Accelerated surface flattening by alternating Ga flow in hydride vapor phase epitaxy

GaN films were grown on c$c$-plane sapphire substrates by using hydride vapor phase epitaxy (HVPE) with a pulsed flow of HCl over Ga metal. NH₃${\mathrm{NH}}_3$ gas supply was controlled to flow in a constant rate or in a modulated way. The surface morphology dependence of these films on the various flow modulation schemes was investigated. Depending on the duty cycle of NH₃${\mathrm{NH}}_3$ flow, the surface morphology of GaN films was sensitively modified. This sensitive response of surface morphology of GaN films to the flow modulation was attributed to diffusion efficiency variation of Ga species under different gas environment. Under proper modulation conditions, flattened top-surface morphology of nucleated domains was found to be obtained.     

Growth of InAsSb/InAs MQWs on GaSb for mid-IR photodetector applications

We report the OMVPE growth and characterization of InAsSb/InAs strain balanced multiple quantum wells lattice-matched to GaSb substrates for potential application as mid-infrared detectors for wavelengths beyond 4 μm$\mathrm{\mu }\mathrm{m}$. Detailed transmission electron microscopy measurements were performed to evaluate the degree of Ga and Sb intermixing at the GaSb/InAsSb and InAs/InAsSb interfaces. Photoluminescence emission up to 5 μm$\mathrm{\mu }\mathrm{m}$ was observed for superlattice structures with only 15% antimony. The dependence of PL on wavelength is red shifted compared to expectations based on type I band alignment.     

Applicability of LES turbulence modeling for CZ silicon crystal growth systems with traveling magnetic field

To examine the applicability of LES turbulence modeling for CZ silicon crystal growth systems with traveling magnetic fields, LES calculations with Smagorinsky–Lilly turbulence model and van Driest damping at the solid walls are carried out. The program package for the calculations was developed on the basis of the open-source code library OpenFOAM^®${\mathrm{OpenFOAM}}^{\circledR }$. A previously published laboratory model with low temperature melt InGaSn, a 20” crucible, and process parameters corresponding to industrial Czochralski silicon systems is considered. Flow regimes with two crystal and crucible rotation rates and with different strengths of the traveling magnetic field “down” are analyzed. The calculated distributions of averaged temperature and standard temperature deviations are compared with measured ones in the laboratory system, and a relatively good agreement between them is shown. The influence of chosen time steps and grid sizes is analyzed by comparing Fourier spectra of temperature time-autocorrelation functions and temperature spatial distributions, and it is shown that the used moderate meshes of few hundred thousand cells can be applied for practical calculations.     

Hybrid observation of crystal growth using laser confocal microscope with atomic force microscope

We built up a hybrid microscope system that consists of an atomic force microscope (AFM) and a laser confocal microscope with differential interference contrast microscope (LCM-DIM) and investigated the combined imaging of a potassium dihydrogen phosphate (KDP) crystal surface and its growth. Using this integrated setup, we were able to approach a AFM cantilever tip to several-ten μm$\mathrm{\mu }\mathrm{m}$ crystals using an optical microscope with AFM and to observe steps with measuring the height using LCM-DIM/AFM. Evaluation of the accuracy of the setup was studied and resulted in less than 100 nm of the AFM tip accuracy using LCM-DIM/AFM. We also demonstrated an in-situ observation of a KDP crystal growth using LCM-DIM/AFM. The interference fringes at the cantilever and the movements of steps were simultaneously observed.     

Local structural,magnetic, and optical properties of Zn1−xFexO thin films

High quality Zn_1−xFe_xO thin films were deposited on α-sapphire$\alpha \text{-sapphire}$ substrates by RF magnetron sputtering. X-ray absorption fine structure measurements showed that the chemical valence of Fe ions in the films was a mixture of 2+ and 3+ states, and Fe ions substituted mainly for the Zn sites in the films. DC-magnetization measurements revealed ferromagnetic properties from 5 to 300 K. The photoluminescence measurements at 15 K showed a sharp main transition peak at 3.35 eV along with a broad impurity peak at 2.45 eV. The structural and magnetization analyses of the Zn_1−xFe_xO films strongly suggested that the ferromagnetism was the intrinsic properties of the films.