共查询到20条相似文献,搜索用时 15 毫秒
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采用波长13.5 nm的极紫外光作为曝光光源的极紫外光刻技术是最有潜力的下一代光刻技术之一, 它是半导体制造实现10 nm及以下节点的关键技术. 获得极紫外辐射的方法中, 激光等离子体光源凭借转换效率高、收集角度大、碎屑产量低等优点而被认为是最有前途的极紫外光源. 本文开展了脉冲TEA-CO2激光和Nd:YAG激光辐照液滴锡靶产生极紫外辐射的实验, 对极紫外辐射的谱线结构以及辐射的时空分布特性进行了研究.实验发现: 与TEA-CO2激光相比, 较高功率密度的Nd:YAG激光激发的极紫外辐射谱存在明显的蓝移; 并且激光等离子体光源可以认为是点状光源, 其极紫外辐射强度随空间角度变化近似满足Lambertian分布. 相似文献
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半导体产业是高科技、信息化时代的支柱。光刻技术,作为半导体产业的核心技术之一,已成为世界各国科研人员的重点研究对象。本文综述了激光等离子体13.5 nm极紫外光刻的原理和国内外研究发展概况,重点介绍了其激光源、辐射靶材和多层膜反射镜等关键系统组成部分。同时,指出了在提高激光等离子体13.5 nm极紫外光源输出功率的研究进程中所存在的主要问题,包括提高转换效率和减少光源碎屑。特别分析了目前已实现百瓦级输出的日本Gigaphoton公司和荷兰的ASML公司的极紫外光源装置。最后对该项技术的发展前景进行了总结与展望。 相似文献
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A. V. Vodopyanov S. V. Golubev D. A. Mansfeld N. N. Salashchenko N. I. Chkhalo 《Bulletin of the Russian Academy of Sciences: Physics》2011,75(1):64-66
An extreme ultraviolet (EUV) radiation source based on a low-pressure discharge sustained in a magnetic trap by high-power
electromagnetic radiation at a frequency of 75 GHz is discussed. The experimental radiation power in the wavelength range
of 13.5 nm ±1% was as high as 50 W. The conversion of microwave radiation into EUV radiation was about 1%. 相似文献
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An analytical formula for maximizing radiation efficiency from a laser-produced plasma is derived. The maximum efficiency is achieved when the plasma expansion distance during laser heating is equal to the laser absorption length. The dependence of the radiation efficiency on the plasma density is confirmed by experiments using a particle-cluster target. By creating a relatively uniform density plasma with a 300 microm diameter by dispersing SnO(2) particles coated on a Si wafer, the conversion efficiency at 14 nm, as high as 4 times as that for a Sn plate target, is achieved. 相似文献
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Terhalle B Langner A Päivänranta B Guzenko VA David C Ekinci Y 《Optics letters》2011,36(21):4143-4145
We fabricate computer generated holograms for the generation of phase singularities at extreme ultraviolet (EUV) wavelengths using electron beam lithography and demonstrate their ability to generate optical vortices in the nonzero diffraction orders. To this end, we observe the characteristic intensity distribution of the vortex beam and verify the helical phase structure interferometrically. The presented method forms the basis for further studies on singular light fields in the EUV frequency range, i.e., in EUV interference lithography. Since the method is purely achromatic, it may also find applications in various fields of x ray optics. 相似文献
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Masamoto Otsuka Ryuiti Ikee Kazushige Ishii 《Journal of Quantitative Spectroscopy & Radiative Transfer》1975,15(11):995-1005
Very intense spectral lines of He+ were observed when a He plasma was brought into contact with a He gas. The population densities of the excited levels of He+ ions were found to be much larger than the values expected in the steady state for the given electron temperature and density. The contact mechanism and a method of determining the electron temperature and the electron and ion densities are discussed for the quasi-steady state. 相似文献
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Mordovanakis AG Hou KC Chang YC Cheng MY Nees J Hou B Maksimchuk A Mourou G Galvanauskas A Lafontaine B 《Optics letters》2006,31(17):2517-2519
Efficient generation of extreme UV (EUV) light at lambda = 13.5 nm from a bulk Sn target has been demonstrated by using a fiber laser. The conversion efficiency from the 1064 nm IR to the EUV was measured to be around 0.9% into 2pi steradians within a 2% bandwidth. To the best of our knowledge, this is the first time an all-fiber system was used to generate EUV or soft x rays. 相似文献
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We report the demonstration of strong resonance enhancement of a single high-order harmonic in the extreme ultraviolet (XUV) region generated from the interaction of a femtosecond pulse with low-ionized In ablation. A strong 13th harmonic (61.2 nm) of Ti:sapphire laser radiation with output intensity almost two orders of magnitude higher than neighboring harmonics was observed in these studies. The high conversion efficiency of the 13th harmonic (8 x 10(-5)) is attributed to multiple collisions of electron trajectories with the origin due to multiphoton resonance with the In ion. 相似文献
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Experimental observation of classical subwavelength interference with a pseudothermal light source 总被引:2,自引:0,他引:2
We report the experimental observation of classical subwavelength double slit interference with a pseudothermal light source. The experimental results are in good agreement with the theoretical simulation using the second order correlation function for the thermal light. 相似文献
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Ch. Schwedes E. Peik J. von Zanthier A.Y. Nevsky H. Walther 《Applied physics. B, Lasers and optics》2003,76(2):143-147
A compact, tunable and narrow-bandwidth laser source for blue and ultraviolet radiation is presented. A grating-stabilized
diode laser at 922 nm is frequency-stabilized to below 100 Hz relative to a reference resonator. Injection of the diode-laser
light into a tapered amplifier yields a power of 0.5 W. In a first frequency-doubling stage, more than 200 mW of blue light
at 461 nm is generated by use of a periodically poled KTP crystal. Subsequent second-harmonic generation employing a BBO crystal
leads to about 1 mW of ultraviolet light at 231 nm.
Received: 12 August 2002 / Published online: 15 January 2003
RID="*"
ID="*"Corresponding author. Fax: +49-89/32905-200, E-mail: christian.schwedes@mpq.mpg.de
RID="**"
ID="**"Present address: PTB, Bundesallee 100, 38116 Braunschweig, Germany 相似文献
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M. Kaku S. Suetake Y. Senba M. Katto S. Kubodera 《Applied physics. B, Lasers and optics》2008,93(2-3):361-364
We have demonstrated auto-cleaning of deposited tin debris produced in a laser-plasma extreme ultraviolet (EUV) source by using a liquid jet target containing tin chloride solution. The use of double laser pulse irradiation improved the EUV conversion efficiency of 1.1%, which was 3.3 times as large as that obtained with single laser pulse irradiation. At an appropriate concentration of tin chloride, the amount of deposited debris was balanced out with that of sputtered and/or etched debris, resulting in a thickness of deposited debris less than 1 nm after 40?000 laser pulse irradiations. 相似文献
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《中国物理 B》2021,30(9):95207-095207
Extreme ultraviolet(EUV) source produced by laser-induced discharge plasma(LDP) is a potential technical means in inspection and metrology. A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system. The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera. The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry. An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm. The laser and discharge parameters such as laser energy, voltage, gap distance,and anode shape can influence the EUV emission. 相似文献