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1.
研究氟化类金刚石(FDLC)薄膜化学结构对光学性能的影响,用等离子体增强化学气相沉积(PECVD)法在玻璃基底上沉积氟化类金刚石(FDLC)薄膜,用俄歇能谱、傅里叶红外光谱(FTIR)、紫外 可见光分光光度计 (UV-VIS)对薄膜进行分析。分析结果表明:沉积薄膜是典型的类金刚石结构,薄膜中氟主要以C-F2键存在;随着沉积温度的提高,C-F2含量先增后减;随着F含量的增加,FDLC薄膜的sp3含量减少,sp2含量增加;光学带隙与sp2键含量密切相关,sp2含量越大,薄膜的光学带隙越小。  相似文献   

2.
金刚石薄膜的红外椭圆偏振光谱研究   总被引:3,自引:0,他引:3       下载免费PDF全文
采用红外椭圆偏振光谱对微波等离子体化学气相沉积法(MPCVD)和热丝化学气相沉积法(H-FCVD)制备的金刚石薄膜在红外波长范围(2.5—12.5μm)的光学参数进行了测量.建立了不同的光学模型,且在模型中采用Bruggeman有效介质近似方法综合考虑了薄膜表面和界面的椭偏效应.结果表明,MPCVD金刚石膜的椭偏数据在模型引入了厚度为77.5nm的硅表面氧化层、HFCVD金刚石膜引入879nm粗糙层之后能得到很好的拟合.最后对两种模型下金刚石薄膜的折射率和消光系数进行了计算,表明MPCVD金刚石薄膜的红外 关键词: 金刚石薄膜 红外椭圆偏振光谱 光学参数 有效介质近似  相似文献   

3.
织构金刚石薄膜的成核与生长   总被引:2,自引:0,他引:2       下载免费PDF全文
在加衬底偏压和不加衬底偏压两种情况下,用微波等离子体化学汽相沉积(MWCVD)技术在Si(100)衬底上合成了织构的金刚石薄膜使用扫描电子显微镜(SEM)和取向X射线衍射技术证实了我们得到的样品是织构的金刚石薄膜观察了织构的金刚石薄膜的成核和生长过程,从理论上对金刚石薄膜异质外延的成核和生长机理进行了探讨 关键词:  相似文献   

4.
纳米金刚石薄膜的沉积实验在自行研制的热丝化学气相沉积系统上完成。基体为金刚石微粉研磨和酸蚀后的硬质合金片,反应气体为CH4和H2混合气,V(CH4):V(H2)=1%-4%,基体温度800-1000℃,沉积时气压为0.8~2.0kPa。SEM观察表明,影响金刚石膜的表面形貌及粗糙度的关键参量是基体温度、反应气压及含炭气体的浓度,这些参数都会影响到薄膜的纯度、结晶习性和晶面完整性。沉积纳米金刚石薄膜工艺是通过高密度形核以及抑制金刚石膜在沉积过程中的晶粒长大来实现的。  相似文献   

5.
金刚石薄膜的气相合成及应用研究近年来取得了飞速发展,气相合成金刚石薄膜的CVD方法已达20几种,最大的沉积速度已达到每小时930μm.硼掺杂金刚石薄膜的空穴载流子浓度已达到10~(18)cm~(-3),电阻率已达到10~(-2)Ω·cm,在硅衬底表面实现了金刚石薄膜的选择性生长.金刚石薄膜热沉使半导体锁相列阵激光器的输出功率提高了10%左右,金刚石薄膜作为刀具涂层使刀具的寿命得到提高,金刚石热敏电阻、发光管、场效应管等器件原型电子器件在实验上已获得成功.  相似文献   

6.
研究了微波化学气相沉积中沉积气压对金刚石薄膜生长速率和质量的影响.研究表明,金刚石薄膜的生长速率随沉积气压的提高而增大,生长速率与沉积气压为线性关系.在高沉积气压下生长的金刚石薄膜晶形完整,拉曼谱测量可得到锐利的金刚石相的峰,但电压-电流测量表明,随着制备时沉积气压的提高,金刚石薄膜的暗电流增大,膜的电学质量下降. 关键词: 金刚石薄膜 生长速率 沉积气压  相似文献   

7.
高鹏  徐军  邓新绿  王德和  董闯 《物理学报》2005,54(7):3241-3246
利用微波ECR全方位离子注入技术,在单晶硅(100)衬底上制备类金刚石薄膜.分析结果表明,所制备的类金刚石碳膜具有典型的类金刚石结构特征,薄膜均匀、致密,表面粗糙度小,摩擦系数小.其中,薄膜的结构和性能与氢流量比关系密切,随氢流量比的增加,薄膜的沉积速率减小,表面粗糙度降低,且生成sp3键更加趋向于金刚石结构,表面能 更低,从而使摩擦系数大幅降低. 关键词: 全方位离子注入 类金刚石碳膜 拉曼光谱 摩擦磨损  相似文献   

8.
 利用射频磁控溅射方法,在金刚石膜上沉积了氮化硼薄膜。红外光谱分析表明,氮化硼薄膜的结构为六角氮化硼。在超高真空系统中测量了样品的场发射特性,沉积在金刚石膜上的氮化硼薄膜的阈值电场为12 V/μm,最大发射电流密度为272 μA/cm2。并且沉积在金刚石膜上的氮化硼薄膜的场发射特性明显优于金刚石薄膜本身的场发射特性。这说明,氮化硼薄膜可以有效地改善金刚石膜的场发射特性。场发射Fowler-Nordheim(F-N)曲线表明,电子发射是通过遂穿表面势垒完成的。  相似文献   

9.
利用甲醇-氢(CH3OH-H2)混合气体为气源,30nm厚的无定形硅为过渡层,借助于微波等离子体化学气相沉积(MWCVD)成功地将金刚石薄膜生长在不锈钢上,其最低生长温度可至420℃,并且甲醇-氢混合气体比传统的甲烷-氢(CH4-H2)更具优势,测试表明这种金刚石薄膜有希望作为耐磨层在工业上应用  相似文献   

10.
为了使研究者能更详细地了解类金刚石(DLC)薄膜的研究现状,综述了类金刚石薄膜的特性及应用,分析对比了目前常用的一些类金刚石薄膜的制备方法,包括物理气相沉积法(PVD)和化学气相沉积法(CVD),并对类金刚石薄膜的抗强激光损伤特性以及提高其激光损伤阈值的方法进行了论述。结果发现,利用PVD法制备的DLC膜的硬度可以达到40 GPa~80 GPa,且薄膜的残余应力可以达到0.9 GPa~2.2 GPa之间,而CVD法则由于反应气体的充入导致类DLC薄膜的沉积速率大大降低,故使用率不高。同时,优化膜系的电场强度设计,采用合理的制备工艺,进行激光辐照后处理,施加外界电场干预均可有效地提高DLC薄膜的抗激光损伤能力, 且目前的DLC薄膜的激光损伤阈值可达到2.4 J/cm2。  相似文献   

11.
Two-dimensional scanning of a 0.6328 mum guided-light beam has been realized using noncolinear acousto-optic (AO) coplanar Bragg diffraction together with colinear AO guided-mode to substrate radiation-mode conversion in a Z-cut Xpropagation LiNbO3 proton-exchanged (PE) waveguide. The two surface acoustic (SAW) waves utilized are at the center frequencies of 500 and 200 MHz, propagating in the Y and X axes, respectively. Two-dimensional scanning of approximately 720 resolvable light beam spots, namely, 18 40 (horizontal vertical) scanning, has been demonstrated using a light beam of 1.0 mm aperture. The total number of resolvable beam spots can be greatly increased from 720 by simply utilizing SAW transducers of larger bandwidth and a light beam of greater aperture. It should also be possible to significantly increase the diffraction efficiency from 3 % by optimizing the parameters of the PE waveguide and the SAWs.  相似文献   

12.
Results of a study of the effect of γ-radiation on the spectral luminescence properties of cadmium tungstate crystals doped with silver, bismuth, and molybdenum cations are presented. Spectral characteristics of the nondnnnoped crystals are briefly described. Absorption and photo and X-ray luminescence spectra of the crystals taken before and after exposure to γ-radiation (5.5·104 Gy) are compared. It is found that the spectral characteristics of the crystals doped with silver, bismuth, and molybdenum cations do not change markedly after the exposure. The relation between the type of impurity-induced defects, individual characteristics of the impurity cations, and the character of the effect of γ-radiation on the spectral luminescence properties of impure crystals is analyzed (preliminarily). Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 64, No. 1, pp. 55–60, January–February, 1997.  相似文献   

13.
A simple technique of pulse compression, based on the linear chirp compensation of self-phase modulation (SPM) spectra in dispersion shifted fibers, is demonstrated. The optimization procedure is carried out, for a short span of a single-mode fiber, using a parabolic law, which describes the behavior of the squared output pulse width versus the pump peak power in the case of Gaussian pulses. The experimental results give a minimum pulse duration of 233 fs, which is in good agreement with the model. Shorter and coherent pulses, down to 90 fs, have been obtained by inserting an interference filter at the optical output.  相似文献   

14.
The Shanghai Synchrotron Radiation Facility(SSRF)booster ring,a full energy injector for the storage ring,is deigned to accelerate the electron beam energy from 150MeV to 3.5GeV that demands high extraction efficiency at the extraction energy with low beam loss rate when electrons are ramping.Closed orbit distortion(COD)caused by bending magnet field uniformity errors which affects the machine performance harmfully could be effectively reduced by bending magnet location sorting.Considering the affections of random errors in measurement,both ideal sorting and realistic sorting are studied based on measured bending magnet field uniformity errors and one reasonable combination of bending magnets which can reduce the horizontal COD by a factor of 5is given as the final installation sequence of the booster bending magnets in this paper.  相似文献   

15.
16.
We measure the waveform and phase curves of short optical pulses before and after transmission over different lengths of fibers by use of the pulse analyzer with the frequency-resolved optical gating (FROG),and numerically simulate pulse evolution under the experimental conditions.The nonlinear coefficient of the fiber is given by comparing the experimental results with the numerical ones.Difference between the experiment and numerical simulation is analyzed.  相似文献   

17.
Resonance scattering of elastic spherical shell and cylindrical shell while the surrounding fluid medium has absorption is studied. The normal mode solution derived using exact elastic theory and the separation of variables is still applicable. However, the scattering form function has to be modified for the absorbing medium, otherwise the unreasonable result would be obtained. The backscattering form function in the absorbing medium is redefined, and the form function of elastic spherical and cylindrical shell with vacuum or solid matter filled is calculated in various absorption conditions. The results show that the absorption of surrounding fluid leads to notable attenuation of the coincidence resonances in the mid-frequency, but it has a little influence on the low-frequency resonance scattering induced by the filler inside the shell.  相似文献   

18.
A versatile and low-cost single-beam self-referenced phase-sensitive surface plasmon resonance(SPR)sensing system with ultra-high resolution performance is presented.The system exhibits a root-mean-square phase fluctuation of ±0.0028.over a period of 45 min.i.e.a resolution of±5.2×10-9 refractive index units.The enhanced performance has been achieved through the incorporation of three design elements:a true single-beam configuration enabling complete self-referencing so that only the phase change associated with SPR gets detected,a differential measurement scheme to eliminate spurious signals not related to the sensor response,and the elimination of retardation drifts by incorporating temperature stabilization in the liquid crystal phase modulato .Our design should bring the detection sensitivity of non-labeling SPR biosensing closer to that achievable by conventional fluorescence-based techniques.  相似文献   

19.
Ta2O5 films are prepared on BK7 substrates with conventional electron beam evaporation deposition.The effects of SiO2 protective layers and annealing on the laser-induced damage threshold (LIDT) of the films are investigated.The results show that SiO2 protective layers exert little influence on the electric field intensity(EFI)distribution,microstructure and microdefect density but increase the absorption slightly.Annealing iS effective on decreasing the microdefect density and the absorption of the films.Both SiO2 protective layers and annealing are beneficial to the damage resistance of the films and the latter is more effective to improve the LIDT.Moreover,the maximal LIDT of Ta2O5 films is achieved by the combination of SiO2 protective layers and annealing.  相似文献   

20.
Gray cross correlation matching technique is adopted to extract candidate matches with gray cross correla- tion coefficients less than some certain range of maximal correlation coefficient called multi-peak candidate matches. Multi-peak candidates are extracted corresponding to three closest feature points at first. The corresponding multi-peak candidate matches are used to construct the model polygon. Correspondence is determined based on the local geometric relations between the three feature points and the multi-peak candidates. The disparity test and the global consistency checkout are applied to eliminate the remaining ambiguous matches that are not removed by the local geometric relational test. Experimental results show that the proposed algorithm is feasible and accurate.  相似文献   

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