GaAs/Ge/GaAs Heterostructures for Use in Nonlinear Optics

GaAs/Ge/GaAs heterostructures with sublattice reversed GaAs on Ge epilayers grown via molecular beam epitaxy (MBE) for periodic domain inverted structures are presented. For the first time, such structures are grown in separate MBE machines for GaAs and Ge with atmospheric wafer transfer. The high quality of the heterostructures is confirmed via X-ray diffraction and photoluminescence. It is proposed that the surfactants (Bi, Sb) be used to control the nucleation of GaAs epilayers on a Ge epilayer.     

Orientation-patterned templates GaAs/Ge/GaAs for nonlinear optical devices. II. Investigation of properties

GaAs/Ge/GaAs heterostructures in which GaAs layer lattices are rotated at a right angle in the substrate plane are studied. High quality of heterostructures is confirmed by X-ray diffraction and photoluminescence methods.     

Antiphase disorder in GaAs/Ge heterostructures for solar cells

Antiphase disorder in metal organic vapour phase epitaxy grown GaAs/(100)Ge heterostructures has been studied both in as-grown materials and in GaAs solar cells by chemical etching, transmission electron microscopy, and cathodoluminescence. All the samples are single domains at the surface due to the self-annihilation of antiphase domains whose size decreases as the misorientation angle increases. Completely antiphase domain-free epitaxy has been achieved for substrate miscuts greater than 3 degrees off towards [111]. A reversal in sublattice location has been found in the GaAs layers varying the misorientation angle and the growth temperature. A model to explain this result has been proposed based on the role of surface steps in the nucleation process. Strong interaction between antiphase boundaries and misfit dislocations has been found in all the heterostructures. In solar cells antiphase domains have been observed in high densities in the initial layer of GaAs deposited on Ge. The successful realisation of high efficiency solar cells is due to the overgrowth of these domains by single phase material over most of the wafer area.     

金辅助催化方法制备GaAs和GaAs/InGaAs纳米线结构的形貌表征及生长机理研究

利用金（Au）辅助催化的方法,通过金属有机化学气相沉积技术制备了GaAs纳米线及GaAs/InGaAs纳米线异质结构.通过对扫描电子显微镜（SEM）测试结果分析,发现温度会改变纳米线的生长机理,进而影响形貌特征.在GaAs纳米线的基础上制备了高质量的纳米线轴、径向异质结构,并对生长机理进行分析.SEM测试显示,GaAs/InGaAs异质结构呈现明显的“柱状”形貌与衬底垂直,InGaAs与GaAs段之间的界面清晰可见.通过X射线能谱对异质结样品进行了线分析,结果表明在GaAs/InGaAs轴向纳米线异质结构样品中,未发现明显的径向生长.从生长机理出发分析了在GaAs/InGaAs径向纳米线结构制备过程中伴随有少许轴向生长的现象.     

The dependence of the strain effects on the ZnTe layer thicknesses in ZnTe/GaAs heterostructures

Photoluminescence (PL) and spectroscopic ellipsometry measurements on ZnTe/GaAs strained heterostructures grown by molecular beam epitaxy were carried out to investigate the strain effect depending on the ZnTe epitaxial layer thickness. PL spectra show that the PL peaks corresponding to the excitons bound to neutral acceptors shift toward the higher-energy side with increasing the ZnTe film thickness. As the strain increases, the value of the critical-point energy shift obtained from the spectroscopic ellipsomerty increases. The strains in the ZnTe layers grown on GaAs substrates are expected to decrease with increasing the ZnTe layer thickness. These results indicate that the strains in the ZnTe layers grown on GaAs substrates are strongly dependent on the ZnTe layer thickness.     

Depth-resolved cathodoluminescence characterization of buried InGaP/GaAs heterointerfaces

As a new approach for contactless and non-destructive characterization method of buried multi-layer heterointerfaces, acceleration voltage-dependence of cathodoluminescence (CL) spectra is investigated for various InGaP/GaAs multi-layer heterostructures. The plot of CL intensity vs. acceleration voltage for a multi-layer heterostructure is defined as the cathodoluminescence in-depth spectrum (CLIS). Experimental CLIS spectra on InGaP/GaAs single heterostructures and quantum well structures grown on GaAs by MOVPE and by GSMBE using TBP as the P source demonstrate that CLIS technique is very powerful to obtain depth-resolved information on multi-layer heterostructures.     

有源层掺杂剂对Ga1-xAlxAs/GaAs双异质结发光管特性的影响

本文研究了由液相外延技术生长的GaAIAs/GaAs双异质结材料制成的发光管,有源层掺杂剂对器件特性的影响结果表明,器件结构和器件制作工艺相同的GaAIAs/GaAs发光管,有源层掺Si可获得较大的光输出功率,而频响特性<15MHz,波长在8700Å以上;对有源层掺Ge器件,光输出功率低于掺Si器件,而频响特性则>15MHz,波长可控制在8200Å~8500Å.深能级测量表明二者有不同的深能级位置,对掺Si(氧沾污)器件,Ec-ET≈0.29eV,而掺Ge器件ET-Ev≈0.42eV.两种掺杂剂对有源层暗缺陷的影响尚无明显区别.     

Influence of elastic strains in sublayers on the critical thickness of the Stranski-Krastanow transition for the GeSi/Si(001) system

A novel estimation of the critical thickness of the epitaxial layer in the Stranski-Krastanow (SK) transition is proposed. The transition criterion is based on accumulation of the energy of the effective strain up to a certain critical value. The calculation includes the elastic energy stored in elastically strained layers, takes into account the restriction on the depth of the strained layer still affecting the transition, and a segregation effect described by thermally activated atomic exchange. The equations of growth on the vicinal substrate surface that divide each monolayer into submonolayers parallel to the surface are used. Simulation results are compared with the corresponding experimental data for the heterostructures built of a strained sublayer covered by a spacer layer on which a wetting layer is deposited until the SK transition occurs. The Ge/Si structures of this type are grown by molecular beam epitaxy, and in addition, the experimental results for InAs/GaAs systems, published in the literature, are used. A comparison of experimental and calculated data on the dependence between the critical thickness of the wetting layer and the thickness of the spacer layer shows good agreement for both Ge/Si and InAs/GaAs systems.     

GaSb/AlSb/GaAs应变层结构的分子束外延生长

本文以反射式高能电子衍射(RHEED)和其强度振荡为监测手段,在半绝缘GaAs衬底上成功地生长GaSb/AlSb/GaAs应变层结构,RHEED图样表明,GaSb正常生长时为Sb稳定的C(2×6)结构,AlSb为稳定的(1×3)结构,作者观察并记录GaSb,AlSb生长时的RHEED强度振荡,并利用它成功地生长10个周期的GaSb/AlSb超晶格,透射电子显微镜照片显示界面平整、清晰,采用较厚的AlSb过渡层及适当的生长条件,可在半绝缘GaAs衬底上生长出质量好的GaSb外延层,其X射线双晶衍射半峰宽小于 关键词：     

生长速率对低压MOCVD外延生长GaAs/Ge异质结的影响

采用自制的液相金属氧化物化学汽相沉积(LP-MOCVD)设备,在Ge(100)向(110)面偏9°外延生长出GaAs单晶外延层,对电池材料进行了X射线衍射测试分析,半峰宽为52″.讨论了外延生长参量对GaAs/Ge的影响,表明抑制反向畴不仅与过渡层有关,而且与GaAs单晶外延生长参量有关.适当的生长速率可有效地抑制反向畴的生长.     

Epitaxial ferromagnetic thin films and heterostructures of Mn-based metallic and semiconducting compounds on GaAs

We present two approaches to integrate magnetic materials with III–V semiconductors. One is epitaxial ferromagnetic metallic films and heterostructures on GaAs (0 0 1) substrates. Although crystal structure, lattice constant, chemical bonding and other properties are dissimilar, ferromagnetic hexagonal MnAs thin films and MnAs/NiAs ferromagnet/nonmagnet heterostructures (HSs) are grown on GaAs by molecular beam epitaxy (MBE). Multi-stepped magnetic hysteresis are controllably realized in MnAs/NiAs HSs, making this material promising for the application to multi-level nonvolatile recording on semiconductors. The other approach is to prepare a new class of GaAs based magnetic semiconductor, GaMnAs, by low-temperature molecular beam epitaxy (LT-MBE) on GaAs (0 0 1). New III–V based superlattices consisting of ferromagnetic semiconductor GaMnAs and nonmagnetic semiconductor AlAs are also successfully grown. Structural and magnetic properties of these new heterostructures are presented.     

GaAs quantum well structures investigation by local cathodoluminescence

The article shows the cathodoluminescence technique application to a quality analysis of a semiconductor multilayer heterostructures. Two structures with a GaAs quantum well embedded between the AlGaAs and GaInP barriers were investigated. The AlGaAs/GaAs/GaInP and GaInP/GaAs/AlGaAs structures were grown by MOCVD on a GaAs substrate. In this work we study the interface quality of quantum-dimensional GaAs layer by means of the local cathodoluminescence. Degradation and broadening of GaAs/GaInP interface occurring during the growth process of GaAs on GaInP layer was assumed to result in the formation of a layer with mixed composition at the interface. In addition, the presence of the layer prevented the formation of a quantum well in the GaAs layer. The transition layer was clearly observed by the cathodoluminescence. In the other case it was found that the growth of a structure with GaAs layer on top of AlGaAs produced a quantum well with a 10 nm thickness. The interface quality and layer thicknesses were also confirmed by the X-ray diffraction investigation of these structures.     

InAs/GaAs和InAs/InxGa1-xAs/GaAs纳米线异质结构的生长研究

利用金辅助金属有机化学气相沉淀法(MOCVD)在GaAs(111)B衬底上分别制备了InAs/GaAs和InAs/In _{x Ga1-xAs/GaAs(0≤x≤1)纳米线异质结构.实验结果显示,直接生长在GaAs纳米线上的InAs纳米线生长方向杂乱或者沿着GaAs纳米线侧壁向衬底方向生长,生长的含有In x Ga1-xAs组分渐变缓冲段的InAs/In x Ga1-x关键词： 纳米线异质结构 xGa1-xAs')" href="#">InxGa1-xAs 组分渐变缓冲层 金属有机化学气相沉淀法}     

Stranski–Krastanow growth of multilayer In(Ga)As/GaAs QDs on Germanium substrate

We have described Stranski–Krastanow growth of multilayer In(Ga)As/GaAs QDs on Ge substrate by MBE. The growth technique includes deposition of a thin germanium buffer layer followed by migration-enhanced epitaxy (MEE) grown GaAs layer at 350°C. The MEE layer was overgrown by a thin low-temperature (475°C) grown GaAs layer with a subsequent deposition of a thick GaAs layer grown at 590°C. The sample was characterized by AFM, cross-sectional TEM and temperature-dependent PL measurements. The AFM shows dense formation of QDs with no undulation in the wetting layer. The XTEM image confirms that the sample is free from structural defects. The 8 K PL emission exhibits a 1051 nm peak, which is similar to the control sample consisting of In(Ga)As/GaAs QDs grown on GaAs substrate, but the observed emission intensity is lower. The similar slopes of Arrhenius plot of the integrated PL intensity for the as-grown QD sample grown on Ge substrate as well as for a reference QD sample grown on GaAs substrate are found to be identical, indicating a similar carrier emission process for both the samples. This in turn indicates coherent formation of QDs on Ge substrate. We presume due to the accumulated strain associated with the self-assembled growth of nanostructures on Ge that nonradiative recombination centers are introduced in the GaAs barrier in between the QD layers, which in turn degrades the overall optical quality of the sample.     

Molecular beam epitaxy growth of GaAs on an offcut Ge substrate

Molecular beam epitaxy growth of GaAs on an offcut Ge (100) substrate has been systemically investigated. A high quality GaAs/Ge interface and GaAs film on Ge have been achieved. High temperature annealing before GaAs deposition is found to be indispensable to avoid anti-phase domains. The quality of the GaAs film is found to strongly depend on the GaAs/Ge interface and the beginning of GaAs deposition. The reason why both high temperature annealing and GaAs growth temperature can affect epitaxial GaAs film quality is discussed. High quality In_0.17Ga_0.83As/GaAs strained quantum wells have also been achieved on a Ge substrate. Samples show flat surface morphology and narrow photoluminescence line width compared with the same structure sample grown on a GaAs substrate. These results indicate a large application potential for III--V compound semiconductor optoelectronic devices on Ge substrates.     

Observation of interface plasmon excitation in photoemission spectroscopy from the heterostructures Cu/RbF/GaAs(100) and Cu/RbF/Ge(100)

Synchrotron radiation photoelectron spectra taken at 100 eV photon energy have been measured to characterize the interface reactions of the metal-insulator-semiconductor systems Cu/RbF/GaAs(100) and Cu/RbF/Ge(100). In comparision, similar sequences are studied on the Cu/GaAs(100) and Cu/Ge(100) interfaces without the RbF interlayer. After Cu-deposition of 1–4 Å on RbF-covered (10–14 Å) GaAs and Ge surfaces, shoulder peaks appear on both the Ga 3d and Ge 3d core levels. The shoulder peaks are shifted 1.1 and 1.4 eV to higher binding energy for the Ga 3d and Ge 3d levels, respectively. The Rb 4p and F 2p peak positions are slightly shifted between 0.25 and 0.5 eV. The broad second Ga 3d and Ge 3d peaks can be correlated to plasmon loss of electrons from these levels in a two-dimensional Rb metal-like layer formed at the Cu/RbF interface. The excitation energy of a Rb surface plasmon in a Cu-Rb-RbF system is calculated to be 1.3 eV.     

空间用GaInP/GaAs/In0.3Ga0.7 As(1 eV)倒装三结太阳电池研制

采用阶变缓冲层技术 (step-graded) 外延生长了具有更优带隙组合的倒装GaInP/GaAs/In_0.3Ga_0.7As(1.0 eV) 三结太阳电池材料, TEM和HRXRD测试表明晶格失配度为2%的In_0.3Ga_0.7As 底电池具有较低的穿透位错密度和较高的晶体质量, 达到太阳电池的制备要求. 通过键合、剥离等工艺制备了太阳电池芯片. 面积为 10.922 cm² 的太阳电池芯片在空间光谱条件下转换效率达到32.64% (AM0, 25 ℃), 比传统晶格匹配的 GaInP/GaAs/Ge(0.67 eV) 三结太阳电池的转换效率提高3个百分点. 关键词： 太阳电池 三结 倒装结构     

高温处理工艺对低压MOCVD外延GaAs/Ge太阳电池的影响

采用自制的低压金属有机化学汽相淀积LP-MOCVD设备,在Ge衬底(100)面向(111)偏9°外延生长出GaAs电池结构,对电池材料进行了X射线衍射分析另外,对由此材料制成的太阳电池进行了性能测试,测试结果表明,Ge衬底的高温处理工艺对GaAs/Ge太阳电池的电流电压特性有一定的影响试验表明,在600～700℃之间高温处理效果较好。     

Simulation of the indium profile in InGaAs/GaAs quantum-size heterostructures

A new approach to describe phenomena attendant on the growth of thin InGaAs epitaxial layers by hydride MOCVD in terms of which the boundary gas layer is considered as quasi-liquid is suggested. A numerical model for simulating the concentration profiles of the components in quantum-well heterostructures is developed. It is based on the assumption that a state close to thermodynamic equilibrium exists near the interface. The concentration profiles are simulated by jointly solving equations that describe heterogeneous equilibria and material balance at the interface. The indium profiles in InGaAs/GaAs quantum-size heterostructures are simulated at various parameters of the epitaxy process, such as temperature, initial component ratio in the gas phase, and boundary layer thickness. The results obtained agree well with the available experimental data.     

A study of photosensitive InAs/GaAs heterostructures with quantum dots grown by ion-beam deposition

The possibility of obtaining ion-beam-deposited InAs/GaAs heterostructures with quantum dots for photovoltaic converters is shown. The surface morphology of the grown heterostructures is analyzed by scanning probe microscopy. Quantum dots and InAs nanoclusters with planar dimensions from 20 to 100 nm and a height from 5 to 80 nm are detected. The average surface density of quantum-dimensional InAs objects with a size below 35 nm is 10⁵ mm⁻². In the photoluminescence spectra (T = 300 K), a peak is revealed with a maximum at the wavelength λ = 1150 nm (hν ≈ 1.1 eV), which shows that the grown heterostructures contain InAs quantum dots of various sizes.