helpful for improving the PL properties of ZnO crystal. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Periodic Multilayers MoSi2/Si with a Large Number of Periods

Different approaches to decreasing mechanical stresses developed in MoSi₂/Si multilayers with increase of number of periods due to structural reconstruction in layers of amorphous silicon and nanocrystalline MoSi₂ were studied by scattering CuKα X-ray radiation at small and large angles, cross-sectional electron microscopy and micrometry of substrate sag. It was shown that effective relaxation of mechanical stresses in MoSi₂/Si multilayers is achieved by annealing them at ∼320 °C during 1 hour, or by deposition of layers at substrate temperature ∼320 °C, or by increasing sputtering gas pressure up to 7 × 10^—3 Torr in case of argon. Optimal conditions for deposition of MoSi₂/Si multilayers with periods N > 10³ and high reflectivity of X-rays with wavelengths 12.4—20.0 nm are: substrate temperature T_s = 220 °C, argon pressure P_Ar = 3 × 10^—3 Torr, layer deposition rate 1 nm/s.     

Growth of pure ZnO thin films prepared by chemical spray pyrolysis on silicon

Structural, morphological, optical and electrical properties of ZnO thin films prepared by chemical spray pyrolysis from zinc acetate (Zn(CH₃COO)₂ 2H₂O) aqueous solutions, on polished Si(1 0 0), and fused silica substrates for optical characterization, have been studied in terms of deposition time and substrate temperature. The growth of the films present three regimes depending on the substrate temperature, with increasing, constant and decreasing growth rates at lower, middle, and higher-temperature ranges, respectively. Growth rate higher than 15 nm min⁻¹ can be achieved at T_s=543 K. ZnO film morphological and electrical properties have been related to these growth regimes. The films have been characterized by X-ray diffraction, scanning electron microscopy and X-ray photoelectron spectroscopy.     

Preparation of single-crystalline ZnO films on ZnO-buffered a-plane sapphire by chemical bath deposition

High-quality zinc oxide (ZnO) films were successfully grown on ZnO-buffered a-plane sapphire (Al₂O₃ (1 1 2¯ 0)) substrates by controlling temperature for lateral growth using chemical bath deposition (CBD) at a low temperature of 60 °C. X-ray diffraction analysis and transmission electron microscopy micrographs showed that the ZnO films had a single-crystalline wurtzite structure with c-axis orientation. Rocking curves (ω-scans) of the (0 0 0 2) reflections showed a narrow peak with full width at half maximum value of 0.50° for the ZnO film. A reciprocal space map indicated that the lattice parameters of the ZnO film (a=0.3250 nm and c=0.5207 nm) were very close to those of the wurtzite-type ZnO. The ZnO film on the ZnO-buffered Al₂O₃ (1 1 2¯ 0) substrate exhibited n-type conduction, with a carrier concentration of 1.9×10¹⁹ cm⁻³ and high carrier mobility of 22.6 cm² V⁻¹ s⁻¹.     

SIMS and Raman characterizations of ZnO:N thin films grown by MOCVD

Nitrogen was incorporated into ZnO films grown by metalorganic chemical vapour deposition (MOCVD) on ZnO substrates using DMZn-TEN, tert-butanol and diallylamine, respectively, as zinc, oxygen and doping sources. The carrier gas was either hydrogen or nitrogen and the partial pressure ratio (R_VI/II) was varied in order to favor the nitrogen incorporation and/or reduce carbon related defects. The ZnO films have been characterized by Micro-Raman scattering and SIMS measurements. SIMS measurements confirm the nitrogen incorporation with concentrations extending from ∼10¹⁹ cm⁻³ to ∼4×10²⁰ cm⁻³. Raman spectra show nitrogen local vibration modes in films grown at low R_VI/II ratio and using H₂ as carrier gas. However, a vibration band attributed to carbon clusters dominates the Raman spectra for films grown with N₂ carrier. The contribution of N complexes was discussed. The strain was calculated for the as-grown and annealed films and it changes from tensile to compressive after annealing.     

Chemical Effects at the Deposition of Germanium onto Yttrium-Iron-Garnet Single Crystals

At the deposition of Ge onto YIG-crystals by uhv-evaporation a sharply limited temperature T_st was found with no further deposition above this point. Several experimental facts suggest the following model: incoming Ge atoms pick out oxygen atoms from the substrate and reevaporate as GeO. The step temperature T_st is defined by an equilibrium of the incoming Ge vapour rate, r_Ge, and the GeO evaporation rate. For r_Ge = 3 monolayers/sec we found T_st = 510°C.     

Electrochemical deposition of ZnO film and its photoluminescence properties

ZnO thin films were prepared by the electrochemical deposition method on conductive substrates. The as-deposited film was ZnO crystallites of the wurzite structure highly oriented along the (0 0 2) plane. The specific crystalline morphology may be attributed to the growth mechanism through the orientation attachment mode, which is one of the characteristics peculiar for the present process, because the terrace has been clearly observed in high-resolution AFM images. The film shows high transmittance and an optical band gap energy of 3.3 eV. After annealing in N₂ or Ar, strong green emission was observed, which should be related to the generation of singly ionized oxygen defects. Improving emission intensity further by optimizing the annealing conditions, this method may be promising to replace the traditional method for preparation of ZnO green phosphor.     

Structural and optical properties of single-crystal ZnMgO thin films grown on sapphire and ZnO substrates by RF magnetron sputtering

High-quality ZnMgO films were grown by the radio frequency (RF) magnetron sputtering technique in pure oxygen ambient. Single-crystal films were obtained, when the Mg concentration was Zn_0.87Mg_0.13O or lower in the case of ZnMgO/Al₂O₃ and when it was Zn_0.65Mg_0.35O or lower in the case of ZnMgO/ZnO. Polycrystalline films were obtained when the growth temperature was lower than 500 °C, regardless of the Mg concentration. Position of the photoluminescence (PL) ultraviolet (UV) peak of the ZnMgO film shifted with the addition of Mg, from 3.33 eV (ZnO) to 3.51 eV (Zn_0.87Mg_0.13O) and 3.70 eV (Zn_0.65Mg_0.35O). It was also observed that growth of the ZnMgO films at higher temperature resulted in higher band-gap energy. It was proposed that this phenomenon is because concentration of the substitutional Mg atoms occupying Zn site is increased as the growth temperature increases.     

EPR study of disorder processes in the ternary vanadate Zn2FeV3O11−x compound

Two samples of the Zn₂FeV₃O₁₁ compound were synthesized using different preparation routes: a solid state reaction of the ZnO–Fe₂O₃–V₂O₅ oxides and a direct reaction of the Zn₂V₂O₇ and FeVO₄ vanadates. In both cases the temperature dependences of the EPR spectra revealed a dominant contribution of antiferromagnetically coupled Fe³⁺ ions in the high-spin state. Specific differences in the EPR spectra of the two samples were recorded at all the investigated temperature intervals. A short range, or less likely, partial magnetic order involving a fraction of the Fe³⁺ distributed on the two octahedral crystallographic sites appeared to take place below 50 K. The differences observed between the EPR spectra of the two Zn₂FeV₃O₁₁ samples might suggest the existence of small variations in the cation disorder phenomena of Fe³⁺ and Zn²⁺ ions or the presence of an oxygen deficiency process.     

Preparation of undoped and indium doped ZnO thin films by pulsed laser deposition method

An original modification of the standard Pulse Laser Deposition (PLD) method for preparing both undoped and indium doped zinc oxide (ZnO:In) thin films at low substrate temperature is proposed. This preparation method does not demand any further post‐deposition annealing treatment of the grown films. The developed method allows to grow thin films at low substrate temperature that prevents them from the considerable loss of their intrinsic electrical and optical properties. The influence of deposition parameters on the electrical and optical parameters of the undoped and the indium doped ZnO thin films is also analysed. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Decisive role of Au layer on the oriented growth of ZnO nanorod arrays via a simple aqueous solution method

Vertically aligned arrays of ZnO nanorod were synthesized on the Au/SiO₂/Si(1 0 0) substrate by a simple aqueous solution growth process, without pre-prepared ZnO seed layer. For comparison, glass and SiO₂/Si were also used as substrates, and the results show that the Au layer plays a decisive role in orienting the growth of the ZnO nanorod. The effects of other growth parameters, including Zn²⁺ concentration and growth time, on morphology, density, and orientation of the ZnO nanostructure were also studied and with longer reaction time, a new structure namely ZnO nanotip was obtained. Moreover, the growth mechanism of ZnO nanorod arrays grown on the Au/SiO₂/Si substrate was proposed.