Enhanced output power of near-ultraviolet InGaN-GaN LEDs grown on patterned sapphire substrates

Near-ultraviolet nitride-based light-emitting diodes (LEDs) with peak emission wavelengths around 410 nm were fabricated onto c-face patterned sapphire substrates (PSS). It was found that the electroluminescence intensity of the PSS LED shown 63% larger than that of the conventional LED. For a typical lamp-form PSS LED operating at a forward current of 20 mA, the output power and external quantum efficiency were estimated to be 10.4 mW and 14.1%, respectively. The improvement in the light intensity could be attributed to the decrease of threading dislocations and the increase of light extraction efficiency in the horizontal direction using a PSS.     

Enhancing the output power of GaN-based LEDs grown on wet-etched patterned sapphire substrates

GaN-based light-emitting diodes (LEDs) with emitting wavelength of 450 nm were grown on patterned sapphire substrates (PSSs) fabricated by chemical wet etching. The crystallography-etched facet was {1-102} R-plane with a 57/spl deg/ against {0001} C-axis and had superior capability for enhancing light extraction efficiency. The light output power of the PSS LED was 1.15 times higher than that of the conventional LED at an injection current of 20 mA. The output power and external quantum efficiency were estimated to be 9 mW and 16.4%, respectively. The improvement was attributed not only to geometrical shapes of {1-102} crystallography-etched facets that efficiently scatter the guided light to find escape cones, but also to dislocation density reduction by adopting the PSS growth scheme.     

Increased effective reflection and transmission at the GaN-sapphire interface of LEDs grown on patterned sapphire substrates

The effect of patterned sapphire substrate (PSS) on the top-surface (P-GaN-surface) and the bottom-surface (sapphire-surface) of the light output power (LOP) of GaN-based LEDs was investigated, in order to study the changes in reflection and transmission of the GaN-sapphire interface. Experimental research and computer simulations were combined to reveal a great enhancement in LOP from either the top or bottom surface of GaN-based LEDs, which are prepared on patterned sapphire substrates (PSS-LEDs). Furthermore, the results were compared to those of the conventional LEDs prepared on the planar sapphire substrates (CSS-LEDs). A detailed theoretical analysis was also presented to further support the explanation for the increase in both the effective reflection and transmission of PSS-GaN interface layers and to explain the causes of increased LOP values. Moreover, the bottom-surface of the PSS-LED chip shows slightly increased light output performance when compared to that of the top-surface. Therefore, the light extraction efficiency (LEE) can be further enhanced by integrating the method of PSS and flip-chip structure design.     

Improvement of the performance of GaN-based LEDs grown on sapphire substrates patterned by wet and ICP etching

Sapphire substrates patterned by a selective chemical wet and an inductively coupled plasma (ICP) etching technique was proposed to improve the performance of GaN-based light-emitting diodes (LEDs). GaN-based LEDs were fabricated on sapphire substrates through metal organic chemical vapor deposition (MOCVD). The LEDs fabricated on the patterned substrates exhibit improved device performance compared with the conventional LED fabricated on planar substrates when growth and device fabricating conditions were the same. The light output powers of the LEDs fabricated on wet-patterned and ICP-patterned substrates were about 37% and 17% higher than that of LEDs on planar substrates at an injection current of 20 mA, respectively. The enhancement is attributable to the combination of the improvement of GaN-based epilayers quality and the improvement of the light extraction efficiency.     

图形化蓝宝石衬底结构对GaN基LED发光性能的影响

为了研究图形化蓝宝石衬底(PSS)的结构和形貌对GaN基发光二极管(LED)光学性能的影响,对PSS的制备工艺和参数进 行了调控,从而 形成具有不同填充因子的蒙古包形PSS(HPSS)和金字塔形PSS(TPSS)两种衬底,用于生长 和制备蓝光LED 芯片。通过对TPSS-LED的光学性能测试和分析得到,随着PSS填充因子的增大, LED的 光输出功 率也增大;进而比较具有相同填充因子的HPSS和TPSS的光学性能表明,HPSS明显优于TPSS。 因此, PSS填充因子的增大,能够提高LED的光输出功率;优化PSS的结构可以改善LED中光出射途径 ,从而更有效提高LED的光发射效率。     

Enhanced luminescence from GaN-based blue LEDs grown on grooved sapphire substrates

Luminescence from GaN-based blue light-emitting diodes grown on grooved sapphire substrates was investigated using cathodoluminescence (CL) and electroluminescence (EL). The 60-nm-deep 2 (ridge) /spl times/4 /spl mu/m (trench) grooves along the <101~0> direction were created by BCl/sub 3/-Cl/sub 2/-based inductively coupled plasma reactive ion etching. Stronger CL and EL from the trench regions of the grooves in GaN and InGaN-GaN multiquantum-wells were observed, confirming its better crystalline quality over the trench regions, further supported by the EL mapping results. Epitaxial lateral growth was believed to initiate from the ridge regions to cover the trench regions at the foremost stage of GaN growth that is similar to the coalescence of islands.     

图形衬底对InGaN/GaN多量子阱太阳能电池性能的提升

In this paper, the enhanced performance of InGaN/GaN multiple quantum well solar cells grown on patterned sapphire substrates （PSS） was demonstrated. The short-circuit current （Jsc） density of the solar cell grown on PSS showed an improvement of 60%, compared to that of solar cells grown on conventional sapphire substrate. The improved performance is primarily due to the reduction of edge dislocations and the increased light absorption path by the scattering from the textured surface of the PSS. It shows that the patterned sapphire technology can effectively alleviate the problem of high-density dislocations and low Jsc caused by thinner absorption layers of the InGaN based solar cell, and it is promising to improve the efficiency of the solar cell.     

在蓝宝石图形衬底上生长低穿透性位错的GaN薄膜

使用MOCVD外延系统,采用3D-2D生长模式在圆锥图形蓝宝石衬底上生长GaN薄膜。研究发现3D-2D生长模式能够有效的减少GaN薄膜的穿透性位错,其中3D GaN层的生长条件是关键：低V/III比,低温和高生长压力。为了进一步减少TD,3D GaN层的厚度应该与图形衬底上的图形高度接近。当3D GaN层生长结束时,3D GaN层把图形衬底的图形围在其中,具有倾斜的侧壁和（0001）向的上表面,而图形上基本没有沉积物。在接下来的2D生长过程里,GaN沿倾斜侧面快速生长,使得侧面上的穿透性位错产生弯曲,从而减少GaN薄膜的穿透性位错。经过对3D条件的优化,GaN薄膜的穿透性位错降低到1×108cm-2,XRD测试得到的（002）,（102）半宽分别达到211弧秒和219弧秒。     

High performance of InGaN LEDs on (111) silicon substrates grown by MOCVD

We report on the high-performance of InGaN multiple-quantum well light-emitting diodes (LEDs) on Si (111) substrates using metal-organic chemical vapor deposition. A high-temperature thin AlN layer and AlN-GaN multilayers have been used for the growth of high-quality GaN-based LED structure on Si substrate. It is found that the operating voltage of the LED at 20 mA is reduced to as low as 3.8-4.1 V due to the formation of tunnel junction between the n-AlGaN layer and the n-Si substrate when the high-temperature AlN layer is reduced to 3 nm. Because Si has a better thermal conductivity than sapphire, the optical output power of the LED on Si saturates at a higher injected current density. When the injected current density is higher than 120 A/cm/sup 2/, the output power of the LED on Si is higher than that of LED on sapphire. The LED also exhibited the good reliability and the uniform emission from a large size wafer. Cross-sectional transmission electron microscopy observation indicated that the active layer of these LEDs consists of the dislocation-free pyramid-shaped (quantum-dot-like) structure.     

Efficiency improvement of AlGaInN LEDs advanced by ray-tracing analysis

A modified ray-tracing model is applied to analyze the dependence of external quantum efficiency and far-field radiation pattern of AlGaInN light-emitting diodes (LEDs) on various device parameters. Considerable increase (about 1.5 times) in the efficiency is predicted for LEDs with highly reflective p-contact as compared to those with the semitransparent p-contact. It is shown that the LED's efficiency degrades with the increasing of the optical loss in AlGaInN epitaxial layers as well as with increasing of the LED chip area. The ways of improving the external efficiency of large-area (and thus, powerful) LEDs are discussed including utilization of a textured (light-scattering) backside of sapphire substrate or a diffusive interface between epitaxial layers and p-contact.     

InGaN/GaN light-emitting diodes with a reflector at the backside of sapphire substrates

Nitride-based light-emitting diodes (LEDs) with a reflector at the backside of the sapphire substrates have been demonstrated. It was found that an SiO₂/TiO₂ distributed-Bragg reflector (DBR) structure could reflect more downward-emitting photons than an Al-mirror layer. It was also found that the 20-mA output power was 2.76 mW, 2.65 mW, and 2.45 mW for the DBR LED, Al-reflector LED, and conventional LED, respectively. With the same 50-mA current injection, the integrated-electroluminescence (EL) intensity of a DBR LED and an Al-reflector LED was 19% and 15% larger than that observed from a conventional LED.     

Efficiency improvement of AlGaN-based deep ultraviolet LEDs with gradual Al-composition AlGaN conduction layer

The low internal quantum efficiency (IQE) of AlGaN-based deep ultraviolet light emitting diode (DUV-LED) limits its wider application. The main reasons for low IQE include low carrier concentration, poor carrier location and large defects. The bending of energy band between AlGaN electron blocking layer and conduction layer obstructs transport of holes to multiple quantum wells. In this paper, we propose a gradual Al-composition p-type AlGaN (p-AlGaN) conduction layer to improve the light emitting properties of AlGaN-based DUV-LED. Increased carrier concentration in the active region enhances the effective radiative recombination rate of the LED. Consequently, the IQE of our optimazited DUV-LED is increased by 162% in comparison with conventional DUV-LEDs.     

Photoluminescence characteristics and pit formation of InGaN/GaN quantum-well structures grown on sapphire substrates by low-pressure metalorganic vapor phase epitaxy

We have examined how a growth interruption, caused by closing group-III sources, affects the crystalline quality of InGaN/GaN quantum-well (QW) structures grown by metalorganic vapor phase epitaxy. The QW samples were characterized by their photoluminescence (PL), and by atomic force microscopy (AFM), transmission electron microscopy (TEM), and energy dispersive x-ray (EDX) microanalysis. The PL peak wavelength was strongly dependent on the duration of the growth interruption and on the number of QW layers. AFM measurements revealed that the size of the open hexagonally shaped pits in the QW structures increased dramatically as the interruption duration was lengthened. Through TEM and EDX microanalysis, we found that the formation of these hexahedronal pits, formed due to the growth interruption, causes a large fluctuation in the In composition, especially around the pits, and the presence of such pits in an underlying QW layer strongly affects the In incorporation into the upper QW layers, leading to significant growth-rate variation in an InGaN QW layer and red-shifting of the PL spectra when a multiple-QW structure is grown.     

图形蓝宝石衬底GaN基发光二极管的研制

采用抗刻蚀性光刻胶作为掩膜,并利用光刻技术制作周期性结构,进行ICP干法刻蚀C面(0001)蓝宝石制作图形蓝宝石衬底(PSS);然后,在PSS上进行MOCVD制作GaN基发光二极管(LED)外延片;最终,进行芯片制造和测试。PSS的基本结构为圆孔,直径为3μm,间隔为2μm,深度为864 nm,呈六角形分布。与同批生长的普通蓝宝石衬底(CSS)GaN基LED芯片相比,PSS芯片的光强和光通量比CSS分别提高57.32%和28.33%(20 mA),并可减小芯片的反向漏电流,且未影响芯片的波长分布和电压特性。     

图形蓝宝石基GaN性能的研究

在相同的腐蚀温度下,通过控制对蓝宝石衬底的化学腐蚀时间,以研究其对GaN光学性质的影响.测试结果表明:对蓝宝石衬底腐蚀50 min后,外延生长的GaN薄膜晶体质量及光学质量最优,x射线摇摆曲线中.其(0002)面及(10-12)面的半峰全宽分别降低至202.68 arcsec,300.24 arcsec.透射光谱中,其透射率最高,调制深度最大;光致发光谱的近带边发射峰强度最强,其半高全宽也降低到6.7 nm,几乎看不到任何黄光带.     

基于纳米球镜光刻的选区生长的光子晶体提高InGaN LED光提取效率的研究

We report a new method for the fabrication of two-dimensional photonic crystal(PhC) hole arrays to improve the light extraction of GaN-based light-emitting diodes(LEDs).The PhC structures were realized using nanospherical-lens photolithography and the selective-area epitaxy method,which ensured the electrical properties of the LEDs through leaving the p-GaN damage-free.At a current of 350 mA,the light output power of LEDs with PhC hole arrays of 450 nm and 600 nm in diameter with the same lattice period of 900 nm were enhanced by 49.3% and 72.2%,respectively,compared to LEDs without a PhC.Furthermore,the LEDs with PhC hole structures showed an obviously smaller divergent angle compared with conventional LEDs,which is consistent with the results of finite-difference time-domain simulation.     

基于图形衬底生长的GaN位错机制分析

采用缺陷选择性腐蚀法结合光学显微镜及原子力显微镜(AFM)对金属有机化合物气相外延(MOVPE)在蓝宝石图形衬底(PSS)上生长的非掺杂GaN体材料的位错产生机制进行了研究,分析结果表明,位错来源于三个方面:一是"二步法"生长机制引入的位错;二是是由于图形衬底上不同区域GaN晶体相互连接时由于晶面不连续所造成的位错群;三是由于图形衬底制作工艺过程中引入的表面污染与损伤.     

Fabrication of large-area nano-scale patterned sapphire substrate with laser interference lithography

Periodic triangle truncated pyramid arrays are successfully fabricated on the sapphire substrate by a low-cost and high-efficiency laser interference lithography（LIL）system.Through the combination of dry etching and wet etching techniques,the nano-scale patterned sapphire substrate（NPSS）with uniform size is prepared.The period of the patterns is 460 nm as designed to match the wavelength of blue light emitting diode（LED）.By improving the stability of the LIL system and optimizing the process parameters,well-defined triangle truncated pyramid arrays can be achieved on the sapphire substrate with diameter of 50.8 mm.The deviation of the bottom width of the triangle truncated pyramid arrays is 6.8%,which is close to the industrial production level of 3%.     

Growth of low dimensional structures on patterned substrates

Epitaxial growth of lattice-matched and strained heterostructures by molecular beam epitaxy (MBE) has reached a high level of maturity in terms of the understanding of growth mechanisms, and of the development of high performance and novel electronic and optoelectronic devices. In view of applications to next-generation devices, various approaches for the formation of quantum confinement nanostructures are being intensively studied. An area whose full potential is yet to be exploited is the growth of heterostructures on patterned substrates. In this article some of the latest results obtained in this area of research are presented.