Fabrication of microfluidic optical waveguides on glass chips with femtosecond laser pulses

We describe the fabrication of microfluidic channel structures on the surface of a borosilicate glass slide by femtosecond laser direct writing for optical waveguide application. Liquid with a variable refractive index is fed into the microchannel, serving as the core of the waveguide. We demonstrate that either a multimode or a single-mode waveguide can be achieved by controlling the refractive index of the liquid.     

Applications of multimode interference effects in gradient waveguides produced by ion-exchange in glass

The paper is concerned with applications of multimode interference structures (MMI) as the elements of integrated optic circuits. Investigations of MMI produced by ion-exchange in glass, obtained by visualization method of light propagation in gradient structures, using fluorescence of the substance covering the MMI section, are presented. Experimental results concern the self-imaging phenomena for symmetrical and paired interference for TE, TM and unpolarized light excitation. On the base of investigations and BPM simulations the applications of MMI are proposed.     

Control of femtosecond laser written waveguides in silica glass

Writing conditions for the fabrication of optical waveguides in bulk fused silica glass by use of 1 kHz focused femtosecond laser pulses at 800 nm were systematically determined for different focusing geometries. The results demonstrate that waveguides can be formed based on optical breakdown, filamentation (single or multiple), or a combination of both processes, when using pulse energies lower than the threshold of structural damage. The mechanisms of laser-induced index change are also discussed. PACS 42.65.Jx; 42.70.Ce; 42.79.Gn     

Interference microscopy of femtosecond laser written waveguides in phosphate glass

By focusing fs-laser radiation in the volume of a transparent material the refractive index can be changed locally, leading to 3-dimensional waveguiding structures. Waveguides are written in phosphate glass (IOG from Schott) at a depth of 100 μm below the surface. The pulse energy and the scan velocity are varied. For the first time the optical path difference caused by the waveguides and therefore the refractive index distribution of the waveguides and their cross sections are determined using interference microscopy. The optical path difference measured in the written structures and their cross sections is analyzed by a phase-shift algorithm. Thus, the refractive index distribution both along a line perpendicular to the waveguide and in the plane of a cross section is determined. The results are visualized as 2-dimensional graphics. Several regions of opposite sign of the refractive index change are observed in the cross sections of waveguides generated by femtosecond laser pulses. The number and the size of these regions are increasing with increasing pulse energy and decreasing scan velocity.     

Optical loss measurements in femtosecond laser written waveguides in glass

The optical loss is an important parameter for waveguides used in integrated optics. We measured the optical loss in waveguides written in silicate glass slides with high repetition-rate (MHz) femtosecond laser pulses. The average transmission loss of straight waveguides is about 0.3 dB/mm at a wavelength of 633 nm and 0.05 dB/mm at a wavelength of 1.55 μm. The loss is not polarization dependent and the waveguides allow a minimum bending radius of 36 mm without additional loss. The average numerical aperture of the waveguides is 0.065 at a wavelength of 633 nm and 0.045 at a wavelength of 1.55 μm. In straight waveguides more than 90% of the transmission loss is due to scattering.     

Fabrication of hollow optical waveguides in fused silica by three-dimensional femtosecond laser micromachining

We report on the fabrication of hollow optical waveguides in fused silica using femtosecond laser micromachining. We show that in such hollow waveguides, high-intensity femtosecond laser beams can be guided with low optical loss. Our technique, which was established earlier for fabrication of optofluidic structures in glass, can ensure a high smoothness at the inner surfaces of the hollow waveguides and provide the unique capability of fabrication of hollow waveguides with complex geometries and configurations. A transmission of ∼90% at 633 nm wavelength is obtained for a 62-mm-long hollow waveguide with an inner diameter of ∼250 μm. In addition, nonlinear propagation of femtosecond laser pulses in the hollow waveguide is demonstrated, showing that the spectral bandwidth of the femtosecond pulses can be broadened from ∼27.2 to ∼55.7 nm.     

Three-dimensional photonic devices fabricated in glass by use of a femtosecond laser oscillator

Three-dimensional photonic waveguide devices are fabricated in glass by use of femtosecond pulses from an extended-cavity laser oscillator. Three-dimensional devices, including a symmetric three-waveguide directional coupler and a three-dimensional microring resonator, are fabricated and tested. Waveguides can be fabricated at depths of approximately 1 mm inside a glass substrate, thus demonstrating the capability of achieving dramatic increases in device density. These results demonstrate the potential to fabricate new classes of devices that are not possible in two dimensions.     

Fabrication and analysis of a directional coupler written in glass by nanojoule femtosecond laser pulses

A directional coupler written in a glass sample by the focused 400-nm output from a 25-fs oscillator is reported. The coupler is single mode; the splitting ratio is 1.9 dB at 633 nm. A refractive-index profile of the waveguide with a magnitude of Dn = 4.5 x 10(-3) was retrieved from a near-field mode pattern.     

Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining

Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. One of the most important features of femtosecond laser processing is that a femtosecond laser beam can induce strong absorption in even transparent materials due to nonlinear multiphoton absorption. This makes it possible to directly create three-dimensional (3D) microfluidic structures in glass that are of great use for fabrication of biochips. For fabrication of the 3D microfluidic structures, two technical approaches are being attempted. One of them employs femtosecond laser-induced internal modification of glass followed by wet chemical etching using an acid solution (Femtosecond laser-assisted wet chemical etching), while the other one performs femtosecond laser 3D ablation of the glass in distilled water (liquid-assisted femtosecond laser drilling). This paper provides a review on these two techniques for fabrication of 3D micro and nanofluidic structures in glass based on our development and experimental results.     

Generation of bubbles in glass by a femtosecond laser

Permanent microscale bubbles with varied size and number density are induced in borosilicate glasses by adjusting the focusing depth (FD) of a tightly focused femtosecond laser. With continuously increasing of the focusing depth, the average size of generated bubbles experiences an increase-decrease process. However, the number density of generated bubbles experiences an opposite changing process compared to the change of the size. The possible mechanism for the bubble generation and changing with the focusing depth has been discussed.     

Fabrication of single-mode waveguide structure in optical multimode fluoride fibers using self-channeled plasma filaments excited by a femtosecond laser

A permanent structure of a single-mode waveguide in optical multimode fluoride fibers was first fabricated using a self-channeled plasma filament excited by a femtosecond (110-fs) Ti:sapphire laser (_p=800 nm). The photoinduced refractive-index modification in a multimode step-index fluoride glass (ZBLAN) fiber with a 100/110-m core/cladding diameter reached a length of approximately 12–15 mm from the input surface of the optical fiber, with the diameters ranging from 5 to 8 m at input intensities more than 1.0×10¹² W/cm². The graded refractive-index profiles were fabricated to have a symmetric form from the center of a multimode fluoride fiber and a maximum value of the refractive-index change (n) was measured to be 1.3×10^-2. The beam profile of the output beam transmitted through the modified multimode fibers showed that the photoinduced refractive-index modification produced a permanent structure of a single-mode waveguide. PACS 42.55.-f; 42.65.Jx; 42.81.Wg     

Writing low-loss waveguides in borosilicate (BK7) glass with a low-repetition-rate femtosecond laser

Borosilicate glass (BK7) is a widely-used material in integrated optics devices and in the optical communications industry. We report on laser-written waveguiding in BK7 glass using a low-repetition-rate (1 kHz) laser producing 40 fs pulses of 800 nm light. A 500 μm slit is used to write structures 100 μm below the glass surface. These waveguides show strong guidance at 635 nm, with an index contrast of 3 × 10^− 4 and a propagation loss of ~ 0.5 dB/cm. We measured the change in refractive index for a range of writing conditions as quantified in terms of energy dose; there is an energy dose window (> 0.6 μJ μm^− 3 and < 1.5 μJ μm^− 3) within which the written structures show guidance.     

Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy

Using tightly focused femtosecond laser pulses of just 5 nJ, we produce optical breakdown and structural change in bulk transparent materials and demonstrate micromachining of transparent materials by use of unamplified lasers. We present measurements of the threshold for structural change in Corning 0211 glass as well as a study of the morphology of the structures produced by single and multiple laser pulses. At a high repetition rate, multiple pulses produce a structural change dominated by cumulative heating of the material by successive laser pulses. Using this cumulative heating effect, we write single-mode optical waveguides inside bulk glass, using only a laser oscillator.     

Fabrication of complex nanostructures on ZnO crystals by the interference of three femtosecond laser beams

By adjusting the laser polarization combinations, fluences and pulse numbers, we fabricated several types of two-dimensional (2D) complex nanostructures on the surface of c-cut ZnO single crystal by the interference of three femtosecond laser beams with central wavelength of 800 nm, pulse duration of 50 fs and pulse repetition frequency of 1 kHz. The hexagonal 2D nanostructures with a period of 600 nm are very regular and uniform, in which nanoparticles, nanorings and nanoripples with sizes of 200 nm are embedded. Excited by 800 nm femtosecond laser pulses, the photoluminescence (PL) micrographs reveal that the 2D nanostructures can emit purer and brighter blue light compared with the plane surface. These nanostructures have potential applications in blue light-emitting diodes (LEDs), high density optical storage and other optoelectronic devices.     

Fabrication of micro-gratings on Au-Cr thin film by femtosecond laser interference with different pulse durations

We encoded surface relief micro-gratings on Au-Cr thin films using two-beam interference of femtosecond laser pulses with the durations from 25 fs to 70 fs. The dependence of the fabrication quality on the pulse duration has been investigated both numerically and experimentally. The results revealed that the shorter pulses were preferable to prepare periodical microstructures with minimal ablation fringe width and satisfied fabrication quality. This work has potential applications on periodic functional microstructures fabrication for ultra-fine processing and modification on various materials, especially for intractable materials.     

Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator

Single-mode X couplers and three-dimensional waveguides are fabricated in transparent glasses by use of an unamplified femtosecond laser generating energies of up to 100 nJ. Changing fabrication parameters such as power and scanning speed permits creation of waveguides with a wide range of structures and refractive-index difference. Optical coherence tomography shows large refractive-index changes of up to ~10(-2) in the waveguides; these changes are consistent with guided mode analysis.     

Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications. PACS 42.62.-b; 81.05.Kf; 82.50.Pt     

Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing

Microfluidic dye lasers three-dimensionally embedded in glass have been fabricated for what is believed to be the first time by integrating micro-optical and microfluidic components by use of a femtosecond laser. By pumping the microfluidic laser, in which the microfluidic chamber was filled with the laser dye Rhodamine 6G dissolved in ethanol, with a frequency-doubled Nd:yttrium aluminum garnet laser, lasing action was confirmed by analysis of the emission spectra at different pump powers. In addition, by arranging two microfluidic chambers serially in the glass, we built a microfluidic twin laser that produces an array of two simultaneous laser emissions with one pump laser.     

Micromachining soda-lime glass by femtosecond laser pulses

The physical process of forming a modified region in soda-lime glass was investigated using 1 kHz intense femtosecond laser pulses from a Ti: sapphire laser at 775 nm. Through the modifications induced by the femtosecond laser radiation using selective chemical etching techniques, we fabricated reproducible and defined microstructures and further studied their morphologies and etching properties. Moreover, a possible physical mechanism for the femtosecond laser modification in soda-lime glass was proposed.