Interaction of a Surface Acoustic Wave with a Two-dimensional Electron Gas

When a surface acoustic wave （SAW） propagates on the surface of a GaAs semiconductor, coupling between electrons in the two-dimensional electron gas beneath the interface and the elastic host crystal through piezoelectric interaction will attenuate the SAW. The coupling coemcient is ~alculated for the SAW propagating along an arbitrary direction. It is found that the coupling strength is strongly dependent on the propagating direction. When the SAW propagates along the [011] direction, the coupling becomes quite weak.     

Interaction of a Surface Acoustic Wave with a Two-dimensional Electron Gas

When a surface acoustic wave (SAW) propagates on the surface of a GaAs semiconductor, coupling between electrons in the two-dimensional electron gas beneath the interface and the elastic host crystal through piezoelectric interaction will attenuate the SAW. The coupling coefficient is calculated for the SAW propagating along an arbitrary direction. It is found that the coupling strength is strongly dependent on the propagating direction. When the SAW propagates along the [011] direction, the coupling becomes quite weak.     

Magnetic ordering in (110) Eu films in an applied magnetic field

Below its ordering temperature (T _N = 90 K), bulk bcc Eu has a helical magnetic state with propagation vectors along the three equivalent 〈100〉 directions. In contrast, epitaxial (110)Eu films exhibit a unique magnetic ordering: the domain with a magnetic helix propagating along the in-plane [001] direction vanishes on cooling, at the expense of other domains with helices propagating along [100] and [010]. This paper is devoted to the study of the stability of the magnetic domains in an external magnetic field using neutron scattering experiments and macroscopic magnetization measurements. The helix propagating along the [001] direction can be restored by the application of an external field along this direction. On the contrary, when a magnetic field is applied along an intermediate direction, specifically [10], the domain with a helix propagating along [001] is suppressed. Both effects depend on the film thickness. They are explained if one considers that, because of the low magnetic anisotropy of Eu, a helix with a propagation vector parallel to (or close to) the applied magnetic field is energetically more favourable than cycloidal structures with unchanged propagation vectors. Finally, the amplitudes of the propagation vectors and their directions (that are modified in films compared to bulk) do not vary under magnetic field.     

Velocity of a SAW propagating in a 2D phononic crystal

We have studied the propagation of a surface acoustic waves (SAW), in a structure constituted by a 2D phononic film (a few micrometers thick and having lattice constants of a few hundreds of micrometers in the two directions of the propagation plane) deposited onto a homogeneous semi-infinite substrate. First, we have calculated the dispersion relations of the acoustic modes by using a plane waves expansion method. We found that the surface branch exhibits both the folding effect and a band gap for the propagation along some particular directions. This is a very interesting result which demonstrates that the effects related to the existence of the band gap (sound velocity dispersion, diffraction, refraction, ultrasound tunneling, etc.) can all appear, even if the thickness of the phononic film is much less than the penetration depth of the SAW. Then, we used an all-optical technique to monitor the spectral content of the SAW propagating along the GammaX direction in the reduced Brillouin zone. We show that a wave with frequency in the stop band, is destructively diffracted after it propagates through less than ten periods. Finally, we report on measurements of the Rayleigh wave phase velocity and we show that the transit time is independent of the distance traveled inside the phononic crystal, suggesting that tunneling trough the sample is involved.     

Non-linear dynamical analysis of crack surface perturbations and their dependence on velocity and direction

The fracture surfaces of single crystal [1 0 0] silicon specimens, fractured under three-point bending (3PB) and subjected to a high strain energy upon cracking, revealed exceptional surface perturbations, generated during the unstable propagation. While macroscopically the crack is propagating on the (1 1 1) low energy cleavage plane, microscopic examination revealed small angled deviations from and fluctuations along that plane. Furthermore, while the crack is propagating at a velocity of nearly 3000 m/s in the direction, its velocity in the direction is two orders of magnitude lower, with distinctive surface perturbations. The amplitude and complexity of the perturbations increase as the normal velocity vector changes its direction and magnitude. These perturbations were recorded with a profilometer and analyzed using non-linear dynamical analysis tools. This study provides an opportunity to interpret surface phenomena of one of the most general cases of fracture and to study the effect of major variables on the nature of the perturbations involved, such as the local crack tip velocity and the crystallographic orientations. It is shown that the surface perturbations are chaotic deterministic in nature and can be described by high order non-linear differential equations; the order of the equation varying with the variations of the local velocity and direction.     

环形定子的激光致表面波机理及可视化探测研究

开展了用于新型激光驱动马达的环形定子的激光致表面波机理及实验研究. 提出一种带有凹槽阵列结构的环形定子新设计, 建立了激光在环形定子表面激发表面波的物理模型, 揭示了影响表面波幅值的关键因素; 采用一种新颖的激光致表面波可视化探测方法, 在波长1053 nm, 脉宽30 ns, 单脉冲能量1 mJ的激光激发下, 对表面波在铜质环形定子表面的传播特性进行了可视化探测实验. 理论与实验研究表明: 当激发光斑的位置紧邻凹槽阵列时, 沿着圆环向凹槽方向传播的表面波会被齿状凹槽阵列迅速衰减和吸收, 而沿着圆环向远离凹槽方向传播的表面波能够持续传递, 从而首次实现了激光致表面波在环形定子上的单向传播; 而对没有凹槽阵列结构的圆环进行的对比实验表明, 激光致表面波在圆环表面双向传播, 最终因相互混叠和串扰等而处于混乱状态. 由激光在该种环形定子表面激发出的单向表面波, 可望在光致表面波马达及驱动机构中获得应用. 关键词： 激光致表面波 环形定子 表面波可视化 激光驱动     

表征超大规模集成电路互连纳米薄膜硬度特性的声表面波的频散特性

利用声表面波(SAW)的频散特性来表征超大规模集成电路(ULSI)互连系统中低介电常数(k)薄膜的物性具有准确、快速、对材料无损伤等突出优点.研究了Si(100)衬底上淀积低k薄膜的分层结构中，SAW沿任意方向传播的色散关系.引入坐标变换后，单层薄膜特征矩阵从9阶降到6阶，双层薄膜特征矩阵从15阶降到10阶，大幅度提高了计算速度，有利于生产ULSI过程中的在线监测. 关键词： 超大规模集成电路 声表面波 传输方向 频散特性     

Smooth and oriented AlN thin films deposited by laser ablation and their application for SAW devices

Aluminum nitride films of up to 1.2 7m thickness were deposited by excimer laser ablation onto c-, r-, m-, and a-cut sapphire substrates. The films were found to be of (00.1), (11.0), (10.0) and (00.1) orientation on c-, r-, m- and a-cut sapphire substrates, respectively. XRD pole figure measurements showed good in-plane alignment of all three sample sets. AFM measurements reveal that all films were atomically smooth in the initial stages of growth. Furthermore, for AlN(11.0) on r-cut sapphire the film surface remained smooth, with an r.m.s. roughness of about 1 nm up to a film thickness of 1.2 7m. AlN films with the polar c-axis parallel to the film surface are particularly favourable for SAW device applications, since the c-axis direction yields the strongest coupling coefficient. A smooth surface, as for AlN(11.0), is essential to prevent scattering of propagating surface acoustic waves. A SAW r.f. filter was fabricated with interdigital transducers of 5.6 7m wavelength on top of a 1.2 7m AlN(11.0) film on r-cut sapphire. The resonance frequency of 1.068 GHz corresponds well to theoretical expectations for the SAW velocity in this propagation geometry.     

Nonlinear surface acoustic waves: silicon strength in phonon-focusing directions

The anisotropy of the elastic properties of single-crystal silicon manifests itself in features of both the linear and nonlinear surface acoustic wave (SAW) propagation. Directions showing the phonon-focusing effect and strong nonlinearity were employed in contact-free and notch-free laser-based fracture experiments, yielding the intrinsic strength of silicon. The critical tensile stress values vary between 2.5 GPa and 7 GPa for the different crystallographic planes and directions of SAW propagation investigated.     

Simulation and design on SAW reflective delay line for wireless sensor application using coupling of modes

This paper presents an optimal design on surface acoustic wave reflective delay line using coupling of modes（COM）model.The reflection coefficient S₁₁of the SAW device is deduced to evaluate the device performance.Typical SAW reflective delay line consists of a piezoelectric substrate,an interdigital transducer（IDT）and several reflectors positioned along the acoustic propagation direction.The influences of the design parameters of the device, such as structure of the IDT,reflector types,etc.on device performance are investigated,and the optimal design parameters are determined.Based on these parameters,a 434 MHz SAW reflective delay line with single phase unidirectional transducers and three shorted grating reflectors is fabricated on 41°YX LiNbO₃.The measured S₁₁agrees well with the simulated one.Sharp reflection peaks,high signal noise ratio（S/N）,and low spurious noise between the reflection peaks are observed.     

Y旋转切割石英基片上的准纵漏表面声波

在理论和实验上对Y旋转切割石英基片上的准纵漏表面声波(快速声表面波)的传播特性作了比较全面的研究。准纵漏表面声波的相速度可以达到6200m/s~7100m/s,是常规声表面波相速度的两倍,接近纵波速度。理论计算和实验结果均表明:在Y旋转切割石英基片的某些传播方向上,准纵漏表面声波的束偏向角和延迟温度系数均较小。例如,沿欧拉角(0°,155.25°,42°)方向的准纵漏表面声波的相速度和延迟温度系数的实验测量值分别为6201m/s和12.9 ppm/℃。实验还表明,放置于基片表面的液体对准纵漏表面声波的吸收不大,说明此种声波质点振动集中在传播方向(沿表面方向),具有纵波的性质。     

Temperature-stable orientations in LGS and LGN piezoelectric crystals for surface acoustic waves

The temperature characteristics of surface acoustic waves (SAW) propagating in LGS and LGN crystals are numerically analyzed. The optimal orientations that correspond to the zero value of the first-order temperature coefficient of delay (TCD) for SAW propagating in these crystals are considered. The second-order TCD for SAW is calculated for a wide range of operating temperatures. It is shown that the temperature dependences of the material constants of LGS and LGN crystals are strongly nonlinear. The characteristics of SAW propagating in a structure that consists of an isotropic layer overlying an LGS or LGN piezoelectric crystal are numerically calculated. It is shown that, in the presence of a thin aluminum layer of a certain thickness on the crystal surface, in some cases it is possible to extend the operating temperature range within which the TCD for SAW is equal to zero.     

应用于无线传感器的声表面波反射型延迟线的耦合模分析

基于耦合模理论对一种应用于无线传感器的声表面波(SAW)反射型延迟线的性能进行了优化模拟分析。结合混合等效电路模型推导出评价这种器件性能的时域反射系数S₁₁。典型的SAW反射型延迟线包含置于压电基片之上的一个换能器与沿声波传播方向设置的多个反射器。讨论了器件性能的各种结构性影响因素如换能器结构以及反射器类型等,并以此获得优化的器件设计参数。在理论优化分析的基础上,以41°YX LiNbO₃为压电基片,结合铝电极试验制作了采用单向单相换能器(SPUDT)与3个短路栅反射器的440 MHz SAW反射型延迟线器件,并与理论分析结果予以对比与评价分析。     

晶体相场法研究应力状态及晶体取向对微裂纹尖端扩展行为的影响

采用晶体相场模拟研究了单向拉伸作用下初始应力状态、晶体取向角度对单晶材料内部微裂纹尖端扩展行为的影响, 以(111)晶面上的预制中心裂纹为研究对象探讨了微裂纹尖端扩展行为的纳观机理, 结果表明: 微裂纹的扩展行为主要发生在<011>(111)滑移系上, 扩展行为与扩展方向与材料所处的初始应力状态及晶体取向紧密相关. 预拉伸应力状态将首先诱发微裂纹尖端生成滑移位错, 进而导致晶面解理而实现微裂纹尖端沿[011]晶向扩展, 扩展到一定程度后由于位错塞积, 应力集中, 使裂纹扩展方向沿另一滑移方向[101], 并形成锯齿形边缘; 预剪切应力状态下, 微裂纹尖端首先在[101]晶向解理扩展, 并诱发位错产生, 形成空洞聚集型长大的二次裂纹, 形成了明显的剪切带; 预偏变形状态下微裂纹尖端则直接以晶面解理形式[101]在上进行扩展, 直至断裂失效; 微裂纹尖端扩展行为随晶体取向不同而不同, 较小的取向角度会在裂纹尖端形成滑移位错, 诱发空位而形成二次裂纹, 而较大的取向角下的裂纹尖端则以直接解理扩展为主, 扩展方向与拉伸方向几近垂直.     

Surface-acoustic-wave-induced space-charge waves in electron-hole systems

Space-charge waves in an electron-hole system are studied, which are excited by a moving grating provided by a surface acoustic wave (SAW). The SAW induces a constant current that may change its sign, when a constant electric field is applied opposite to the wave propagation direction. Current resonances are predicted to appear, when the SAW wavelength and frequency match the ones of the space-charge wave.     

Effect of initial stress on Love waves in a piezoelectric structure carrying a functionally graded material layer

The effect of initial stress on the propagation behavior of Love waves in a piezoelectric half-space of polarized ceramics carrying a functionally graded material (FGM) layer is analytically investigated in this paper from the three-dimensional equations of linear piezoelectricity. The analytical solutions are obtained for the dispersion relations of Love wave propagating in this kind of structure with initial stress for both electrical open case and electrical short case, respectively. One numerical example is given to graphically illustrate the effect of initial stress on dispersive curve, phase velocity and electromechanical coupling factor of the Love wave propagation. The results reported here are meaningful for the design of surface acoustic wave (SAW) devices with high performance.     

Analysis of spurious bulk waves in ball surface wave device

We analyzed the acoustic waves propagating in a sphere to establish a useful guideline for the design of NDE apparatus and ball surface acoustic wave (SAW) device exploiting the diffraction-free propagation of SAW on a sphere. First, we calculated the laser-generated acoustic displacements both under ablation condition and under thermoelastic condition and verified experimentally the validity of the calculation. Next, the acoustic waves excited by out-of-plane stress and those excited by in-plane stress were compared. The results showed that when the out-of-plane stress was applied, the relative amplitudes of the bulk waves to that of the SAW were larger and the number of bulk waves was larger than that when the in-plane stress was applied, while the SAW had similar waveforms in each case. The ratio of the relative amplitude of the bulk waves for the out-of-plane stress and the in-plane stress was 3.1:1 at phi(1)=90 degrees and 1.67:1 at phi(1)=0 degrees. The large amplitude for the out-of-plane stress can be explained by wide directivities of bulk waves. Consequently, we found that it is necessary for ball SAW device to select a piezoelectric material and form of interdigital transducer so that the in-plane stress becomes dominant.     

Surface Acoustic Wave Induced Birefringence in In0.21Ga0.79As-GaAs Multiple Quantum Wells for Optical Modulation ≈1000 nm under Normal Incidence

This paper presents observation of quantum Confined Stark effect induced by the surface acoustic waves (SAW) propagating in multiple quantum well (MQW) layers. It also presents the evidence for the first time of SAW induced birefringence under surface normal mode operation in MQWs. MQW layers usually do not exhibit significant birefringence when the light is normally incident. The launching of surface acoustic waves in In_0.21Ga_0.79As-GaAs MQW layers produces significantly different strain along the direction of propagation (y) as compared to the lateral direction (x), and this in turn results in differential absorption coefficient (= _x - _y) and birefringence (n_bir). The enhanced birefringence due to excitonic effect depends on the magnitude of RF power exciting the SAW transducer. An interdigitated transducer operating at 119 MHz with an aperture (w) to wavelength () ratio of 25 was used to launch the surface acoustic waves. Typical values of n are in the range of 0.01-0.02 for polarized light at 1.01 m wavelength when the RF power is varied between 0.5-1.2 Watt. Computations of n are in agreement with experimental data. The SAW propagation also induces a perpendicular component E_z of electric field which results in conventional Stark effect producing absorption and index changes in MQWs that vary as a function of SAW power.     

Peculiarities of the formation of the X-ray diffraction image of a surface acoustic wave in grazing geometry

The x-ray diffraction image of a Bluestein-Gulyaev surface acoustic wave (SAW) at grazing angles of incidence is considered in the noncoplanar symmetric Laue geometry. It is assumed that the SAW propagation direction makes a small angle with the diffraction vector. It is shown that small deviations from the Bragg angle (～0.01″) due to SAWs that do not lead to a change in the reflection coefficient result in the formation of diffraction satellites for both standing and traveling SAWs. The recorded x-ray diffraction image representing the time-averaged intensity distribution has characteristic profiles for even-and odd-order satellites.     

Thermal stabilization of SAW devices by metal films

The characteristics of surface acoustic waves (SAW) propagating in a structure that consists of a metal layer overlying an YX-cut quartz crystal are numerically analyzed for a wide range of operating temperatures. It is shown that the presence of a metal film of a certain thickness on the surface of an YX-cut quartz crystal considerably improves the thermal stability of the characteristics of SAW propagating in such a structure.