Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing

We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment, successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of 1.0 mm, and the other is the plano-convex microlens with radius R of 0.75 mm. Subsequently, by the continuous procedure of hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip. Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a single glass chip is highly effective for light beam guiding and focusing. PACS 42.62.-b; 81.05.Kf; 42.82.Cr; 82.50.Pt; 42.79.Gn     

Femtosecond two-photon stereo-lithography

We report herein a method for the three-dimensional (3D) fabrication of microstructures by means of direct fs-beam writing (scanning) inside a polymerizable resin. Photopolymerization takes place via two-photon absorption (TPA), as indicated by measurements of transmission power dependence. This concept of fabrication is based on two principles: the use of short, sub-picosecond pulses and simultaneous tight focusing (numerical aperture, NA>1). This approach creates a unique opportunity for avoiding self-focusing even at very high intensities, as the power is lower than the self-focusing threshold. Under such conditions, no filament formation takes place and no thermal convection disturbance occurs in the focal vicinity during photo-polymerization. This technique requires no sacrificial layers or structures in real 3D micro-stereo-lithography. Received: 31 May 2001 / Accepted: 6 June 2001 / Published online: 30 August 2001     

Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption

Effective energy windows for two-photon absorption (TPA) photopolymerization of resins were investigated and, with a properly selected laser pulse energy, exquisite three-dimensional (3D) microstructures with submicrometer spatial resolution were achieved. The results show the inherent utility of TPA in the fabrication of real 3D patterns. In particular, we propose and utilize a resin pre-exposure technique by which freely movable components affixed to an axle are built, demonstrating a new application of TPA in laser microfabrication.     

Planar defects in three-dimensional chalcogenide glass photonic crystals

Here we report on the direct laser writing fabrication of Fabry-Perot-type planar microcavities in a three-dimensional (3D) photonic crystal (PhC) embedded within a high-refractive nonlinear chalcogenide glass (ChG) film. The fabricated planar microcavities in a nonlinear ChG 3D PhC facilitate the observation of resonant modes inside the stop gap. The experimental results show that the length of the planar cavity can be well controlled by the fabrication power and thus be used to tune the defect modes. The tunability of the observed defect modes is confirmed by the theoretical prediction.     

Research on the resolution of micro stereo lithography

Micro stereo lithography is a kind of technology utilizing the solidified effect that photo curable polymer will appear under ultraviolet （UV） laser exposure. It is widely used in three-dimensional （3D） micro fabrication. We get the experimental values of a pair of UV laser curing coefficients, absorption coefficient and critical curing energy, of curable resin by fitting the calculation results of the Gaussian beam theory and experimental curing results. The theoretical relation between the curing unit＇s shape and the exposure features of time and intensity of convergent Gaussian beam is presented. The calculation and experimental results of curing unit under different conditions agree well with each other. This research offers a steady base for further research about the improvement of resolution.     

Etching-assisted femtosecond laser microfabrication

Although femtosecond laser microfabrication is one of the most promising three-dimensional(3D) fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However,the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication(EAFLM). Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.     

Femtosecond laser-assisted three-dimensional microfabrication in silica

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10mum in diameter inside the volume with any angle of interconnection and a high aspect ratio (10mum -diameter channels in a 100mum -thick silica slab).     

Formation and removal of multi-layered fluorescence patterns in gold-ion doped glass

We report the formation of fluorescence patterns inside gold-doped glass medium by femtosecond-laser fabrication. Strong fluorescence images appeared from the irradiated multi-layered region after low temperature annealing. We removed the images by exposing the glass to an electric furnace or a CO₂ laser beam for high temperature annealing. The method was also applied to recording, reading, and erasing of fluorescence data by a femtosecond laser, a 405-nm laser diode, and a CO₂ laser respectively.     

Three-dimensional micro-channels in polymers: one-step fabrication

We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 m were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals . PACS 42.70.-a; 42.70.Jk; 81.16.-c; 81.40.-z; 82.35.Lr     

Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser

A novel microchannel fabrication technology for quartz using a Q-switched Nd:YAG laser is presented. Complex 3D channel systems inside quartz substrates can be constructed directly using a laser beam by controlled fracturing, and high-quality microchannels can be fabricated by melting quartz using a laser-induced plasma. The behavior of laser-induced plasmas in drilling microchannels is discussed. The diameter of the microchannels can be controlled from 25 to 200 μm. The average roughness of the interior channel wall is less than 0.2 μm. Currently, microchannels longer than 4 mm in fused-quartz cubes can be achieved using laser-induced plasmas. Received: 15 January 2001 / Accepted: 5 June 2001 / Published online: 30 October 2001     

Log-pile photonic crystal of CdS–polymer nanocomposites fabricated by combination of two-photon polymerization and in situ synthesis

A log-pile photonic crystal of CdS nanoparticles–polymer nanocomposites was successfully fabricated by a novel method combining the two-photon polymerization technique and in situ synthesis of CdS nanoparticles in a polymer matrix. The photonic band gap of the three-dimensional (3D) log-pile photonic crystal is confirmed and becomes more effective for CdS nanoparticles–polymer nanocomposites than polymer doped with Cd²⁺ ions, because the nanocomposites possess a higher refractive index than the polymer. The proposed concept in the new fabrication method for a 3D microstructure of polymer nanocomposites should be of critical importance in providing a general methodology for functionalization of materials via functional nanocomposites used in the field of laser microstructure fabrication. PACS 42.70.Qs; 78.66.Sq; 81.40.Tv; 82.35.Np; 82.50.Pt     

Photoetching of spherical microlenses on glasses using a femtosecond laser

We fabricated spherical microlenses on optical glasses by femtosecond laser direct writing (FLDW) in ambient air. To achieve good appearances of the microlenses, a meridian-arcs scanning method was used after a selective multilayer removal process with spiral scanning paths. A positive spherical microlens with diameter of 48 μm and height of 13.2 μm was fabricated on the surface of the glass substrate. The optical performances of the microlens were also tested. Compared to the conventional laser direct writing (LDW) technique, this work could provide an effective method for precise shape-controlled fabrication of three-dimensional (3D) microstructures with curved surfaces on difficult-to-cut materials for practical applications.     

Three-dimensional microfabrication with two-photon-absorbed photopolymerization

We propose a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption with a pulsed infrared laser. An experimental system for the microfabrication has been developed with a Ti:sapphire laser whose oscillating wavelength and pulse width are 790 nm and 200 fs, respectively. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate monomers, and urethane acrylate oligomers.     

Three-dimensional photofabrication with femtosecond lasers for applications in photonics and biomedicine

A status report on rapidly advancing femtosecond laser technology, three-dimensional (3D) microstructuring by multiphoton illumination technique, is given. Taking its origin from multiphoton microscopy, this technique is now becoming an important microfabrication tool. In our work we apply near-infrared Ti:sapphire femtosecond laser pulses (at 800/780 nm) for 3D material processing. When tightly focused into the volume of a photosensitive material (or photoresist), they initiate 2PP process by, for example, transferring liquid into the solid state. This allows the fabrication of any computer generated 3D structure by direct laser “recording” into the volume of photosensitive material. 2PP of photosensitive materials irradiated by femtosecond laser pulses is now considered as enabling technology for the fabrication of 3D photonic crystals and photonic crystal templates. In particular, 2PP allows one to introduce defects at any desired locations, which is crucial for the practical applications. Recently, we studied possible applications of 2PP technique in biomedicine. 2PP is a very interesting technique for the fabrication of drug delivery systems, scaffolds for tissue engineering, and medical implants. These and other biomedical applications of 2PP will be reviewed.     

Fabrication of Micro -Optical Devices by a Femtosecond Laser

Femtosecond laser is a perfect laser source for materials processing when high accuracy and small structure size are required. Due to the ultra short interaction time and the high peak power, the process is generally characterized by the absence of heat diffusion and, consequently molten layers. Various induced structures have been observed in materials after the femtosecond laser irradiation. Here, we report on fabrication of micro-optical devices by the femtosecond laser. 1) formation of optical waveguide with internal loss less than 0.5dB/cm in the wavelength region from 1.2 to 1.6 mm, by translating a silica glass perpendicular to the axis of the focused femtosecond laser beam; 2) nano-scale valence state manipulation of active ions inside transparent materials; 3) space-selective precipitation and control of metal nanoparticles inside transparent materials; The mechanisms and applications of the femtosecond laser induced phenomena were also discussed.     

Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635~nm laserand matched photopolymer

2D and 3D submicron periodic structures are first fabricated by red-induced photopolymerization using a common 635 nm semiconductor laser and specially developed red-sensitive polymer material. The principle of this new photo-polymer material fabrication is explained and the absorption spectra of the material are measured. This fabrication technique allows a deeper penetration into volume and larger interference irradiation area which is more than 1 cm². The optical design, theoretical calculations and experimental results including diffraction patterns verifying the formation of periodic structures are presented. Compared with other fabrication technologies using high-power lasers, this approach has greatly reduced the demand for laser apparatus. Therefore, it is much more accessible to most laboratories and potentially usable in holographic fabrication of photonic crystals and devices in micro electro-mechanical systems (MEMS).     

Fabrication of desired three-dimensional structures by holographic assembly technique

We demonstrate a novel technique to fabricate desired three-dimensional (3D) periodic structures by holographically assembling multiple one-dimensional (1D) or multiple two-dimensional (2D) structures. Thanks to the high-absorption effect of the used material, we fabricated for each time, by employing a two-beam interference technique, a 1D or a 2D structure with very limited film thickness. By using the same sample and repeating the same fabrication process, i.e., (i) spin coating, (ii) exposure, and (iii) post-exposure bake, we created, layer-by-layer, a 3D structure as desired, without the limitation of the number of layers. This technique allows rapid fabrication of very large and thick 3D photonic crystal template with variable period, flexible design, low cost, and possible introduction of arbitrary defects inside a 3D structure.     

Fabrication of 3D microfluidic structures inside glass by femtosecond laser micromachining

Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. One of the most important features of femtosecond laser processing is that a femtosecond laser beam can induce strong absorption in even transparent materials due to nonlinear multiphoton absorption. This makes it possible to directly create three-dimensional (3D) microfluidic structures in glass that are of great use for fabrication of biochips. For fabrication of the 3D microfluidic structures, two technical approaches are being attempted. One of them employs femtosecond laser-induced internal modification of glass followed by wet chemical etching using an acid solution (Femtosecond laser-assisted wet chemical etching), while the other one performs femtosecond laser 3D ablation of the glass in distilled water (liquid-assisted femtosecond laser drilling). This paper provides a review on these two techniques for fabrication of 3D micro and nanofluidic structures in glass based on our development and experimental results.     

Hollow tube fabrication in photoresist film using continuous wave laser

This paper is a study of three-dimensional (3D) micron/submicron fabrication with a continuous wave (CW) laser. The fabrication forms vertical and horizontal hollow tubes in a photoresist film with nonlinear optical properties. We controlled beam intensities and dose amounts to manipulate a reaction time constant of the photoresist; we fabricated the 3D hollows in high contrast.     

飞秒激光精密微纳加工的研究进展

飞秒激光由于其超快时间特性和超高峰值功率特性在精密微纳加工领域引起了人们广泛的重视．在与物质的相互作用中它能快速、准确地将能量作用在特定的区域内，从而可以获得极高的分辨率和加工精度。文章综述了飞秒激光精密微纳加工的最新研究进展，分别就飞秒激光烧蚀微加工和飞秒激光双光子聚合产生三维微纳结构进行了介绍，阐述了各自的物理机制．最后对飞秒激光微纳加工的研究前景做了初步探讨。