硅光电集成的曙光：多孔硅的电致发光

近两年来，多孔硅发光特性已经成为国际半导体界的研究热点，介绍了多孔硅器件电致发光方面的研究进展，给出了多孔硅器件的基本结构以及相应的光谱响应，阐述了多孔硅固态的电致发光在硅光电集成发展过程中的重要意义以及目前尚未解决的问题，展示了它们在技术领域中的潜在应用。     

多孔硅/DR1复合膜三阶非线性光学性质的研究

采用物理吸附方法制备出多孔硅和偶氮化合物染料分散红（DR1）的复合薄膜.用单光束扫描法研究了多孔硅/ DR1复合膜的三阶非线性光学性质，测量了在1064 nm处多孔硅/DR1复合膜的双光子吸收系数和非线性折射率.实验结果表明，同多孔硅相比，多孔硅/DR1复合膜三阶非线性光学效应明显得到了增强.     

金—多孔硅光致发光和红外光谱研究

报道了金－多孔硅 稳态光致发光，瞬态光致发光和傅里叶变换红外光谱的研究，讨论了金在多孔硅表面吸附产生的表面电子态对多孔硅光致发光特性的影响。     

金－多孔硅光致发光和红外光谱研究

报道了金－多孔硅的稳态光致发光，瞬态光致发光和傅里叶变换红外光谱的研究，讨论了金在多孔硅表面吸附产生的表面电子态对多孔硅光致发光特性的影响。     

矫顽力可调的多孔硅基Fe膜

采用电化学腐蚀法制备了不同多孔度的多孔硅(PS),再通过磁控溅射法在该PS衬底上沉积了一定厚度的Fe膜;并对样品进行了X射线衍射的结构分析、扫描隧道显微技术的表面形貌观察和磁光克尔效应的测量.发现在同一Fe膜厚度下，相对于参考样品硅上的Fe膜，多孔硅上Fe膜的矫顽力更大;同时观察到多孔硅基Fe膜随着PS多孔度的增加，矫顽力相应变大;而对于多孔度相同的多孔硅基样品,随着Fe膜厚度的增加矫顽力却逐步减小.得出了多孔硅特有的海绵状疏松结构能有效调节Fe膜矫顽力大小的结论. 关键词： 多孔硅 海绵状结构 Fe薄膜 矫顽力     

少子寿命和表面形貌与多孔硅发光性能的关系

研究了不同时间腐蚀的多孔硅的光致发光性能与多孔硅的表面形貌和少子寿命之间的关系。结果表明,多孔硅的发光来自与氧空位有关的缺陷,而多孔硅表面的氢原子能够钝化多孔硅表面的非辐射中心从而提高多孔硅的发光效率。多孔硅的空隙度随腐蚀时间的延长而增大,这也导致了多孔硅的少子寿命的降低,从而造成多孔硅的光致发光效率随多孔硅空隙度的增大以及少子寿命的降低而提高。另外,原子力显微照片表明长时间的腐蚀使多孔硅表面层被化学腐蚀,从而降低了多孔硅表面的粗糙度。     

多孔硅——一种新形态的硅材料

多孔硅（ｐｏｒｏｕｓ　Ｓｉｌｉｃｏｎ）是指通过对氢氟酸溶液中的晶体硅片进行阳极氧化，在硅衬底上形成的多孔态的硅材料．本文介绍了多孔硅的形成规律和结构形貌，并对其光学性质和形成机制仆行了简要的评介，最后以多孔硅在大规模集成电路中的应用为主讨论了它的技术应用．     

基于纳米压痕法的多孔硅硬度及杨氏模量与微观结构关系研究

采用电化学腐蚀制备多孔硅，利用场致发射扫描式电子显微镜(field emission scanning electron microscope，FESEM)观测多孔硅的二维微观形貌，利用Nano Indenter XP中的纳米轮廓扫描仪组件(nano profilometry, NP)得到其三维拓扑分析图像，分析了微观结构差异的原因并讨论了多孔硅内部微观结构对其机械性能的影响；利用MTS Nano Indenter XP纳米压入测量仪器，研究了多孔硅的显微硬度和杨氏模量随压入深度的变化规律，比较了不同孔隙率多孔硅的机械性能差别.实验结果测得40mA/cm²，60mA/cm²，80mA/cm²和100mA/cm²四个不同腐蚀电流密度条件下制备多孔硅样品的孔隙率在60%—80%范围内，孔隙率随着腐蚀电流密度的增加而增大；在氢氟酸(HF)浓度为20%的条件下制备出多孔硅样品的厚度在40μm—50μm范围内；测得多孔硅的平均硬度、平均杨氏模量分别在0.478GPa—1.171GPa和10.912GPa—17.15GPa范围内，并且其数值随腐蚀电流密度的增加而减小，在纳米硬度范围内随压入深度的增加而减小，在显微硬度范围内其数值保持相对恒定，分析了样品表面、厚度、微观结构，及环境对其机械性能的影响，得到了多孔硅力学性能随其微观尺度形貌的变化规律. 关键词： 多孔硅 微观结构 硬度 杨氏模量     

多孔硅蓝光发射与发光机制

在制备出光致发光能量为２．７ｅＶ的发射蓝光多孔硅的基础上对它进行了较系统的研究：测量了它的光致发光时间分辨光谱，用傅里叶交换红外光谱分析了其表面吸附原子的局域振动模，研究了γ射线辐照对其发光的影响，并与发红、黄光的多孔硅作了对比，通过空气中长期存放、激光和紫外线照射的方法，研究了光致发光峰能量为２．７ｅＶ的多孔硅发光稳定性．我们及其它文献中报道的多孔硅蓝光发射的实验结果与量子限制模型矛盾，但能用量子限制／发光中心模型解释．我们认为多孔硅的２．７ｅＶ发光是多孔硅中包裹纳米硅的ＳｉＯ_x层中某种特征发光中心引起的． 关键词：     

多孔硅尺寸的理论研究

研究了球形纳米硅的振动特性及Raman谱，建立了Raman移动与尺寸的对应关系．用球形纳米硅来模拟多孔硅，发现多孔硅的尺寸比通常认为的尺度要小得多 关键词：     

多孔硅后处理对其镶嵌染料光学特性的影响

对多孔硅进行真空退火处理和暴露大气快速退火处理,将有机染料香豆素102(C102)镶嵌其中,研究镶嵌复合膜发光特性的变化。通过比较多孔硅退火处理前、后傅立叶红外(FT-IR)吸收光谱的变化,从多孔硅与镶嵌染料分子间的能量传递方式角度出发,解释了PS表面态氧化能改善镶嵌复合膜发光特性的原因。实验通过改变多孔硅表面态,提高了复合膜的发光效率和多孔硅基体的透明程度,证明了多孔硅是一种良好的载体,在发展固体激光器方面有一定的应用,同时为实现硅基蓝绿发光开辟一条新的途径。     

发光多孔硅表面微结构及其晶格畸变的实验研究

用电化学方法制备了不发光多孔硅和发光多孔硅,用X射线双晶衍射对两类多孔硅表面进行了微结构分析和晶体质量表征,实验表明两类多孔硅的微结构间存在着很大差别。不发光多孔硅表面对X射线的双晶衍射摇摆曲线可解叠成两个峰,它们分别来自样品多孔层和单晶硅衬底,而发光多孔硅对X射线的双晶衍射摇摆曲线呈高斯对称分布,不可解叠。发光多孔硅比不发光多孔硅表面晶体质量差,且电化学腐蚀越严重,表面晶体质量下降也越严重。     

Determination of the effective refractive index of porous silicon/polymer composite films

The equation for calculating the effective refractive index of porous silicon inserted polymer was obtained by three-component Bruggeman effective medium model. The dependence of the effective refractive index of porous silicon/polymer composite films on the polymer fraction with various initial porosity was given theorically and experimentally respectively. The porous silicon and polymer polymethylmetacrylate based dispersive red one (PMMA/DR1) composite films were fabricated in our experiments. It is found that the measured effective refractive index of porous silicon inserted polymer was slightly lower than the calculated result because of the oxidization of porous silicon. The effective refractive index of oxidized porous silicon inserted polymer also was analyzed by four-component medium system.     

多孔硅光致发光峰半峰全宽的压缩

硅发光对于在单一硅片上实现光电集成是至关重要的.目前已有的使硅产生发光的方法有:掺杂深能级杂质、掺稀土离子、多孔硅、纳米硅以及Si/SiO₂超晶格.声空化所引发的特殊的物理、化学环境为制备光致发光多孔硅薄膜提供了一条重要的途径.实验表明,声化学处理对于改善多孔硅的微结构,提高发光效率和发光稳定性都是一项非常有效的技术.超声波加强阳极电化学腐蚀制备发光多孔硅薄膜,比目前通用的常规方法制备的样品显示出更优良的性质.这种超声波的化学效应源于声空化,即腐蚀液中气泡的形成、生长和急剧崩溃.在多孔硅的腐蚀过程中,由于超声波的作用增加了孔中氢气泡的逸出比率和塌缩,有利于孔沿垂直方向的腐蚀,使多孔硅光致发光峰的半峰全宽压缩到了3.8nm.     

Peculiarities of photoluminescence of porous silicon with luminescent liquid crystal fillers

Photoluminescence spectra of porous silicon filled by luminescent liquid crystals 5CB and H109 were investigated. It was observed that there were photoluminescence bands corresponding to both porous silicon and liquid crystal in experimental spectra. In addition, the band corresponding to porous silicon increases in comparison with photoluminescence of porous silicon without the filler. Experimental results are explained by the radiating and nonradiating energy transfer from liquid crystal to porous silicon.     

Annealing and amorphous silicon passivation of porous silicon with blue light emission

The photoluminescence (PL) of the annealed and amorphous silicon passivated porous silicon with blue emission has been investigated. The N-type and P-type porous silicon fabricated by electrochemical etching was annealed in the temperature range of 700-900 °C, and was coated with amorphous silicon formed in a plasma-enhanced chemical vapor deposition (PECVD) process. After annealing, the variation of PL intensity of N-type porous silicon was different from that of P-type porous silicon, depending on their structure. It was also found that during annealing at 900 °C, the coated amorphous silicon crystallized into polycrystalline silicon, which passivated the irradiative centers on the surface of porous silicon so as to increase the intensity of the blue emission.     

Characterization of thermal, optical and carrier transport properties of porous silicon using the photoacoustic technique

In this work, the porous silicon layer was prepared by the electrochemical anodization etching process on n-type and p-type silicon wafers. The formation of the porous layer has been identified by photoluminescence and SEM measurements. The optical absorption, energy gap, carrier transport and thermal properties of n-type and p-type porous silicon layers were investigated by analyzing the experimental data from photoacoustic measurements. The values of thermal diffusivity, energy gap and carrier transport properties have been found to be porosity-dependent. The energy band gap of n-type and p-type porous silicon layers was higher than the energy band gap obtained for silicon substrate (1.11 eV). In the range of porosity (50-76%) of the studies, our results found that the optical band-gap energy of p-type porous silicon (1.80-2.00 eV) was higher than that of the n-type porous silicon layer (1.70-1.86 eV). The thermal diffusivity value of the n-type porous layer was found to be higher than that of the p-type and both were observed to increase linearly with increasing layer porosity.     

Correlation of excitation-wavelength dependent photoluminescence with the fractal microstructures of porous silicon

The correlation of the excitation-wavelength dependent photoluminescence with the fractal microstructures of porous silicon has been investigated. As the excitation wavelength increases from 340 to 650 nm, the photoluminescence of porous silicon redshifts from 500 to 780 nm. The excitation-wavelength dependent photoluminescence suggests the existence of a size distribution for the large number of silicon nanocrystallites in porous silicon. Using scanning electron microscopy and computer simulation, we have investigated the fractal features of the microstructures of porous silicon. Our results have demonstrated that the fractal features in the microstructures of porous silicon indicate the existence of a size distribution for the silicon nanocrystallites in porous silicon. The recorded excitation-wavelength dependent photoluminescence of porous silicon can be interpreted in terms of the bond-order-length-strength correlation theory.     

Photoacoustic investigations of the optical absorption spectra of porous silicon layers on a silicon backing

This paper presents a series of experimental photoacoustic spectra of porous silicon layers on crystalline silicon and their numerical analysis performed in the proposed two-layer model. The goal of the analysis was to calculate the optical absorption spectra of porous silicon from the photoacoustic spectra of porous silicon layers on a silicon background. The experimental character of the observed absorption band associated with the porous silicon was revealed. This is the first attempt at a theoretical interpretation of the photoacoustic spectra of porous silicon on a silicon backing.